Abstract: A pump system comprising a vacuum pump and a cooling element connected to said vacuum pump. A coolant feed and a coolant discharge are connected to the cooling element for the purpose of cooling said vacuum pump by virtue of receiving and discharging heat using a coolant. The coolant feed and coolant discharge are connected to a heat exchanger such that heat is transferred from the coolant discharge to said coolant feed.

Abstract: The present invention relates to a method for separating solid-body slices (1) from a donor substrate (2). The method comprises the steps of: producing modifications (10) within the donor substrate (2) by means of laser beams (12), wherein a detachment region is predefined by the modifications (10), along which detachment region the solid-body layer (1) is separated from the donor substrate (2), and removing material from the donor substrate (2), starting from a surface (4) extending in the peripheral direction of the donor substrate (2), in the direction of the centre (Z) of the donor substrate (2), in particular in order to produce a peripheral indentation (6).

Abstract: A method for creating a detachment zone in a solid is contemplated, such as in order to detach a solid portion, especially a solid layer, from the solid, said solid portion that is to be detached being thinner than the solid from which the solid portion has been removed.

Abstract: The invention relates to a method for creating a detachment zone (2) in a solid (1) in order to detach a solid portion (12), especially a solid layer (12), from the solid (1), said solid portion (12) that is to be detached being thinner than the solid from which the solid portion (12) has been removed.

Abstract: A leak detection device has a test chamber which, for evacuation, is connected to an evacuation pump device. Moreover, the test chamber is connected by a test gas line to a test gas pump device. The test gas pump device is connected, at its main inlet, to a test gas detector, such that a detection of test gas can take place using the counter-current principle. A valve device is arranged in the test gas line. This valve device has a test gas chamber for temporary storage of test gas removed from the test chamber.

Abstract: The invention relates to a method for creating a detachment area (2) in a solid (1), in particular for detaching the solid (1) along the separating region (2). Said solid portion (12) that is to be detached is thinner than the solid body (1) from which the solid portion (12) has been removed. According to the invention, said method preferably comprises at least the following steps: the crystal lattice of the solid (1) is modified by means of a modifying agent, in particular by means of at least one laser, in particular a pico- or femtosecond laser. The modifications, in particular the laser beams penetrate into the solid (1) via a surface (5) of the solid portion (12) which is to be detached, several modifications (9) are created in the crystal lattice, said crystal lattice penetrates, following said modifications (9), in the areas surrounding the modifications (9), at least in one particular part.

Abstract: The present invention relates to a method for producing solid body layers. The claimed method comprises at least the following steps: providing a solid body (2) for separating at least one solid body layer (4), fixing the receiving layer (10) for holding the solid layer (4) to the solid body (2), said receiving layer having a plurality of holes for guiding a fluid and is fixed by means of a connecting layer to the solid body and the receiving layer (10) is subjected to thermal stress, in particular, mechanical stress, for generating voltages in the solid body (2), wherein a crack in the solid body (2) along a separation plane (8) expands due to the voltages, the solid layer (4) being separated from the solid body (2) due to the crack.

Abstract: The present invention relates to a method for the production of layers of solid material. The method according to the invention comprises at the very least the steps of providing a solid body (2) for the separation of at least one layer of solid material (4), generating defects by means of at least one radiation source, in particular a laser, in the inner structure of the solid body in order to determine a detachment plane along which the layer of solid material is separated from the solid body, and applying heat to a polymer layer (10) disposed on the solid body (2) in order to generate, in particular mechanically, stresses in the solid body (2), due to the stresses a crack propagating in the solid body (2) along the detachment plane (8), which crack separates the layer of solid material (4) from the solid body (2).

Abstract: A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).

Abstract: A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).

Abstract: A turbomolecular pump has a rotor element in a housing. The rotor element is arranged on a rotor shaft. The rotor shaft is supported by two bearing elements in the housing. The bearing element on the high-vacuum side is constructed as a roller bearing. In order to guarantee a pressure in the area of the bearing element that is acceptable for the bearing element constructed as a roller bearing, the bearing element is arranged in a chamber. The chamber is connected via a channel to the pre-vacuum area and sealed relative to the high-vacuum area by a gasket.

Abstract: A leak detection device has a test chamber which, for evacuation, is connected to an evacuation pump device. Moreover, the test chamber is connected by a test gas line to a test gas pump device. The test gas pump device is connected, at its main inlet, to a test gas detector, such that a detection of test gas can take place using the counter-current principle. A valve device is arranged in the test gas line. This valve device has a test gas chamber for temporary storage of test gas removed from the test chamber.

Abstract: A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).

Abstract: The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).

Abstract: A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).

Abstract: A vacuum pump, particularly a turbomolecular pump or multi-inlet pump, comprises a rotor shaft (12) carrying at least one rotor means (14). The rotor shaft (12) is supported on the pressure side by a bearing assembly (56) and on the suction-side by a further bearing assembly (30). According to the invention, the suction-side bearing assembly (30) comprises an electromagnetic bearing (32,34). Further according to the invention, the pressure-side bearing assembly (56) comprises a ball bearing (58) so that the rotor shaft (12) can be given the largest possible length. The rolling bearing (58) is preferably biased by the electromagnetic bearing (32,34).

Abstract: A pump rotor (11) contains a transponder (14) that can be read out by a reader (12) of a pump stator (10). The pump rotor (11) also contains sensors (26) for determining operating data (BD), and a memory (27). The memory (27) stores either the history of the measured operating data (BD) or a service life characteristic (LDK). In this way, the rate of wear of the respective rotor is determined and stored in the rotor, and the rotor therefore contains all of the information relating to maintenance. The rotor-related information remains in the rotor even if the rotor is used in another vacuum pump.

Abstract: The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).

Abstract: In a reactor for the decomposition of a silicon-containing gas, provision is made, to avoid silicon deposition on an inner wall of a reactor vessel, for at least one catalytically active mesh to be provided within a reaction chamber between at least one gas feed line and the inner wall (4). The mesh accelerates the thermal decomposition of the gas and reduces the deposition of silicon on the inner wall. Also described is a process for the preparation of silicon using the reactor according to the invention and the use in photovoltaics of the silicon prepared.

Abstract: A high rotational speed vacuum pump (10) includes a compressor (12), a drive motor (14) for driving said compressor (12), and a motor control unit (16) for operating said drive motor (14) at a constant nominal rotational frequency. Depending on the basic conditions, undesirably strong oscillations may occur at the compressor (12) during compressor operation at the nominal rotational frequency. These undesirably strong oscillations cause the bearings to be excessively stressed. To reduce the oscillation stress of the compressor and/or the vacuum pump, an activatable rotational frequency correction device (18) is associated with the motor control unit (16). The correction device constantly corrects the nominal frequency by a rotational frequency correction value of max. 10% of the nominal rotational frequency when the rotational frequency correction device (18) is activated.