Abstract: A bondhead assembly having a bond body for mounting a bonding tool, a support structure that is configured to be drivable for moving the bondhead assembly to different locations and flexural elements arranged substantially along at least one plane which couple the bond body to the support structure for flexibly supporting the bond body during movement with respect to the support structure. A motor is coupled to the support structure and it is operative to drive the bond body to move relative to the support structure along an axis extending substantially perpendicular to the at least one plane.

Abstract: A driving mechanism and method are provided for driving a detachment tool adapted to detach a chip from an adhesive tape to which the chip is mounted. The mechanism includes a first actuator coupled to the detachment tool and operative to drive the detachment tool to move along a first axis substantially perpendicular to a surface of the chip, and a second actuator coupled to the detachment tool and operative to drive the detachment tool to move adjacent to a width of the chip along a second axis perpendicular to the first axis. The first actuator is configured for programmable movement along the first axis with respect to the chip in conjunction with the second actuator for movement adjacent the width of the chip to provide controlled lifting of the chip for propagation of delamination between the chip and the adhesive tape.

Abstract: An apparatus is disclosed for moving an optical component of an opto-mechanical inspection system relative to an object to be inspected using a linear actuator comprising a coil located in a magnetic field created by a magnet assembly. A translation stage is coupled to either of said coil and magnet assembly whereby the translation stage is configured for motion relative to the other of said coil and magnet assembly. Movement of the translation stage is configured along a plane that is substantially perpendicular to a direction of incident light projected from a light source through the optical component onto the object.

Abstract: The invention provides an apparatus and a method for positioning an object coupled to a first support structure and a second support structure. A first actuator drives the first support structure along a first axis and a second actuator drives the first support structure along a second axis orthogonal to the first axis. A third actuator comprising a forcer and a stator is provided for driving the second support structure that is guided for movement relative to the first support structure along a third axis orthogonal to the first and second axes. The forcer is coupled to the second support structure and is movable with respect to the stator, and the stator is relatively stationary and decoupled from the second support structure.

Abstract: The position of a working point relative to a working space, such as a working point of a carriage on a gantry beam of an XY positioning table, is determined by measuring at least two sets of displacements. A first set of displacements, of the working point relative to an intermediate component, such as the gantry beam, includes a relatively large displacement (X) in a first linear degree of freedom and relatively small displacements (Y1?, Y2?), in at least two of the five degrees of freedom other than the first. The second set of displacements, of the intermediate component relative to the working space, includes a relatively large displacement (Y1, Y2), in a second linear degree of freedom, and relatively small displacements (X1?, X2?), in at least two of the five degrees of freedom other than the second.

Abstract: A clamping device is provided for clamping an object, such as bonding wire for a wire bonding machine. The device comprises a pair of clamping arms arranged in pivotal relationship with each other about a pivot point, the clamping arms having clamping ends movable between an open position and a closed position. An attraction device is operative to provide an attraction force between the clamping arms about the pivot point. The device includes biasing means that is operative to provide a biasing force in opposition to the attraction force about the pivot point, such that the biasing force is operative to bias the clamping ends towards the closed position. In a preferred embodiment, the biasing means comprises a flexure bearing.

Abstract: A clamping device is provided for clamping an object, such as bonding wire for a wire bonding machine. The device comprises a pair of clamping arms arranged in pivotal relationship with each other about a pivot point, the clamping arms having clamping ends movable between an open position and a closed position. An attraction device is operative to provide an attraction force between the clamping arms about the pivot point. The device includes biasing means that is operative to provide a biasing force in opposition to the attraction force about the pivot point, such that the biasing force is operative to bias the clamping ends towards the closed position. In a preferred embodiment, the biasing means comprises a flexure bearing.

Abstract: An apparatus for moving an optical element in an opto-mechanical system, includes at least one circularly symmetric flexure surrounding the optical element, and a device for moving the optical element along an axis perpendicular to and extending through the center of the flexure. A number of flexures may be provided in a stack with spacers therebetween, and the optical element may be mounted in a tubular member supported by two spaced apart stacks. Structure is also provided for damping end of movement vibrations.

