Abstract: A vacuum pump (10) includes a pump unit (14) and an operating unit (12) arranged spaced from the pump unit (14). The operating unit (12) is connected with the pump unit (14) for controlling it. The pump unit (14) and the operating unit (12) respectively comprise a transceiver module (20,22) for transmitting and receiving control and operational data bidirectionally in a wireless manner. The pump unit (14) and the operating unit (12) are exclusively connected with each other in a wireless manner. By the omission of electrical lines, the induction of interfering signals is excluded. Wall perforations for lead-through of electrical lines are omitted.

Abstract: In a reactor for the decomposition of a silicon-containing gas, provision is made, to avoid silicon deposition on an inner wall of a reactor vessel, for at least one catalytically active mesh to be provided within a reaction chamber between at least one gas feed line and the inner wall (4). The mesh accelerates the thermal decomposition of the gas and reduces the deposition of silicon on the inner wall. Also described is a process for the preparation of silicon using the reactor according to the invention and the use in photovoltaics of the silicon prepared.

Abstract: A method for cleaning a dry compressing screw-type vacuum pump with internal compression includes the following method steps: operating the screw-type pump (12) at nominal rotation speed, mixing a cleaning fluid composed of a rinsing liquid and a rinsing gas at a volume ratio of at least 1:10, and introducing the cleaning fluid into the gas inlet (16) of the screw-type pump (12). The cleaning method allows a dry compressing screw-type vacuum pump with internal compression to be cleaned in a simple manner at regular intervals.

Abstract: A vacuum side channel compressor (10) comprises a pump stator (14) and a pump rotor (12), which surround a side channel (31,32,33,34). An axial bearing (22) is provided for mounting the pump rotor (12). A sealing gap (40) is formed next to the side channel between the pump stator (14) and the pump rotor (12), part of which forms a conical ring whose imaginary cone apex (50) lies in the vicinity of the axial bearing (22).

Abstract: A test-gas leak detector (1) includes a connection (27) for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (2), a test-gas detector (5) that is connected on the intake side of said pumps, and a test-gas conduit (28) leading from the connection of the leak detector (27). The conduit is connected to at least one intermediate stage of the high-vacuum pump (2) in addition to the pre-vacuum zone of the high-vacuum pump (2) via conduit sections (31, 32, 35) and valves (33, 34, 36). A housing (9), in which at least some of the conduits and valves and the high-vacuum pump (2) are integrated, forms part of the leak detector (1) and a detachable slide-in module (51) forms part of the high-vacuum pump. The slide-in module has an external jacket construction (53) comprising passages (58, 61) and when the leak detector (1) is operational, is situated in a receiving opening (52) that is provided in the housing (9).

Abstract: A test-gas leak detector (1) includes a connection (27) for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (2), a test-gas detector (5) that is connected on the intake side of said pumps, and a test-gas conduit (28) leading from the connection of the leak detector (27). The conduit is connected to at least one intermediate stage of the high-vacuum pump (2) in addition to the pre-vacuum zone of the high-vacuum pump (2) via conduit sections (31, 32, 35) and valves (33, 34, 36). A housing (9), in which at least some of the conduits and valves and the high-vacuum pump (2) are integrated, forms part of the leak detector (1) and a detachable slide-in module (51) forms part of the high-vacuum pump. The slide-in module has an external jacket construction (53) comprising passages (58, 61) and when the leak detector (1) is operational, is situated in a receiving opening (52) that is provided in the housing (9).

Abstract: A vacuum pump (10) includes a control device (20) for processing operational data and operational instructions. Further, the vacuum pump (10) includes a touch screen (40) serving as display for displaying the operational data callable from the control device (20) and as input for inputting operational instructions into the control device (20). The touch screen (40) includes a display panel (42) and a key panel (44) as display and the input, respectively, and is connected with the control device (20) via a data line (36). By combining the display and the input in a single device, namely the touch screen, the trouble for display and data input is reduced.

Abstract: A one-piece rotor (1) for a drag vacuum pump (21) is designed, at least in sections, as a turbomolecular vacuum pump with rotor blades (5) and stator blades (9), The rotor (1) has a hub (2) whose peripheral surface supports the pump structures. The rotor-side pump structures include, at least in sections, blades (5), which are arranged in rows (4) and which are formed from the surface of a blank by means of metal cutting operations. The metal cutting operations include producing radial peripheral grooves (3) into which stator blade rows (9) engage when the pump is assembled. In order to simplify the machining of the rotor (1), another metal cutting operation provides the outer surface of the blank with one or more thread grooves (13).

Abstract: The invention relates to a magnetic bearing having a fixed first bearing portion and a movable second bearing portion which is contactlessly supported on the first bearing portion. The first bearing portion (12) comprises a magnetic coil (42) generating a magnetic field and having a yoke (44). The second bearing portion (18) comprising a permanent magnet (50) which is magnetized in alignment with the yoke (44). The permanent magnet of the second bearing portion has an attracting effect upon the yoke of the first bearing portion. To avoid this, the first bearing portion is provided with a permanently magnetized compensation magnet (54) which is located opposite the permanent magnet (50) of the second bearing portion (18) and is magnetized oppositely to the permanent magnet (50).

Abstract: A turbomolecular vacuum pump (1) has an inlet (3) and an outlet (4) and rotor and stator vanes (5 and 6), situated between the inlet and outlet. The rotor vanes (6) have front sides (11) and rear sides (12) in relation to the direction of rotation. At least a part of the rotor vanes (6) have a rear side (12) which is convex on the suction-side and concave on the delivery side. Alternately, at least part of the rotor vanes (6) have a front side (11), which is concave on the suction side and convex on the delivery side.

