Abstract: An illumination optical system can form a pupil intensity distribution with a desired beam profile. The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a spatial light modulator which has a plurality of optical elements arrayed on a predetermined surface and individually controlled and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system; a divergence angle providing member which is arranged in a conjugate space including a surface optically conjugate with the predetermined surface and which provides a divergence angle to an incident beam and emits the beam; and a polarizing member which is arranged at a position in the vicinity of the predetermined surface or in the conjugate space and which changes a polarization state of a partial beam of a propagating beam propagating in an optical path.

Abstract: There is provided an optical characteristic measuring method for measuring an optical characteristic of an optical system which forms, on a second plane, an image of an object arranged on a first plane, the optical characteristic measuring method including: arranging, on the first plane, a first area through which a measuring light passes or by which the measuring light is reflected; arranging a second area, through which the measuring light passes or by which the measuring light is reflected, on the second plane at a position corresponding to the first area; and detecting, via one of the first area and the second area, a light amount of the measuring light via the optical system and the other of the first area and the second area; wherein at least one of the first area and the second area has a shape such that a light amount, of the measuring light which passes or which is reflected via the optical system, is changed depending on the optical characteristic.

Abstract: [Object] Copy processing time is reduced by selecting an optimum copy method according to the content of difference data and the status of a system. [Solution] When the primary disk storage apparatus and the secondary disk storage apparatus are separated from each other after dual writing operation and a copy pair regarding which data is written to only the primary disk storage apparatus is to be resynchronized, the host computer selects either host-computer-based copy processing executed via the host computer or inter-disk-control-device copy processing executed between the first disk control device and the second disk control device, on the basis of information about copy processing including a difference data amount between the primary disk storage apparatus and the secondary disk storage apparatus, a data transfer amount between the respective apparatuses, and performance information of each apparatus.

Abstract: An illumination optical system can form a pupil intensity distribution with a desired beam profile. The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a spatial light modulator which has a plurality of optical elements arrayed on a predetermined surface and individually controlled and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system; a divergence angle providing member which is arranged in a conjugate space including a surface optically conjugate with the predetermined surface and which provides a divergence angle to an incident beam and emits the beam; and a polarizing member which is arranged at a position in the vicinity of the predetermined surface or in the conjugate space and which changes a polarization state of a partial beam of a propagating beam propagating in an optical path.

Abstract: [Object] Copy processing time is reduced by selecting an optimum copy method according to the content of difference data and the status of a system. [Solution] When the primary disk storage apparatus and the secondary disk storage apparatus are separated from each other after dual writing operation and a copy pair regarding which data is written to only the primary disk storage apparatus is to be resynchronized, the host computer selects either host-computer-based copy processing executed via the host computer or inter-disk-control-device copy processing executed between the first disk control device and the second disk control device, on the basis of information about copy processing including a difference data amount between the primary disk storage apparatus and the secondary disk storage apparatus, a data transfer amount between the respective apparatuses, and performance information of each apparatus.

Abstract: An illumination optical system can form a pupil intensity distribution with a desired beam profile. The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a spatial light modulator which has a plurality of optical elements arrayed on a predetermined surface and individually controlled and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system; a divergence angle providing member which is arranged in a conjugate space including a surface optically conjugate with the predetermined surface and which provides a divergence angle to an incident beam and emits the beam; and a polarizing member which is arranged at a position in the vicinity of the predetermined surface or in the conjugate space and which changes a polarization state of a partial beam of a propagating beam propagating in an optical path.

Abstract: An illumination optical system can form a pupil intensity distribution with a desired beam profile. The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a spatial light modulator which has a plurality of optical elements arrayed on a predetermined surface and individually controlled and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system; a divergence angle providing member which is arranged in a conjugate space including a surface optically conjugate with the predetermined surface and which provides a divergence angle to an incident beam and emits the beam; and a polarizing member which is arranged at a position in the vicinity of the predetermined surface or in the conjugate space and which changes a polarization state of a partial beam of a propagating beam propagating in an optical path.

Abstract: A microscope apparatus can generate information of a super-resolved image at high speed. For that purpose, the microscope apparatus of the present invention is equipped with an image-forming optical system for forming an intermediate image of light emitted from a specimen, a relay optical system for forming an image of the intermediate image, an illuminating optical system that jointly owns an optical path of the image-forming optical system and illuminates the specimen through the optical path of the image-forming optical system, and a spatial modulator disposed on a formation plane of the intermediate image. In this microscope apparatus, the specimen is subjected to structured illumination by an image of the spatial modulator. Light from the specimen which is modulated by the structured illumination is automatically remodulated in the spatial modulator.

Abstract: There is provided an optical characteristic measuring method for measuring an optical characteristic of an optical system which forms, on a second plane, an image of an object arranged on a first plane, the optical characteristic measuring method including: arranging, on the first plane, a first area through which a measuring light passes or by which the measuring light is reflected; arranging a second area, through which the measuring light passes or by which the measuring light is reflected, on the second plane at a position corresponding to the first area; and detecting, via one of the first area and the second area, a light amount of the measuring light via the optical system and the other of the first area and the second area; wherein at least one of the first area and the second area has a shape such that a light amount, of the measuring light which passes or which is reflected via the optical system, is changed depending on the optical characteristic.

