Patents by Inventor Fu-Ting Sung

Fu-Ting Sung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11581484
    Abstract: A semiconductor structure includes an Nth metal layer, a diffusion barrier layer over the Nth metal layer, a first deposition of bottom electrode material over the diffusion barrier layer, a second deposition of bottom electrode material over the first deposition of bottom electrode material, a magnetic tunneling junction (MTJ) layer over the second deposition of bottom electrode material, a top electrode over the MTJ layer; and an (N+1)th metal layer over the top electrode; wherein the diffusion barrier layer and the first deposition of bottom electrode material are laterally in contact with a dielectric layer, the first deposition of bottom electrode material spacing the diffusion barrier layer and the second deposition of bottom electrode material apart, and N is an integer greater than or equal to 1. An associated electrode structure and method are also disclosed.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chung-Yen Chou, Fu-Ting Sung, Yao-Wen Chang, Shih-Chang Liu
  • Publication number: 20220336741
    Abstract: A memory device, a memory integrated circuit and a manufacturing method of the memory device are provided. The memory device includes a composite bottom electrode, a top electrode and a resistance variable layer disposed between the composite bottom electrode and the top electrode. The composite bottom electrode includes a first bottom electrode and a second bottom electrode disposed over the first bottom electrode. A sidewall of the second bottom electrode is laterally recessed from sidewalls of the first bottom electrode layer and the resistance variable layer.
    Type: Application
    Filed: July 4, 2022
    Publication date: October 20, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Fu-Ting Sung
  • Publication number: 20220278170
    Abstract: Some embodiments relate to a method for forming a memory device. The method includes forming a lower dielectric layer over a conductive wire. A stack of memory layers is formed within the lower dielectric layer and over the conductive wire. The stack of memory layers comprises a top electrode, a bottom electrode, and a data storage layer between the top electrode and the bottom electrode. A removal process is performed on the stack of memory layers to define a programmable metallization cell that comprises the top electrode, the bottom electrode, and the data storage layer. The programmable metallization cell comprises a central region and a peripheral region that extends upwardly from the central region. A top surface of the programmable metallization cell and a top surface of the lower dielectric layer are coplanar.
    Type: Application
    Filed: May 19, 2022
    Publication date: September 1, 2022
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Yuan-Tai Tseng
  • Patent number: 11417839
    Abstract: A memory device, a memory integrated circuit and a manufacturing method of the memory device are provided. The memory device includes a composite bottom electrode, a top electrode and a resistance variable layer disposed between the composite bottom electrode and the top electrode. The composite bottom electrode includes a first bottom electrode and a second bottom electrode disposed over the first bottom electrode. A sidewall of the second bottom electrode is laterally recessed from sidewalls of the first bottom electrode layer and the resistance variable layer.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: August 16, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Fu-Ting Sung
  • Publication number: 20220216106
    Abstract: A method for fabricating an integrated circuit device is provided. The method includes forming an interconnect layer over a substrate, wherein the interconnect layer has a first interlayer dielectric layer, a first conductive feature in a first portion of the first interlayer dielectric layer, and a second conductive feature in a second portion of the first interlayer dielectric layer; depositing a dielectric layer over the interconnect layer; removing a first portion of the dielectric layer over the first conductive feature and the first portion of the first interlayer dielectric layer, and remaining a second portion of the dielectric layer over the second conductive feature and the second portion of the first interlayer dielectric layer; and forming a memory structure over the first conductive feature.
