Abstract: An electrode structure combined with an antenna according to an embodiment of the present disclosure includes a substrate layer, sensing electrodes, a bridge electrode and an antenna unit. The sensing electrodes are arranged on the substrate layer, and include first sensing electrodes arranged along a first direction parallel to a top surface of the substrate layer, and second sensing electrodes arranged along a second direction parallel to the top surface of the substrate layer and intersecting the first direction. The bridge electrode connects the first sensing electrodes neighboring in the first direction. The antenna unit is disposed at the same layer as that of the bridge electrode, and includes a radiator overlapping the sensing electrodes in a planar view.

Abstract: An antenna package according to an exemplary embodiment of the present invention includes a first antenna device which includes a first antenna unit including a first radiator, a second antenna device which includes a second antenna unit including a second radiator whose polarization direction is perpendicular to the first radiator, a first circuit board electrically connected with the first antenna unit, a second circuit board electrically connected with the second antenna unit, and a third circuit board on which at least one antenna driving integrated circuit (IC) chip electrically and independently connected to the first circuit board and the second circuit board is mounted. By supplying power to two antenna devices having different polarization directions, respectively, signal interference and signal loss may be prevented, and dual polarization may be implemented.

Abstract: A touch sensing electrode structure includes sensing electrodes, each of which including a plurality of unit patterns, and traces electrically connected to the sensing electrodes. The traces include at least two trace lines and trace bridges connecting the at least two trace lines to each other. An electrode visibility due to a pattern deviation is reduced and a reliability of the trace is improved by the trace bridge.

Abstract: A chuck assembly for holding a plate comprises a member configured to hold the plate, the member including a flexible portion configured to have a central opening, and a first cavity formed by the flexible portion, wherein the plate is held by the flexible portion by reducing pressure in the first cavity, a light-transmitting member covering the central opening of the member, and a fluid path in communication with a second cavity defined by the member, the plate held by the member and the light-transmitting member for pressurizing the second cavity.

Abstract: A high performance touch sensor according to the present invention comprises: a substrate; a first detection electrode formed on the substrate; an insulation layer formed on the first detection electrode; a second detection electrode formed on the insulation layer; and a protection layer formed on the second detection electrode, wherein one of the first detection electrode and the second detection electrode has a triple-film structure including a metal oxide and a thin film metal laminated on each other, and the other one includes a metal pattern. Therefore, the present invention can implement touch sensor having a high resolution and a large area while simultaneously satisfying a low resistance characteristic and an optical characteristic, facilitate progress of a high-temperature process, and diversify the substrate.

Abstract: A system and method of imprinting a formable material on a substrate includes a feature with a template. The substrate is initially held with a first back pressure. After which the template is brought into contact with the formable material. A template strain tensor above the feature may be greater than a strain threshold. The substrate is then held with a second back pressure less than the first back pressure, after which the substrate strain below the feature increases. After which the formable material is solidified.

Abstract: A touch sensor includes a substrate layer, a plurality of sensing electrodes on the substrate layer, and a dummy line between the sensing electrodes, the dummy line extending along a boundary of the sensing electrode. Electrode visibility is reduced by the dummy line, and touch sensitivity of the touch sensor is also improved.

Abstract: An apparatus is provided. The apparatus has a chuck having a first side configured to retain a superstrate or a template and a second side, an array of image sensors disposed at the second side of the chuck and spaced from the chuck, and an array of light sources disposed between the transparent chuck and the array of image sensors.

Abstract: A touch sensor according to an embodiment of the present invention includes a base layer including a first region and a second region, a touch sensing electrode layer disposed on the first region of the base layer, the touch sensing electrode layer including a plurality of touch sensing unit electrodes having openings formed therein, and a fingerprint sensing electrode layer including a plurality of fingerprint sensing unit electrodes disposed on the second region of the base layer. A space having the same shape as that of the openings is formed between neighboring fingerprint sensing unit electrodes of the plurality of fingerprint sensing unit electrodes.

