Patents by Inventor Cheng-Ying Huang

Cheng-Ying Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11469323
    Abstract: Techniques are disclosed for an integrated circuit including a ferroelectric gate stack including a ferroelectric layer, an interfacial oxide layer, and a gate electrode. The ferroelectric layer can be voltage activated to switch between two ferroelectric states. Employing such a ferroelectric layer provides a reduction in leakage current in an off-state and provides an increase in charge in an on-state. The interfacial oxide layer can be formed between the ferroelectric layer and the gate electrode. Alternatively, the ferroelectric layer can be formed between the interfacial oxide layer and the gate electrode.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: October 11, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Willy Rachmady, Jack T. Kavalieros, Cheng-Ying Huang, Matthew V. Metz, Sean T. Ma, Harold Kennel, Tahir Ghani
  • Publication number: 20220310610
    Abstract: Thin-film transistors and MIM capacitors in exclusion zones are described. In an example, an integrated circuit structure includes a semiconductor substrate having a zone with metal oxide semiconductor (MOS) transistors therein, and having a zone that excludes MOS transistors. A back-end-of-line (BEOL) structure is above the semiconductor substrate. A thin-film transistor (TFT) and/or a metal-insulator-metal (MIM) capacitor is in the BEOL structure. The TFT and/or MIM capacitor is vertically over the zone that excludes MOS transistors.
    Type: Application
    Filed: March 25, 2021
    Publication date: September 29, 2022
    Inventors: Abhishek A. SHARMA, Willy RACHMADY, Cheng-Ying HUANG, Gilbert DEWEY, Rajat PAUL
  • Publication number: 20220310605
    Abstract: Multiple non-silicon semiconductor material layers may be stacked within a fin structure. The multiple non-silicon semiconductor material layers may include one or more layers that are suitable for P-type transistors. The multiple non-silicon semiconductor material layers may further include one or more one or more layers that are suited for N-type transistors. The multiple non-silicon semiconductor material layers may further include one or more intervening layers separating the N-type from the P-type layers. The intervening layers may be at least partially sacrificial, for example to allow one or more of a gate, source, or drain to wrap completely around a channel region of one or more of the N-type and P-type transistors.
    Type: Application
    Filed: June 13, 2022
    Publication date: September 29, 2022
    Applicant: Intel Corporation
    Inventors: Gilbert Dewey, Patrick Morrow, Ravi Pillarisetty, Rishabh Mehandru, Cheng-ying Huang, Willy Rachmady, Aaron Lilak
  • Patent number: 11444159
    Abstract: An electronic device comprises a channel layer on a buffer layer on a substrate. The channel layer has a first portion and a second portion adjacent to the first portion. The first portion comprises a first semiconductor. The second portion comprises a second semiconductor that has a bandgap greater than a bandgap of the first semiconductor.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: September 13, 2022
    Assignee: Intel Corporation
    Inventors: Sean T. Ma, Gilbert Dewey, Willy Rachmady, Matthew V. Metz, Cheng-Ying Huang, Harold W. Kennel, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
  • Patent number: 11437405
    Abstract: Embodiments herein describe techniques for an integrated circuit (IC). The IC may include a first transistor, an insulator layer above the first transistor, and a second transistor above the insulator layer. The first transistor may be a p-type transistor including a channel in a substrate, a first source electrode, and a first drain electrode. A first metal contact may be coupled to the first source electrode, while a second metal contact may be coupled to the first drain electrode. The insulator layer may be next to the first metal contact, and next to the second metal contact. The second transistor may include a second source electrode, and a second drain electrode. The second source electrode may be coupled to the first metal contact, or the second drain electrode may be coupled to the second metal contact. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: September 6, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Patrick Morrow, Aaron Lilak, Willy Rachmady, Anh Phan, Ehren Mannebach, Hui Jae Yoo, Abhishek Sharma, Van H. Le, Cheng-Ying Huang
  • Publication number: 20220278227
    Abstract: Tunneling Field Effect Transistors (TFETs) are promising devices in that they promise significant performance increase and energy consumption decrease due to a steeper subthreshold slope (for example, smaller sub-threshold swing). In various embodiments, vertical fin-based TFETs can be fabricated in trenches, for example, silicon trenches. In another embodiment, vertical TFETs can be used on different material systems acting as a substrate and/or trenches (for example, Si, Ge, III-V semiconductors, GaN, and the like). In one embodiment, the tunneling direction in the channel of the vertical TFET can be perpendicular to the Si substrates. In one embodiment, this can be different than the tunneling direction in the channel of lateral TFETs.
