Abstract: Provided is a vaporizable source material container having excellent corrosion resistance. The vaporizable source material container for storing and vaporizing a metal halide for thin film deposition S includes: a container main body including a container wall; a lid body provided with a carrier gas inlet and a mixed gas outlet; fastening members for fixing the container main body with the lid body; and joint members, wherein the container wall of the container main body is fabricated of copper with 99 to 99.9999% purity, aluminum with 99 to 99.9999% purity, or titanium with 99 to 99.9999% purity, and the container main body, the lid body, the fastening members and the joint members are each treated by fluorocarbon polymer coating and/or by electrolytic polishing.

Abstract: A traffic signal control apparatus capable of controlling signal light colors at a target intersection includes: an acquisition unit configured to acquire positional information of a tail-end vehicle among platoon vehicles traveling on an inflow road of the target intersection, and a vehicle speed of the platoon vehicles; and a control unit configured to, when the tail-end vehicle cannot pass a stop line of the target intersection by the time a remaining green interval elapses, execute preferential control that allows the platoon vehicles to preferentially pass through the target intersection by extending a clearance interval of the target intersection.

Abstract: A multi-charged particle beam writing apparatus includes a movable stage to mount a substrate thereon, a shot data generation circuit to generate shot data of each shot of multiple charged particle beams, a shift amount calculation circuit to calculate a shift amount for collectively correcting positions of all of the multiple charged particle beams of the k-th shot, based on parameters related to at least the (k+1)th and subsequent shots (k being a natural number) of the multiple charged particle beams, and a writing mechanism including a deflector for deflecting the multiple charged particle beams, and to perform the k-th shot onto the substrate with the multiple charged particle beams while shifting the all of the multiple charged particle beams of the k-th shot by collective deflection according to the shift amount.

Abstract: A semiconductor device includes a semiconductor substrate on which a first insulation film is provided. A first conductive film is on the first insulation film. First electrode films are on the first conductive film and stacked. A charge accumulation member is between one of the first electrode films and the semiconductor member. The first conductive film includes a main body arranged below the first electrode films and an outer peripheral portion provided in an outer periphery of the main body to be apart from the main body. First and second slits are alternately provided in the outer peripheral portion, and extend along the outer periphery of the main body. The first and second slits are apart from each other as viewed in the stacking direction, and partly overlap each other as viewed in a first direction directed from the main body toward the outer peripheral portion.

Abstract: Provided is a solid vaporization/supply system of metal halide for thin film deposition that reduces particle contamination. The system includes a vaporizable source material container for storing and vaporizing a metal halide and buffer tank coupled with the vaporizable source material container. The vaporizable source material container includes a container main body with a container wall; a lid body; fastening members; and joint members, wherein the container wall is configured to have a double-wall structure composed of an inner wall member and outer wall member, which allows a carrier gas to be led into the container main body via its space. The container wall is fabricated of 99 to 99.9999% copper, 99 to 99.9996% aluminum, or 99 to 99.9996% titanium, and wherein the container main body, the lid body, the fastening members, and the joint members are treated by fluorocarbon polymer coating and/or by electrolytic polishing.

Abstract: An information generating apparatus includes: an information managing unit that associates and manages an image obtained by photographing skin of a person, marking information indicating one or more markings that one or more operators perform with respect to one or more characteristic parts of skin in the image, and amendment information indicating amendment that a specialist makes to the marking information; and a marking-UI processing unit that superimposes and displays the one or more markings, indicated by the marking information, and the amendment, indicated by the amendment information, on the image.

Abstract: A wiper blade includes a wiper lever assembly with a tournament structure. The wiper lever assembly includes a main lever and a pair of movable covers. The two length direction sides of the main lever and the movable covers are respectively formed with fin surfaces each having a downward gradient on progression toward a vehicle front side, and main housing compartments and movable housing compartments that are open toward a wiping surface. A pair of yoke levers are respectively housed spanning inside the main housing compartments and inside the movable housing compartments, and are coupled so as to be capable of pivoting to the main lever and to the movable covers. The main housing compartments, the movable housing compartments, and the yoke levers each has a greater height dimension at a rear side than at a front side.

Abstract: A handlebar assembly is basically provided with a handlebar and a support. The handlebar has an outer circumferential surface and an arrangement area disposed inside the outer circumferential surface. The arrangement area is configured to arrange an electric switch unit at least partially inside the outer circumferential surface. The support is at least partially disposed in the arrangement area and supporting the electric switch unit to receive an operating force applied to operate the electric switch unit.

Abstract: A traffic signal control apparatus capable of controlling signal light colors at a target intersection and a downstream intersection, and includes: an acquisition unit configured to acquire a platoon length of platoon vehicles that are traveling on an inflow road of the target intersection, and an empty space length in a planned traveling route of the platoon vehicles; and a control unit configured to determine whether or not to control the signal light color at the downstream intersection corresponding to the planned traveling route of the platoon vehicles, according to a result of comparison between the platoon length and the empty space length.

Abstract: A temperature sensor includes an insulating substrate made of ceramics and having a first surface and a second surface an electrode including a cathode electrode and an anode electrode, which are disposed on the first surface of the insulating substrate; a resistance wire portion including one or more resistance wires inside the insulating substrate, a cathode end portion of the resistance wire portion being electrically connected to the cathode electrode, and an anode end portion of the resistance wire portion electrically connected to the anode electrode; and one or more metal layers connected to a portion in a path through which current flows between the cathode electrode and the anode electrode, and the portion having a potential identical with or lower than that of the resistance wire portion.