Abstract: Systems and methods for improving robust layer separation during the separation process of an imprint lithography process are described. Included are methods of matching strains between a substrate to be imprinted and the template, varying or modifying the forces applied to the template and/or the substrate during separation, or varying or modifying the kinetics of the separation process.

Abstract: An apparatus is described for separation of a nanoimprint template from a solidified patterned layer on a substrate that minimize separation defects, including last point of separation (LPOS) defects. The apparatus is configured to move the template and substrate relative to one another and determining an amount of pressure to apply to the backsides of the template and the substrate.

Abstract: A chuck is provided. The chuck comprises a plurality of lands protruding from a surface of the chuck, the lands defining a series of zones; and a trenched recessed from the surface of the chuck in at least one of the zones.

Abstract: A film antenna according to an embodiment of the present invention includes a dielectric layer, an antenna pattern including a mesh structure on a top surface of the dielectric layer, and a dummy pattern on a top surface of the dielectric layer. The dummy pattern includes the same mesh structure as that of the antenna pattern. Optical properties are improved by the same mesh structure of the antenna pattern and the dummy pattern.

Abstract: An apparatus is provided. The apparatus has a chuck having a first side configured to retain a superstrate or a template and a second side, an array of image sensors disposed at the second side of the chuck and spaced from the chuck, and an array of light sources disposed between the transparent chuck and the array of image sensors.

Abstract: In an embodiment, an imprint apparatus can include a substrate holder having a chucking region and a recessed support section; and a template holder, wherein the chucking region has more area as compared to a template region. In another embodiment, an imprint apparatus can include gas zones; and a gas controller that can be configured to adjust pressures within the gas zones to induce a convex curvature of a partial field of a workpiece used with the imprint apparatus. A method can include providing a workpiece within an imprint apparatus, wherein the workpiece includes a substrate and a formable material; and initially contacting a template with the formable material at a location spaced apart from the periphery of a partial field. In a particular embodiment, the method can further include modulating the substrate to form a convex shape contacting the template with the formable material.

Abstract: A composite cathode active material, a method of preparing the composite cathode active material, a cathode including the composite cathode active material, and a lithium battery including the cathode. The composite cathode active material includes a lithium intercalatable material; and a garnet oxide, wherein an amount of the garnet oxide is about 1.9 wt % or less, based on a total weight of the composite cathode active material.

Abstract: A digitizer module is formed on a film substrate which is used as a substrate of an OLED module and stacked with the OLED module, thereby providing an OLED integrated digitizer applicable to a flexible display device.

Abstract: A nanofabrication method comprises receiving information regarding a distortion within an imprint system, generating a first drop pattern of formable material based on the received information, dispensing a first plurality of drops onto a substrate according to the first drop pattern, contacting the dispensed first plurality of drops with a patternless superstrate to form a first layer of formable material, forming a first cured layer by curing the first layer of formable material while the superstrate is contacting the first layer of formable material, separating the superstrate from the first cured layer, depositing an etch resistant layer on the first cured layer, generating a second drop pattern of formable material, dispensing a second plurality of drops onto the etch resistant layer according to the second drop pattern, and contacting the dispensed second plurality of drops with a patterned template to form a second layer of formable material.

Abstract: A method, comprising retaining a superstrate with a superstrate chuck; applying a pressure to deflect the superstrate toward a substrate, deflection of the superstrate being gradually extended along a radial direction; maintaining a vacuum applied to a perimeter of the superstrate and continuously retaining the superstrate with the chuck while the deflecting the superstrate by the pressure; releasing the vacuum from the perimeter of the superstrate; and releasing the superstrate from the chuck.

Abstract: A method and system for controlling a position of a moveable stage having a substrate supported thereon is provided. First position information representing a position of the substrate relative to a mark on an object is obtained from a sensor. Alignment prediction information is generated based on the obtained first position wherein the generated alignment prediction information including at least one parameter value. First trajectory information is generated and includes the at least one parameter value based on the obtained first position information and the generated alignment prediction information. Second trajectory information is generated based on the generated alignment prediction information first trajectory information and second position information, wherein the second position information represents a position of the moveable stage.