Patents by Inventor Charles T. Carlson
Charles T. Carlson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10217657Abstract: An active substrate alignment system for an ion implanter, the system including a platen, a registration device adapted to selectively move a substrate engagement surface disposed adjacent the platen for limiting movement of a substrate disposed on the platen, a camera configured to capture an image of the substrate before the substrate is disposed on the platen, and a controller in communication with the camera and the registration device, the controller configured to command the registration device to move the substrate engagement surface based on the image to limit movement of the substrate in a predetermined manner.Type: GrantFiled: September 4, 2015Date of Patent: February 26, 2019Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Aaron P. Webb, Timothy J. Miller, Tammy Jo Pride, Christopher N. Grant, James D. Strassner, Charles T. Carlson
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Publication number: 20170294330Abstract: An active substrate alignment system for an ion implanter, the system including a platen, a registration device adapted to selectively move a substrate engagement surface disposed adjacent the platen for limiting movement of a substrate disposed on the platen, a camera configured to capture an image of the substrate before the substrate is disposed on the platen, and a controller in communication with the camera and the registration device, the controller configured to command the registration device to move the substrate engagement surface based on the image to limit movement of the substrate in a predetermined manner.Type: ApplicationFiled: September 4, 2015Publication date: October 12, 2017Inventors: Aaron P. Webb, Timothy J. Miller, Tammy Jo Pride, Christopher N. Grant, James D. Strassner, Charles T. Carlson
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Patent number: 9694989Abstract: One embodiment of this workpiece handling system has conveyor belts and a load lock. A first swap robot holds and transports workpieces between a build station and the load lock. A gantry robot transports the workpieces between each of the conveyor belts and the first swap robot. In one instance, processed workpieces are transported from the first swap robot to a first conveyor belt and unprocessed workpieces are transported from a second conveyor belt to the first swap robot using the gantry robot. A second swap robot also may be used with the first swap robot to load and unload workpieces from the load lock.Type: GrantFiled: October 23, 2012Date of Patent: July 4, 2017Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Malcolm N. Daniel, Aaron P. Webb, William T. Weaver
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Patent number: 9659677Abstract: A shielding device for shielding an edge of a semiconductor substrate can include a multisided frame defining a perimeter of an enclosed area, and a shield coupled to the frame. The shield may be configured to move between a first position where the shield is retracted to the perimeter and a second position where shield advanced into the enclosed area. A method for processing a semiconductor substrate includes placing a semiconductor substrate in position in an implantation chamber, covering edges of the semiconductor substrate by pushing shields into engagement with the edges, performing an ion implantation procedure, and retracting the shields from the edges.Type: GrantFiled: June 27, 2014Date of Patent: May 23, 2017Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.Inventors: Aaron P. Webb, Charles T. Carlson, William T. Weaver, Timothy J. Miller, James D. Strassner
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Patent number: 9570309Abstract: A mask alignment system for providing precise and repeatable alignment between ion implantation masks and workpieces. The system includes a mask frame having a plurality of ion implantation masks loosely connected thereto. The mask frame is provided with a plurality of frame alignment cavities, and each mask is provided with a plurality of mask alignment cavities. The system further includes a platen for holding workpieces. The platen may be provided with a plurality of mask alignment pins and frame alignment pins configured to engage the mask alignment cavities and frame alignment cavities, respectively. The mask frame can be lowered onto the platen, with the frame alignment cavities moving into registration with the frame alignment pins to provide rough alignment between the masks and workpieces. The mask alignment cavities are then moved into registration with the mask alignment pins, thereby shifting each individual mask into precise alignment with a respective workpiece.Type: GrantFiled: December 10, 2013Date of Patent: February 14, 2017Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Aaron P. Webb, Charles T. Carlson, William T. Weaver, Christopher N. Grant
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Patent number: 9490153Abstract: A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.Type: GrantFiled: July 3, 2014Date of Patent: November 8, 2016Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Aaron P. Webb, Charles T. Carlson, Michael Honan, Luigi G. Amato, Christopher Neil Grant, James D. Strassner
