Patents by Inventor Chung-Hsien Chen

Chung-Hsien Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150311111
    Abstract: The disclosure relates to a fin structure of a semiconductor device. An exemplary fin structure for a semiconductor device comprises a lower portion protruding from a major surface of a substrate, wherein the lower portion comprises a first semiconductor material having a first lattice constant; an upper portion having an interface with the lower portion, wherein the upper portion comprises a second semiconductor material having a second lattice constant different from the first lattice constant; a first pair of notches lower than the interface and extending into opposite sides of the lower portion, wherein each first notch have a first width; and a second pair of notches extending into opposite sides of the interface, wherein each second notch have a second width greater than the first width.
    Type: Application
    Filed: July 7, 2015
    Publication date: October 29, 2015
    Inventors: Chung-Hsien Chen, Tung Ying Lee, Yu-Lien Huang, Chi-Wen Liu
  • Publication number: 20150236016
    Abstract: A method of fabricating a semiconductor device comprises forming a fin structure extending from a substrate, the fin structure comprising a first fin, a second fin, and a third fin between the first fin and the second fin. The method further comprises forming germanide over a first facet of the first fin, a second facet of the second fin, and a substantially planar surface of the third fin, wherein the first facet forms a first acute angle with a major surface of the substrate and is substantially mirror symmetric with the second facet, and wherein the substantially planar surface of the third fin forms a second acute angle smaller than the first acute angle with the major surface of the substrate.
    Type: Application
    Filed: April 30, 2015
    Publication date: August 20, 2015
    Inventors: Clement Hsingjen Wann, Ling-Yen Yeh, Chi-Wen Liu, Chi-Yuan Shih, Li-Chi Yu, Meng-Chun Chang, Ting-Chu Ko, Chung-Hsien Chen
  • Patent number: 9093531
    Abstract: The disclosure relates to a fin structure of a semiconductor device. An exemplary fin structure for a semiconductor device comprises a lower portion protruding from a major surface of a substrate, wherein the lower portion comprises a first semiconductor material having a first lattice constant; an upper portion having an interface with the lower portion, wherein the upper portion comprises a second semiconductor material having a second lattice constant different from the first lattice constant; a first pair of notches lower than the interface and extending into opposite sides of the lower portion, wherein each first notch have a first width; and a second pair of notches extending into opposite sides of the interface, wherein each second notch have a second width greater than the first width.
    Type: Grant
    Filed: June 11, 2013
    Date of Patent: July 28, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Hsien Chen, Tung Ying Lee, Yu-Lien Huang, Chi-Wen Liu
  • Patent number: 9087903
    Abstract: A device comprises insulation regions disposed in a substrate and a semiconductor fin extending above top surfaces of the insulation regions. The semiconductor fin comprises a first material. A semiconductor region comprising a second material extends from a first side of the semiconductor fin over a top of the fin to a second side of the fin. A strain buffer layer is disposed between, and contacts, the semiconductor fin and the semiconductor region. The strain buffer layer comprises an oxide, and a bottommost surface of the strain buffer layer is vertically spaced apart from the top surfaces of the insulation regions.
    Type: Grant
    Filed: July 2, 2014
    Date of Patent: July 21, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lien Huang, Tung Ying Lee, Chung-Hsien Chen, Chi-Wen Liu
  • Patent number: 9048317
    Abstract: The disclosure relates to a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface; a fin structure extending upward from the substrate major surface, wherein the fin structure comprises a first fin, a second fin, and a third fin between the first fin and second fin; a first germanide over the first fin, wherein a first bottom surface of the first germanide has a first acute angle to the major surface; a second germanide over the second fin on a side of the third fin opposite to first germanide substantially mirror-symmetrical to each other; and a third germanide over the third fin, wherein a third bottom surface of the third germanide has a third acute angle to the major surface less than the first acute angle.
