Patents by Inventor Gurtej S. Sandhu

Gurtej S. Sandhu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11289501
    Abstract: Some embodiments include a memory array which has a vertical stack of alternating insulative levels and wordline levels. A channel material extends vertically along the stack. The channel material includes a semiconductor composition and has first segments alternating with second segments. The first segments are adjacent the wordline levels and the second segments are adjacent the insulative levels. The first segments have a first dopant distribution and the second segments have a second dopant distribution which is different from the first dopant distribution. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: May 20, 2019
    Date of Patent: March 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Byeung Chul Kim, Richard J. Hill, Francois H. Fabreguette, Gurtej S. Sandhu
  • Patent number: 11289491
    Abstract: Systems, methods, and apparatuses are provided for epitaxial single crystalline silicon growth for a horizontal access device. One example method includes depositing layers of a first dielectric material, a semiconductor material, and a second dielectric material to form a vertical stack, forming first vertical openings to form elongated vertical, pillar columns with first vertical sidewalls in the vertical stack, and forming second vertical openings through the vertical stack to expose second vertical sidewalls. Further, the example method includes selectively removing first portions of the semiconductor material from the second vertical openings to form horizontal openings with a remaining second portion of the semiconductor material at a distal end of the horizontal openings from the second vertical openings, and epitaxially growing single crystalline silicon within the horizontal openings from the distal end of the horizontal openings toward the second vertical openings to fill the horizontal openings.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: March 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Armin Saeedi Vahdat, Gurtej S. Sandhu, Scott E. Sills, Si-Woo Lee, John A. Smythe, III
  • Publication number: 20220077176
    Abstract: An electronic device comprising a cell region comprising stacks of alternating dielectric materials and conductive materials. A pillar region is adjacent to the cell region and comprises storage node segments adjacent to adjoining oxide materials and adjacent to a tunnel region. The storage node segments are separated by a vertical portion of the tunnel region. A high-k dielectric material is adjacent to the conductive materials of the cell region and to the adjoining oxide materials of the pillar region. Additional electronic devices are disclosed, as are methods of forming an electronic device and related systems.
    Type: Application
    Filed: September 4, 2020
    Publication date: March 10, 2022
    Inventors: Shyam Surthi, Richard J. Hill, Gurtej S. Sandhu, Byeung Chul Kim, Francois H. Fabreguette, Chris M. Carlson, Michael E. Koltonski, Shane J. Trapp
  • Patent number: 11270909
    Abstract: A method of forming a structure comprises forming a pattern of elongate features extending vertically from a base structure. Conductive material is formed on the elongate features. After completing the forming of the pattern of elongate features, the elongate features, the conductive material, or both is (are) exposed to at least one surface treatment gas. The at least one surface treatment gas comprises at least one species formulated to diminish attractive or cohesive forces at a surface of the conductive material. Apparatus and additional methods are also described.
    Type: Grant
    Filed: January 27, 2020
    Date of Patent: March 8, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Marko Milojevic, John A. Smythe, Timothy A. Quick, Sumeet C. Pandey
  • Publication number: 20220068933
    Abstract: Systems, methods and apparatus are provided for a three-node access device in vertical three-dimensional (3D) memory. An example method includes a method for forming arrays of vertically stacked memory cells, having horizontally oriented access devices and vertically oriented access lines. The method includes depositing alternating layers of a dielectric material and a sacrificial material to form a vertical stack. Forming a plurality of first vertical openings to form elongated vertical, pillar columns with sidewalls in the vertical stack. Conformally depositing a gate dielectric in the plurality of first vertical openings. Forming a conductive material on the gate dielectric. Removing portions of the conductive material to form a plurality of separate, vertical access lines. Repairing a first side of the gate dielectric exposed where the conductive material was removed. Forming a second vertical opening to expose sidewalls adjacent a first region of the sacrificial material.
