Patents by Inventor Erik M. Dahlstrom

Erik M. Dahlstrom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9034712
    Abstract: A lateral diffused metal-oxide-semiconductor field effect transistor (LDMOS transistor) employs a stress layer that enhances carrier mobility (i.e., on-current) while also maintaining a high breakdown voltage for the device. High breakdown voltage is maintained, because an increase in doping concentration of the drift region is minimized. A well region and a drift region are formed in the substrate adjacent to one another. A first shallow trench isolation (STI) region is formed on and adjacent to the well region, and a second STI region is formed on and adjacent to the drift region. A stress layer is deposited over the LDMOS transistor and in the second STI region, which propagates compressive or tensile stress into the drift region, depending on the polarity of the stress layer. A portion of the stress layer can be removed over the gate to change the polarity of stress in the inversion region below the gate.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: May 19, 2015
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Robert J. Gauthier, Jr., Ephrem G. Gebreselasie, Richard A. Phelps, Jed H. Rankin, Yun Shi
  • Patent number: 8946799
    Abstract: Device structures, fabrication methods, operating methods, and design structures for a silicon controlled rectifier. The method includes applying a mechanical stress to a region of a silicon controlled rectifier (SCR) at a level sufficient to modulate a trigger current of the SCR. The device and design structures include a SCR with an anode, a cathode, a first region, and a second region of opposite conductivity type to the first region. The first and second regions of the SCR are disposed in a current-carrying path between the anode and cathode of the SCR. A layer is positioned on a top surface of a semiconductor substrate relative to the first region and configured to cause a mechanical stress in the first region of the SCR at a level sufficient to modulate a trigger current of the SCR.
    Type: Grant
    Filed: August 1, 2013
    Date of Patent: February 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Robert J. Gauthier, Jr., Ephrem G. Gebreselasie, Richard A. Phelps, Yun Shi, Andreas D. Stricker
  • Patent number: 8710500
    Abstract: Methods for fabricating bipolar junction transistors with self-aligned emitter and extrinsic base, bipolar junction transistors made by the methods, and design structures for a BiCMOS integrated circuit. The bipolar junction transistor is fabricated using a sacrificial emitter pedestal that provides a sacrificial mandrel promoting self-alignment between the emitter and the extrinsic base. The sacrificial emitter pedestal is subsequently removed to open an emitter window extending to the intrinsic base. An emitter is formed in the emitter window that lands on the intrinsic base.
    Type: Grant
    Filed: January 31, 2013
    Date of Patent: April 29, 2014
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Erik M. Dahlstrom, Peter B. Gray, David L. Harame, Qizhi Liu
  • Publication number: 20140030861
    Abstract: A lateral diffused metal-oxide-semiconductor field effect transistor (LDMOS transistor) employs a stress layer that enhances carrier mobility (i.e., on-current) while also maintaining a high breakdown voltage for the device. High breakdown voltage is maintained, because an increase in doping concentration of the drift region is minimized A well region and a drift region are formed in the substrate adjacent to one another. A first shallow trench isolation (STI) region is formed on and adjacent to the well region, and a second STI region is formed on and adjacent to the drift region. A stress layer is deposited over the LDMOS transistor and in the second STI region, which propagates compressive or tensile stress into the drift region, depending on the polarity of the stress layer. A portion of the stress layer can be removed over the gate to change the polarity of stress in the inversion region below the gate.
    Type: Application
    Filed: October 2, 2013
    Publication date: January 30, 2014
    Applicant: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Robert J. Gauthier, JR., Ephrem G. Gebreselasie, Richard A. Phelps, Jed H. Rankin, Yun Shi
  • Publication number: 20130313607
    Abstract: Device structures, fabrication methods, operating methods, and design structures for a silicon controlled rectifier. The method includes applying a mechanical stress to a region of a silicon controlled rectifier (SCR) at a level sufficient to modulate a trigger current of the SCR. The device and design structures include a SCR with an anode, a cathode, a first region, and a second region of opposite conductivity type to the first region. The first and second regions of the SCR are disposed in a current-carrying path between the anode and cathode of the SCR. A layer is positioned on a top surface of a semiconductor substrate relative to the first region and configured to cause a mechanical stress in the first region of the SCR at a level sufficient to modulate a trigger current of the SCR.
    Type: Application
    Filed: August 1, 2013
    Publication date: November 28, 2013
    Applicant: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Robert J. Gauthier, JR., Ephrem G. Gebreselasie, Richard A. Phelps, Yun Shi, Andreas D. Stricker
  • Patent number: 8586423
    Abstract: Device structures, fabrication methods, operating methods, and design structures for a silicon controlled rectifier. The method includes applying a mechanical stress to a region of a silicon controlled rectifier (SCR) at a level sufficient to modulate a trigger current of the SCR. The device and design structures include a SCR with an anode, a cathode, a first region, and a second region of opposite conductivity type to the first region. The first and second regions of the SCR are disposed in a current-carrying path between the anode and cathode of the SCR. A layer is positioned on a top surface of a semiconductor substrate relative to the first region and configured to cause a mechanical stress in the first region of the SCR at a level sufficient to modulate a trigger current of the SCR.
