Patents by Inventor Garlen C. Leung

Garlen C. Leung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Platen with patterned surface for chemical mechanical polishing
    Publication number: 20040072518
    Abstract: A platen having a patterned upper surface for supporting a polishing material in a chemical mechanical polishing system is provided. In one embodiment, a platen for supporting a polishing material in a chemical mechanical polishing system includes a body adapted to support a polishing material during processing and having a substantially rigid non-planar upper support surface for supporting the polishing material during polishing.
    Type: Application
    Filed: October 7, 2003
    Publication date: April 15, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Gopalakrishna B. Prabhu, Erik S. Rondum, Peter McReynolds, Thomas H. Osterheld, Garlen C. Leung, Jack Arluck, Adam H. Zhong, Gregory E. Menk