Abstract: A connector for mounting and grounding electrical components to an underlyuing electrically conductive support structure by a mounting screw includes an electrically insulating mounting block which defines at least one mounting hole. A bent, electrically conductive bus bar having upper and lower legs is operatively associated with the mounting block such that a terminal end portion of the lower leg extends from the mounting block so as to contact the mounting screw when the connector is mounted to the support structure. Thus, grounding of the bus bar to the support structure occurs through the mounting screw. A reinforcement ring may be provided for the mounting hole which is positionally retained therewithin by various structures. Thus, reliable mounting and grounding of an electrical component may be achieved by the connectors of this invention, while minimizing the risk that excessive tightening of the mounting screw will result in breakage of the mounting block in the vicinity of the mounting hole.

Abstract: An exposure apparatus for forming a pattern of a mask on a photo-sensitive substrate comprises an X-Y stage, a Z-stage supported on the X-Y stage, and a levelling stage that supports the photo-sensitive substrate. The levelling stage is supported on the Z-stage by a plurality of levelling devices that define a levelling reference plane, and that are operated in unison to change the level of the levelling stage relative to the Z-stage and relative to an exposure reference plane that is parallel to the levelling reference plane. The levelling devices are also operated individually to change the inclination of the photo-sensitive substrate relative to the levelling reference plane and relative to the exposure reference plane. A focus detector controls the movement of the Z-stage and the in-unison movement of the levelling devices. An inclination detector controls the individual operation of the levelling devices.