Abstract: The end effector device includes an end effector including a palm and a plurality of fingers, a drive device, a position shift direction determination unit and a position shift correction unit. Each finger includes a tactile sensor unit capable of detecting external forces in at least three axial directions. The position shift direction determination unit determines in which direction the object being grasped is position-shifted with respect to the fitting recess based on a detection result detected by the tactile sensor unit in a case where at least one of the external forces detected by the tactile sensor unit is a specified value or more. The position shift correction unit moves the palm in a direction opposite to a position shift direction of the object being grasped determined by the position shift direction determination unit.

Abstract: A four-way valve includes a body and a valve component. The body includes a valve chamber and first to fourth communication channels which communicate with the valve chamber at positions arranged in sequence in a predefined rotational direction and cause the valve chamber to communicate with an outside. The valve component is rotatable in the predefined rotational direction and switches the four-way valve to be in at least one of: a first state in which the first and second communication channels communicate with the first region and the third and fourth communication channels communicate with the third region; and a second state in which the second communication channel communicates with the first region, the third communication channel communicates with the second region, and the first and fourth communication channels communicate with the third region.

Abstract: A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.

Abstract: A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.

Abstract: A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector.

Abstract: There is provided a power-supply platform IC for realizing a parameter-deciding power-supply circuit, which, in order to decide a parameter of a power-supply circuit that supplies power to an electronic circuit IC (load), is connected to the electronic circuit IC (load) in place of the power-supply circuit. The power-supply platform IC includes: one or more transistor arrays that include a plurality of transistors operable as switching transistors; and a selecting circuit for selecting a transistor to be operated as a switching transistor from among the plurality of transistors, so as to control a size of the transistor that operates as a switching transistor, wherein the selecting circuit varies the size of the transistor as a parameter of the power-supply circuit, according to an external command.

Abstract: A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.

Abstract: A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.

Abstract: A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector.

Abstract: Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened.

Abstract: A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material.

Abstract: The invention has an object to provide a flow path block capable of reducing pressure loss, providing an extremely long flow path and a complex flow path, and achieving weight reduction, and a manufacturing method thereof. A flow path block (1) comprises a block body (11) formed with through holes (21) and a groove (22) communicating with the through holes (21) and a lid member (12) which covers the groove (22). The groove (22) can be formed with any depth and width by a cutting tool to reduce pressure loss. The groove (22) can also be formed in a long shape by the cutting tool, so that a very long flow path can be provided when the groove (22) is covered with the lid member (12). The groove (22) can be made freely by the cutting tool to provide a complex flow path. Further, the thickness of the block body (11) can be reduced to achieve weight reduction.

Abstract: A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material.

Abstract: A charge pump DC/DC converter circuit of the present invention includes: a monitor circuit that detects a potential difference between terminals of a semiconductor switch that turns on during a first period, so as to output a determining signal corresponding to the potential difference; and each of drive circuits that outputs a drive signal to a semiconductor switch that turns on during a first period, in response to the determining signal. The drive signal increases the on-resistance of the semiconductor switch in proportion to the detected potential difference.

Abstract: There is provided a power-supply platform IC for realizing a parameter-deciding power-supply circuit, which, in order to decide a parameter of a power-supply circuit that supplies power to an electronic circuit IC (load), is connected to the electronic circuit IC (load) in place of the power-supply circuit. The power-supply platform IC includes: one or more transistor arrays that include a plurality of transistors operable as switching transistors; and a selecting circuit for selecting a transistor to be operated as a switching transistor from among the plurality of transistors, so as to control a size of the transistor that operates as a switching transistor, wherein the selecting circuit varies the size of the transistor as a parameter of the power-supply circuit, according to an external command.

Abstract: A charge pump DC/DC converter circuit of the present invention includes: a monitor circuit that detects a potential difference between terminals of a semiconductor switch that turns on during a first period, so as to output a determining signal corresponding to the potential difference; and each of drive circuits that outputs a drive signal to a semiconductor switch that turns on during a first period, in response to the determining signal. The drive signal increases the on-resistance of the semiconductor switch in proportion to the detected potential difference.

Abstract: The present invention is a charge pump circuit provided as a charge pump DC/DC circuit for reducing the in-rush current in an initial operation of a charge pump operation. The charge pump DC/DC converter is realized using a conventional charge pump SW circuit, without any modification to the charge pump SW circuit portion. In the initial operation of the charge pump operation, a predetermined pre-set voltage is inputted that increases with time. With a feedback circuit provided in the charge pump DC/DC converter, charging of output capacitor C of power supply voltage VIN is allowed if the output voltage is below the pre-set voltage, and is disallowed if the output voltage exceeds the pre-set voltage. By setting a pattern of increase of the pre-set voltage during manufacture or use, the rate of increase of the output voltage can be reduced.

Abstract: Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard-interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened.

Abstract: A power-on reset circuit comprises a power supply voltage detection circuit that detects a rise of a power supply voltage and that changes a logic level of a first internal node; a capacitor charge/discharge circuit that charges and discharges a capacitor according to the first internal node level and that in an event that the power supply voltage is reduced, discharges the capacitor to follow the event; and a reset pulse generation circuit that before the power supply voltage rises higher than the predetermined voltage, outputs a first output voltage to an output node and that after the power supply voltage has risen higher than the predetermined voltage, outputs a second output voltage to the output node upon detecting that a charge level of the capacitor has become higher than a charge level detection voltage.

Abstract: A flow controller and a flow controlling method are adapted to be released from conventional restrictions by using a novel type called a pulse shot type. A pulse shot (opening/closing operation of a first cutoff valve (12) and, after that, opening/closing operation of a second cutoff valve (17)) is repeated. Simultaneously, a volume flow Q of process gas exhausted from the second cutoff valve (17) per unit time on the basis of after-filling pressure and after-exhaust pressure of the process gas in a gas filling capacity (13) measure by a pressure sensor (14). Furthermore, a mode of the pulse shot is changed to control the volume flow Q of the process gas exhausted from the second cutoff valve (17) per unit time.