Patents by Inventor Gary Wyka
Gary Wyka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11306824Abstract: The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.Type: GrantFiled: September 28, 2018Date of Patent: April 19, 2022Assignee: Applied Materials, Inc.Inventors: Benjamin B. Riordon, Charles T. Carlson, Aaron Webb, Gary Wyka
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Publication number: 20200217423Abstract: The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.Type: ApplicationFiled: September 28, 2018Publication date: July 9, 2020Inventors: Benjamin B. RIORDON, Charles T. CARLSON, Aaron WEBB, Gary WYKA
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Patent number: 7627395Abstract: A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.Type: GrantFiled: December 28, 2006Date of Patent: December 1, 2009Assignee: Applied Materials, Inc.Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
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Patent number: 7233841Abstract: A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.Type: GrantFiled: March 11, 2003Date of Patent: June 19, 2007Assignee: Applied Materials, Inc.Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
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Publication number: 20070112465Abstract: A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.Type: ApplicationFiled: December 28, 2006Publication date: May 17, 2007Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
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Patent number: 7085622Abstract: Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.Type: GrantFiled: April 19, 2002Date of Patent: August 1, 2006Assignee: Applied Material, Inc.Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
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Publication number: 20030202092Abstract: A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.Type: ApplicationFiled: March 11, 2003Publication date: October 30, 2003Applicant: Applied Materials, Inc.Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
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Publication number: 20030198376Abstract: Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.Type: ApplicationFiled: April 19, 2002Publication date: October 23, 2003Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
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Patent number: 6313596Abstract: The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly clamped substrate to be compensated for misalignments due to substrates not at or very near to their nominal positions on the blade. A sensor unit comprising a radiation source and a detector and capable of transmitting and receiving a signal is mounted outside a transfer chamber and is positioned to direct the signal therein. A robot blade having a reflecting member is actuated through the transfer chamber and into the path of the signal. The reflecting member is preferably positioned on a clamp finger and causes the signal to be reflected to the detector of the sensor unit when the signal is incident on the reflecting member. As the reflecting member moves through the signal the output of the sensor unit switches states, thereby generating values corresponding to the position of the reflecting member.Type: GrantFiled: November 10, 2000Date of Patent: November 6, 2001Assignee: Applied Materials, Inc.Inventors: Gary Wyka, Jaime Carrera, Van Hoskins
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Patent number: 6166509Abstract: The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly clamped substrate to be compensated for misalignments due to substrates not at or very near to their nominal positions on the blade. A sensor unit comprising a radiation source and a detector and capable of transmitting and receiving a signal is mounted outside a transfer chamber and is positioned to direct the signal therein. A robot blade having a reflecting member is actuated through the transfer chamber and into the path of the signal. The reflecting member is preferably positioned on a clamp finger and causes the signal to be reflected to the detector of the sensor unit when the signal is incident on the reflecting member. As the reflecting member moves through the signal the output of the sensor unit switches states, thereby generating values corresponding to the position of the reflecting member.Type: GrantFiled: July 7, 1999Date of Patent: December 26, 2000Assignee: Applied Materials, Inc.Inventors: Gary Wyka, Jaime Carrera, Van Hoskins
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Patent number: D938373Type: GrantFiled: October 25, 2019Date of Patent: December 14, 2021Assignee: Applied Materials, Inc.Inventors: Jason M. Schaller, Benjamin Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka, Jeffrey Hudgens, Paul Z. Wirth, Charles T. Carlson, Siva Chandrasekar, Michael Carrell, Venkata Raghavaiah Chowdhary Kode, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez