Abstract: An object of the disclosure is to provide a vacuum processing apparatus capable of minimizing the size of the whole apparatus by reducing a floor area occupied by a vacuum pump. An etching apparatus 20 for applying an etching process on an object to be processed in a vacuum includes a processing vessel 21 for applying the etching process on a semiconductor wafer W introduced into the vessel 21 and a vacuum pump 30 arranged below the processing vessel 21 so as to be coaxial with the processing vessel 21, for sucking exhaust gas in the processing vessel 21 to form the vacuum.

Abstract: A process device and a method for processing a substrate. A dipole ring magnet (DRM) is arranged in a manner so that a leakage magnetic field in the neighborhood of the process device and at a position a prescribed distance therefrom is minimized. The dipole ring magnet (DRM) rotates around an outer periphery of a process chamber which has a plasma generation device, a substantially cylindrical shield plate covering an outer periphery of the dipole ring magnet. The shield is rotated coaxially with the dipole ring magnet and in a direction opposite to the rotation of the dipole ring magnet. In this way a magnetic field is generated in a direction that cancels leakage magnetic flux generated outside the dipole ring magnet.

Abstract: An object of the disclosure is to provide a vacuum processing apparatus capable of minimizing the size of the whole apparatus by reducing a floor area occupied by a vacuum pump. An etching apparatus 20 for applying an etching process on an object to be processed in a vacuum includes a processing vessel 21 for applying the etching process on a semiconductor wafer W introduced into the vessel 21 and a vacuum pump 30 arranged below the processing vessel 21 so as to be coaxial with the processing vessel 21, for sucking exhaust gas in the processing vessel 21 to form the vacuum.

Abstract: The present invention provides a hairiness suppressing device for an automatic winder that can perfectly balloon a spun yarn using a whirling current in a yarn passage. In a hairiness suppressing device (1) comprising a yarn inserting opening (9) that extends and opens in an axial direction of a yarn passage (8) in which a whirling current acts on a spun yarn, a wedge-shaped cover member (29) is provided that can open and close the yarn inserting opening (9). When a swiveling body (26) is swivellably moved to open the cover member (29), the yarn can be introduced into the yarn passage (8) through the yarn inserting opening (9). When the swiveling body (26) is swivellably moved to close the cover member (29), the whirling current in the yarn passage (8) is prevented from leaking from a side of the yarn passage (8).

Abstract: An object of the disclosure is to provide a vacuum processing apparatus capable of minimizing the size of the whole apparatus by reducing a floor area occupied by a vacuum pump. An etching apparatus 20 for applying an etching process on an object to be processed in a vacuum includes a processing vessel 21 for applying the etching process on a semiconductor wafer W introduced into the vessel 21 and a vacuum pump 30 arranged below the processing vessel 21 so as to be coaxial with the processing vessel 21, for sucking exhaust gas in the processing vessel 21 to form the vacuum.

Abstract: The present invention relates to a dyed-yarn winding method wherein specified length control operates to wind a specified length of a dyed-yarn y without dyeing specks to a winding package Pw, and then cuts the dyed-yarn to remove a dyed-yarn having dyeing specks and remaining an a dyed-yarn supply package Ps. Since the specified length control prevents that part of a dyed-yarn that has dyeing specks from being wound to a winding package, an operation for removing such a part from the winding package can be omitted.

Abstract: A probe card assembly thermal influenced from a wafer with which a probe makes contact during a probe test. The assembly includes a probe card unit having a great number of probes to be brought into contact with the wafer to be tested, and a holder for holding the probe card unit at a center portion thereof. The holder includes a ring member, supported by another member, for supporting the probe card unit from a low side, and a cutout stepped member and a slot hole for relaxing stress due to thermal expansion concentrated on the ring member.

Abstract: A bobbin carrying tray having an air passage extending through a peg adapted for insertion in a bobbin, and through a base underlying it. Some linear members are provided at the midway portion of the air passage to prevent the passing of yarn which is suspended in a bobbin by the air drawn through the air passage.

