Patents by Inventor Charles Michael Birtcher
Charles Michael Birtcher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9550260Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.Type: GrantFiled: March 24, 2016Date of Patent: January 24, 2017Assignee: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Publication number: 20160333477Abstract: Described herein are systems and methods using same for the storage and delivery of chemical precursors that are used in the manufacture of a semiconductor device. In one aspect, the storage system comprises the chemical precursors and a container and the systems have an inlet jet design. The chemical precursor has a low vapor pressure less than about 50 Torr-absolute at container temperature set for delivery. The delivery system further contains a carrier gas. The inlet jet design can deliver the carrier gas at a certain pressure and a certain low rate to impinge upon the surface of the chemical precursors to produce a vapor or droplets of the chemical precursor. The vapor or droplets of the chemical precursor then combine with the carrier gas to provide a precursor-laden fluid stream which will be passed to and used in the processing tool.Type: ApplicationFiled: April 29, 2016Publication date: November 17, 2016Applicant: Air Products and Chemicals, Inc.Inventors: James Patrick Nehlsen, Charles Michael Birtcher
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Publication number: 20160305019Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel using a carrier gas. The vessel defines an interior volume segmented into an upper volume and a lower volume, the upper volume being in fluid communication with the lower volume, the lower volume containing substantially all of the precursor material and being separated from the upper volume by a separator. The vessel includes a diffuser tube that extends from an inlet port, through the separator and has a distal end having a plurality of openings formed therein and extends along the bottom interior wall of the vessel.Type: ApplicationFiled: April 8, 2016Publication date: October 20, 2016Applicant: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, Sergei Vladimirovich Ivanov
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Patent number: 9435027Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.Type: GrantFiled: March 12, 2014Date of Patent: September 6, 2016Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, Xinjian Lei
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Publication number: 20160207153Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.Type: ApplicationFiled: March 24, 2016Publication date: July 21, 2016Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Patent number: 9316525Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.Type: GrantFiled: January 24, 2014Date of Patent: April 19, 2016Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Publication number: 20160061645Abstract: An ultrasonic probe having ultrasonic sensors (e.g., piezoelectric crystals) for measuring the level of liquid within a sealed container and having features that make the probe more reliable and enable more precise liquid level readings as the container nears an empty state. Embodiments include spacing the ultrasonic sensors more closely at the lower end of the probe, offsetting the sensors to enable tighter vertical spacing, matched pairs of sensors for redundancy, and a downward facing sensor located at the lower end of the probe to decrease the minimum liquid level that can be accurately measured by the probe. A sump may also be provided to further decrease the minimum liquid level that can be accurately measured by the probe.Type: ApplicationFiled: August 11, 2015Publication date: March 3, 2016Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Publication number: 20150368087Abstract: In one respect, the invention is an improved diptube design for a container for containing and dispensing a liquid chemical, the diptube generating a spring force when compressed that acts to maintain a bottom end of the diptube in contact with a bottom interior surface of the container and a notch located at a bottom edge of the bottom end of the diptube that creates a flow communication between the diptube and the interior volume of the base portion of the container. In another respect, the invention is a method of constructing a container having these limitations.Type: ApplicationFiled: June 19, 2015Publication date: December 24, 2015Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Charles Michael Birtcher, Gildardo Vivanco, William Jon Sheehy
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Patent number: 9109287Abstract: A vessel for conveying a precursor fluid from the vessel, comprising: an interior volume having an upper volume and a lower volume, wherein the two volumes are in communication and the lower volume contains precursor; a lid comprising a fluid inlet directing carrier gas into the vessel, a âTâ fluid outlet, a sidewall having an upper lip wherein the upper lip contacts the lid; a separator interposed between the lid and the sidewall wherein the separator resides adjacent the upper lip and segments the interior volume into the upper volume and a lower volume; and an inlet plenum in communication with the fluid inlet having a plenum chamber opening towards the separator to direct the carrier gas through the separator and towards the precursor. A method for using the apparatus is also disclosed.Type: GrantFiled: October 4, 2007Date of Patent: August 18, 2015Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Patent number: 8959998Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.Type: GrantFiled: January 24, 2014Date of Patent: February 24, 2015Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Patent number: 8944420Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.Type: GrantFiled: January 16, 2012Date of Patent: February 3, 2015Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Publication number: 20140338443Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.Type: ApplicationFiled: January 24, 2014Publication date: November 20, 2014Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Publication number: 20140338442Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.Type: ApplicationFiled: January 24, 2014Publication date: November 20, 2014Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Publication number: 20140193578Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.Type: ApplicationFiled: March 12, 2014Publication date: July 10, 2014Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, Xinjian Lei
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Publication number: 20140191423Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.Type: ApplicationFiled: March 12, 2014Publication date: July 10, 2014Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, Xinjian Lei
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Patent number: 8708320Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.Type: GrantFiled: November 13, 2007Date of Patent: April 29, 2014Assignee: Air Products and Chemicals, Inc.Inventors: Thomas Andrew Steidl, Charles Michael Birtcher, Xinjian Lei
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Publication number: 20130312855Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.Type: ApplicationFiled: May 20, 2013Publication date: November 28, 2013Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, Xinjian Lei, Sergei Vladimirovich Ivanov
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Publication number: 20130015594Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.Type: ApplicationFiled: January 16, 2012Publication date: January 17, 2013Applicant: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Patent number: 8162296Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.Type: GrantFiled: March 19, 2009Date of Patent: April 24, 2012Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Patent number: 8002247Abstract: The present invention is a quartz bubbler container with cross purge capability. This cross purge allows the user to easily purge air and chemical from the valve inlet and outlet by simply flowing inert gas, and avoids the requirement for a more complicated vacuum purging apparatus. The design incorporates two small footprint 3-way valves mounted on the bubbler container inlet and outlet connectors. The 3rd port of each valve is piped together between the valves with a crosspurge line. The valves are corrosion resistant, leak free, maintenance free, non-leaching of impurities, and can accommodate an optional breakseal crusher that will perforate quartz break seals (on the inlet and outlet of ampoule). Liquid out containers of various materials of construction are also contemplated.Type: GrantFiled: May 13, 2009Date of Patent: August 23, 2011Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, John Eric Baker