Patents by Inventor Hisashi Higuchi

Hisashi Higuchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240153781
    Abstract: Embodiments of methods are provided for thermal dry etching of a ruthenium (Ru) metal layer. In the disclosed embodiments, a substrate containing a Ru metal layer formed thereon is exposed to a gas pulse sequence, while the substrate is held at a relatively high substrate temperature (e.g., a temperature greater than or equal to about 160° C.), to provide thermal etching of the Ru metal layer. As described further herein, the gas pulse sequence may generally include a plurality of gas pulses, which are supplied to the substrate sequentially with substantially no overlap between gas pulses. The gas pulses supplied to the substrate form: (i) volatile reaction products that are vaporized from the Ru surface, and (ii) non-volatile oxide surface layers that are removed from the Ru surface by the next gas pulse, resulting in atomic layer etching (ALE) of the Ru metal layer.
    Type: Application
    Filed: October 31, 2023
    Publication date: May 9, 2024
    Inventors: Hisashi Higuchi, Kai-Hung Yu, Cory Wajda, Gyanaranjan Pattanaik, Kandabara Tapily, Gerrit Leusink, Robert Clark
  • Publication number: 20220139776
    Abstract: A method for filling recessed features with a low-resistivity metal includes providing a patterned substrate containing a recessed feature formed in a first layer and a second layer that is exposed in the recessed feature, pre-treating the substrate with a surface modifier that increases metal deposition selectivity on the second layer relative to on the first layer, and depositing a metal layer on the substrate by vapor phase deposition, where the metal layer is preferentially deposited on the second layer in the recessed feature. The method further includes removing metal nuclei deposited on the first layer, including on a field area and on sidewalls of the first layer in the recessed feature, to selectively form the metal layer on the second layer in the recessed feature, where the removing includes exposing the patterned substrate to an etching gas containing ozone.
    Type: Application
    Filed: October 21, 2021
    Publication date: May 5, 2022
    Inventors: Kai-Hung Yu, David L. O'Meara, Hisashi Higuchi, Hirokazu Aizawa, Omid Zandi, Cory Wajda, Gerrit J. Leusink
  • Patent number: 10734221
    Abstract: A method of manufacturing a semiconductor device having a metal oxide film with workpiece accommodated in a chamber, includes: supplying a precursor gas containing a metal complex into the chamber to form a precursor layer on the workpiece from the precursor gas; supplying an oxidizing gas into the chamber to oxidize the precursor layer so that a metal oxide layer is formed, the oxidizing gas being a gas containing H2O or a gas having a functional group containing hydrogen atoms in the metal complex and containing an oxidant to generate H2O by reaction with the functional group; supplying an H2O removal gas containing alcohols or amines into the chamber to remove H2O adsorbed onto the metal oxide layer; and executing a plurality of cycles each including the supplying a precursor gas and the supplying an oxidizing gas. At least some of the cycles includes the supplying an H2O removal gas.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: August 4, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Taiki Kato, Hisashi Higuchi, Kosuke Yamamoto, Ayuta Suzuki, Kazuyoshi Matsuzaki, Yuji Seshimo, Susumu Takada, Yoshihiro Takezawa
  • Publication number: 20190013195
    Abstract: A method of manufacturing a semiconductor device having a metal oxide film with workpiece accommodated in a chamber, includes: supplying a precursor gas containing a metal complex into the chamber to form a precursor layer on the workpiece from the precursor gas; supplying an oxidizing gas into the chamber to oxidize the precursor layer so that a metal oxide layer is formed, the oxidizing gas being a gas containing H2O or a gas having a functional group containing hydrogen atoms in the metal complex and containing an oxidant to generate H2O by reaction with the functional group; supplying an H2O removal gas containing alcohols or amines into the chamber to remove H2O adsorbed onto the metal oxide layer; and executing a plurality of cycles each including the supplying a precursor gas and the supplying an oxidizing gas. At least some of the cycles includes the supplying an H2O removal gas.
    Type: Application
    Filed: July 6, 2018
    Publication date: January 10, 2019
    Inventors: Taiki KATO, Hisashi HIGUCHI, Kosuke YAMAMOTO, Ayuta SUZUKI, Kazuyoshi MATSUZAKI, Yuji SESHIMO, Susumu TAKADA, Yoshihiro TAKEZAWA
  • Publication number: 20180226252
    Abstract: There is provided a method for planarizing irregularities in a surface of a grapheme layer formed on a substrate, including: planarizing the grapheme layer by removing graphene constituting a convex portion in the surface of the grapheme layer by anisotropically etching the grapheme layer using a plasma etching in an in-plane direction from an edge portion of the graphene.