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Patent number: 9437392Abstract: One embodiment of this ion implanter includes an ion source and a process chamber. This process chamber is connected to the ion source and separated from the ion source by a plurality of extraction electrodes. A carrier holds multiple workpieces. A mask loader in the process chamber connects a mask to the carrier. A transfer chamber and load lock may be connected to the process chamber. The ion implanter is configured to perform either blanket or selective implantation of the workpieces.Type: GrantFiled: October 26, 2012Date of Patent: September 6, 2016Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: William T. Weaver, Charles T. Carlson, Joseph C. Olson, James Buonodono, Paul Sullivan
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Patent number: 9412638Abstract: An end effector pad including a fence member, a first recessed support member extending from a first side of the fence member, a second recessed support member extending from a second side of the fence member opposite the first side, a first glass plate having a relatively low coefficient of friction disposed on top of the first recessed support member for supporting a substrate thereon, and a second glass plate having a relatively low coefficient of friction disposed on top of the second recessed support member for supporting a substrate thereon.Type: GrantFiled: May 30, 2014Date of Patent: August 9, 2016Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.Inventors: Paul E. Pergande, Charles T. Carlson, Krag R. Senior
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Patent number: 9333733Abstract: A multi-part mask has a pattern plate, which includes a planar portion that has the desired aperture pattern to be used during workpiece processing. The multi-part mask also has a mounting frame, which is used to hold the pattern plate. Prior to assembly, the pattern plate has an aligning portion, which has one or more holes through which reusable alignment pins are inserted. These alignment pins enter kinematic joints disposed on the mounting frame, which serve to precisely align the pattern plate to the mounting frame. After the pattern plate has been secured to the mounting frame, the aligning portion can be detached from the pattern plate. The alignment pins can be reused at a later time. In some embodiments, the pattern plate can later be removed from the mounting frame, so that the mounting frame may be reused.Type: GrantFiled: July 2, 2014Date of Patent: May 10, 2016Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Aaron P. Webb, Charles T. Carlson
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Patent number: 9240338Abstract: An alignment device has a carriage, two rails on the carriage that are configured for a workpiece to pass therebetween, and a finger that protrudes a distance from the carriage. The finger is configured to be disposed on a carrier for the workpieces. The workpieces may be solar cells and may pass through the rails on a conveyor belt. The alignment device may move in order to align the workpieces as the workpieces are loaded into a carrier.Type: GrantFiled: August 26, 2014Date of Patent: January 19, 2016Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Malcolm N. Daniel, Charles T. Carlson, William T. Weaver
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Publication number: 20150380116Abstract: A shielding device for shielding an edge of a semiconductor substrate can include a multisided frame defining a perimeter of an enclosed area, and a shield coupled to the frame. The shield may be configured to move between a first position where the shield is retracted to the perimeter and a second position where shield advanced into the enclosed area. A method for processing a semiconductor substrate includes placing a semiconductor substrate in position in an implantation chamber, covering edges of the semiconductor substrate by pushing shields into engagement with the edges, performing an ion implantation procedure, and retracting the shields from the edges.Type: ApplicationFiled: June 27, 2014Publication date: December 31, 2015Inventors: Aaron P. Webb, Charles T. Carlson, William T. Weaver, Timothy J. Miller, James D. Strassner
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Publication number: 20150279720Abstract: An end effector pad including a fence member, a first recessed support member extending from a first side of the fence member, a second recessed support member extending from a second side of the fence member opposite the first side, a first glass plate having a relatively low coefficient of friction disposed on top of the first recessed support member for supporting a substrate thereon, and a second glass plate having a relatively low coefficient of friction disposed on top of the second recessed support member for supporting a substrate thereon.Type: ApplicationFiled: May 30, 2014Publication date: October 1, 2015Applicant: Varian Semiconductor Equipment Associates, Inc.Inventors: Paul E. Pergande, Charles T. Carlson, Krag R. Senior