    Type: Application
    Filed: January 5, 2021
    Publication date: July 7, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsia-Wei CHEN, Fu-Ting SUNG, Yu-Wen LIAO, Wen-Ting CHU, Fa-Shen JIANG, Tzu-Hsuan YEH
  • Patent number: 11362265
    Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer, a bottom electrode over the Nth metal layer, a magnetic tunneling junction (MTJ) over the bottom electrode, a top electrode over the MTJ, and an (N+M)th metal layer over the Nth metal layer. N and M are positive integers. The (N+M)th metal layer surrounds a portion of a sidewall of the top electrode. A manufacturing method of forming the semiconductor structure is also provided.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: June 14, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Yuan-Tai Tseng, Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 11342379
    Abstract: Some embodiments relate to a memory device. The memory device includes a top electrode overlying a bottom electrode. A data storage layer overlies the bottom electrode. The bottom electrode cups an underside of the data storage layer. The top electrode overlies the data storage layer. A top surface of the bottom electrode is aligned with a top surface of the top electrode.
    Type: Grant
    Filed: May 10, 2019
    Date of Patent: May 24, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Yuan-Tai Tseng
  • Publication number: 20220131072
    Abstract: A memory device includes a bottom electrode, a magnetic tunnel junction (MTJ) structure, an inner spacer, and an outer spacer. The MTJ structure is over the bottom electrode. The bottom electrode has a top surface extending past opposite sidewalls of the MTJ structure. The inner spacer contacts the top surface of the bottom electrode and one of the opposite sidewalls of the MTJ structure. The outer spacer contacts an outer sidewall of the inner spacer. The outer spacer protrudes from a top surface of the inner spacer by a step height.
    Type: Application
    Filed: January 10, 2022
    Publication date: April 28, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting SUNG, Chern-Yow HSU, Shih-Chang LIU
  • Publication number: 20220093857
    Abstract: A memory device, a memory integrated circuit and a manufacturing method of the memory device are provided. The memory device includes a composite bottom electrode, a top electrode and a resistance variable layer disposed between the composite bottom electrode and the top electrode. The composite bottom electrode includes a first bottom electrode and a second bottom electrode disposed over the first bottom electrode. A sidewall of the second bottom electrode is laterally recessed from sidewalls of the first bottom electrode layer and the resistance variable layer.
    Type: Application
    Filed: September 21, 2020
    Publication date: March 24, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Fu-Ting Sung
  • Patent number: 11258007
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: February 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 11227993
    Abstract: A device includes a first conductive via plug, a first electrode, a storage element, a second electrode, a spacer, a barrier structure, a first dielectric layer. The first electrode is over the first conductive via plug. The storage element is over the first electrode. The second electrode is over the storage element. The spacer has a bottom portion extending along a top surface of the first electrode and a standing portion extending from the bottom portion and along a sidewall of the second electrode. The barrier structure extends from the bottom portion of the spacer and along a sidewall of the standing portion of the spacer. The first dielectric layer is substantially conformally over the spacer and the barrier structure.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: January 18, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu
  • Publication number: 20210367145
    Abstract: A semiconductor structure includes an Nth metal layer, a diffusion barrier layer over the Nth metal layer, a first deposition of bottom electrode material over the diffusion barrier layer, a second deposition of bottom electrode material over the first deposition of bottom electrode material, a magnetic tunneling junction (MTJ) layer over the second deposition of bottom electrode material, a top electrode over the MTJ layer; and an (N+1)th metal layer over the top electrode; wherein the diffusion barrier layer and the first deposition of bottom electrode material are laterally in contact with a dielectric layer, the first deposition of bottom electrode material spacing the diffusion barrier layer and the second deposition of bottom electrode material apart, and N is an integer greater than or equal to 1. An associated electrode structure and method are also disclosed.
    Type: Application
    Filed: August 3, 2021
    Publication date: November 25, 2021
    Inventors: CHUNG-YEN CHOU, FU-TING SUNG, YAO-WEN CHANG, SHIH-CHANG LIU
  • Publication number: 20210343932
    Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer, a bottom electrode over the Nth metal layer, a magnetic tunneling junction (MTJ) over the bottom electrode, a top electrode over the MTJ, and an (N+M)th metal layer over the Nth metal layer. N and M are positive integers. The (N+M)th metal layer surrounds a portion of a sidewall of the top electrode. A manufacturing method of forming the semiconductor structure is also provided.
