Abstract: A photoresist composition including an oxetane-containing compound represented by Formula 1 or 2, an oxirane-containing compound represented by Formula 3 or 4, a photoinitiator, and a solvent, a method of forming a pattern using the photoresist composition, and an inkjet print head including a polymerization product of the photoresist composition. The photoresist composition provides a polymerization product which resists formation of cracks due to an inner stress, and has excellent heat tolerance, excellent chemical resistance, excellent adhesiveness, and excellent durability.

Abstract: A filter plate usable with an ink jet head, an ink jet head with the filter plate, and a method of fabricating the filter plate are provided. The filter plate includes a filter substrate having a filter hole region. Filter holes having angled line shapes extend through the filter substrate of the filter hole region. Each of the filter holes may include an upper filter hole formed to have a first angle with respect to the filter substrate at an upper portion of the filter substrate, and a lower filter hole formed at a lower portion of the filter substrate to be connected to the upper filter hole and having a second angle with respect to the filter substrate different from the first angle.

Abstract: An ink-jet printhead and a method of manufacturing the same include a substrate on which a heater and a passivation layer protecting the heater are formed, a passage plate on which an ink chamber corresponding to the heater and an ink passage connected to the ink chamber are formed, and a nozzle plate in which an orifice corresponding to the ink chamber is formed. An exposure stop layer (ESL) that blocks passage of a photosensitive energy is formed inside the nozzle plate, and the nozzle plate and the passage plate are bonded with each other by the exposure stop layer (ESL).

Abstract: An ink jet print head and a manufacturing method thereof that is improved so as to simplify a glue layer forming process including a glue layer of the ink jet print head is made of a silicone modified resin having a photosensitive property, such as a silicone modified polyimide resin. The glue layer can be formed by coating a silicone modified polyimide resin solution on a substrate, forming a silicone modified polyimide resin layer by vaporizing a solvent from the coated silicone modified polyimide resin solution, and patterning the silicone modified polyimide resin layer.

Abstract: A method of manufacturing an inkjet printhead having a small thickness variation and having excellent durability, and an inkjet printhead manufactured by the same.

Abstract: A MEMS (Micro Electro Mechanical System) device and a method of manufacturing the same, in which an detection indicator is formed on a chamber layer stacked on a substrate such that a user easily inspects whether the chamber layer has a required thickness. The MEMS device can include two detection indicators that are formed on the chamber layer and have different depth from each other, or an detection indicator which is formed on the chamber layer and has a tapered sectional shape in which an upper surface of the detection indicator is gradually narrowed in a downward direction such that a user can easily inspect whether the chamber layer has a required thickness. The user can precisely determine whether the chamber layer is planarized to a required thickness by planarizing the detection indicator formed on the chamber layer, and inspecting the detection indicator by using an optical microscope, thereby facilitating inspection for a thickness of the chamber layer.

Abstract: A method of manufacturing a thermal inkjet printhead. The method includes forming on a substrate a chamber layer having an ink chamber, forming a sacrificial layer on the chamber layer wherein the sacrificial layer fills the ink chamber, and planarizing a top surface of the sacrificial layer and of the chamber layer using a primary Chemical Mechanical Polishing (CMP) process until the sacrificial layer and the chamber layer attain a desired height, wherein a slurry is used in the primary CMP process that includes polishing particles having an average particle size of 500 nm˜2 ?m.

Abstract: A liquid-type composition for forming a photosensitive polymer complex and a method of preparing a photosensitive polymer complex containing silver nanoparticles using the same are provided. The composition for forming a photosensitive polymer complex includes a multifunctional epoxy resin, a photoacid generator, an organic solvent and a silver compound, or additionally includes a multifunctional acrylate resin and a photoinitiator, or an additive, e.g., a surfactant or a flow improver. This composition is applied, selectively exposed, and developed, thus preparing a photosensitive polymer complex, which contains silver nanoparticles uniformly dispersed and formed in the polymer pattern portion thereof through photo reduction and is therefore improved in terms of physical or chemical properties, e.g., heat resistance and wear resistance.

Abstract: A method of manufacturing an inkjet print head that includes an improved process of forming an ink feed hole, thereby enabling an increase in productivity and a favorable ink supply via the ink feed hole. The method includes preparing a substrate on which a heater to heat an ink is formed on the front side thereof, forming a flow passage formation layer on the front side of the substrate such that the flow passage formation layer defines an ink flow passage, forming a nozzle layer provided with a nozzle on the flow passage formation layer, forming a first protective layer such that the first protective layer covers the flow passage formation layer and the nozzle layer, applying a mask material used to etch the substrate to the rear side of the substrate, applying a second protective layer to the lateral side of the substrate to protect the lateral side of the substrate, and forming an ink feed hole on the substrate by wet etching. Tantalum (Ta) is used as the mask material.