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Patent number: 9145271Abstract: A system and method for the handling of workpieces in a workpiece processing system is disclosed. The system utilizes three conveyor belts, where one may be a loading belt, feeding unprocessed workpieces from its associated workpiece carrier to a processing system. A second conveyor belt may be an unloading belt, receiving processed workpieces from the processing system and filling its associated workpiece carrier. The third conveyor belt may be exchanging its workpiece carrier during this time, so that it is available to start operating as the loading belt once all of the workpieces have been removed from the workpiece carrier associated with the first conveyor belt.Type: GrantFiled: September 5, 2013Date of Patent: September 29, 2015Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Robert Brent Vopat, Malcolm N. Daniel, Luke Bonecutter, Jason M. Schaller, Charles T. Carlson, William T. Weaver
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Patent number: 9082799Abstract: A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.Type: GrantFiled: September 20, 2012Date of Patent: July 14, 2015Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: William T. Weaver, Charles T. Carlson, Scott A. Smith, Michael A. Beck, Aaron P. Webb, James D. Strassner, Lawrence R. Gravell, Michael C. Simmons
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Patent number: 9004564Abstract: Disclosed is a wafer support and alignment apparatus. The wafer support and alignment apparatus includes a wafer support component adapted to seat, align and support a wafer. The wafer support component includes at least one flat portion to support the wafer, at least one alignment lip portion protruding upward from the at least one flat portion, and at least one recessed pocket carved out of a portion of the at least one base portion. The at least one recessed pocket is adapted to receive at least one pad.Type: GrantFiled: March 13, 2013Date of Patent: April 14, 2015Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Paul E. Pergande, Charles T. Carlson
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Publication number: 20150026953Abstract: A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.Type: ApplicationFiled: July 3, 2014Publication date: January 29, 2015Inventors: Aaron P. Webb, Charles T. Carlson, Michael Honan, Luigi G. Amato, Christopher Neil Grant, James D. Strassner
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Publication number: 20150028232Abstract: A multi-part mask has a pattern plate, which includes a planar portion that has the desired aperture pattern to be used during workpiece processing. The multi-part mask also has a mounting frame, which is used to hold the pattern plate. Prior to assembly, the pattern plate has an aligning portion, which has one or more holes through which reusable alignment pins are inserted. These alignment pins enter kinematic joints disposed on the mounting frame, which serve to precisely align the pattern plate to the mounting frame. After the pattern plate has been secured to the mounting frame, the aligning portion can be detached from the pattern plate. The alignment pins can be reused at a later time. In some embodiments, the pattern plate can later be removed from the mounting frame, so that the mounting frame may be reused.Type: ApplicationFiled: July 2, 2014Publication date: January 29, 2015Inventors: Aaron P. Webb, Charles T. Carlson
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Publication number: 20140366358Abstract: An alignment device has a carriage, two rails on the carriage that are configured for a workpiece to pass therebetween, and a finger that protrudes a distance from the carriage. The finger is configured to be disposed on a carrier for the workpieces. The workpieces may be solar cells and may pass through the rails on a conveyor belt. The alignment device may move in order to align the workpieces as the workpieces are loaded into a carrier.Type: ApplicationFiled: August 26, 2014Publication date: December 18, 2014Inventors: Malcolm N. Daniel, Charles T. Carlson, William T. Weaver
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Publication number: 20140265392Abstract: Disclosed is a wafer support and alignment apparatus. The wafer support and alignment apparatus includes a wafer support component adapted to seat, align and support a wafer. The wafer support component includes at least one flat portion to support the wafer, at least one alignment lip portion protruding upward from the at least one flat portion, and at least one recessed pocket carved out of a portion of the at least one base portion. The at least one recessed pocket is adapted to receive at least one pad.Type: ApplicationFiled: March 13, 2013Publication date: September 18, 2014Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.Inventors: Paul E. Pergande, Charles T. Carlson
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Patent number: 8813338Abstract: An alignment device has a carriage, two rails on the carriage that are configured for a workpiece to pass therebetween, and a finger that protrudes a distance from the carriage. The finger is configured to be disposed on a carrier for the workpieces. The workpieces may be solar cells and may pass through the rails on a conveyor belt. The alignment device may move in order to align the workpieces as the workpieces are loaded into a carrier.Type: GrantFiled: March 8, 2012Date of Patent: August 26, 2014Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Malcolm N. Daniel, Charles T. Carlson, William T. Weaver