    Type: Application
    Filed: August 28, 2020
    Publication date: March 3, 2022
    Inventors: John A. Smythe III, Gurtej S. Sandhu, Armin Saeedi Vahdat, Si-Woo Lee, Scott E. Sills
  • Publication number: 20220068932
    Abstract: Some embodiments include an integrated assembly having first conductive structures extending along a first direction. Spaced-apart upwardly-opening container-shapes are over the first conductive structures. Each of the container-shapes has a first sidewall region, a second sidewall region, and a bottom region extending from the first sidewall region to the second sidewall region. Each of the first and second sidewall regions includes a lower source/drain region, an upper source/drain region, and a channel region between the upper and lower source/drain regions. The lower source/drain regions are electrically coupled with the first conductive structures. Second conductive structures extend along a second direction which crosses the first direction. The second conductive structures have gate regions operatively adjacent the channel regions. Storage elements are electrically coupled with the upper source/drain regions. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 14, 2021
    Publication date: March 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: David K. Hwang, Richard J. Hill, Gurtej S. Sandhu
  • Publication number: 20220069133
    Abstract: Some embodiments include an integrated assembly having an upwardly-extending structure with a sidewall surface. Two-dimensional-material extends along the sidewall surface. First electrostatic-doping-material is adjacent a lower region of the two-dimensional-material, insulative material is adjacent a central region of the two-dimensional-material, and second electrostatic-doping-material is adjacent an upper region of the two-dimensional-material. A conductive-gate-structure is over the first electrostatic-doping-material and adjacent to the insulative material. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: August 27, 2020
    Publication date: March 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: David K. Hwang, Richard J. Hill, Gurtej S. Sandhu
  • Patent number: 11257962
    Abstract: A transistor comprises a channel region between a source region and a drain region, a dielectric material adjacent to the channel region, an electrode adjacent to the dielectric material, and an electrolyte between the dielectric material and the electrode. Related semiconductor devices comprising at least one transistors, related electronic systems, and related methods are also disclosed.
    Type: Grant
    Filed: May 2, 2019
    Date of Patent: February 22, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Yunfei Gao, Kamal M. Karda, Stephen J. Kramer, Gurtej S. Sandhu, Sumeet C. Pandey, Haitao Liu
  • Patent number: 11251363
    Abstract: A magnetic cell includes a magnetic region formed from a precursor magnetic material comprising a diffusive species and at least one other species. An amorphous region is proximate to the magnetic region and is formed from a precursor trap material comprising at least one attractor species having at least one trap site and a chemical affinity for the diffusive species. The diffusive species is transferred from the precursor magnetic material to the precursor trap material where it bonds to the at least one attractor species at the trap sites. The species of the enriched trap material may intermix such that the enriched trap material becomes or stays amorphous. The depleted magnetic material may then be crystallized through propagation from a neighboring crystalline material without interference from the amorphous, enriched trap material. This enables high tunnel magnetoresistance and high magnetic anisotropy strength. Methods of fabrication and semiconductor devices are also disclosed.
    Type: Grant
    Filed: December 9, 2019
    Date of Patent: February 15, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Sumeet C. Pandey
  • Publication number: 20220045062
    Abstract: Systems, methods and apparatus are provided for storage node after horizontally oriented, three-node access device formation in vertical three dimensional (3D) memory. An example method includes a method for forming arrays of vertically stacked memory cells, having horizontally oriented access devices and vertically oriented access lines. The method includes depositing alternating layers of a dielectric material and a sacrificial material to form a vertical stack. A plurality of first vertical openings are formed through the vertical stack to form elongated vertical, pillar columns with sidewalls in the vertical stack. A first conductive material is conformally deposited on a gate dielectric material in the first vertical openings. Portions of the first conductive material are removed to form a plurality of separate, vertical access lines along the sidewalls of the elongated vertical, pillar columns.