    Type: Application
    Filed: July 15, 2021
    Publication date: November 4, 2021
    Inventors: Fu-Ting SUNG, Chung-Chiang MIN, Yuan-Tai TSENG, Chern-Yow HSU, Shih-Chang LIU
  • Patent number: 11114610
    Abstract: A semiconductor structure includes an Nth metal layer, a diffusion barrier layer over the Nth metal layer, a first deposition of bottom electrode material over the diffusion barrier layer, a second deposition of bottom electrode material over the first deposition of bottom electrode material, a magnetic tunneling junction (MTJ) layer over the second deposition of bottom electrode material, a top electrode over the MTJ layer; and an (N+1)th metal layer over the top electrode; wherein the diffusion barrier layer and the first deposition of bottom electrode material are laterally in contact with a dielectric layer, the first deposition of bottom electrode material spacing the diffusion barrier layer and the second deposition of bottom electrode material apart, and N is an integer greater than or equal to 1. An associated electrode structure and method are also disclosed.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: September 7, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chung-Yen Chou, Fu-Ting Sung, Yao-Wen Chang, Shih-Chang Liu
  • Patent number: 11050021
    Abstract: A semiconductor structure and a method for forming the same are provided. The method for manufacturing a semiconductor structure includes forming a bottom electrode layer over a substrate and forming a dielectric layer over the bottom electrode layer. The method for manufacturing a semiconductor structure further includes forming a top electrode layer over the dielectric layer and patterning the bottom electrode layer, the dielectric layer, and the top electrode layer to form a dielectric structure between a bottom electrode and a top electrode. The method for manufacturing a semiconductor structure further includes etching the bottom electrode from a sidewall of the bottom electrode to partially expose a bottom surface of the dielectric structure.
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: June 29, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chern-Yow Hsu, Fu-Ting Sung, Shih-Chang Liu
  • Patent number: 11018299
    Abstract: A manufacture includes a first electrode having an upper surface and a side surface, a resistance variable film over the first electrode, and a second electrode over the resistance variable film. The resistance variable film extends along the upper surface and the side surface of the first electrode. The second electrode has a side surface. A portion of the side surface of the first electrode and a portion of the side surface of the second electrode sandwich a portion of the resistance variable film.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: May 25, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Pei Hsieh, Chia-Shiung Tsai, Chern-Yow Hsu, Fu-Ting Sung, Shih-Chang Liu
  • Publication number: 20210135102
    Abstract: A semiconductor memory structure includes a memory cell, an encapsulation layer over a sidewall of the memory cell, and a nucleation layer between the sidewall of the memory cell and the encapsulation layer. The memory cell includes a top electrode, a bottom electrode and a data-storage element sandwiched between the bottom electrode and the top electrode. The nucleation layer includes metal oxide.
    Type: Application
    Filed: April 9, 2020
    Publication date: May 6, 2021
    Inventors: HSING-LIEN LIN, FU-TING SUNG, CHING JU YANG, CHII-MING WU
  • Patent number: 10957852
    Abstract: A memory structure includes a first dielectric layer, having a first top surface, over a conductive structure. A first opening in the first dielectric layer exposes an area of the conductive structure, and has an interior sidewall. A first electrode structure, having a first portion and a second portion, is over the exposed area of the conductive structure. The second portion extends upwardly along the interior sidewall. A resistance variable layer is disposed over the first electrode. A second electrode structure, having a third portion and a fourth portion, is over the resistance variable layer. The third portion has a second top surface below the first top surface of the first dielectric layer. The fourth portion extends upwardly along the resistance variable layer. A second opening is defined by the second electrode structure. At least a part of a second dielectric layer is disposed in the second opening.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: March 23, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fu-Ting Sung, Ching-Pei Hsieh, Chia-Shiung Tsai, Chern-Yow Hsu, Shih-Chang Liu
  • Publication number: 20210043832
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Application
    Filed: October 8, 2020
    Publication date: February 11, 2021
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 10840438
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: November 17, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai