Patents by Inventor Chien-Hua Huang

Chien-Hua Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9627215
    Abstract: A method includes providing a substrate having a first conductive feature in a first dielectric material layer; forming a first etch stop layer on the first dielectric material layer, wherein the first etch stop layer is formed of a high-k dielectric material; forming a second etch stop layer on the first etch stop layer; forming a second dielectric material layer on the second etch stop layer; forming a pattered mask layer on the second dielectric material layer; forming a first trench in the second dielectric material layer and the second etch stop layer; removing a portion of the first etch stop layer through the first trench to thereby form a second trench, wherein removing the portion of the first etch stop layer includes applying a solution to the portion of the first etch stop layer; and forming a second conductive feature in the second trench.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: April 18, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chien-Hua Huang, Cheng-Hsiung Tsai, Chung-Ju Lee, Cherng-Shiaw Tsai
  • Publication number: 20170092580
    Abstract: A method includes providing a substrate having a first conductive feature in a first dielectric material layer; forming a first etch stop layer on the first dielectric material layer, wherein the first etch stop layer is formed of a high-k dielectric material; forming a second etch stop layer on the first etch stop layer; forming a second dielectric material layer on the second etch stop layer; forming a pattered mask layer on the second dielectric material layer; forming a first trench in the second dielectric material layer and the second etch stop layer; removing a portion of the first etch stop layer through the first trench to thereby form a second trench, wherein removing the portion of the first etch stop layer includes applying a solution to the portion of the first etch stop layer; and forming a second conductive feature in the second trench.
    Type: Application
    Filed: September 25, 2015
    Publication date: March 30, 2017
    Inventors: CHIEN-HUA HUANG, CHENG-HSIUNG TSAI, CHUNG-JU LEE, CHERNG-SHIAW TSAI
  • Patent number: 9589890
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming a first dielectric layer over a substrate, forming a first trench in the first dielectric layer, forming a metal line in the first trench, removing a first portion of the metal line to form a second trench and removing a second portion of the metal line to form a third trench. A third portion of the metal line is disposed between the second and third trenches. The method also includes forming a second dielectric layer in the second and third trenches.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: March 7, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsin-Chieh Yao, Carlos H. Diaz, Cheng-Hsiung Tsai, Chung-Ju Lee, Chien-Hua Huang, Hsi-Wen Tien, Shau-Lin Shue, Tien-I Bao, Yung-Hsu Wu
  • Publication number: 20170053804
    Abstract: A method of forming a semiconductor device includes providing a precursor. The precursor includes a substrate; a gate stack over the substrate; a first dielectric layer over the gate stack; a gate spacer on sidewalls of the gate stack and on sidewalls of the first dielectric layer; and source and drain (S/D) contacts on opposing sides of the gate stack. The method further includes recessing the gate spacer to at least partially expose the sidewalls of the first dielectric layer but not to expose the sidewalls of the gate stack. The method further includes forming a spacer protection layer over the gate spacer, the first dielectric layer, and the S/D contacts.
    Type: Application
    Filed: August 19, 2015
    Publication date: February 23, 2017
    Inventors: Chih Wei Lu, Chung-Ju Lee, Hai-Ching Chen, Chien-Hua Huang, Tien-I Bao
  • Patent number: 9558927
    Abstract: A method for reducing contaminants in a semiconductor device is provided. The method includes cleaning the semiconductor substrate. The cleaning includes rotating the semiconductor substrate and dispersing an aerosol at a predetermined temperature to a surface of the semiconductor substrate or a layer formed on the substrate to be cleaned. The aerosol includes a chemical having a predetermined pressure and a gas having a predetermined flow rate.
    Type: Grant
    Filed: July 15, 2013
    Date of Patent: January 31, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hua Huang, Tsung-Min Huang, Chung-Ju Lee
  • Publication number: 20170025346
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming a first dielectric layer over a substrate, forming a first trench in the first dielectric layer, forming a metal line in the first trench, removing a first portion of the metal line to form a second trench and removing a second portion of the metal line to form a third trench. A third portion of the metal line is disposed between the second and third trenches. The method also includes forming a second dielectric layer in the second and third trenches.
    Type: Application
    Filed: July 20, 2015
    Publication date: January 26, 2017
    Inventors: Hsin-Chieh Yao, Carlos H. Diaz, Cheng-Hsiung Tsai, Chung-Ju Lee, Chien-Hua Huang, Hsi-Wen Tien, Shau-Lin Shue, Tien-I Bao, Yung-Hsu Wu
  • Patent number: 9490163
    Abstract: A semiconductor arrangement and methods of formation are provided. The semiconductor arrangement includes conductive lines having sidewalls angled between about 45° to about 90° relative to a plane in which bottom surfaces of the conductive lines lie. A dielectric layer is formed over the conductive lines. The angled sidewalls of the conductive lines cause the dielectric layer to pinch off before an area between adjacent conductive lines is filled, thus establishing an air gap between adjacent conductive lines, where the air gap has a lower dielectric constant than the dielectric material.