    Type: Application
    Filed: August 6, 2020
    Publication date: February 10, 2022
    Inventors: Armin Saeedi Vahdat, John A. Smythe III, Si-Woo Lee, Gurtej S. Sandhu, Scott E. Sills
  • Publication number: 20220045069
    Abstract: Systems, methods and apparatus are provided for a three-node access device in vertical three dimensional (3D) memory. An example method includes a method for forming arrays of vertically stacked memory cells, having horizontally oriented access devices and vertically oriented access lines. The method includes depositing alternating layers of a dielectric material and a sacrificial material in repeating iterations to form a vertical stack. An etchant process is used to form a first vertical opening exposing vertical sidewalls in the vertical stack adjacent a first region of the sacrificial material. The first region is selectively etched to form a first horizontal opening removing the sacrificial material a first horizontal distance back from the first vertical opening.
    Type: Application
    Filed: August 6, 2020
    Publication date: February 10, 2022
    Inventors: Scott E. Sills, John A. Smythe, III, Si-Woo Lee, Gurtej S. Sandhu, Armin Saeedi Vahdat
  • Publication number: 20220045060
    Abstract: Systems, methods and apparatus are provided for a three-node access device in vertical three dimensional (3D) memory. An example method includes a method for forming arrays of vertically stacked memory cells, having horizontally oriented access devices and vertically oriented access lines. The method includes depositing alternating layers of a dielectric material and a sacrificial material in repeating iterations to form a vertical stack. An etchant process is used to form a first vertical opening exposing vertical sidewalls in the vertical stack adjacent a first region. The first region is selectively etched to form a first horizontal opening removing the sacrificial material a first horizontal distance back from the first vertical opening.
    Type: Application
    Filed: August 6, 2020
    Publication date: February 10, 2022
    Inventors: Scott E. Sills, John A. Smythe, III, Si-Woo Lee, Gurtej S. Sandhu, Armin Saeedi Vahdat
  • Publication number: 20220045061
    Abstract: Systems, methods and apparatus are provided for a three-node access device in vertical three dimensional (3D) memory. An example method includes a method for forming arrays of vertically stacked memory cells, having horizontally oriented access devices and vertically oriented access lines. The three-node access devices include a first source/drain region (1) and a second source/drain region (2) separated by a channel and gates (3) opposing the channel, but do not have a direct, electrical body contact to a body region and/or channel of the access devices. The method includes depositing alternating layers of a dielectric material and a sacrificial semiconductor material in repeating iterations to form a vertical stack, a first region of the sacrificial semiconductor material in which to form a first and a second source/drain region separated laterally by a channel region. An etchant process is used to form a first vertical opening exposing vertical sidewalls in the vertical stack adjacent the first region.
    Type: Application
    Filed: August 6, 2020
    Publication date: February 10, 2022
    Inventors: Si-Woo Lee, John A. Smythe, III, Scott E. Sills, Gurtej S. Sandhu, Armin Saeedi Vahdat
  • Patent number: 11239117
    Abstract: Systems, methods, and apparatus are provided for storage node after horizontally oriented, three-node access device formation in vertical three dimensional (3D) memory. An example method includes a method for forming arrays of vertically stacked memory cells, having horizontally oriented access devices and vertically oriented access lines. The method includes depositing alternating layers of a dielectric material and a sacrificial semiconductor material to form a vertical stack. A first vertical opening is formed through the vertical stack to expose a first region of the sacrificial semiconductor material. The first region is selectively removed to form a first horizontal opening in which to replace a sacrificial gate dielectric material, form a source/drain conductive contact material, a channel conductive material, and a digit line conductive contact material of the three-node access device.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: February 1, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Armin Saeedi Vahdat, John A. Smythe, III, Si-Woo Lee, Gurtej S. Sandhu, Scott E. Sills
  • Patent number: 11227861
    Abstract: Some embodiments include an integrated assembly having a base comprising sense-amplifier-circuitry, a first deck over the base, and a second deck over the first deck. The first deck includes a first portion of a first array of first memory cells, and includes a first portion of a second array of second memory cells. The second deck includes a second portion of the first array of the first memory cells, and includes a second portion of the second array of the second memory cells. A first digit line is associated with the first array, and a second digit line is associated with the second array. The first and second digit lines are comparatively coupled with one another through the sense-amplifier-circuitry.
