Abstract: In a measuring-instrument remote-calibration system and measuring-instrument remote-calibration method, a measuring standard quantity is converted into a parameter adapted for communication, or based on measuring standard quantity, a parameter adapted for communication is generated and sent to a remote place. Alternatively, when the measuring standard quantity is not suitable for communication, it is converted into a form adapted for transportation and the converted measuring standard quantity is sent to a remote place. After the converted measuring standard quantity reaches the place, it is restored to the original measuring standard quantity, thus enabling calibration. The result of the calibration is certified.

Abstract: Before each content file is recorded first to a recording medium, a flag indicating a recording state of a content file is generated corresponding to a physical area where an index file can be continuously recorded. An index file is generated which associates attribute information with the generated flag added thereto with real data of each content file, and the generated index file is recorded to the recording medium. Since fragmentation of the physical area where the index file is recorded is restrained to a minimum level, a high-speed reading operation is realized.

Abstract: A recording apparatus such as an optical disk and a file management method are disclosed by which, where an index file is formed from groups of data wherein extract information is collected for different types and one of the groups of data is used to collectively manage the other groups of data, a process relating to deletion or addition of extract information can be executed simply, easily, and with certainty. In each of slots of a property entry, information representing whether the slot is valid or invalid and information representative of a relationship to different slots to which extract information relating to the same file is allocated are recorded, and a combination of the slots in which the extract information of the one file is allocated is managed with the property entry.

Abstract: In a measuring-instrument remote-calibration system and measuring-instrument remote-calibration method, a measuring standard quantity is converted into a parameter adapted for communication, or based on measuring standard quantity, a parameter adapted for communication is generated and sent to a remote place. Alternatively, when the measuring standard quantity is not suitable for communication, it is converted into a form adapted for transportation and the converted measuring standard quantity is sent to a remote place. After the converted measuring standard quantity reaches the place, it is restored to the original measuring standard quantity, thus enabling calibration. The result of the calibration is certified.

Abstract: A recording apparatus such as an optical disk and a file management method are disclosed by which wastefulness caused by free slots in an index file can be reduced. To each slot of a property entry of the index file, valid/invalid information representative of whether the slot is valid or invalid is set. Further, to the header of the property entry, a last valid slot number indicative of a last one of those slots which are set to valid with the valid/invalid information is set.

Abstract: A recording apparatus and a file management method are disclosed which can be applied typically to an optical disk apparatus and make it possible to grasp a hierarchical structure readily and register or delete extract information simply and easily. Reference information pointing to slots of a higher hierarchy, a lower hierarchy and the same hierarchy is set, and a flag is set to delete or register extract information without varying the reference information.

Abstract: A curable polyvinyl benzyl compound represented by the following general formula (1): 1

Abstract: An environmental monitoring apparatus comprises: an infrared transmitting substrate 12 disposed in a prescribed ambient atmosphere 10; an infrared radiation source 20 for irradiating an infrared radiation to the infrared transmitting substrate 12; a contaminant analyzing means 30 for computing a concentration of a contaminant in the ambient atmosphere 10, based on the infrared radiation exited from the infrared transmitting substrate 12 after the infrared radiation has undergone multiple reflections inside the infrared transmitting substrate 12; and a contaminant removing means 50 for removing the contaminant in the ambient atmosphere 10 complied with the concentration of the contaminant in the ambient atmosphere 10, which have been computed by the contaminant analyzing means 30. Thus, the contaminant in the ambient atmosphere can be monitored with high sensitivity and real time, and can be immediately removed when the concentration in the ambient atmosphere exceed a prescribed value.

Abstract: An infrared beam is applied into an infrared transmitting substrate 10 disposed in an environment to be measured; the infrared beam which has undergone multiple internal reflections in the infrared transmitting substrate 10 and exited from the infrared transmitting substrate 10 is detected; the detected infrared beam is spectroscopically analyzed to measure a species and/or a quantity of the substance in the environment present near the infrared transmitting substrate 10; and a species and/or a concentration of the substance in the environment to be measured are measured based on the species and/or the quantity of the substance in the environment present near the infrared transmitting substrate 10. Thus, the substances in the environment, such as organic contaminants, etc., present in the atmosphere can be identified, or their concentrations can be measured, with high sensitivity and realtime.

