Abstract: The invention relates to a compressed air supply installation (10, 10A, 10B, 10C) for operating a pneumatic installation (90), especially an air suspension installation of a vehicle, comprising the following: an air supply unit (0) and an air compression unit (21) for supplying a compressed as supply unit (1) with compressed air, a pneumatic connection, especially a bleeding line (30), comprising a bleeding valve system in the form of a controllable solenoid valve system (40, 40A, 40B, 40C) having a magnetic part (43, 43A, 43B, 43C) and a pneumatic part (44, 44A, 44B, 44C), and further comprising a bleeding port (3) for bleeding air, and the compressed air supply installation further comprising a pneumatic connection, especially a compressed air supply line (20) having an air drier (22) and a compressed air port (2) for supplying the pneumatic installation (90) with compressed air.

Abstract: Air suspension installation (110) for a vehicle (100) comprising a pneumatic installation (200) which is adapted such that it can be operated in conjunction with a compressed air supply installation (2) and comprises: a pneumatic line (3) having a port connecting it to the compressed air supply installation (2), a plurality of air bellows (43, 45, 47, 49), each serving as a pressure chamber for an air spring, one air bellows being connected to the pneumatic line (3) via a controllable directional valve in the form of a solenoid valve, and the air bellows being fillable or bleedable depending on a switching state of the controllable directional valve, a first directional valve (11, 18) and a second directional valve (13,19) forming a controllable solenoid valve system (120, 130) which has a pneumatic part that can be actuated by a magnetic part, the first directional valve (11, 18) forming a primary valve and the second directional valve (13, 19) forming a secondary valve of the solenoid valve system (120, 130

Abstract: A two-stage solenoid valve for an electropneumatic valve control unit, e.g., a pilot control unit of a pressure modulator, includes a solenoid system to which a first and second current intensity can be applied as well as a solenoid valve device with a primary side connectable to a first compressed-air supply and a secondary side connectable to a second compressed-air supply. A primary valve encompassing an adjustable primary armature biased by a primary armature spring is provided on the primary side, and a secondary valve encompassing an adjustable secondary armature biased by a secondary armature spring is provided on the secondary side. The solenoid valve device can be a valve cartridge insertable from one side. Diameters of a front (in relation to insertion direction) region and a central region of the valve cartridge are smaller than or equal to the diameter of a rear region of the valve cartridge.

Abstract: A device and method for processing wafer-shaped articles comprises a process chamber and a rotary chuck located within the process chamber. The rotary chuck is adapted to be driven without physical contact through a magnetic bearing. The rotary chuck comprises a series of gripping pins adapted to hold a wafer shaped article in a position depending downwardly from the rotary chuck. The rotary chuck further comprises a plate that rotates together with the rotary chuck. The plate is positioned above an area occupied by the wafer-shaped article, and shields upper surfaces of the process chamber from liquids flung off of a wafer-shaped article during use of the rotary chuck.

Abstract: A valve control unit, particularly for a pressure modulator of a commercial vehicle includes a valve control housing, solenoid valves, which are provided with solenoids and internal valve pieces inserted into the solenoids, and a pneumatic interface. The solenoids are accommodated inside the valve control housing. Pressure sensors for measuring pneumatic pressures are accommodated in or on the valve control unit, preferably on the top surface. Valve bores, into which the internal valve pieces are inserted, extend within the valve control housing. Air ducts extend between the pneumatic interface, the valve bores, and the pressure sensors, inside the valve control housing. The solenoids and pressure sensors are contacted with an electrical interface. The valve control housing can be a single piece.

Abstract: Mixtures containing concentrated sulfuric acid used for stripping photoresist from semiconductor wafer, such as SOM and SPM mixtures, are more quickly removed from a wafer surface using another liquid also containing high concentration of sulfuric acid, with the second liquid furthermore containing controlled small amounts of fluoride ion. The second liquid renders the wafer surface hydrophobic, which permits easy removal of the sulfuric acid therefrom by spinning and/or rinsing.

Abstract: A spin chuck for holding semiconductor wafers includes one or more damping mechanisms to limit the force with which chuck pins impact the wafer edge following wafer shift. The damping mechanism may be a linear or rotary dashpot. The dashpot or dashpots are mounted on a surface of the chuck body and include a control arm that contacts a common gear ring that in turn drives the chuck pins during radially inward and outward movement.

