Patents by Inventor Heiko Mueller

Heiko Mueller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6949751
    Abstract: A slit lens arrangement for particle beams, and particularly for the projection of a mask onto a workpiece, includes a combined lens, having a cylinder lens and a quadrupole lens, the optical axes of which run parallel to each other, so that the optical axis of the quadrupole lens may be displaced in a parallel manner and which may have a gap-like opening between the pole shoes or in the electrodes with the same spatial relationship to each other. Both lenses are thus so arranged relative to each other, that the focussing of the quadrupole lens occurs in that plane in which the cylinder lens is not focussed, and the defocusing of the quadrupole lens occurs in that plane in which the cylinder lens focuses. Two combined lenses are provided with functionally identical elements arranged such that the optical axes of both lenses lie coaxial to each other, defining the mid-axis of the total system and in which the beam path is telescopic throughout the entire slit lens arrangement.
    Type: Grant
    Filed: July 24, 2002
    Date of Patent: September 27, 2005
    Inventor: Heiko Müller
  • Patent number: 6946657
    Abstract: A particle-optical apparatus is disclosed which combines the functions of an energy selector 27 and a beam splitter 21. The particle-optical apparatus is used in an electron microscopy system and serves to separate and superimpose, respectively, beam paths of a primary electron beam 11 and a secondary electron beam 13.
    Type: Grant
    Filed: August 1, 2003
    Date of Patent: September 20, 2005
    Assignee: Carl Zeiss NTS GmbH
    Inventors: Oliver Kienzle, Rainer Knippelmeyer, Heiko Müller
  • Patent number: 6903337
    Abstract: An examining system for imaging an object positionable in an object plane, includes an illumination device for supplying energy to a delimited field of the object such that charged particles emerge from locations of the field, the field being displaceable in the plane of the object, a first deflector for providing a variable deflection field for guiding charged particles emerging from locations of a selectable region of the object through a fixed, predetermined beam cross-section, and a position-sensitive detector disposed in the beam path such that the charged particles, after having passed through the first deflector, impinge on the position-sensitive detector, wherein particles emerging from different locations of the region are imaged on different locations of the position-sensitive detector which are allocated to the locations of emergence.
    Type: Grant
    Filed: July 1, 2002
    Date of Patent: June 7, 2005
    Assignee: Carl Zeiss SMT AG
    Inventors: Oliver Kienzle, Dirk Stenkamp, Michael Steigerwald, Rainer Knippelmeyer, Max Haider, Heiko Müller, Stephan Uhlemann
  • Patent number: 6888145
    Abstract: An optical particle corrector with a straight optical axis for eliminating color and aperture aberrations in optical particle lenses includes multipole elements in the form of electric and/or magnetic quadrupole and octupole elements. There are at least twelve quadrupole elements and ten octupole elements, in which three quadrupole elements and two octupole elements are assembled into a group. These groups are arranged successively along the straight optical axis, in which a first symmetrical plane is defined between the first and second groups, a second symmetrical plane is defined between the second and third groups and a third symmetrical plane is defined between the third and fourth groups. The multipole elements from one group to another correspond to each other in pairs, in which the multipole elements of the corresponding following group are positioned in reverse order along the straight optical axis in comparison with the corresponding multipole elements of the preceding group.
    Type: Grant
    Filed: December 3, 2002
    Date of Patent: May 3, 2005
    Assignee: CEOS Corrected Electron Optical Systems GmbH
    Inventors: Heiko Müller, Harald Rose
  • Patent number: 6866621
    Abstract: A laboratory with a rotor driven by a centrifuge electric motor and a cooling unit driven by an electrical cooling motor, wherein the centrifuge motor is formed as a frequency-controlled induction motor fed from a frequency converter controlled by a control unit and having a centrifuge inverted rectifier that feeds the centrifuge motor and is connected to a d.c. source fed from a mains power rectifier, characterized in that the cooling motor is formed as a frequency-controlled induction motor, and that the frequency converter has a further cooling inverted rectifier connected to the d.c. source parallel to the centrifuge inverted rectifier for feeding the cooling motor.
    Type: Grant
    Filed: June 26, 2000
    Date of Patent: March 15, 2005
    Assignee: Eppendorf AG
    Inventors: Heiko Müller, Horst Kache
  • Patent number: 6605778
    Abstract: A circuit carrier (2) (printed circuit board 2) has two metallic outer layers (13, 14) and at least one metallic intermediate layer (11, 12). Insulating layers (8, 9) are arranged between the outer layers (13, 14) and the intermediate layer (11, 12). A component (3, 5) to be cooled and a cooling element (6, 7) are arranged on the outer layers (13, 14). The cooling element (6, 7) is thermally coupled to the component (3, 5) to be cooled via a heat conducting path. The heat conducting path runs partly in the intermediate layer (11, 12). Heat is transferred transversely in said path.
    Type: Grant
    Filed: October 2, 2001
    Date of Patent: August 12, 2003
    Assignee: Siemens Aktiengesellschaft
    Inventors: Helmut Dörfler, Heiko Mueller, Sebastian Raith
  • Publication number: 20020047193
    Abstract: A circuit carrier (2) (printed circuit board 2) has two metallic outer layers (13, 14) and at least one metallic intermediate layer (11, 12). Insulating layers (8, 9) are arranged between the outer layers (13, 14) and the intermediate layer (11, 12). A component (3, 5) to be cooled and a cooling element (6, 7) are arranged on the outer layers (13, 14). The cooling element (6, 7) is thermally coupled to the component (3, 5) to be cooled via a heat conducting path. The heat conducting path runs partly in the intermediate layer (11, 12). Heat is transferred transversely in said path.
    Type: Application
    Filed: October 2, 2001
    Publication date: April 25, 2002
    Inventors: Helmut Dorfler, Heiko Mueller, Sebastian Raith
  • Patent number: 6190086
    Abstract: A method for laying a mosaic in which a quantity of n individual mosaic elements are arranged on a common support surface so as to be separated from one another by joints, preferably for laying natural stones to form natural stone paving.
    Type: Grant
    Filed: April 5, 1999
    Date of Patent: February 20, 2001
    Assignee: Pflaster-Mueller GmbH & Co. KG
    Inventors: Heiko Mueller, Thomas Mueller