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: June 2, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Clement Hsingjen Wann, Ling-Yen Yeh, Chi-Wen Liu, Chi-Yuan Shih, Li-Chi Yu, Meng-Chun Chang, Ting-Chu Ko, Chung-Hsien Chen
  • Patent number: 8963251
    Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a substrate, a fin structure disposed over the substrate in the gate region. The fin structure includes a first semiconductor material layer as a lower portion of the fin structure, a semiconductor oxide layer as a middle portion of the fin structure and a second semiconductor material layer as an upper portion of the fin structure. The semiconductor device also includes a dielectric feature disposed between two adjacent fin structures over the substrate. A top surface of the dielectric feature located, in a horizontal level, higher than the semiconductor oxide layer with a distance d. The semiconductor device also includes a high-k (HK)/metal gate (MG) stack disposed in the gate region, including wrapping over a portion of the fin structure.
    Type: Grant
    Filed: June 12, 2013
    Date of Patent: February 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung Ying Lee, Yu-Lien Huang, Chung-Hsien Chen, Chi-Wen Liu
  • Publication number: 20150035017
    Abstract: The disclosure relates to a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface; a fin structure extending upward from the substrate major surface, wherein the fin structure comprises a first fin, a second fin, and a third fin between the first fin and second fin; a first germanide over the first fin, wherein a first bottom surface of the first germanide has a first acute angle to the major surface; a second germanide over the second fin on a side of the third fin opposite to first germanide substantially mirror-symmetrical to each other; and a third germanide over the third fin, wherein a third bottom surface of the third germanide has a third acute angle to the major surface less than the first acute angle.
    Type: Application
    Filed: July 31, 2013
    Publication date: February 5, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Clement Hsingjen Wann, Ling-Yen Yeh, Chi-Wen Liu, Chi-Yuan Shih, Li-Chi Yu, Meng-Chun Chang, Ting-Chu Ko, Chung-Hsien Chen
  • Publication number: 20140367800
    Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a substrate, a fin structure disposed over the substrate in the gate region. The fin structure includes a first semiconductor material layer as a lower portion of the fin structure, a semiconductor oxide layer as a middle portion of the fin structure and a second semiconductor material layer as an upper portion of the fin structure. The semiconductor device also includes a dielectric feature disposed between two adjacent fin structures over the substrate. A top surface of the dielectric feature located, in a horizontal level, higher than the semiconductor oxide layer with a distance d. The semiconductor device also includes a high-k (HK)/metal gate (MG) stack disposed in the gate region, including wrapping over a portion of the fin structure.
    Type: Application
    Filed: June 12, 2013
    Publication date: December 18, 2014
    Inventors: Tung Ying Lee, Yu-Lien Huang, Chung-Hsien Chen, Chi-Wen Liu
  • Publication number: 20140361336
    Abstract: The disclosure relates to a fin structure of a semiconductor device. An exemplary fin structure for a semiconductor device comprises a lower portion protruding from a major surface of a substrate, wherein the lower portion comprises a first semiconductor material having a first lattice constant; an upper portion having an interface with the lower portion, wherein the upper portion comprises a second semiconductor material having a second lattice constant different from the first lattice constant; a first pair of notches lower than the interface and extending into opposite sides of the lower portion, wherein each first notch have a first width; and a second pair of notches extending into opposite sides of the interface, wherein each second notch have a second width greater than the first width.
    Type: Application
    Filed: June 11, 2013
    Publication date: December 11, 2014
    Inventors: Chung-Hsien Chen, Tung Ying Lee, Yu-Lien Huang, Chi-Wen Liu
  • Publication number: 20140332904
    Abstract: A FinFET structure layout includes a semiconductor substrate comprising a plurality of FinFET active areas, and a plurality of fins within each FinFET active area of the plurality of FinFET active areas. The FinFET structure layout further includes a gate having a gate length parallel to the semiconductor substrate and perpendicular to length of the plurality of fins within each FinFET active area of the plurality of FinFET active areas. The FinFET structure layout further includes a plurality of metal features connecting a source region or a drain region of a portion of the plurality of FinFET active areas to a plurality of contacts. The plurality of metal features includes a plurality of metal lines parallel to a FinFET channel direction and a plurality of metal lines parallel to a FinFET channel width direction.
