Abstract: An ultrasonic cleaning apparatus including: a cleaning tank for storing a cleaning liquid; an object-to-be-processed holder for insertion into the cleaning tank, the holder holding an object to be processed and immersing the object into the cleaning liquid; a vibrator disposed on a bottom part of the cleaning tank; and an ultrasonic oscillator configured to make the vibrator ultrasonically vibrate. In the cleaning tank, a lateral holding member configured to hold the object is disposed. The holder is configured to be laterally moved by a driving apparatus. The control device is configured to control the driving apparatus such that the holder is laterally moved after the object has been held by the lateral holding member, and the control device is configured to control the ultrasonic oscillator such that the vibrator is made to ultrasonically vibrate so that the ultrasonic vibration from the vibrator is propagated to the object.

Abstract: The signal source generates a signal of a frequency higher than the vibration frequency of the slider of the hard disk drive, and supplies it to one end of the slider and the disk of the hard disk drive. The detector detects a signal output from the other end of the slider and the disk, and outputs a change in the capacitance between the slider and the disk as a voltage when the hard disk drive receives an impact.

Abstract: A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.

Abstract: An ultrasonic cleaning apparatus including: a cleaning tank for storing a cleaning liquid; an object-to-be-processed holder for insertion into the cleaning tank, the holder holding an object to be processed and immersing the object into the cleaning liquid; a vibrator disposed on a bottom part of the cleaning tank; and an ultrasonic oscillator configured to make the vibrator ultrasonically vibrate. In the cleaning tank, a lateral holding member configured to hold the object is disposed. The holder is configured to be laterally moved by a driving apparatus. The control device is configured to control the driving apparatus such that the holder is laterally moved after the object has been held by the lateral holding member, and the control device is configured to control the ultrasonic oscillator such that the vibrator is made to ultrasonically vibrate so that the ultrasonic vibration from the vibrator is propagated to the object.

Abstract: The signal source generates a signal of a frequency higher than the vibration frequency of the slider of the hard disk drive, and supplies it to one end of the slider and the disk of the hard disk drive. The detector detects a signal output from the other end of the slider and the disk, and outputs a change in the capacitance between the slider and the disk as a voltage when the hard disk drive receives an impact.

Abstract: A second line 44 is branched from a first line 22 connected to a processing part 10 configured to process a wafer W. A plurality of third lines (an ammonia-water supply line 48, a hydrochloric-acid supply line 52, and a hydrofluoric-acid line 56) are branched from the second line 44. The third lines are respectively provided with valves 48a, 52a, and 56a at locations branched from the second line 44. Chemical-liquid supply sources (an ammonia-water supply source 46, a hydrochloric-acid supply source 50, and a hydrofluoric-acid supply source 54) are connected to the respective third lines, whereby chemical liquids can be supplied from these chemical-liquid supply sources to the respective third lines.

Abstract: Bismuth dithiocarbamate (BiDTC) is added to a urea grease containing a lubricating base oil having a poly-?-olefin synthetic oil or a diphenyl ether synthetic oil and a diurea thickening agent, or a fluorine grease containing a lubricating base oil having fluorinated synthetic oil and a polytetrafluoroethylene thickening agent. By taking such constitution as described above, a surface film is formed on a surface of a raceway of any one of inner and outer rings or a surface of a rolling element of a bearing. Therefore, the rolling bearing in which a grease composition having the constitution is packed can maintain an excellent lubricity for a long period of time even under severe conditions such as a high rotation, a high temperature and a heavy load. Further, the grease composition for the rolling bearing is low in harmfulness to a human body and gives little load to the environment.

Abstract: A film composed of grease, or a film composed of a thickener for grease, is formed on a portion of the surface of each of components constituting a bearing, the portion being opposed to a polymeric lubricant, whereby sliding frictional resistance between the bearing components and the polymeric lubricant is reduced. In the formation of the film, the assembled bearing in which the film has not yet been formed is immersed into a liquid which is obtained by diluting the grease or the thickener for grease with a solvent, and the solvent is then dried, thereby to highly reproducibly form the film of uniform thickness. In an assembled double-row self-aligning roller bearing wherein an outer race is swingable in a direction perpendicular to the center axis of the bearing, raw materials of a polymeric lubricant are poured into and solidified in two regions of an annular space between the inner and outer races.

Abstract: Bismuth dithiocarbamate (BiDTC) is added to a urea grease containing a lubricating base oil having a poly-?-olefin synthetic oil or a diphenyl ether synthetic oil and a diurea thickening agent, or a fluorine grease containing a lubricating base oil having fluorinated synthetic oil and a polytetrafluoroethylene thickening agent. By taking such constitution as described above, a surface film is formed on a surface of a raceway of any one of inner and outer rings or a surface of a rolling element of a bearing. Therefore, the rolling bearing in which a grease composition having the constitution is packed can maintain an excellent lubricity for a long period of time even under severe conditions such as a high rotation, a high temperature and a heavy load. Further, the grease composition for the rolling bearing is low in harmfulness to a human body and gives little load to the environment.