    Type: Application
    Filed: May 16, 2022
    Publication date: September 1, 2022
    Applicant: Intel Corporation
    Inventors: Cheng-Ying Huang, Jack Kavalieros, Ian Young, Matthew Metz, Willy Rachmady, Uygar Avci, Ashish Agrawal, Benjamin Chu-Kung
  • Patent number: 11424335
    Abstract: Group III-V semiconductor devices having dual workfunction gate electrodes and their methods of fabrication are described. In an example, an integrated circuit structure includes a gallium arsenide layer on a substrate. A channel structure is on the gallium arsenide layer. The channel structure includes indium, gallium and arsenic. A source structure is at a first end of the channel structure and a drain structure is at a second end of the channel structure. A gate structure is over the channel structure, the gate structure having a first workfunction material laterally adjacent a second workfunction material. The second workfunction material has a different workfunction than the first workfunction material.
    Type: Grant
    Filed: September 26, 2017
    Date of Patent: August 23, 2022
    Assignee: Intel Corporation
    Inventors: Sean T. Ma, Willy Rachmady, Gilbert Dewey, Cheng-Ying Huang, Dipanjan Basu
  • Publication number: 20220262796
    Abstract: Gate-all-around integrated circuit structures having depopulated channel structures, and methods of fabricating gate-all-around integrated circuit structures having depopulated channel structures using a selective bottom-up approach, are described. For example, an integrated circuit structure includes a vertical arrangement of nanowires above a substrate. The vertical arrangement of nanowires has one or more active nanowires above one or more oxide nanowires. A first gate stack is over and around the one or more active nanowires. A second gate stack is over and around the one or more oxide nanowires.
    Type: Application
    Filed: April 27, 2022
    Publication date: August 18, 2022
    Inventors: Nicole THOMAS, Ehren MANNEBACH, Cheng-Ying HUANG, Marko RADOSAVLJEVIC
  • Publication number: 20220246608
    Abstract: Stacked transistor structures having a conductive interconnect between upper and lower transistors. In an embodiment, the interconnect is formed by first provisioning a protective layer over an area to be protected (gate dielectric or other sensitive material) of upper transistor, and then etching material adjacent and below the protected area to expose an underlying contact point of lower transistor. A metal is deposited into the void created by the etch to provide the interconnect. The protective layer is resistant to the etch process and is preserved in the structure, and in some cases may be utilized as a work-function metal. In an embodiment, the protective layer is formed by deposition of reactive semiconductor and metal material layers which are subsequently transformed into a work function metal or work function metal-containing compound. A remnant of unreacted reactive semiconductor material may be left in structure and collinear with protective layer.
    Type: Application
    Filed: April 21, 2022
    Publication date: August 4, 2022
    Inventors: Aaron D. LILAK, Anh PHAN, Ehren MANNEBACH, Cheng-Ying HUANG, Stephanie A. BOJARSKI, Gilbert DEWEY, Orb ACTON, Willy RACHMADY
  • Patent number: 11404562
    Abstract: Disclosed herein are tunneling field effect transistors (TFETs), and related methods and computing devices. In some embodiments, a TFET may include: a first source/drain material having a p-type conductivity; a second source/drain material having an n-type conductivity; a channel material at least partially between the first source/drain material and the second source/drain material, wherein the channel material has a first side face and a second side face opposite the first side face; and a gate above the channel material, on the first side face, and on the second side face.