Abstract: An oxetane-containing compound, a photoresist composition including the same, a method of preparing patterns using the photoresist composition, and an inkjet print head including polymerization products of the oxetane-containing compound.

Abstract: An inkjet print head includes a substrate in which an ink feed hole having an hourglass cross-section is formed, a chamber layer that is stacked on the substrate and has a plurality of ink chambers into which ink supplied from the ink feed hole is filled, and a nozzle layer that is stacked on the chamber layer and has a plurality of nozzles through which the ink is ejected.

Abstract: A method of fabricating an inkjet print head includes forming at least one energy generating element to eject ink on a substrate. A chamber layer and a nozzle layer are formed on the substrate, wherein the nozzle layer has a nozzle corresponding to the energy generating elements, and at least one of the chamber layer and the nozzle layer is formed using a photocurable resin composition that includes a photo-base generator, an epoxy resin and a non-photoreactive solvent.

Abstract: A photo-curable resin composition, a method of patterning the same, an ink jet head, and a method of fabricating the same. The photo-curable resin composition includes an epoxy compound, a photo-catalyst provided as a photo-initiator, and a non-photo reactive solvent. The photo-catalyst may be a semiconductor material to generate electron-hall pairs using light energy. The semiconductor material is one selected from a group consisting of TiO2, CdS, Si, SrTiO3, WO, ZnO, SnO2, CdSe and CdTe, CdSe and CdTe. The epoxy compound may include a di-functional epoxy compound and a multi-functional epoxy compound. The non-photo reactive solvent may be one or a mixture selected from a group consisting of gamma-butyrolactone (GBL), cyclopentanone, C1-6 acetate, tetrahydrofurane (THF), and xylene. The photo-curable resin composition is patterned to form a fluid channel structure of the ink jet head.

Abstract: Provided is a method of manufacturing an inkjet printhead.

Abstract: A photo-curable resin composition, a method of patterning the same, an ink jet head, and a method of fabricating the same. The photo-curable resin composition includes an epoxy compound, a photo-catalyst provided as a photo-initiator, and a non-photo reactive solvent. The photo-catalyst may be a semiconductor material to generate electron-hall pairs using light energy. The semiconductor material is one selected from a group consisting of TiO2, CdS, Si, SrTiO3, WO, ZnO, SnO2, CdSe and CdTe, CdSe and CdTe. The epoxy compound may include a di-functional epoxy compound and a multi-functional epoxy compound. The non-photo reactive solvent may be one or a mixture selected from a group consisting of gamma-butyrolactone (GBL), cyclopentanone, C1-6 acetate, tetrahydrofurane (THF), and xylene. The photo-curable resin composition is patterned to form a fluid channel structure of the ink jet head.

Abstract: An inkjet head including a substrate having a manifold supplying ink, a chamber formed of a photocurable epoxy resin, the chamber having a heat source and forming an ink chamber to temporarily storing the ink, and a nozzle plate formed on the chamber using a thermocurable epoxy resin and including a plurality of nozzles ejecting the ink, and a method of manufacturing the inkjet head.

Abstract: An inkjet printhead includes an ink flow path including a nozzle through which ink is ejected and is formed of a conductive epoxy resin, the conductive epoxy resin is a hardening result of a conductive cross-linked polymer resist composition formed by actinic radiation, and the conductive cross-linked polymer resist composition includes (a) at least one epoxy precursor polymer selected from a phenol novolak precursor polymer and an alicyclic precursor polymer including glycidyl ether group, (b) a metal alkoxide compound represented by the following formula R?M(OR)n, where R? refers to a functional group including an oxirane group or an oxetanyl group, R refers to a C1-10alkyl group, and M is a metal selected from the group consisting of Al, Ti, and Zr, (c) a cationic photoinitiator, and (d) a solvent. The inkjet printhead includes an ink flow path formed of a conductive epoxy resin and a trench formed around a heater of the inkjet printhead to dissipate residual heat generated by the heater.

Abstract: A method of manufacturing an inkjet printhead, including forming a nozzle layer by radiating actinic radiation to a cross-linked polymer resist composition including a precursor polymer, a cationic photoinitiator, and a solvent, in which a concentration of the cationic photoinitiator is varied to control a tapered angle of a nozzle included in the nozzle layer.

Abstract: An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.

Abstract: An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor applying current to the heater are formed between the passivation layers. An epoxy nozzle layer is formed of a thermally conductive epoxy to cover the passivation layers. The epoxy nozzle layer is formed with a nozzle connected to the ink chamber.