Abstract: In a grease composition which essentially comprises a base oil and a thickener, a mixture of a urea compound and lithium soap is blended as the thickener. The content of the urea compound in the thickener is preferably set to 20 to 80 wt %. As the urea compound, an alkyl group- or cyclohexyl group-terminated diurea compound, or, particularly, a diurea compound in which the diisocyanate component is 4,4′-diphenylmethane diisocyanate is preferably used. In a rolling bearing which is lubricated by the grease composition, the acoustic performance is largely improved by a synergistic action of the lithium soap and the urea compound, and simultaneously also the anti-fretting property is enhanced by an action of the urea compound.

Abstract: The invention provides: a polymeric lubricant packed bearing in which the sliding frictional resistance between a polymeric lubricant, and rolling elements or inner and outer races is sufficiently reduced, the rotational torque is small, and melting or damage of the polymeric lubricant due to self heating, and oxidation degradation of the base oil of the polymeric lubricant can be surely prevented from occurring; a method of efficiently producing such a polymeric lubricant packed bearing; and a method which can produce easily and stably a polymeric lubricant packed bearing having a structure in which a polymeric lubricant packed between inner and outer races of a double-row self-aligning roller bearing is axially divided in a gap between two rolling element rows so as to be independently rotatable.

Abstract: It is an object of the invention to provide a grease composition which can improve both the acoustic performance and anti-fretting property of a ball bearing, and a rolling bearing which is lubricated by such a grease composition.

Abstract: A rolling bearing has first and second races that define an annular space therebetween. A plurality of rolling elements roll on the races. The space is filled with a solid lubricant composition containing a resin polymer. The space is preferably sealed with a pair of sealing members which are interposed between the races and a region between the lubricant composition and the corresponding sealing member in the space is filled with grease.

Abstract: The present invention is directed to a grease for a rolling bearing containing poly-&agr;-olefin synthetic oil or diphenyl ether synthetic oil, a diurea thickening agent, and an organic antimony compound or an organic molybdenum compound. The present invention is also directed to a rolling bearing in which the grease for a rolling bearing is sealed. The organic antimony compound or the organic molybdenum compound reacts with a metal composing inner and outer bearing rings and a rolling element to form a compound film contributing to the reduction of the force in the tangential direction on a raceway surface of the bearing rings and a surface of the rolling element, thereby preventing an excessively large force in the tangential direction under high-speed rotation. This enables to lengthen the life of the rolling bearing used under particularly severe conditions such as high temperature, high-speed rotation and high road.

Abstract: A shield case which is capable of significantly reducing the level of spurious radiation which may be emitted out through a through-hole formed in the shield case is provided. A recess 8 a few cm wide and a few mm deep is formed in that portion of the interior surface of the shield case 2 surrounding the through-hole 6. A material providing a resistance to the flow of radio frequency current 7 passing through a printed circuit board 1, that is, a material 9 giving a significant transmission loss to a radio frequency signal is embedded in the recess 8 to prevent the radio frequency current passing through the printed circuit board 1 from flowing into the through-hole 6. In addition, such material 9 giving a significant transmission loss is deposited on the inner peripheral surface of the through-hole to inhibit the radio frequency current 7 from flowing through the through-hole.

Abstract: There is provided is a conductive lubricant for a fluid dynamic bearing being able to ground static electricity occurring at the fluid dynamic bearing without impairing the performance of the fluid dynamic bearing. This conductive lubricant for a fluid dynamic bearing is provided by an ester base oil such as dioctyl sebacate that concurrently has heat resistance, a small quantity of evaporation, low cost and wettability to metal, which are necessary for a fluid dynamic bearing. The conductive lubricant contains 0.1 to 5 percent by weight of antistatic additive such as alkyl aryl sulfonate having an affinity for this ester base oil. Therefore, this antistatic additive imparts conductivity to the base oil, by which the static electricity occurring at the fluid dynamic bearing can be grounded without impairing the lubrication performance.

Abstract: It is to provide a multi-signal generator which is able to lower the cost thereof by performing modulation in a low frequency range and using an output of a frequency synthesizer commonly to all channels. The multi-signal generator for generating a multi-signal which is a combination of a plurality of output signals generated by a plurality of channels each of which is using a frequency conversion method wherein a modulated carrier signal and a local signal are frequency converted by a mixer, wherein an output frequency from at least one frequency synthesizer is commonly used as a frequency source for the carrier signal or local signal by all the channels.

Abstract: A rolling bearing has a pair of races, rolling elements and a cage. A region defined between the pair of races is filled with a solid lubricating composition. A film including a lubricating component is formed in a clearance between the cage and the rolling elements, whereby the solid lubricating composition is prevented from being interposed therebetween. The film including a lubricating component is formed prior to the process of filling the region with the lubricating composition to solidify the lubricating composition. It is preferable that the film including a lubricating component is formed on the respective surfaces in contact with the solid lubricating composition of the races, the rolling elements and the cage.

Abstract: The present invention provides a grease composition comprising a lubricating oil and a thickener, characterized in that the thickener is a diurea compound prepared by reacting a diisocyanate compound with cyclohexylamine and monoalkylphenylamine wherein the alkyl portion has 8 to 16 carbon atoms.