Abstract: A semiconductor package including a substrate, interposers, chips, and a dummy interposer is provided. The interposers are stacked on the substrate. The chips are located on the interposers. The chip is electrically connected to the interposer. The dummy interposer is located between the interposer and the substrate and is electrically connected to the interposer. The chip is not located between the dummy interposer and the interposer.

Abstract: A computer-implemented method of performing voltage rule check in an electronic design automation (EDA) platform is provided in the present invention, including steps of inserting pseudo device with safe operating area (SOA) model setting in a netlist generated by the EDA platform or in a schematic of process design kit (PDK), wherein parameters of the pseudo device and the model are set so that the pseudo device would not affect original circuits in the netlist and the schematic, performing SOA check in the netlist or the schematic through the EDA platform, and examining the warning messages triggered by the pseudo device and the model violating the SOA setting in the SOA check to find out layout sections violating the SOA setting.

Abstract: A transistor structure including a first doped layer, a second doped layer, a channel layer, a gate, and a dielectric structure is provided. The second doped layer is located on the first doped layer. The channel layer is located between the first doped layer and the second doped layer. The gate penetrates through the second doped layer and the channel layer. The second doped layer and the channel layer respectively surround the gate. The dielectric structure is located between the gate and the second doped layer and located between the gate and the channel layer.

Abstract: Interconnect structures and methods and apparatuses for forming the same are disclosed. In an embodiment, a method includes supplying a process gas to a process chamber; igniting the process gas into a plasma in the process chamber; reducing a pressure of the process chamber to less than 0.3 mTorr; and after reducing the pressure of the process chamber, depositing a conductive layer on a substrate in the process chamber.

Abstract: A method of forming a semiconductor device includes forming an opening in a dielectric layer, and forming a barrier layer in the opening. A combined liner layer is formed over the barrier layer by first forming a first liner layer over the barrier layer, and forming a second liner layer over the first liner layer, such that the first liner layer and the second liner layer intermix. A conductive material layer is formed over the combined liner layer, and a thermal process is performed to reflow the conductive material layer.

Abstract: An opening is formed through a dielectric material layer to physically expose a top surface of a conductive material portion in, or over, a substrate. A metallic nitride liner is formed on a sidewall of the opening and on the top surface of the conductive material portion. A metallic adhesion layer including an alloy of copper and at least one transition metal that is not copper is formed on an inner sidewall of the metallic nitride liner. A copper fill material portion may be formed on an inner sidewall of the metallic adhesion layer. The metallic adhesion layer is thermally stable, and remains free of holes during subsequent thermal processes, which may include reflow of the copper fill material portion. An additional copper fill material portion may be optionally deposited after a reflow process.

Abstract: An opening is formed through a dielectric material layer to physically expose a top surface of a conductive material portion in, or over, a substrate. A metallic nitride liner is formed on a sidewall of the opening and on the top surface of the conductive material portion. A metallic adhesion layer including an alloy of copper and at least one transition metal that is not copper is formed on an inner sidewall of the metallic nitride liner. A copper fill material portion may be formed on an inner sidewall of the metallic adhesion layer. The metallic adhesion layer is thermally stable, and remains free of holes during subsequent thermal processes, which may include reflow of the copper fill material portion. An additional copper fill material portion may be optionally deposited after a reflow process.

Abstract: A computer-implemented method of performing voltage rule check in an electronic design automation (EDA) platform is provided in the present invention, including steps of inserting pseudo device with safe operating area (SOA) model setting in a netlist generated by the EDA platform or in a schematic of process design kit (PDK), wherein parameters of the pseudo device and the model are set so that the pseudo device would not affect original circuits in the netlist and the schematic, performing SOA check in the netlist or the schematic through the EDA platform, and examining the warning messages triggered by the pseudo device and the model violating the SOA setting in the SOA check to find out layout sections violating the SOA setting.

Abstract: An insulated gate bipolar transistor (IGBT) structure including a substrate and a first gated PNPN diode is provided. The first gated PNPN diode is located on the substrate. The first gated PNPN diode includes a first gate, a first source/drain extension (SDE) region, and a second SDE region. The first gate is located on the substrate. The first SDE region and the second SDE region are located in the substrate on two sides of the first gate.

Abstract: A method of manufacturing a channel all-around semiconductor device includes: forming a plurality of gate structures having the same extension direction, and forming a multi-connected channel layer on a substrate. Each of the gate structures has opposite first end and second end, and the gate structures are all surrounded by the formed multi-connected channel layer, and a plane direction of the multi-connected channel layer is perpendicular to the extension direction of the gate structures, so that channels of the gate structures are connected to each other.