Abstract: A microscope apparatus can generate information of a super-resolved image at high speed. For that purpose, the microscope apparatus of the present invention is equipped with an image-forming optical system for forming an intermediate image of light emitted from a specimen, a relay optical system for forming an image of the intermediate image, an illuminating optical system that jointly owns an optical path of the image-forming optical system and illuminates the specimen through the optical path of the image-forming optical system, and a spatial modulator disposed on a formation plane of the intermediate image. In this microscope apparatus, the specimen is subjected to structured illumination by an image of the spatial modulator. Light from the specimen which is modulated by the structured illumination is automatically remodulated in the spatial modulator.

Abstract: A method and system is provided that takes advantage of the atmospheric transmission properties of the Hydrogen Lyman-? radiation line (121.6 nm wavelength) to illuminate a sample with high energy VUV photons at least partially in an atmospheric environment. Thus, according to the principles of the present invention, a sample is illuminated by radiation at the Hydrogen Lyman-? radiation line (121.6 nm wavelength), at least partially in an atmospheric environment, and luminescent radiation from the sample at longer wavelengths is detected. The high energy illuminating photons generate luminescent radiation from the sample at longer wavelengths, typically in the visible wavelength range, and this radiation can then be imaged, e.g. with a normal visible microscope.

Abstract: A special image such as a super-resolution image is obtainable without a microscope of a specialized configuration. A microscope observation method includes: a measurement step for changing the illumination angle of an object and measuring the complex amplitude distribution of each lightwave generated separately on the image surface by each light flux emitted from the object at respective illumination angle values; a calculation step for calculating, according to the data on the complex amplitude distribution of each lightwave, the complex amplitude distribution of the virtual lightwave generated on the image surface when the optical imaging system is replaced by an optical virtual-imaging system having a greater numerical aperture; and an image generation step for generating image data of the virtual image formed on the image surface by the optical virtual-imaging system according to the complex amplitude distribution of the virtual lightwave.

Abstract: A method and apparatus for measuring a wave front aberration of a projection lens with high precision and a related calibration method. The apparatus includes: either a light source and an element producing a first point source in combination with the light source or a first point source generating part; a magnifying projection optical system projecting and magnifying a point image of the first point source projected by a test object; a detector detecting the magnified point image projected and magnified by the magnifying projection optical system; a supporting member supporting the magnifying projection optical system and the detector; a calculating part calculating a wave front aberration; and either a second point source producing element or a second point source generating part.

Abstract: A microscope having little damage such as deformation, discoloration or the like given to a sample is disclosed. This microscope comprises an illuminance reducing unit for reducing illuminance of an illumination light on the sample. Assuming that a time width where illuminance is at a level enough for displaying an image of the sample is TF, a time width where illuminance is lower than the level enough for displaying an image of the sample is TN, and a value &agr; is as follows: &agr;=TF/(TF+TN) the value &agr; is changed according to a velocity of a stage or the like. A monitor displays a still picture of the sample for a period of TN, the still picture being one before the time width TN.

Abstract: An optical disc consisting of a substrate and at least a recording layer formed on the substrate is recycled by peeling off the recording layer from the substrate; and bonding another substrate having a recording layer formed thereon to the substrate from which the recording layer has been removed, whereby a renewed optical disc is provided.

Abstract: A microscope having little damage such as deformation, discoloration or the like given to a sample is disclosed. This microscope comprises an illuminance reducing unit for reducing illuminance of an illumination light on the sample. Assuming that a time width where illuminance is at a level enough for displaying an image of the sample is TF, a time width where illuminance is lower than the level enough for displaying an image of the sample is TN, and a value &agr; is as follows: &agr;=TF/(TF+TN) the value &agr; is changed according to a velocity of a stage or the like. A monitor displays a still picture of the sample for a period of TN, the still picture being one before the time width TN.

Abstract: A microscope having little damage such as deformation, discoloration or the like given to a sample is disclosed. This microscope comprises an illuminance reducing unit for reducing illuminance of an illumination light on the sample.

Abstract: Image-formation methods and photosensitive materials used in such methods are disclosed that form very high-resolution patterns. The photosensitive materials comprise an ingredient that is triggered by a radical to undergo a latent-image-forming reaction. The radicals are produced by photons from an illumination light. Alternatively, the ingredient is triggered by a reactive-intermediate compound that is activated by the exposure-produced radical. The photosensitive materials possess a non-linear sensitivity characteristic in which the latent-image reaction density increases according to the mth power (m>1) of the incident light intensity. The photosensitive material can be applied to a sensitive substrate for exposure. Multiple exposures of the sensitive substrate are performed using a projected mask pattern in the presence of a radical deactivator.

Abstract: A linear/rotary actuator capable of carrying out both linear motion and rotary motion either individually or concurrently as desired while controlling both motions as desired. A rotary driving motor includes a hollow shaft. When the rotary driving motor rotates a third nut fitted on a spline section of the rotary driving motor, an output shaft rotatably fitted on a linear shaft through bearings is rotated. The linear shaft 21 is provided thereon with a threaded section. A spline section and a first nut is threadedly fitted on the threaded section and a second nut kept stationary is fitted on the spline section. The first nut is rotated while being fixed in a hollow shaft of a linear driving motor. Rotation of the linear driving motor leads to rotation of the first nut, resulting in the linear shaft 21 being linearly moved in an axial direction thereof, so that the output shaft may be linearly moved.

Abstract: After a photoresist is applied onto a wafer, a contrast enhancement material (CEM) layer is applied onto this photoresist. A pattern is projected through this CEM layer onto the photoresist. Next, this CEM layer is removed from the photoresist and thereafter a new CEM layer is again applied onto the photoresist. Another pattern is projected through this new CEM layer onto the photoresist, whereby the photoresist is exposed in accordance with a composite pattern of the two patterns. This composite pattern can surpass the resolution limit of projection optical system.