Abstract: A display device includes a stretchable lower substrate; a plurality of first plate patterns which is disposed on the lower substrate; a plurality of first line patterns disposed between the plurality of first plate patterns; a plurality of first connection lines which extends in a first direction; a plurality of second connection lines which extends in a second direction; and a plurality of third connection lines which extends in a direction different from the first direction and the second direction to be connected to four first plate patterns which are adjacent to each other. Accordingly, the plurality of third connection lines which connects wiring lines on the plurality of first plate patterns in a mesh structure is formed to reduce a wiring line resistance.

Abstract: A pixel can include a light emitting diode; a driving transistor including a gate electrode connected to a first node between a high potential voltage line and a second node, the driving transistor being configured to drive the light emitting diode; a storage capacitor connected between the first node and a third node; a first transistor connected between the third node and a data line, the first transistor including a gate electrode connected to a scan signal line; a second transistor connected between the first node and the second node, and including a gate electrode connected to the scan signal line; a third transistor connected between the third node and a fourth node, the third transistor including a gate electrode connected to an emission signal line. Also, the pixel can include a voltage divider configured to internally generate a reference voltage and output the reference voltage to the fourth node.

Abstract: A display device according to an exemplary embodiment of the present disclosure may include a lower substrate that is stretchable; a first adhesive layer disposed on the lower substrate; a pattern layer disposed on the first adhesive layer and including a plurality of first line patterns; a plurality of connection lines disposed on each of the plurality of first line patterns; and a filling layer covering the pattern layer and the plurality of connection lines, wherein the plurality of first line patterns include grooves disposed in lower portions thereof, so that the plurality of first line patterns and the plurality of connection lines are separated from the first adhesive layer and easily stretched.

Abstract: A concentration measuring instrument includes a piezoelectric vibrator transmitting an ultrasonic wave into a solution contained in a cavity and detecting the ultrasonic wave reflected, a temperature sensor measuring a temperature of the solution, a drive circuit generating a drive signal driving the piezoelectric vibrator, a phase comparator performing a phase comparison between the drive signal and a detection signal, a frequency setting circuit making the drive circuit generate drive signals having sequentially different frequencies and monitoring a phase comparison result to detect a resonant frequency, and a Phase Locked Loop (PLL) circuit making a frequency of the drive signal follow the detected resonant frequency. A microcomputer determines a concentration of a solute in the solution on a basis of the frequency of the drive signal while the PLL circuit is being operated and a result of a temperature measurement by the temperature sensor.

Abstract: A printed circuit board comprises a board main body, a sensor, an external connection pad, and a hollow-structured electrical conductor. The board main body has a top face and a bottom face opposite the top face. The sensor is mounted on one of the top face and the bottom face of the board main body. The external connection pad is provided on the top face or the bottom face of the board main body opposite the sensor. The hollow-structured electrical conductor extends through the board main body and electrically connects the sensor to the external connection pad.

Abstract: A concentration measuring instrument includes a piezoelectric vibrator transmitting an ultrasonic wave into a solution contained in a cavity and detecting the ultrasonic wave reflected, a temperature sensor measuring a temperature of the solution, a drive circuit generating a drive signal driving the piezoelectric vibrator, a phase comparator performing a phase comparison between the drive signal and a detection signal, a frequency setting circuit making the drive circuit generate drive signals having sequentially different frequencies and monitoring a phase comparison result to detect a resonant frequency, and a Phase Locked Loop (PLL) circuit making a frequency of the drive signal follow the detected resonant frequency. A microcomputer determines a concentration of a solute in the solution on a basis of the frequency of the drive signal while the PLL circuit is being operated and a result of a temperature measurement by the temperature sensor.

Abstract: An inertial sensor having a simple configuration by vacuum sealing a resonator which detects acceleration and exploits a resonance vibration using a high Q value MEMS device. The sensor includes: a detecting proof mass and beam which detects acceleration; a driving electrode which excites the detecting proof mass and beam; a resonant frequency tuning electrode which changes the resonant frequency of the detecting proof mass and beam; and a detecting circuit which applies voltage to the resonant frequency tuning electrode for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam when the acceleration is applied to the detecting proof mass and beam during the vibration of the detecting proof mass and beam by the voltage applied to the detecting proof mass and beam, and outputs the acceleration based on a value of the voltage applied to resonant frequency tuning electrode.