Abstract: An opening is formed through a dielectric material layer to physically expose a top surface of a conductive material portion in, or over, a substrate. A metallic nitride liner is formed on a sidewall of the opening and on the top surface of the conductive material portion. A metallic adhesion layer including an alloy of copper and at least one transition metal that is not copper is formed on an inner sidewall of the metallic nitride liner. A copper fill material portion may be formed on an inner sidewall of the metallic adhesion layer. The metallic adhesion layer is thermally stable, and remains free of holes during subsequent thermal processes, which may include reflow of the copper fill material portion. An additional copper fill material portion may be optionally deposited after a reflow process.

Abstract: An insulated gate bipolar transistor (IGBT) structure including a substrate and a first gated PNPN diode is provided. The first gated PNPN diode is located on the substrate. The first gated PNPN diode includes a first gate, a first source/drain extension (SDE) region, and a second SDE region. The first gate is located on the substrate. The first SDE region and the second SDE region are located in the substrate on two sides of the first gate.

Abstract: A channel all-around semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a plurality of gate structures and a multi-connected channel layer. The gate structures have the same extension direction, and each of the gate structures has opposite first end and second end. The gate structures are all surrounded by the multi-connected channel layer, and the plane direction of the multi-connected channel layer is perpendicular to the above extension direction, so that the channels of the gate structures are connected to each other.

Abstract: A multilayer capacitive element and a design method of the same are provided. The capacitive element includes a substrate having a groove, a first aspect ratio modulation structure, and a plurality of conductive layers and a plurality of dielectric layers. The first aspect ratio modulation structure is located in the groove to define the groove as a first region and a first modulation region, wherein an aspect ratio of the first modulation region is different from that of the first region. The plurality of conductive layers and the plurality of dielectric layers are alternately stacked in the groove.

Abstract: Interconnect structures and methods and apparatuses for forming the same are disclosed. In an embodiment, a method includes supplying a process gas to a process chamber; igniting the process gas into a plasma in the process chamber; reducing a pressure of the process chamber to less than 0.3 mTorr; and after reducing the pressure of the process chamber, depositing a conductive layer on a substrate in the process chamber.

Abstract: An insulated gate field effect bipolar transistor (IGFEBT) includes a substrate, a deep well (DW) region, a first conductivity type well region, a gate structure, a source region and a drain region located on the first conductivity type well region at both sides of the gate structure, an anode, and a cathode. The source region includes a first doped region and a second doped region between the first doped region and the gate structure, and the drain region includes a third doped region and a fourth doped region formed on the third doped region. The substrate, the first and fourth doped regions are of the first conductivity type, and the DW region, the second and the third doped regions are of a second conductivity type. The anode is electrically coupled to the fourth doped region, and the cathode is electrically coupled to the first and second doped regions.

Abstract: A method of forming a semiconductor device includes forming an opening in a dielectric layer, and forming a barrier layer in the opening. A combined liner layer is formed over the barrier layer by first forming a first liner layer over the barrier layer, and forming a second liner layer over the first liner layer, such that the first liner layer and the second liner layer intermix. A conductive material layer is formed over the combined liner layer, and a thermal process is performed to reflow the conductive material layer.

Abstract: A MOSFET includes a substrate, a trench, a bottom oxide, a shield poly, two gate polys and an inter-poly oxide. The trench is formed on the substrate. The bottom oxide is formed on the trench. The shield poly is formed on the trench, and a part of the bottom oxide is separated by the shield poly. The two gate polys are formed on the bottom oxide. The inter-poly oxide is formed between the two gate polys. The shield poly is staggered from at least one of the two gate polys in a horizontal direction and a vertical direction. Therefore, the capacitance between a source electrode and a gate electrode is effectively reduced, and the delay time during switching is shorten and the energy loss is reduced at the same time.

Abstract: A wireless charger for charging an electric device includes an emitting device and a receiving device. The emitting device generates microwaves and the receiving device receives the microwaves from the emitting device and transforms the microwaves into electrical power. The receiving device includes a receiving antenna receiving the microwaves from the emitting device, an impedance matching circuit electrically connected to the receiving antenna, a voltage doubler rectifier filter circuit electrically connected to the impedance matching circuit, and a boost module electrically connected to the voltage doubler rectifier filter circuit. The receiving antenna has a small signal reflection and a small power loss in receiving the microwaves; the impedance matching circuit works with the voltage doubler rectifier filter circuit to provide a small power loss when the microwaves are transformed into the electrical power to directly or indirectly charge the electric device with a high voltage.

Abstract: A circuit structure including a first gate structure, a first multi-connected channel layer and a second transistor is provided. The first gate structure has a first extension direction, and the first gate structure has a first end and a second end opposite to each other. The first gate structure is fully surrounded by the first multi-connected channel layer, and a plane direction of the multi-connected channel layer is perpendicular to the first extension direction. The first gate structure and the first multi-connected channel layer form a first transistor. The second transistor is disposed in the first multi-connected channel layer. A second gate structure or a channel of the second transistor is electrical connected to the first multi-connected channel layer.