Abstract: A spin chuck in an apparatus for single wafer wet processing has structures at its periphery that, in combination with a supported wafer, form a series of annular nozzles that direct flowing gas from a chuck-facing surface of the wafer, around the edge of the wafer, and exhaust the gas away from the non-chuck-facing surface of the wafer, thereby preventing treatment fluid applied to the non-chuck-facing surface from contacting the edge region of the wafer. Retaining pins with enlarged heads engage the wafer edge and prevent it from being displaced upwardly when a high flow rate of gas is utilized.

Abstract: A valve control unit including three valve units for two brake channels of an electropneumatic brake system is provided. Each valve unit is embodied as a valve modulator device for a braking pressure control circuit including an air inlet valve with a primary solenoid and a bleed valve with a secondary solenoid. Each modulator device armature includes a common solenoid guide arrangement controlled by the magnetic flux of a common magnetic coil. Independent operation of the armatures is achieved whereby flux through the secondary solenoid is weakened by a shunt in the flux circuit which causes a switching delay for the secondary solenoid relative to the primary solenoid. The magnetic resistance of a non-magnetic disc effects switch-off acceleration in the flux circuit with energized secondary solenoid, weakens the field and causes the secondary solenoid to revert to a spring-loaded base state at a higher flux than the primary solenoid.

Abstract: A device for wet treating a peripheral area of a wafer-shaped article includes holding elements for holding and rotating the wafer-shaped article at its edge, a first and a second liquid treatment units for supplying liquid towards the peripheral area. The holding elements include rollers for driving the wafer-shaped article at its edge. The first liquid treatment unit includes a first liquid carrier for providing a first liquid to wet a first section of the peripheral area, a first liquid supply nozzle for supplying liquid to the first liquid carrier, and a first liquid discharging channel for removing liquid from the first liquid carrier.

Abstract: Disclosed is an apparatus for wet treatment of a disc-like article, which comprises: a spin chuck for holding and rotating the disc-like article, and an inner edge nozzle dispensing treatment liquid directed towards a first peripheral region of the first surface of the disc-like article, wherein the first surface is facing the spin chuck and the first peripheral region is defined as being a region of the first surface with an inner radius (ri), which is greater than 1 cm less than the disc-like article's radius (ra), wherein the inner edge nozzle is positioned in a stationary manner between the disc-like article (when placed on the spin chuck) and the spin chuck, wherein the inner edge nozzle is feed through a central pipe, which is disposed in a stationary manner and penetrates centrally through the spin chuck, for supplying a treatment liquid against a first surface of the disc-like article.

Abstract: The invention relates to a two-stage solenoid valve for an electropneumatic valve control unit, particularly a pilot control unit of a pressure modulator. Said solenoid valve at least comprises a solenoid system (6) to which a first and second current intensity can be applied as well as a solenoid valve device (8) that is accommodated in the solenoid system (6) and is provided with a primary side (8a) to be connected to a first compressed-air supply and a secondary side (8b) to be connected to a second compressed-air supply. A primary valve (10) encompassing an adjustable primary armature (10a) that is biased by means of a primary armature spring (10c) is provided on the primary side, while a secondary valve (11) encompassing an adjustable secondary armature (11a) which is biased by means of a secondary armature spring (11c) is provided on the secondary side. The solenoid valve device (8) is embodied as a valve cartridge which is to be inserted from one side.

Abstract: The invention relates to a valve control unit, particularly for a pressure modulator of a commercial vehicle. Said valve control unit (1) comprises a valve control housing (2), solenoid valves (4, 5, 6) which are provided with solenoids (16) and internal valve pieces (4a, 5a, 6a) inserted into the solenoids (16), and a pneumatic interface (14). The solenoids (16) are accommodated inside the valve control housing (2). Pressure sensors (10) for measuring pneumatic pressures are accommodated in or on the valve control unit, preferably on the top surface. Valve bores (3), into which the internal valve pieces (4a, 5a, 6a) are inserted, extend within the valve control housing (2). Air ducts (12) extend between the pneumatic interface (14), the valve bores (3), and the pressure sensors (10), inside the valve control housing (2). The solenoids (16) and pressure sensors (10) are contacted with an electrical interface (8). Advantageously, the valve control housing (2) is embodied as a single piece.