    Type: Grant
    Filed: August 18, 2017
    Date of Patent: August 2, 2022
    Assignee: Intel Corporation
    Inventors: Cheng-Ying Huang, Willy Rachmady, Matthew V. Metz, Ashish Agrawal, Benjamin Chu-Kung, Uygar E. Avci, Jack T. Kavalieros, Ian A. Young
  • Patent number: 11398479
    Abstract: An integrated circuit includes: a germanium-containing fin structure above a layer of insulation material; a group III-V semiconductor material containing fin structure above the layer of insulation material; a first gate structure on a portion of the germanium-containing fin structure; a second gate structure on a portion of the group III-V semiconductor material containing fin structure; a first S/D region above the layer of insulation material and laterally adjacent to the portion of the germanium-containing fin structure, the first S/D region comprising a p-type impurity and at least one of silicon or germanium; a second S/D region above the layer of insulation material and laterally adjacent to the portion of the group III-V semiconductor material containing fin structure, the second S/D region comprising an n-type impurity and a second group III-V semiconductor material; and a layer comprising germanium between the layer of insulation material and the second S/D region.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: July 26, 2022
    Assignee: Intel Corporation
    Inventors: Willy Rachmady, Abhishek A. Sharma, Ravi Pillarisetty, Patrick Morrow, Rishabh Mehandru, Aaron D. Lilak, Gilbert Dewey, Cheng-Ying Huang
  • Patent number: 11393818
    Abstract: An integrated circuit structure comprises a lower device layer that includes a first structure comprising a plurality of PMOS transistors. An upper device layer is formed on the lower device layer, wherein the upper device layer includes a second structure comprising a plurality of NMOS thin-film transistors (TFT).
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: July 19, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Ravi Pillarisetty, Abhishek A. Sharma, Aaron D. Lilak, Willy Rachmady, Rishabh Mehandru, Kimin Jun, Anh Phan, Hui Jae Yoo, Patrick Morrow, Cheng-Ying Huang
  • Publication number: 20220223519
    Abstract: A device includes a device level having a metallization structure coupled to a semiconductor device and a transistor above the device level. The transistor has a body including a single crystal group III-V or group IV semiconductor material, a source structure on a first portion of the body and a drain structure on a second portion of the body, where the source structure is separate from the drain structure. The transistor further includes a gate structure including a first gate structure portion in a recess in the body and a second gate structure portion between the source structure and the drain structure. A source contact is coupled with the source structure and a drain contact is coupled with the drain structure. The source contact is in contact with the metallization structure in the device level.
    Type: Application
    Filed: March 30, 2022
    Publication date: July 14, 2022
    Applicant: Intel Corporation
    Inventors: Gilbert Dewey, Ryan Keech, Cory Bomberger, Cheng-Ying Huang, Ashish Agrawal, Willy Rachmady, Anand Murthy
  • Patent number: 11387238
    Abstract: Multiple non-silicon semiconductor material layers may be stacked within a fin structure. The multiple non-silicon semiconductor material layers may include one or more layers that are suitable for P-type transistors. The multiple non-silicon semiconductor material layers may further include one or more one or more layers that are suited for N-type transistors. The multiple non-silicon semiconductor material layers may further include one or more intervening layers separating the N-type from the P-type layers. The intervening layers may be at least partially sacrificial, for example to allow one or more of a gate, source, or drain to wrap completely around a channel region of one or more of the N-type and P-type transistors.
    Type: Grant
    Filed: March 2, 2018
    Date of Patent: July 12, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Patrick Morrow, Ravi Pillarisetty, Rishabh Mehandru, Cheng-ying Huang, Willy Rachmady, Aaron Lilak
  • Patent number: 11380684
    Abstract: Stacked transistor structures including one or more thin film transistor (TFT) material nanowire or nanoribbon channel regions and methods of forming same are disclosed. In an embodiment, a second transistor structure has a TFT material nanowire or nanoribbon stacked on a first transistor structure which also includes nanowires or nanoribbons comprising TFT material or group IV semiconductor. The top and bottom channel regions may be configured the same or differently, with respect to shape and/or semiconductor materials. Top and bottom transistor structures (e.g., NMOS/PMOS) may be formed using the top and bottom channel region structures. An insulator region may be interposed between the upper and lower channel regions.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: July 5, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Aaron Lilak, Cheng-Ying Huang, Jack Kavalieros, Willy Rachmady, Anh Phan, Ehren Mannebach, Abhishek Sharma, Patrick Morrow, Hui Jae Yoo
  • Publication number: 20220199624
    Abstract: Monolithic two-dimensional (2D) arrays of double-sided DRAM cells including a frontside bit cell over a backside bit cell. Each double-sided cell includes a stacked transistor structure having at least a first transistor over a second transistor. Each double-sided cell further includes a first capacitor on a frontside of the stacked transistor structure and electrically coupled to a source/drain of the first transistor. Each double-sided cell further includes a second capacitor on a backside of the stacked transistor structure and electrically coupled to a source/drain of the second transistor. Frontside cell addressing interconnects are electrically coupled to other terminals of at least the first transistor while one or more backside addressing interconnects are electrically coupled to at least one terminal of the second transistor or second capacitor.