Abstract: Provided is a highly reliable acceleration sensor having little 0-point drift. For example, an acceleration sensor having a support substrate having a first direction and a second direction orthogonal thereto in a single surface, a device layer disposed on the support substrate with a space interposed therebetween and having a weight that deforms according to the application of acceleration, and a cap layer disposed on the device layer with a space interposed therebetween, wherein a fixed part fixed to the support substrate is provided in the center of the weight, a beam is provided that extends from the fixed part and makes the weight mobile by being connected thereto, a plurality of posts for coupling the support substrate and the cap layer are disposed on the fixed part, and electric signals are applied to and received from the weight via the posts.

Abstract: A printed circuit board comprises a board main body, a sensor, an external connection pad, and a hollow-structured electrical conductor. The board main body has a top face and a bottom face opposite the top face. The sensor is mounted on one of the top face and the bottom face of the board main body. The external connection pad is provided on the top face or the bottom face of the board main body opposite the sensor. The hollow-structured electrical conductor extends through the board main body and electrically connects the sensor to the external connection pad.

Abstract: In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+?1) occurs in the beam 4a and a compressive stress (??2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

Abstract: Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.

Abstract: A movable part rotates about a rotation axis, which passes through a support, when an inertial force in a detecting direction is applied to an inertial sensor. The movable part includes a first region and a second region displaced in a direction opposite to a direction of the first region when the inertial force is applied. A second substrate includes first and second detection electrodes opposed to the first and second regions, respectively. The first detection electrode and the second detection electrode are provided symmetrically with respect to the rotation axis. A cavity is provided symmetrically with respect to the rotation axis. In a direction perpendicular to the detecting direction and a direction in which the rotation axis extends, a length from the rotation axis to an end of the first region and a length from the rotation axis to an end of the second region are different.

Abstract: The purpose of the present invention is to provide an inertial force detection device that can more accurately detect faults in a temperature sensor. Provided is an inertial force detection device configured so that in a state where an oscillating body is made to oscillate in a first direction, the amount of displacement when the oscillating body is displaced in a second direction due to the generation of angular velocity is detected as angular velocity, wherein the inertial force detection device has a means for performing control so that the oscillating body enters a state of resonance in the first direction, a temperature detection means for detecting temperature, and a means for detecting faults in the temperature detection means, and outputs a plurality of signals, which indicate the fault detection results of the three means, continuously from a single signal wire.

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

Abstract: An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG. 9, an extending portion EXU is provided so as to connect to a fixing portion FU3, this extending portion EXU and a third region P3 which configures part of a mass body MS are connected via a support beam BM3 and a support beam BM4, and the support beam BM3 and the support beam BM4 are disposed oppositely with respect to a virtual line IL1. With this, natural frequency of an unwanted mode due to rotation and torsion of the mass body MS can be shifted to a high frequency band.

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

Abstract: Provided is a highly reliable acceleration sensor having little 0-point drift. For example, an acceleration sensor having a support substrate having a first direction and a second direction orthogonal thereto in a single surface, a device layer disposed on the support substrate with a space interposed therebetween and having a weight that deforms according to the application of acceleration, and a cap layer disposed on the device layer with a space interposed therebetween, wherein a fixed part fixed to the support substrate is provided in the center of the weight, a beam is provided that extends from the fixed part and makes the weight mobile by being connected thereto, a plurality of posts for coupling the support substrate and the cap layer are disposed on the fixed part, and electric signals are applied to and received from the weight via the posts.

Abstract: An inertial sensor having a simple configuration by vacuum sealing a resonator which detects acceleration and exploits a resonance vibration using a high Q value MEMS device. The sensor includes: a detecting proof mass and beam which detects acceleration; a driving electrode which excites the detecting proof mass and beam; a resonant frequency tuning electrode which changes the resonant frequency of the detecting proof mass and beam; and a detecting circuit which applies voltage to the resonant frequency tuning electrode for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam when the acceleration is applied to the detecting proof mass and beam during the vibration of the detecting proof mass and beam by the voltage applied to the detecting proof mass and beam, and outputs the acceleration based on a value of the voltage applied to resonant frequency tuning electrode.

Abstract: Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.

Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.