Abstract: The invention allows for testing by high velocity signals of high density LSIs prior to being packaged having an electrode spacing on the odder of 150 &mgr;m, for example. Coaxial transmission lines 13 for termination formed through a terminal support 11 are arranged in a two-dimensional array. Connected to one ends of the transmission lines 13 are one ends of contact pins 18 such as conductive whiskers while the other ends of the transmission lines 13 are connected to a transmission line block 61 of a three-dimensionally upwardly gradually broadening configuration through a connection plate 72 similar in construction to the terminal support 11. The transmission line block 61 holds high frequency transmission lines 62 for relay connected at one ends to the other ends of the coaxial transmission lines 13 and having spacings between the adjacent lines broadened at the other upper ends. The widely spaced upper ends of the transmission lines 62 are connected to a performance board (not shown).

Abstract: A surface state monitoring apparatus for monitoring a surface state of semiconductor substrates by infrared spectroscopy at fabrication site of semiconductor substrates. The apparatus comprises an incidence optical system for introducing infrared radiation into a substrate-to-be-monitored, a detection optical system for detecting infrared radiation which has undergone multiple reflections inside the substrate and exited from the substrate, a surface state monitoring means for monitoring a surface state of the substrate based on the detected infrared radiation, a position detecting means for optically detecting a position of the substrate, and a control means for controlling a position and an angle at which infrared radiation to be incident on the substrate, corresponding to the position of the substrate.

Abstract: A substrate treating method and apparatus which can perform in-situ monitoring of surface state of a semiconductor substrate. The substrate treating apparatus comprises substrate treating means for subjecting the substrate to a required treatment, means for condensing infrared radiation emitted by an infrared radiation source onto an outer peripheral part of the substrate and introducing the infrared radiation into the substrate, means for detecting the infrared radiation which has undergone multiple reflection inside the substrate and exited from the substrate, means for analyzing the detected infrared radiation, means for monitoring the surface state of the substrate, and control means for controlling the substrate treating means, based on the monitored surface state of the substrate.

Abstract: A surface state monitoring method and apparatus for performing in-situ monitoring of surface states of semiconductor substrates. The apparatus comprises condensing means 30 for condensing infrared radiation to an outer peripheral part of the substrate-to-be-monitored; control means 80 for controlling an incident angle of the infrared radiation condensed by the condensing means 30; condensing means 40 for condensing the infrared radiation which has undergone multiple reflection in the substrate-to-be-monitored; detecting means 50 for detecting the infrared radiation condensed by the infrared radiation condensing means 40, and analyzing means 60 for analyzing the detected infrared radiation detected and measuring contaminants staying on the surfaces of the substrate-to-be-monitored.

Abstract: Infrared beam is applied into an infrared transmitting substrate 10 disposed in an environment to be measured; the infrared beam which has undergone multiple internal reflection in the infrared transmitting substrate 10 and exited from the infrared transmitting substrate 10 is detected; the detected infrared beam is spectroscopically analyzed to measure a species and/or a quantity of the substance in the environment present near the infrared transmitting substrate 10; and a species and/or a concentration of the substance in the environment to be measured are measured based on the species and/or the quantity of the substance in the environment present near the infrared transmitting substrate 10. Thus, the substances in the environment, such as organic contaminants, etc., present in the atmosphere can be identified, or their concentrations can be measured, with high sensitivity and realtime.

Abstract: The surface state monitoring apparatus comprises: a wafer cassette holding a plurality of semiconductor wafers; an incidence optical system for applying infrared radiation to at least one of said plurality of semiconductor wafers; a detection optical system for detecting the infrared radiation which has undergone multiple reflection in the semiconductor wafer and exited from the semiconductor wafer; surface state monitoring means for monitoring surface states of the semiconductor wafer, based on the infrared radiation detected by the detection optical system; and displacing means for displacing the wafer cassette relative to the incidence optical system and the detection optical system.