Abstract: The position of a working point relative to a working space, such as a working point of a carriage on a gantry beam of an XY positioning table, is determined by measuring at least two sets of displacements. A first set of displacements, of the working point relative to an intermediate component, such as the gantry beam, includes a relatively large displacement (X) in a first linear degree of freedom and relatively small displacements (Y1′, Y2′), in at least two of the five degrees of freedom other than the first. The second set of displacements, of the intermediate component relative to the working space, includes a relatively large displacement (Y1, Y2), in a second linear degree of freedom, and relatively small displacements (X1′, X2′), in at least two of the five degrees of freedom other than the second.

Abstract: The invention provides an apparatus and method for clamping an object. The apparatus comprises a clamping mechanism and an actuation system to actuate clamping and de-clamping of the clamping mechanism, wherein the actuation system comprises two actuator devices which are operatively coupled whereby to provide an actuation force to the clamping mechanism. Preferably, the actuator devices comprises a variable reluctance actuator and a linear induction actuator coupled together and adapted to cooperate to provide the actuation force to the clamping mechanism.

Abstract: The invention provides an apparatus and method for clamping an object. The apparatus comprises a clamping mechanism and an actuation system to actuate clamping and de-clamping of the clamping mechanism, wherein the actuation system comprises two actuator devices which are operatively coupled whereby to provide an actuation force to the clamping mechanism. Preferably, the actuator devices comprises a variable reluctance actuator and a linear induction actuator coupled together and adapted to cooperate to provide the actuation force to the clamping mechanism.

Abstract: The invention provides a motor system and a method for positioning a load. The system comprises support means such as an XY table for supporting the load. A first motor and a second motor cooperate to drive the load, whereby the first motor is adapted to provide higher thrust than the second motor and the second motor is adapted to deliver higher positioning accuracy than the first motor during a positioning sequence to position the load.

Abstract: The invention provides a motor system and a method for positioning a load. The system comprises support means such as an XY table for supporting the load. A first motor and a second motor cooperate to drive the load, whereby the first motor is adapted to provide higher thrust than the second motor and the second motor is adapted to deliver higher positioning accuracy than the first motor during a positioning sequence to position the load.

Abstract: Force sensing apparatus is provided for sensing deflection of a transducer in an ultrasonic welding machine. The apparatus includes a body member, a transducer holder and a force sensor. The transducer holder is adapted to hold an ultrasonic transducer and the transducer holder is fixed to the body member. The force sensor is located between adjacent surfaces of the body member and the transducer holder to sense a force applied between the surfaces.

Abstract: There is disclosed apparatus for moving an optical element in an opto-mechanical system, comprising at least one circularly symmetric flexure surrounding said optical element, and means for moving said optical element along an axis perpendicular to and extending through the centre of said at least one flexure. A number of flexures may be provided in a stack with spacers therebetween, and the optical element may be mounted in a tubular member support by two paced apart stacks. Means are also provided for damping end of movement vibrations.

Abstract: The present invention provides a bonding head for a wedge wire bonding apparatus in which the bonding force of the transducer assembly, and also the clamping force of the wire clamping assembly are provided by permanent magnet motors including a coil formed as part of the transducer assembly and the wire clamping assembly respectively and with the coils located between magnets fixed to a bond head bracket member. The use of permanent magnet motors to provide the bonding and clamping forces results in apparatus in which the bonding and clamping forces can be controlled with high accuracy and reliability.

Abstract: Force sensing apparatus is provided for sensing deflection of a transducer in an ultrasonic welding machine. The apparatus includes a body member, a transducer holder and a force sensor. The transducer holder is adapted to hold an ultrasonic transducer and the transducer holder is fixed to the body member. The force sensor is located between adjacent surfaces of the body member and the transducer holder to sense a force applied between the surfaces.

Abstract: Force sensing apparatus is provided for sensing deflection of a transducer (8) in an ultrasonic welding machine. The apparatus includes a body member (2), a transducer holder (1) and a force sensor (4). The transducer holder (1) is adapted to hold an ultrasonic transducer (8) and the transducer holder (1) is fixed to the body member (2). The force sensor (4) is located between adjacent surfaces (11, 12) of the body member (2) and the transducer holder (1) to sense a force applied between the surfaces (11, 12).