    Type: Application
    Filed: July 28, 2014
    Publication date: November 13, 2014
    Inventors: Clement Hsingjen WANN, Chih-Sheng CHANG, Yi-Tang LIN, Ming-Feng SHIEH, Ting-Chu KO, Chung-Hsien CHEN
  • Publication number: 20140319462
    Abstract: A device comprises insulation regions disposed in a substrate and a semiconductor fin extending above top surfaces of the insulation regions. The semiconductor fin comprises a first material. A semiconductor region comprising a second material extends from a first side of the semiconductor fin over a top of the fin to a second side of the fin. A strain buffer layer is disposed between, and contacts, the semiconductor fin and the semiconductor region. The strain buffer layer comprises an oxide, and a bottommost surface of the strain buffer layer is vertically spaced apart from the top surfaces of the insulation regions.
    Type: Application
    Filed: July 2, 2014
    Publication date: October 30, 2014
    Inventors: Yu-Lien Huang, Tung Ying Lee, Chung-Hsien Chen, Chi-Wen Liu
  • Patent number: 8816444
    Abstract: A method for generating a layout for a device having FinFETs from a first layout for a device having planar transistors is disclosed. The planar layout is analyzed and corresponding FinFET structures are generated in a matching fashion. The resulting FinFET structures are then optimized. Dummy patterns and a new metal layer may be generated before the FinFET layout is verified and outputted.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: August 26, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Clement Hsingjen Wann, Chih-Sheng Chang, Yi-Tang Lin, Ming-Feng Shieh, Ting-Chu Ko, Chung-Hsien Chen
  • Patent number: 8796666
    Abstract: A device includes a substrate, insulation regions extending into the substrate, and a semiconductor fin higher than top surfaces of the insulation regions. The semiconductor fin has a first lattice constant. A semiconductor region includes sidewall portions on opposite sides of the semiconductor fin, and a top portion over the semiconductor fin. The semiconductor region has a second lattice constant different from the first lattice constant. A strain buffer layer is between and contacting the semiconductor fin and the semiconductor region. The strain buffer layer includes an oxide.
    Type: Grant
    Filed: April 26, 2013
    Date of Patent: August 5, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lien Huang, Tung Ying Lee, Chung-Hsien Chen, Chi-Wen Liu
  • Publication number: 20140147978
    Abstract: A semiconductor device comprises a substrate comprising a major surface; a p-type Field Effect Transistor (pFET) comprising: a P-gate stack over the major surface, a P-strained region in the substrate adjacent to one side of the P-gate stack, wherein a lattice constant of the P-strained region is different from a lattice constant of the substrate, wherein the P-strained region has a first top surface higher than the major surface; and a P-silicide region on the P-strained region; and an n-type Field Effect Transistor (nFET) comprising: an N-gate stack over the major surface, an N-strained region in the substrate adjacent to one side of the N-gate stack, wherein a lattice constant of the N-strained region is different from a lattice constant of the substrate, wherein the N-strained region has a second top surface lower than the major surface and a N-silicide region on the N-strained region.
    Type: Application
    Filed: January 28, 2014
    Publication date: May 29, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Hsien Chen, Ting-Chu Ko, Chih-Hao Chang, Chih-Sheng Chang, Shou-Zen Chang, Clement Hsingjen Wann
  • Publication number: 20140048888
    Abstract: A semiconductor device comprises a substrate comprising a major surface; a p-type Field Effect Transistor (pFET) comprising: a P-gate stack over the major surface, a P-strained region in the substrate adjacent to one side of the P-gate stack, wherein a lattice constant of the P-strained region is different from a lattice constant of the substrate, wherein the P-strained region has a first top surface higher than the major surface; and a P-silicide region on the P-strained region; and an n-type Field Effect Transistor (nFET) comprising: an N-gate stack over the major surface, an N-strained region in the substrate adjacent to one side of the N-gate stack, wherein a lattice constant of the N-strained region is different from a lattice constant of the substrate, wherein the N-strained region has a second top surface lower than the major surface and a N-silicide region on the N-strained region.
