Abstract: An apparatus and method employing principles of stereo vision for determining one or more orientation parameters and especially the second and third Euler angles ?, ? of an elongate object whose tip is contacting a surface at a contact point. The apparatus has a projector mounted on the elongate object for illuminating the surface with a probe radiation in a known pattern from a first point of view and a detector mounted on the elongate object for detecting a scattered portion of the probe radiation returning from the surface to the elongate object from a second point of view. The orientation parameters are determined from a difference between the projected and detected probe radiation such as the difference between the shape of the feature produced by the projected probe radiation and the shape of the feature detected by the detector.

Abstract: A method and apparatus for determining a pose of an elongate object and an absolute position of its tip while the tip is in contact with a plane surface having invariant features. The surface and features are illuminated with a probe radiation and a scattered portion, e.g., the back-scattered portion, of the probe radiation returning from the plane surface and the feature to the elongate object at an angle ? with respect to an axis of the object is detected. The pose is derived from a response of the scattered portion to the surface and the features and the absolute position of the tip on the surface is obtained from the pose and knowledge about the feature. The probe radiation can be directed from the object to the surface at an angle ? to the axis of the object in the form of a scan beam. The scan beam can be made to follow a scan pattern with the aid of a scanning arrangement with one or more arms and one or more uniaxial or biaxial scanners. Angle ? can also be varied, e.g.

Abstract: An apparatus and method for determining an inclination angle ? between an axis of an elongate object such as a cane, a pointer or a jotting implement such as a pen, pencil, stylus or the like and a normal to a plane surface at times when a tip of the elongate object is contacting that plane surface. The apparatus has an emitter mounted on the object for illuminating the plane surface with a probe radiation at an angle ? with respect to the axis of the object. The apparatus also has a detector mounted on the elongate object for detecting a radiation characteristic of a scattered portion of the probe radiation returning from the plane surface and a computing unit for deriving the inclination angle ? from the radiation characteristic. A scanning arrangement, such as a uniaxial or biaxial scanner, or a light guiding optic can be used for varying angle ?, and the probe radiation can be emitted in the form of a scan beam.

Abstract: An apparatus for handling and positioning wafers or other flat objects. The apparatus has an XY stage with an X-drive and a Y-drive, and a bed attached to the XY stage. A chuck (e.g. a vacuum chuck) is disposed on the bed and an effector is attached to the bed. The effector can rotate about an axis of rotation extending in the Z-direction. The effector can pick up objects and place the objects onto the chuck. The effector can also pick up objects from the chuck. Preferably, the chuck has a recessed region for accommodating the effector so that the effector can be inserted under a flat object on the chuck. The X-drive or Y-drive of the XY stage provides linear motion for the effector so that the effector can pull wafers from a cassette such as used in the semiconductor industry. Alternatively, the effector is attached to a linear actuator disposed on the bed.

Abstract: An optical system for simultaneously compensating a source drift of a light source and a detector drift of a light detector includes a test location, a first beam path from the light source to the test location, a second beam path from the test location to the light detector. First and second beam paths are arranged to intersect at a beam crossing. A calibration sample having a known reflectivity is positioned at the test location and illuminated by a probe beam generated by the light source. A known response beam of the calibration sample is used for calibrating the light source and the detector. A reference sample is placed at the beam crossing and illuminated by the probe beam. In response, the reference sample sends a reference beam along the second path length, which is used for compensating the source and detector drift.

Abstract: An optical fiber terminator or, more generally, an apparatus for manipulating light, comprises a body, an input interface for admitting a light beam into the body, a concave reflective surface and a convex toroidal reflective surface to manipulate the light within the body, and an output surface to out-couple the light beam. The device exhibits a low aberration over a wide wavelength range and is designed to preserve long-term optical properties even in adverse environmental conditions.

Abstract: A system for docking a floating test stage with integrated testing equipment to a predetermined position relative to a terrestrial base is described. The system includes a cylinder for docking the test stage to the predetermined position and a vibration isolation system for isolating the test stage when it is floating over the base. The system also includes a handling unit indexed to the predetermined position for loading and unloading samples on the test stage.

Abstract: An apparatus for handling and positioning wafers or other flat objects. The apparatus has an XY stage with an X-drive and a Y-drive, and a bed attached to the XY stage. A chuck (e.g. a vacuum chuck) is disposed on the bed and an effector is attached to the bed. The effector can rotate about an axis of rotation extending in the Z-direction. The effector can pick up objects and place the objects onto the chuck. The effector can also pick up objects from the chuck. Preferably, the chuck has a recessed region for accommodating the effector so that the effector can be inserted under a flat object on the chuck. The X-drive or Y-drive of the XY stage provides linear motion for the effector so that the effector can pull wafers from a cassette such as used in the semiconductor industry. Alternatively, the effector is attached to a linear actuator disposed on the bed.

Abstract: An apparatus uses reflectance spectrophotometry to characterize a sample having any number of thin films. The apparatus uses two toroidal mirrors in an optical relay to direct light reflected by the sample to a spectroscopic device. A computer then analyzes the reflected spectrum to characterize the optical properties of the sample. The optical relay allows a range of angles of reflection from the sample, and has no chromatic aberration. The optical relay is also arranged so that the non-chromatic aberration is minimized. For polarization-based measurements polarizing elements can be used in the apparatus and the spectroscopic device can be a spectroscopic ellipsometer. The sample is mounted on a movable stage so that different areas of the sample may be characterized. Furthermore, a deflector and a viewer are used to allow the operator of the apparatus to view the region of the sample under study.

Abstract: An apparatus for rotationally positioning a disk on a stationary stage at a constant and repeatable distance and angle for a device to perform an operation on several positions of the disk surface is disclosed. The disk apparatus has a manipulating member that operates from a central portion of the stationary stage. The member raises the disk, rotates the disk to a new position and sets the disk back down on a planar portion of the same stationary stage. The apparatus uses vacuum to secure the disk to the stage and to the member during manipulation. The member is raised by a spring and lowered by vacuum. The apparatus is easily incorporated into an optical system for performing reflectance and transmitance on both side of the disk simultaneously allowing for the analyses of the disk layers for composition and consistency.

Abstract: An apparatus uses reflectance spectrophotometry to characterize a sample having any number of thin films. The apparatus uses two toroidal mirrors in an optical relay to direct light reflected by the sample to a spectrophotometer. A computer then analyzes the reflected spectrum to characterize the optical properties of the sample. The optical relay allows a range of angles of reflection from the sample, and has no chromatic aberration. The optical relay is also arranged so that the non-chromatic aberration is minimized. The sample is mounted on a movable stage so that different areas of the sample may be characterized. Furthermore, a deflector and a viewer are used to allow the operator of the apparatus to view the region of the sample under study.

Abstract: The invention comprises an apparatus for characterizing a thin film using the reflected spectrum of the film. The apparatus uses two toroidal mirrors in an optical relay to direct light onto the thin film and to direct reflected light from the film to a spectrophotometer. A computer then analyzes the reflected spectrum to characterize the optical properties of the thin film. The optical relay allows for a range of angles of incidence upon the sample, and has no chromatic aberration.