Abstract: The mold clamping device with improved transmission mechanism includes: a middle platen 2 fixedly supported by a support base 1 and carrying the lower metallic mold 6; and front tie-bars 3a extending slidably therethrough. A movable platen 4 carrying the upper metallic mold 7 is secured to the top ends of the front tie-bars 3a. The horizontal connecting bar members 5a and 5b connect the bottom ends of the front and the rear tie-bars 3a and 3b. The middle platen 2 and the horizontal connecting bar members 5a and 5b are operatively coupled by means of the pantograph mechanism consisting of flat bar-shaped links 15a and 15b, whose front and rear joints are pinned to annular links 16a and 16bengaging with a left-and-right-handed ball thread member 17 driven by a driving source.

Abstract: The invention allows for testing by high velocity signals of high density LSIs prior to being packaged having an electrode spacing on the odder of 150 &mgr;m, for example. Coaxial transmission lines 13 for termination formed through a terminal support 11 are arranged in a two-dimensional array. Connected to one ends of the transmission lines 13 are one ends of contact pins 18 such as conductive whiskers while the other ends of the transmission lines 13 are connected to a transmission line block 61 of a three-dimensionally upwardly gradually broadening configuration through a connection plate 72 similar in construction to the terminal support 11. The transmission line block 61 holds high frequency transmission lines 62 for relay connected at one ends to the other ends of the coaxial transmission lines 13 and having spacings between the adjacent lines broadened at the other upper ends. The widely spaced upper ends of the transmission lines 62 are connected to a performance board (not shown).

Abstract: A reference voltage generator includes a voltage controlled oscillator which has fixed and accurate relationship between a frequency of an oscillation signal and a voltage supplied thereto, a reference frequency oscillator for generating a reference frequency signal of high accuracy and stability, a phase comparator for detecting a phase difference between the oscillation signal of the voltage controlled oscillator and the reference frequency signal, a low pass filter for smoothing a detection signal from the phase comparator, a gain adjust circuit for amplifying a signal from the low pass filter, a voltage adder for providing a sum of voltages from the gain adjust circuit and an offset voltage to the voltage controlled oscillator, and a phase clock loop formed by the phase comparator, low pass filter, gain adjust circuit and voltage adder to null the phase difference by regulating a control voltage applied to the voltage controlled oscillator.

Abstract: A process for producing a ceramic-base sinter, comprising sintering coated ceramic particles wherein the particles are prepared for sintering by the steps of: dispersing a powder of ceramic core particles in a gaseous atmosphere to form a mixture of a gas and particles in a powder of highly dispersed core particles; charging a precursor for the coat forming substance that has been formed via the vapor phase and/or a precursor for the coat forming substance in a vapor-phase state and the mixture of the gas and the powder of highly dispersed core particles that have a predetermined dispersity according to the average diameter of the core particles in a coating start region of a coating space; coating the surfaces of the core particles with the coat forming substance by allowing the precursor to contact and/or impinge against the core particles; shaping and sintering the thus coated ceramic core particles or a mixture containing them under appropriate sintering conditions.

Abstract: A process for producing a metal-base sinter, comprising sintering coated metal particles wherein the particles are prepared for sintering by the steps of: dispersing a powder of metal core particles in a gaseous atmosphere to form a mixture of a gas and particles in a powder of highly dispersed core particles; charging a precursor for the coat forming substance that has been formed via the vapor phase and/or a precursor for the coat forming substance in a vapor-phase state and the mixture of the gas and the powder of highly dispersed core particles that have a predetermined dispersity according to the average diameter of the core particles in a coating start region of a coating space; coating the surfaces of the core particles with the coat forming substance by allowing the precursor to contact and/or impinge against the core particles; shaping and sintering the thus coated metal core particles or a mixture containing them under appropriate sintering conditions.