    Type: Grant
    Filed: April 30, 2014
    Date of Patent: November 8, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hua Huang, Hsin-Chieh Yao, Chung-Ju Lee
  • Patent number: 9449839
    Abstract: The present disclosure relates to a method of forming a pattern on a semiconductor substrate. One or more layers are formed over the semiconductor substrate. A first self-assembled monolayer (SAM) layer is formed over the one or more layers, wherein the first SAM layer exhibits a first SAM pattern. At least a first of the one or more layers is patterned using the first SAM layer as a first etch mask to form first pillars in the first of the one or more layers and then removing the first SAM layer. A second self-assembled monolayer (SAM) layer is formed along sidewall portions of the first pillars after the first SAM layer has been removed, wherein the second SAM layer exhibits a second SAM pattern that differs from the first SAM pattern and where the second SAM layer differs in material composition from the first SAM layer.
    Type: Grant
    Filed: November 10, 2014
    Date of Patent: September 20, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Min Huang, Chung-Ju Lee, Chien-Hua Huang
  • Publication number: 20160254166
    Abstract: A method includes passing a chemical solution through a metal-ion absorber, wherein metal ions in the metal-ion absorber are trapped by the metal-ion absorber. The chemical solution exiting out of the metal-ion absorber is then used to etch a metal-containing region, wherein the metal-containing region includes a metal that is of a same element type as the metal ions.
    Type: Application
    Filed: May 9, 2016
    Publication date: September 1, 2016
    Inventors: Chien-Hua Huang, Chung-Ju Lee
  • Patent number: 9418886
    Abstract: A method includes forming a patterned mask layer over a conductive layer; forming a first dielectric layer over the patterned mask layer and the conductive layer; selectively etching the first dielectric layer, thereby exposing an upper surface of the patterned mask layer, wherein the upper surface of the first dielectric layer is lower than a top surface of the patterned mask layer; removing the patterned mask layer; and selectively etching the conductive layer to form a conductive feature having a tapered profile.
    Type: Grant
    Filed: July 24, 2015
    Date of Patent: August 16, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chien-Hua Huang, Chieh-Han Wu, Chung-Ju Lee
  • Publication number: 20160225664
    Abstract: A semiconductor device and a fabricating process for the same are provided. The semiconductor device includes a base layer having a part of a reactive material; and a self-assembled protecting layer of a self-assembled molecule reacting with the reactive material formed over the part.
    Type: Application
    Filed: January 25, 2016
    Publication date: August 4, 2016
    Inventors: Chien-Hua Huang, Chung-Ju Lee, Tsung-Min Huang
  • Patent number: 9337055
    Abstract: A method includes passing a chemical solution through a metal-ion absorber, wherein metal ions in the metal-ion absorber are trapped by the metal-ion absorber. The chemical solution exiting out of the metal-ion absorber is then used to etch a metal-containing region, wherein the metal-containing region includes a metal that is of a same element type as the metal ions.
    Type: Grant
    Filed: October 9, 2013
    Date of Patent: May 10, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hua Huang, Chung-Ju Lee
  • Patent number: 9245841
    Abstract: A semiconductor device and a fabricating process for the same are provided. The semiconductor device includes a base layer having a part of a reactive material; and a self-assembled protecting layer of a self-assembled molecule reacting with the reactive material formed over the part.
    Type: Grant
    Filed: July 19, 2012
    Date of Patent: January 26, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hua Huang, Chung-Ju Lee, Tsung-Min Huang
  • Publication number: 20150332625
    Abstract: A brightness controlling method for an all-in-one computer is provided. The all-in-one computer includes an on-screen display adjusting unit having a first brightness value, an operating system having a first system brightness value, a control unit and a scaler. The brightness controlling method includes the following steps. First, the first brightness value is adjusted to a second brightness value or the first system brightness value is adjusted to a second system brightness value. Then, when the first brightness value is adjusted to the second brightness value, the control unit synchronizes the first system brightness value to the second brightness value; when the first system brightness value is adjusted to the second system brightness value, the scaler adjusts the first brightness value to the second system brightness value. The invention also provides an all-in-one computer implementing the brightness controlling method.