    Type: Grant
    Filed: June 24, 2011
    Date of Patent: November 19, 2013
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Robert J. Gauthier, Jr., Ephrem G. Gebreselasie, Richard A. Phelps, Yun Shi, Andreas Stricker
  • Patent number: 8513706
    Abstract: Heterojunction bipolar transistors with reduced base resistance, as well as fabrication methods for heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The heterojunction bipolar transistor includes a conductive layer between the intrinsic base and the extrinsic base. The conductive layer is comprised of a conductive material, such as a silicide, having a lower resistivity than the materials forming the intrinsic base and the extrinsic base.
    Type: Grant
    Filed: November 8, 2012
    Date of Patent: August 20, 2013
    Assignee: International Business Machines Corporation
    Inventors: Erik M. Dahlstrom, Peter B. Gray, Qizhi Liu
  • Patent number: 8492237
    Abstract: Methods for fabricating bipolar junction transistors with self-aligned emitter and extrinsic base, bipolar junction transistors made by the methods, and design structures for a BiCMOS integrated circuit. The bipolar junction transistor is fabricated using a sacrificial emitter pedestal that provides a sacrificial mandrel promoting self-alignment between the emitter and the extrinsic base. The sacrificial emitter pedestal is subsequently removed to open an emitter window extending to the intrinsic base. An emitter is formed in the emitter window that lands on the intrinsic base.
    Type: Grant
    Filed: March 8, 2011
    Date of Patent: July 23, 2013
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Erik M. Dahlstrom, Peter B. Gray, David L. Harame, Qizhi Liu
  • Patent number: 8389372
    Abstract: Heterojunction bipolar transistors with reduced base resistance, as well as fabrication methods for heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The heterojunction bipolar transistor includes a conductive layer between the intrinsic base and the extrinsic base. The conductive layer is comprised of a conductive material, such as a silicide, having a lower resistivity than the materials forming the intrinsic base and the extrinsic base.
    Type: Grant
    Filed: November 22, 2010
    Date of Patent: March 5, 2013
    Assignee: International Business Machines Corporation
    Inventors: Erik M. Dahlstrom, Peter B. Gray, Qizhi Liu
  • Publication number: 20120326766
    Abstract: Device structures, fabrication methods, operating methods, and design structures for a silicon controlled rectifier. The method includes applying a mechanical stress to a region of a silicon controlled rectifier (SCR) at a level sufficient to modulate a trigger current of the SCR. The device and design structures include a SCR with an anode, a cathode, a first region, and a second region of opposite conductivity type to the first region. The first and second regions of the SCR are disposed in a current-carrying path between the anode and cathode of the SCR. A layer is positioned on a top surface of a semiconductor substrate relative to the first region and configured to cause a mechanical stress in the first region of the SCR at a level sufficient to modulate a trigger current of the SCR.
    Type: Application
    Filed: June 24, 2011
    Publication date: December 27, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Robert J. Gauthier, JR., Ephrem G. Gebreselasie, Richard A. Phelps, Yun Shi, Andreas D. Stricker
  • Patent number: 8338863
    Abstract: Vertical heterojunction bipolar transistors with reduced base-collector junction capacitance, as well as fabrication methods for vertical heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The vertical heterojunction bipolar transistor includes a barrier layer between the intrinsic base and the extrinsic base that blocks or reduces diffusion of a dopant from the extrinsic base to the intrinsic base. The barrier layer has at least one opening that permits direct contact between the intrinsic base and a portion of the extrinsic base disposed in the opening.
    Type: Grant
    Filed: May 9, 2012
    Date of Patent: December 25, 2012
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Qizhi Liu
  • Publication number: 20120228611
    Abstract: Methods for fabricating bipolar junction transistors with self-aligned emitter and extrinsic base, bipolar junction transistors made by the methods, and design structures for a BiCMOS integrated circuit. The bipolar junction transistor is fabricated using a sacrificial emitter pedestal that provides a sacrificial mandrel promoting self-alignment between the emitter and the extrinsic base. The sacrificial emitter pedestal is subsequently removed to open an emitter window extending to the intrinsic base. An emitter is formed in the emitter window that lands on the intrinsic base.
    Type: Application
    Filed: March 8, 2011
    Publication date: September 13, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Erik M. Dahlstrom, Peter B. Gray, David L. Harame, Qizhi Liu
  • Publication number: 20120221987
    Abstract: Vertical heterojunction bipolar transistors with reduced base-collector junction capacitance, as well as fabrication methods for vertical heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The vertical heterojunction bipolar transistor includes a barrier layer between the intrinsic base and the extrinsic base that blocks or reduces diffusion of a dopant from the extrinsic base to the intrinsic base. The barrier layer has at least one opening that permits direct contact between the intrinsic base and a portion of the extrinsic base disposed in the opening.