Abstract: Device for carrying lift flaps arranged on the wings of an aircraft and a wing. The device includes a carrier with a U-shaped profile, a covering plate positionable over an open side of the U-shaped profile, and a fairing housing formed in an aerodynamic manner and at least in part by the carrier. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.

Abstract: A method for manufacturing magnet armatures which are used mainly in brake-pressure modulators of electronically controlled brake systems and which are provided on their entire surface with a plastic coating, for reasons of dimensional stability and sliding properties. Magnet armatures of this type are constructed as cylindrical members and are usually provided in the region of one of the two end faces with an elastomeric sealing element, which according to the prior art is bonded to the magnet armature by vulcanization, an adhesive elastomer-to-metal bond being formed between the magnet armature and the elastomeric sealing element during vulcanization. Since bonds of this type are not possible for a completely coated magnet armature, the elastomer for the elastomeric sealing element is, according to the invention, vulcanized onto the armature without using an adhesion promoter.

Abstract: The invention relates to a valve control unit, made up of three valve units, preferably as a pilot unit (1) for two brake channels of an electropneumatic brake system, whereby each valve unit is embodied as a valve modulator device (7) for a braking pressure control circuit made up of an air inlet valve (22) with a primary solenoid (22a) and a bleed valve (23) with a secondary solenoid (23a), whereby each armature is provided with a common solenoid guide arrangement (10), controlled by the magnetic flux of a common magnetic coil (11).

Abstract: A control device for pressurized fluids includes a valve mechanism actuated by a first device incorporating electromagnets in a first housing, and a second device incorporating a circuit board for controlling the valve mechanism in a second housing. Pins on the first device and sockets on the second device automatically form an electrical plug-type connection when the housings are joined. Each socket is received in a first portion of a through-hole provided in a mount supported on the circuit board such that it extends into a corresponding through-hole in the circuit board. A second portion of each through-hole in each mount has a funnel-shaped guide opening toward the pins. A pressure sensor supported by the circuit board forms a plug-type engagement with a port extending from the valve mechanism when the housings are joined. Contacts extend from the sensor into holes in the circuit board.

Abstract: A pre-engagement unit for a braking pressure modulator for a pressure regulating circuit includes a first pneumatic inlet, a second pneumatic inlet, a first pneumatic output terminal, and a second pneumatic output terminal. The unit includes an electrically actuated valve system having a plurality of solenoid valves and a plurality of electrical terminals connected to output terminals of an electronic control unit. An electric braking command signal transmitter delivers a driver initiated electric brake value setting to an input of the electronic control unit. Under normal conditions, a supply pressure and a redundancy pressure are delivered at the first pneumatic output terminal to be converted by an air quantity augmenting relay valve to a braking pressure. In case of failure of the electronic braking system, the redundancy pressure is delivered at the first pneumatic output terminal to be converted by the air quantity augmenting relay valve to the braking pressure.

Abstract: A pre-engagement unit for a braking pressure modulator for a pressure regulating circuit of an electronic braking system includes an electrically actuated valve system with three substantially identical 2/2-way solenoid valves. First and second terminals of the 2/2-way solenoid valves are selectively connected to the pneumatic inlets and output terminals of the pre-engagement unit, and to each other so that the first 2/2-way valve serves as an air admission valve for supply pressure, the second 2/2-way solenoid valve serves as an air admission/exhaust valve for redundancy pressure, and the third 2/2-way solenoid valve serves as an exhaust valve. Thereby, the pressure in the pressure regulating circuit can be increased, decreased, or maintained. Desirably, the first, second, and third 2/2-way solenoid valves are connected in parallel to each other.

Abstract: A method for manufacturing magnet armatures which are used mainly in brake-pressure modulators of electronically controlled brake systems and which are provided on their entire surface with a plastic coating, for reasons of dimensional stability and sliding properties. Magnet armatures of this type are constructed as cylindrical members and are usually provided in the region of one of the two end faces with an elastomeric sealing element, which according to the prior art is bonded to the magnet armature by vulcanization, an adhesive elastomer-to-metal bond being formed between the magnet armature and the elastomeric sealing element during vulcanization. Since bonds of this type are not possible for a completely coated magnet armature, the elastomer for the elastomeric sealing element is, according to the invention, vulcanized onto the armature without using an adhesion promoter.