Abstract: A vacuum pump (10) includes a pump unit (14) and an operating unit (12) arranged spaced from the pump unit (14). The operating unit (12) is connected with the pump unit (14) for controlling it. The pump unit (14) and the operating unit (12) respectively comprise a transceiver module (20,22) for transmitting and receiving control and operational data bidirectionally in a wireless manner. The pump unit (14) and the operating unit (12) are exclusively connected with each other in a wireless manner. By the omission of electrical lines, the induction of interfering signals is excluded. Wall perforations for lead-through of electrical lines are omitted.

Abstract: A rotor (12) is mounted in a stator (14) with radial magnetic bearings (16, 19) and with an axial magnetic bearing (40) in a contactless manner. The axial magnetic bearing (40) produces an axial magnetic field with a magnet coil (40) and a yoke iron (44) mounted on the stator (14). An axially magnetized permanent magnet (50) is provided on the rotor (12), located approxaimately axially opposite the yoke iron (44). A permanently axially magnetized compensating magnet (54) is provided on the stator (14) and arranged axially opposite the permanent magnet of the rotor (50) and polarized in the opposite direction, such that the permanent magnet (50) of the rotor and the compensating magnet (54) repel each other. In a center position, the rotor is bias-free by compensating the forces of attraction between the permanent magnet of the rotor and the yoke iron. As a result, the center position of the rotor can be adjusted with relatively small magnet coil flows.

Abstract: A vacuum line (10) comprising a vacuum-tight flexible tube section (22) and a vibration damper (16) axially parallel to the flexible tube section (22) serves to connect tow vacuum devices (12, 14). The vibration damper (16) is an actively regulated axial magnetic bearing. Thereby, a vibration damper with good dampening properties is realized. By changing the regulation parameters, the vibration damper is adaptable and not subjected to any mechanical wear. The transmission of structure-borne noise is avoided by the contactless vibration dampening.

Abstract: A vacuum pump (10) includes a control device (20) for processing operational data and operational instructions. Further, the vacuum pump (10) includes a touch screen (40) serving as display for displaying the operational data callable from the control device (20) and as input for inputting operational instructions into the control device (20). The touch screen (40) includes a display panel (42) and a key panel (44) as display and the input, respectively, and is connected with the control device (20) via a data line (36). By combining the display and the input in a single device, namely the touch screen, the trouble for display and data input is reduced.

Abstract: A magnetic bearing for rapidly rotating machines (1), in particular, for turbo compressors, drag vacuum pumps, or similar, includes two bearings (3, 4), each with a stator magnetic-ring set (5, 7) and a rotor magnetic-ring set (6, 8). Movement of the rotor is damped by magnetic-ring sets (5, 6; 7, 8) arranged concentrically to each other. The stator magnetic-ring set (5 or 7) is arranged externally and the rotor magnetic-ring set (6 or 8) is arranged internally. Non-magnetic elements with good electrical conducting properties (32, 54, 55) are connected to the outer circumference surfaces of at least one part of the magnetic ring of each of the stator-side magnetic-ring sets (5, 7).

Abstract: A vacuum pump (1) includes a housing (2) in which a suction inlet opening (5) is defined. A vibration absorber (7) includes a suspension body (8) and an absorber jacket (9). The housing (2) of the vacuum pump (1) is connected directly to one end of the suspension body (8) in vacuum-tight connection and an opposite end of the suspension body carries a connecting port (14). By connecting the suspension body directly with the housing without mechanically releasable interconnection elements, the overall height of the pump and suspension body assembly is reduced.

Abstract: The invention relates to a magnetic bearing having a fixed first bearing portion and a movable second bearing portion which is contactlessly supported on the first bearing portion. The first bearing portion (12) comprises a magnetic coil (42) generating a magnetic field and having a yoke (44). The second bearing portion (18) comprising a permanent magnet (50) which is magnetized in alignment with the yoke (44). The permanent magnet of the second bearing portion has an attracting effect upon the yoke of the first bearing portion. To avoid this, the first bearing portion is provided with a permanently magnetized compensation magnet (54) which is located opposite the permanent magnet (50) of the second bearing portion (18) and is magnetized oppositely to the permanent magnet (50).

Abstract: A vacuum line (10) comprising a vacuum-tight flexible tube section (22) and a vibration damper (16) axially parallel to the flexible tube section (22) serves to connect two vacuum devices (12,14). The vibration damper (16) is an actively regulated axial magnetic bearing. Thereby, a vibration damper with good dampening properties is realized. By changing the regulation parameters, the vibration damper is adaptable and not subjected to any mechanical wear. The transmission of structure-borne noise is avoided by the contactless vibration dampening.

Abstract: The invention relates to a turbomolecular vacuum pump comprising rows of rotor blades (3) and rows of stator blades (4) that alternately engage with one another at varying angles of attack (&agr;). The aim of the invention is to improve the properties of such a pump. To this end, at least a part of the blades (1 or 2) of the rows of blades (3 or 4) that are mounted on the pressure side thickens towards the rim facing the pressure side.

Abstract: Turbomolecular vacuum pump (1) with an inlet (3) and an outlet (4) and rotor and stator vanes (5 and 6), situated between the inlet and outlet, whereby the rotor vanes (6) have front sides (11) and rear sides (12) in relation to the direction of rotation thereof; according to the invention, the pumping properties of the pump may be improved, whereby at least a part of the rotor vanes (6) comprises a rear side (12), convex on the suction-side and concave on the delivery side, or that at least part of the rotor vanes (6) comprises a front side (11), which is concave on the suction side and convex on the delivery side.