    Type: Application
    Filed: December 23, 2020
    Publication date: June 23, 2022
    Applicant: Intel Corporation
    Inventors: Cheng-Ying Huang, Ashish Agrawal, Gilbert Dewey, Abhishek A. Sharma, Wilfred Gomes, Jack Kavalieros
  • Patent number: 11367789
    Abstract: A buffer layer is deposited on a substrate. A first III-V semiconductor layer is deposited on the buffer layer. A second III-V semiconductor layer is deposited on the first III-V semiconductor layer. The second III-V semiconductor layer comprises a channel portion and a source/drain portion. The first III-V semiconductor layer acts as an etch stop layer to etch a portion of the second III-V semiconductor layer to form the source/drain portion.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: June 21, 2022
    Assignee: Intel Corporation
    Inventors: Cheng-Ying Huang, Willy Rachmady, Matthew V. Metz, Gilbert Dewey, Jack T. Kavalieros, Sean T. Ma, Harold Kennel
  • Patent number: 11367722
    Abstract: A nanowire transistor structure has a first device region with a first body of semiconductor material having a first cross-sectional shape. A second device region has a second body with a second cross-sectional shape different from the first cross-sectional shape. The first device section is vertically above or below the second device section with the bodies extending horizontally between a source and drain. A first gate structure is wrapped around the first body and a second gate structure is wrapped around the second body. Differences in the geometries of the nanowires can be used to optimize performance in the first device section independently of the second device section.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: June 21, 2022
    Assignee: Intel Corporation
    Inventors: Aaron Lilak, Stephen Cea, Gilbert Dewey, Willy Rachmady, Roza Kotlyar, Rishabh Mehandru, Sean Ma, Ehren Mannebach, Anh Phan, Cheng-Ying Huang
  • Patent number: 11355621
    Abstract: Techniques and mechanisms for providing functionality of a non-planar device which includes a semiconductor body disposed on a dielectric layer and over an underlying subfin region. In an embodiment, the dielectric layer is disposed between, and adjoins each of, a first semiconductor material of the subfin region and a second semiconductor material of semiconductor body. The dielectric layer is an artefact of fabrication processing wherein an epitaxy of the semiconductor body is grown horizontally along a length of the subfin region. During such epitaxial growth, the dielectric layer prevents vertical growth of the second semiconductor material from the subfin region. Moreover, at least a portion of a dummy gate determines a shape of the semiconductor body. In another embodiment, formation of the semiconductor body is preceded by an etching to remove a section of a fin portion which is disposed over the subfin region.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: June 7, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Willy Rachmady, Sean Ma, Nicholas Minutillo, Tahir Ghani, Matthew V. Metz, Cheng-Ying Huang, Anand S. Murthy
  • Patent number: 11348916
    Abstract: Stacked transistor structures having a conductive interconnect between upper and lower transistors. In an embodiment, the interconnect is formed by first provisioning a protective layer over an area to be protected (gate dielectric or other sensitive material) of upper transistor, and then etching material adjacent and below the protected area to expose an underlying contact point of lower transistor. A metal is deposited into the void created by the etch to provide the interconnect. The protective layer is resistant to the etch process and is preserved in the structure, and in some cases may be utilized as a work-function metal. In an embodiment, the protective layer is formed by deposition of reactive semiconductor and metal material layers which are subsequently transformed into a work function metal or work function metal-containing compound. A remnant of unreacted reactive semiconductor material may be left in structure and collinear with protective layer.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: May 31, 2022
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Anh Phan, Ehren Mannebach, Cheng-Ying Huang, Stephanie A. Bojarski, Gilbert Dewey, Orb Acton, Willy Rachmady