    Type: Application
    Filed: August 17, 2012
    Publication date: February 20, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Hsien Chen, Ting-Chu Ko, Chih-Hao Chang, Chih-Sheng Chang, Shou-Zen Chang, Clement Hsingjen Wann
  • Patent number: 8650799
    Abstract: A vehicle door opening warning system for a car includes a sensor for sensing the approaching of another car from behind when a person is opening the car door, a car door-opening control unit stops the car door from being opened when the sensor senses the approaching of the other car from behind, and a warning light and a buzzer are activated to give a visual warning signal and an audio warning signal when the car door is being opened.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: February 18, 2014
    Inventor: Chung-Hsien Chen
  • Publication number: 20130187388
    Abstract: A rear-mounted vehicular power generator system comprises a power generator, a blade wheel, a power generator shaft, an air guiding hood, wires, and fixed terminals. The vehicular wind power generator system is mounted in the rear of a vehicle. When the vehicle is running, air flows through the air guiding hood and drives the blade wheel to rotate. The power generator shaft, which is fixed to the blade wheel, rotates together with the blade wheel and drives the power generator to generate electric energy. The electric energy is stored in a battery for various applications. The present invention is characterized in that the vehicular wind power generator system is mounted in the rear of a vehicle, neither hindering vision of the driver nor impairing balance of the vehicle running at high speed.
    Type: Application
    Filed: January 19, 2012
    Publication date: July 25, 2013
    Inventor: Chung-Hsien Chen
  • Publication number: 20130091770
    Abstract: A vehicle door opening warning system includes a sensor for sensing the approaching of a car from behind when a person is opening the car door, a car door-opening control unit, which stops the car door from being opened when the sensor senses the approaching of a car from behind, and a warning light and a buzzer that are driven to give a visual warning signal and an audio warning signal when the car door is being opened.
    Type: Application
    Filed: October 14, 2011
    Publication date: April 18, 2013
    Inventor: Chung-Hsien CHEN
  • Publication number: 20120273899
    Abstract: A method for generating a layout for a device having FinFETs from a first layout for a device having planar transistors is disclosed. The planar layout is analyzed and corresponding FinFET structures are generated in a matching fashion. The resulting FinFET structures are then optimized. Dummy patterns and a new metal layer may be generated before the FinFET layout is verified and outputted.
    Type: Application
    Filed: March 9, 2012
    Publication date: November 1, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Clement Hsingjen WANN, Chih-Sheng CHANG, Yi-Tang LIN, Ming-Feng SHIEH, Ting-Chu KO, Chung-Hsien CHEN
  • Publication number: 20120181972
    Abstract: An automatic pollution-free energy generation device is provided for a transport and is mounted to a wind-receiving portion of the transport. The energy generation device includes an air accumulation device, an electricity accumulator, an electrical discharge device, a sensor, and an air outlet. The air accumulation device forms a temporal air storage chamber, which receives air to flow therethrough. The electricity accumulator is arranged inside the air accumulation device is operable to perform electrical discharge to the air inside the chamber or is controlled by a control device to discharge electricity, whereby fluid molecules of air carry electricity that is converted into electrical power to be collected by the electricity accumulator and converted by a current conversion controller into direct current to be stored in a battery or to be directly used by the transport.
    Type: Application
    Filed: January 17, 2011
    Publication date: July 19, 2012
    Inventor: CHUNG-HSIEN CHEN