Abstract: A cutting apparatus for sheet-like materials comprises a traveling mechanism having a traveling support member movable above a sheet-like material, a cutting device hanged from the traveling support member of the traveling mechanism and movable in directions perpendicular to traveling directions of the traveling support member, a first detecting device for detecting positions of the cutting device in the traveling directions of the traveling support member, a second detecting device for detecting positions of the cutting device in directions perpendicular to the traveling directions of the traveling support member, and an arithmetic unit for arithmetically operating positions of the cutting device on co-ordinates with the aid of signals from the first and second detecting devices.

Abstract: A metal gasket has an opening for allowing fluid to pass through the gasket, relatively small through-holes for receiving bolts, and a raised portion surrounding the entire circumference of the opening. The raised portion has a double-bead structure including an inner peripheral bead portion formed by an intermediate flat portion and a first frusto-conical portion which connects the intermediate flat portion with an inner peripheral flat portion, and an outer peripheral bead portion formed by the intermediate flat portion and a second frusto-conical portion which connects the intermediate flat portion with an outer peripheral flat portion. The second frusto-conical portion is inclined at an angle which is smaller than that at which the first frusto-conical portion is inclined.

Abstract: An apparatus for attaching belt-like materials has a rotating unit for rotating a forming drum, a holding unit located apart from the forming drum for holding continuous belt-like materials along entire widths to be supplied to the forming drum, embracing units located between the forming drum and the holding units for embracing the belt-like materials along entire widths. A reciprocating unit is used for reciprocating the embracing units between the holding unit and the forming drum. A cutting unit is used for cutting in width directions the belt-like materials held by the holding unit and the embracing units. The apparatus includes control unit for controlling the rotating unit and the reciprocating unit so that circumferential speeds of the forming drum and moving speeds of the embracing means are at a constant ratio.

Abstract: In a cylindrical tire forming member building method or apparatus, after the front end portion of a belt-shaped material is pressed against the drum, the belt-shaped material is wound on the drum while being centered, and with the central portion of the rear end portion of the belt-shaped material pressed against the drum with a robot hand, both edge portions of the rear end portion of the belt-shaped material are elongated longitudinally and pressed against the drum with the robot hand, so that the front and rear ends of the belt-shaped material are butt-joined without forming a gap therebetween or without being overlapped.

Abstract: In a cylindrical tire forming member building method or apparatus, after the front end portion of a belt-shaped material is pressed against the drum, the belt-shaped material is wound on the drum while being centered, and with the central portion of the rear end portion of the belt-shaped material pressed against the drum with a robot hand, both edge portions of the rear end portion of the belt-shaped material are elongated longitudinally and pressed against the drum with the robot hand, so tha front and rear ends of the belt-shaped material are butt-joined without forming a gap therebetween or without being overlapped.

Abstract: A system comprising spinning-bobbin feeding lines and empty-bobbin feeding lines connecting spinning frames with winders is provided, in which the feeding lines are provided in a feeding groove provided below a floor surface on which the machine bases are disposed, and the spinning-bobbin feeding lines are separate from the empty-bobbin feeding lines only in the vertical direction.

Abstract: A yarn splicing device for spun yarns to each other wherein end sections of two yarns are untwisted and placed in overlapping relationship one on the other and thus overlapping portions of the yarns are acted by fluid to intended splicing of the yarns. An untwisting nozzle of the yarn splicing device comprises a fluid injecting hole formed to open to an inner circumferential face of a nozzle pipe and an intercepting plate disposed on a portion of the inner circumferential face of the nozzle.

Abstract: A pneumatic yarn splicing apparatus having a splicing member arranged in the central portion thereof. The splicing member comprises a yarn splicing hole of a cylindrical shape extending through the body of the splicing member, a slit extending along the splicing hole and two nozzles opened to the splicing hole in confronting relation. The two nozzles are so constructed that there is a time lag between the initiation of jetting at a first nozzle and the initiation of jetting at a second nozzle.