    Type: Application
    Filed: April 22, 2015
    Publication date: November 19, 2015
    Inventors: Ke-Ming CHEN, Chien-Hua HUANG
  • Publication number: 20150137378
    Abstract: A method embodiment includes forming a hard mask over a dielectric layer and forming a first metal line and a second metal line extending through the hard mask into the dielectric layer. The method further includes removing the hard mask, wherein removing the hard mask defines an opening between the first metal line and the second metal line. A liner is then formed over the first metal line, the second metal line, and the dielectric layer, wherein the liner covers sidewalls and a bottom surface of the opening.
    Type: Application
    Filed: November 15, 2013
    Publication date: May 21, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yung-Hsu Wu, Chien-Hua Huang, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue
  • Patent number: 9030697
    Abstract: The present invention discloses a printing device. The printing device of the present invention may include a communication element capable of communicating with an external host utilizing a plurality of telecommunication network technologies to receive a file sent from the external host to the device, a printing element electrically coupled to the communication element to output an image file, and an audio outputting element electrically coupled to the communication element to output an audio file, wherein the communication element identifies a file type of the file received from the external host and selectively sends the file to the printing element or the audio outputting element.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: May 12, 2015
    Assignee: HiTi Digital, Inc.
    Inventors: Chien-Hua Huang, Mei-Ju Ko, Jufen Huang, Chia-chen Wei, Hung-Chan Chien, Hong-Shun Chiou, Yu-Fan Fang, Chun-Chang Tu, Tsung-Yueh Chen, Chih-Chieh Lin, Yueh Cheng Lin, Shiu-Sheng Hsu, Chu-Ming Liu
  • Patent number: 9012967
    Abstract: Embedded memories. The devices include a substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer, and a plurality of capacitors. The substrate comprises transistors. The first dielectric layer, embedding first and second conductive plugs electrically connecting the transistors therein, overlies the substrate. The second dielectric layer, comprising a plurality of capacitor openings exposing the first conductive plugs, overlies the first dielectric layer. The capacitors comprise a plurality of bottom plates, respectively disposed in the capacitor openings, electrically connecting the first conductive plugs, a plurality of capacitor dielectric layers respectively overlying the bottom plates, and a top plate, comprising a top plate opening, overlying the capacitor dielectric layers. The top plate opening exposes the second dielectric layer, and the top plate is shared by the capacitors.
    Type: Grant
    Filed: February 9, 2012
    Date of Patent: April 21, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Ching Lin, Chun-Yao Chen, Chen-Jong Wang, Shou-Gwo Wuu, Chung S. Wang, Chien-Hua Huang, Kun-Lung Chen, Ping Yang
  • Publication number: 20150099370
    Abstract: A method includes passing a chemical solution through a metal-ion absorber, wherein metal ions in the metal-ion absorber are trapped by the metal-ion absorber. The chemical solution exiting out of the metal-ion absorber is then used to etch a metal-containing region, wherein the metal-containing region includes a metal that is of a same element type as the metal ions.
    Type: Application
    Filed: October 9, 2013
    Publication date: April 9, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chien-Hua Huang, Chung-Ju Lee
  • Publication number: 20150056813
    Abstract: The present disclosure relates to a method of forming a pattern on a semiconductor substrate. One or more layers are formed over the semiconductor substrate. A first self-assembled monolayer (SAM) layer is formed over the one or more layers, wherein the first SAM layer exhibits a first SAM pattern. At least a first of the one or more layers is patterned using the first SAM layer as a first etch mask to form first pillars in the first of the one or more layers and then removing the first SAM layer. A second self-assembled monolayer (SAM) layer is formed along sidewall portions of the first pillars after the first SAM layer has been removed, wherein the second SAM layer exhibits a second SAM pattern that differs from the first SAM pattern and where the second SAM layer differs in material composition from the first SAM layer.
    Type: Application
    Filed: November 10, 2014
    Publication date: February 26, 2015
    Inventors: Tsung-Min Huang, Chung-Ju Lee, Chien-Hua Huang
  • Publication number: 20150009525
    Abstract: The present invention discloses a printing device. The printing device of the present invention may include a communication element capable of communicating with an external host utilizing a plurality of telecommunication network technologies to receive a file sent from the external host to the device, a printing element electrically coupled to the communication element to output an image file, and an audio outputting element electrically coupled to the communication element to output an audio file, wherein the communication element identifies a file type of the file received from the external host and selectively sends the file to the printing element or the audio outputting element.
    Type: Application
    Filed: July 2, 2013
    Publication date: January 8, 2015
    Inventors: Chien-Hua HUANG, Mei-Ju Ko, Jufen Huang, Chia-chen Wei, Hung-Chan Chien, Hong-Shun Chiou, Yu-Fan Fang, Chun-Chang Tu, Tsuing-Yueh Chen, Chih-Chieh Lin, Yueh Cheng Lin, Shiu-Sheng Hsu, Chu-Ming Liu