    Type: Application
    Filed: May 9, 2012
    Publication date: August 30, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Qizhi Liu
  • Patent number: 8232156
    Abstract: Vertical heterojunction bipolar transistors with reduced base-collector junction capacitance, as well as fabrication methods for vertical heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The vertical heterojunction bipolar transistor includes a barrier layer between the intrinsic base and the extrinsic base that blocks or reduces diffusion of a dopant from the extrinsic base to the intrinsic base. The barrier layer has at least one opening that permits direct contact between the intrinsic base and a portion of the extrinsic base disposed in the opening.
    Type: Grant
    Filed: November 4, 2010
    Date of Patent: July 31, 2012
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Qizhi Liu
  • Publication number: 20120126292
    Abstract: Heterojunction bipolar transistors with reduced base resistance, as well as fabrication methods for heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The heterojunction bipolar transistor includes a conductive layer between the intrinsic base and the extrinsic base. The conductive layer is comprised of a conductive material, such as a silicide, having a lower resistivity than the materials forming the intrinsic base and the extrinsic base.
    Type: Application
    Filed: November 22, 2010
    Publication date: May 24, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Erik M. Dahlstrom, Peter B. Gray, Qizhi Liu
  • Publication number: 20120112244
    Abstract: Vertical heterojunction bipolar transistors with reduced base-collector junction capacitance, as well as fabrication methods for vertical heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The vertical heterojunction bipolar transistor includes a barrier layer between the intrinsic base and the extrinsic base that blocks or reduces diffusion of a dopant from the extrinsic base to the intrinsic base. The barrier layer has at least one opening that permits direct contact between the intrinsic base and a portion of the extrinsic base disposed in the opening.
    Type: Application
    Filed: November 4, 2010
    Publication date: May 10, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Qizhi Liu
  • Patent number: 8163612
    Abstract: Methods and heterostructure barrier varactor (HBV) diodes optimized for application with frequency multipliers at providing outputs at submillimeter wave frequencies and above. The HBV diodes include a silicon-containing substrate, an electrode over the silicon-containing substrate, and one or more heterojunction quantum wells of alternating layers of Si and SiGe of one or more electrodes of the diode. Each SiGe quantum well preferably has a floating SiGe layer between adjacent SiGe gradients followed by adjacent Si layers, such that, a single homogeneous structure is provided characterized by having no distinct separations. The plurality of Si/SiGe heterojunction quantum wells may be symmetric or asymmetric.
    Type: Grant
    Filed: December 17, 2009
    Date of Patent: April 24, 2012
    Assignee: International Business Machines Corporation
    Inventors: Erik M Dahlstrom, Alvin J Joseph, Robert M Rassel, David C Sheridan
  • Publication number: 20100093148
    Abstract: Methods and heterostructure barrier varactor (HBV) diodes optimized for application with frequency multipliers at providing outputs at submillimeter wave frequencies and above. The HBV diodes include a silicon-containing substrate, an electrode over the silicon-containing substrate, and one or more heterojunction quantum wells of alternating layers of Si and SiGe of one or more electrodes of the diode. Each SiGe quantum well preferably has a floating SiGe layer between adjacent SiGe gradients followed by adjacent Si layers, such that, a single homogeneous structure is provided characterized by having no distinct separations. The plurality of Si/SiGe heterojunction quantum wells may be symmetric or asymmetric.
    Type: Application
    Filed: December 17, 2009
    Publication date: April 15, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Erik M. Dahlstrom, Alvin J. Joseph, Robert M. Rassel, David C. Sheridan
  • Patent number: 7696604
    Abstract: Methods and heterostructure barrier varactor (HBV) diodes optimized for application with frequency multipliers at providing outputs at submillimeter wave frequencies and above. The HBV diodes include a silicon-containing substrate, an electrode over the silicon-containing substrate, and one or more heterojunction quantum wells of alternating layers of Si and SiGe of one or more electrodes of the diode. Each SiGe quantum well preferably has a floating SiGe layer between adjacent SiGe gradients followed by adjacent Si layers, such that, a single homogeneous structure is provided characterized by having no distinct separations. The plurality of Si/SiGe heterojunction quantum wells may be symmetric or asymmetric.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: April 13, 2010
    Assignee: International Business Machines Corporation
    Inventors: Erik M. Dahlstrom, Alvin J. Joseph, Robert M. Rassel, David C. Sheridan
  • Publication number: 20090101887
    Abstract: Methods and heterostructure barrier varactor (HBV) diodes optimized for application with frequency multipliers at providing outputs at submillimeter wave frequencies and above. The HBV diodes include a silicon-containing substrate, an electrode over the silicon-containing substrate, and one or more heterojunction quantum wells of alternating layers of Si and SiGe of one or more electrodes of the diode. Each SiGe quantum well preferably has a floating SiGe layer between adjacent SiGe gradients followed by adjacent Si layers, such that, a single homogeneous structure is provided characterized by having no distinct separations. The plurality of Si/SiGe heterojunction quantum wells may be symmetric or asymmetric.
    Type: Application
    Filed: October 23, 2007
    Publication date: April 23, 2009
    Inventors: Erik M. Dahlstrom, Alvin J. Joseph, Robert M. Rassel, David C. Sheridan