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: January 18, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Hiroki Fujisawa, Charles L. Ingalls, Richard J. Hill, Gurtej S. Sandhu, Scott J. Derner
  • Patent number: 11227864
    Abstract: Systems, methods and apparatus are provided for storage node after horizontally oriented, three-node access device formation in vertical three dimensional (3D) memory. An example method includes a method for forming arrays of vertically stacked memory cells, having horizontally oriented access devices and vertically oriented access lines. The method includes forming elongated vertical, pillar columns with sidewalls in a vertical stack. A first conductive material is conformally deposited on a gate dielectric material in the first vertical openings. Portions of the first conductive material are removed to form a plurality of separate, vertical access lines along the sidewalls of the elongated vertical, pillar columns. A second vertical opening is formed through the vertical stack to expose a first region of the sacrificial material. A third vertical opening is formed through the vertical stack to in which to form a storage node electrically coupled to the first source/drain material.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: January 18, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Armin Saeedi Vahdat, John A. Smythe, III, Si-Woo Lee, Gurtej S. Sandhu, Scott E. Sills
  • Publication number: 20210408297
    Abstract: A transistor comprising a channel region on a material is disclosed. The channel region comprises a two-dimensional material comprising opposing sidewalls and oriented perpendicular to the material. A gate dielectric is on the two-dimensional material and gates are on the gate dielectric. Semiconductor devices and systems including at least one transistor are disclosed, as well as methods of forming a semiconductor device.
    Type: Application
    Filed: September 10, 2021
    Publication date: December 30, 2021
    Inventors: Witold Kula, Gurtej S. Sandhu, John A. Smythe
  • Patent number: 11211554
    Abstract: A magnetic cell includes a free region between an intermediate oxide region (e.g., a tunnel barrier) and a secondary oxide region. Both oxide regions may be configured to induce magnetic anisotropy (“MA”) with the free region, enhancing the MA strength of the free region. A getter material proximate to the secondary oxide region is formulated and configured to remove oxygen from the secondary oxide region, reducing an oxygen concentration and an electrical resistance of the secondary oxide region. Thus, the secondary oxide region contributes only minimally to the electrical resistance of the cell core. Embodiments of the present disclosure therefore enable a high effective magnetoresistance, low resistance area product, and low programming voltage along with the enhanced MA strength. Methods of fabrication, memory arrays, memory systems, and electronic systems are also disclosed.
    Type: Grant
    Filed: April 25, 2019
    Date of Patent: December 28, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Witold Kula
  • Patent number: 11205657
    Abstract: Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: December 21, 2021
    Assignee: Micron Technology, Inc.
    Inventors: D. V. Nirmal Ramaswamy, Gurtej S. Sandhu
  • Publication number: 20210381107
    Abstract: A material deposition system comprises a precursor source and a chemical vapor deposition apparatus in selective fluid communication with the precursor source. The precursor source configured to contain at least one metal-containing precursor material in one or more of a liquid state and a solid state. The chemical vapor deposition apparatus comprises a housing structure, a distribution manifold, and a substrate holder. The housing structure is configured and positioned to receive at least one feed fluid stream comprising the at least one metal-containing precursor material. The distribution manifold is within the housing structure and is in electrical communication with a signal generator. The substrate holder is within the housing structure, is spaced apart from the distribution assembly, and is in electrical communication with an additional signal generator. A microelectronic device and methods of forming a microelectronic device also described.
    Type: Application
    Filed: June 3, 2020
    Publication date: December 9, 2021
    Inventors: John A. Smythe, Gurtej S. Sandhu, Sumeet C. Pandey, Michael E. Koltonski