Abstract: In one embodiment, a multi-beam writing method includes forming a beam array of a multi-beam, assigning sub-beam arrays to each of a plurality of sub-stripe regions, the sub-stripe regions being obtained by dividing a region on the substrate, and the sub-beam arrays being obtained by dividing the beam array, calculating an irradiation time modulation rate being used for each beam belonging to each of the sub-beam arrays, calculating a weight for each of the sub-beam arrays based on the irradiation time modulation rate for each of the beams belonging to a group of the sub-beam arrays, and assigning the calculated weight to the sub-beam array, and performing multiple writing on each of the sub-stripe regions by performing writing on each of the sub-stripe regions with the sub-beam arrays, based on the weight assigned to the sub-beam array and the irradiation time modulation rate of the beam belonging to the sub-beam array.

Abstract: To provide a highly browsable data processing device or a highly portable data processing device, a data processing device including the following is devised: an input/output unit provided with a display portion which can be folded and unfolded and a sensor portion that can sense the folded and unfolded states of the display portion and can supply data on fold, and an arithmetic unit that stores a program for executing different processing depending on the data on fold.

Abstract: A multi-beam writing method includes performing the k-th tracking control (k being a natural number) by beam deflection in order to follow movement of the stage while collecting each beam of multiple beams, performing a plurality of shots of the multiple beams by the each beam simultaneously shifting in a rectangular or square irradiation region, which is surrounded by the size of the beam pitch and corresponding to the each beam, while performing the k-th tracking control, and returning, after the period of the k-th tracking control has passed, the tracking position to a position which is obtained by adding an offset of an integer multiple of the size of the beam pitch to the tracking starting position of the k-th tracking control where the k-th tracking control started, to be as a starting position of the (k+1)th tracking control.

Abstract: In one embodiment, a multi-beam writing method includes acquiring a plurality of pieces of position deviation data corresponding to a plurality of parameter values of a parameter that change position deviation amount of each beam of multi-beam irradiated on a substrate, calculating a plurality of pieces of reference coefficient data corresponding to each of the plurality of pieces of position deviation data, calculating coefficient data corresponding to a parameter value at an irradiation position of the multi-beam on the substrate using the plurality of pieces of reference coefficient data corresponding to the plurality of parameter values, modulating an irradiation amount of each beam of the multi-beam for each shot using the coefficient data, and writing a pattern by irradiating the substrate with each beam of at least a part of the multi-beam having the modulated irradiation amounts.

Abstract: A driving device for an electric truck which can obtain good ride quality by decreasing the unsprung weight while achieving the adequate fuel efficiency performance by improving the power transmission efficiency and which can improve the mountability of a battery. The driving device includes a driving unit that accommodates therein a motor, a gearbox, and a differential device. The driving unit is supported by a first support part with respect to a ladder frame. Drive shafts coupled to the differential device are accommodated in hollow members. The hollow members are elastically supported by a second support part with respect to the ladder frame.

Abstract: Provided is a multi-charged-particle beam writing apparatus including: an emitter emitting a charged particle beam; a first shaping aperture array substrate having a plurality of first apertures and forming first multiple beams by passing a part of the charged particle beam through the first apertures, respectively; a second shaping aperture array substrate having second apertures formed at positions corresponding to the respective first apertures and forming second multiple beams by passing at least a part of each of the first multiple beams through corresponding the second apertures, respectively; a blanking aperture array having third apertures formed at positions corresponding to the respective second apertures and including blankers disposed in the respective third apertures to perform blanking deflection on the respective beams of the corresponding second multiple beams; a movable mechanism moving at least one of the first shaping aperture array substrate and the second shaping aperture array substrate;

Abstract: A set of aperture substrates for multiple beams includes a first shaping aperture array substrate including a plurality of first openings, the first shaping aperture array substrate being irradiated with a charged particle beam in a region in which the first openings are formed whereby first multiple beams are formed with a part of the charged particle beams having passed respectively through the first openings, and a second shaping aperture array substrate including a plurality of second openings through which corresponding first multiple beam passes respectively whereby second multiple beams are formed. Each of the second multiple beams is shaped by a pair of opposite sides of the first opening and a pair of opposite sides of the second opening.

Abstract: In one embodiment, a multi-beam blanking device includes a semiconductor substrate, an insulating film that is disposed on the semiconductor substrate, an antistatic film that is disposed on the insulating film, a plurality of cells each of which is related to a through-hole that penetrate the semiconductor substrate and the insulating film and each of which includes a blanking electrode and a ground electrode that are disposed on the insulating film, and a ground wiring line that is disposed in the insulating film. The antistatic film and the ground wiring line are connected to each other at a joint that extends through the insulating film on the ground wiring line.

Abstract: A semiconductor device includes a substrate, a first insulating layer, a second insulating layer above the first insulating layer, a void space between the first and second insulating layers, and contact electrodes extending through the first insulating layer, the void space, and the second insulating layer. Each of the contact electrodes includes a first end facing the substrate, a second end opposite to the first end, and a first width portion between the first end and the second end. The first width portion has a width in a second direction parallel to the substrate that is greater than a width of the first end in the second direction and a width of the second end in the second direction. The first width portion is within the void space.

Abstract: An abnormal part display apparatus, an abnormal part display system, an abnormal part displaying method, and an abnormal part displaying program capable of improving visibility of an abnormal part in an object are provided. An abnormal part display apparatus 11 according to the present disclosure includes an acquisition unit 111 configured to acquire point group data of an object obtained by measuring the object by using a laser ranging apparatus 12, and a photograph image of the object obtained by photographing the object by using a photographing apparatus 13, a display unit 112 configured to display the point group data and the photograph image on a predetermined screen, and a control unit 113 configured to control the point group data and the photograph image to be displayed in the display unit 112.