    Type: Application
    Filed: February 5, 2018
    Publication date: August 9, 2018
    Inventors: Ryota IFUKU, Hisashi HIGUCHI, Takashi MATSUMOTO
  • Patent number: 8950861
    Abstract: An aspect of the present invention relates to an eyeglass lens, which comprises an outermost layer in the form of a water-repellent vapor deposition film formed by vapor depositing a vapor deposition material in the form of a perfluoropolyether-modified silane compound denoted by general formula (I): wherein, in general formula (I), R1 denotes an alkyl group with 1 or 2 carbon atoms, x denotes 1 or 0, R2 denotes an alkoxy group with 1 or 2 carbon atoms, R3 denotes a hydrogen atom or a phenyl group, and n denotes an integer ranging from 10 to 40.
    Type: Grant
    Filed: June 29, 2012
    Date of Patent: February 10, 2015
    Assignee: HOYA Lens Thailand Ltd.
    Inventors: Hisashi Higuchi, Kenji Takashiba, Jutathap Wisuthtatip, Toshihide Tsukatani, Xawkat Ahmat, Hirotaka Kinoshita
  • Publication number: 20130342809
    Abstract: An aspect of the present invention relates to an eyeglass lens, which comprises an outermost layer in the form of a water-repellent vapor deposition film formed by vapor depositing a vapor deposition material in the form of a perfluoropolyether-modified silane compound denoted by general formula (I): wherein, in general formula (I), R1 denotes an alkyl group with 1 or 2 carbon atoms, x denotes 1 or 0, R2 denotes an alkoxy group with 1 or 2 carbon atoms, R3 denotes a hydrogen atom or a phenyl group, and n denotes an integer ranging from 10 to 40.
    Type: Application
    Filed: June 29, 2012
    Publication date: December 26, 2013
    Inventors: Hisashi HIGUCHI, Kenji TAKASHIBA, Jutathap WISUTHTATIP, Toshihide TSUKATANI, Xawkat Ahmat, Hirotaka KINOSHITA
  • Patent number: 8227733
    Abstract: A multi-layer photoelectric conversion device and technology is disclosed. A first photoelectric converter is separated from a second photoelectric converter by an insulative layer. The photoelectric converters may be of a variety of types, and the insulative layer provides protection to reduce pinhole faults in the multi-layer photoelectric conversion device.
    Type: Grant
    Filed: March 31, 2009
    Date of Patent: July 24, 2012
    Assignee: KYOCERA Corporation
    Inventors: Hisashi Higuchi, Junji Aranami, Hisashi Sakai, Riichi Sasamori, Seigo Ito
  • Publication number: 20110094797
    Abstract: An electric wire with terminal connector including an electric wire having a core wire including a plurality of wires and a female terminal connector including a wire barrel that is crimped onto the core wire exposed from the electric wire, the following steps are executed. The steps include a step of removing wire insulation covering an outer peripheral surface of the core wire to expose the core wire, a step of holding the exposed core wire with jigs provided in a pair and applying ultrasonic vibration to the core wire via the jigs, and a step of crimping the wire barrel so as to surround a part of the core wire to which the ultrasonic vibration is applied.
    Type: Application
    Filed: November 18, 2009
    Publication date: April 28, 2011
    Applicants: Autonetworks Technologies, Ltd., Sumitomo Wiring Systems, Ltd., Sumitomo Electric Industries, Ltd.
    Inventors: Takuji Otsuka, Hiroki Hirai, Junichi Ono, Tetsuji Tanaka, Hiroki Shimoda, Akira Ito, Hisashi Higuchi, Masahiro Hagi
  • Publication number: 20100243863
    Abstract: A multi-layer photoelectric conversion device and technology is disclosed. A first photoelectric converter is separated from a second photoelectric converter by an insulative layer. The photoelectric converters may be of a variety of types, and the insulative layer provides protection to reduce pinhole faults in the multi-layer photoelectric conversion device.
    Type: Application
    Filed: March 31, 2009
    Publication date: September 30, 2010
    Applicant: Kyocera Corporation
    Inventors: Hisashi Higuchi, Junji Aranami, Hisashi Sakai, Riichi Sasamori, Seigo Ito
  • Publication number: 20090293947
    Abstract: This invention provides a photoelectric transducer comprising a light transparent substrate, a light transparent conductive layer provided on the light transparent substrate and a porous semiconductor layer provided on the light transparent conductive layer. The porous semiconductor layer can absorb coloring matter and contains an electrolyte. The photoelectric transducer further comprises a porous spacer layer containing an electrolyte provided on the porous semiconductor layer and a counter electrode layer provided on the porous spacer layer. According to the above constitution, the thickness of the electrolyte layer is determined by the thickness of the spacer layer containing the electrolyte unlike the prior art technique in which the thickness of the electrolyte layer is determined by spacing between two substrates. Accordingly, the electrolyte layer can be formed thinly and evenly and can enhance the photoelectric conversion efficiency and the reliability.
    Type: Application
    Filed: October 10, 2006
    Publication date: December 3, 2009
    Applicant: KYOCERA CORPORATION
    Inventors: Hisashi Higuchi, Rui Kamada
  • Publication number: 20090133741
    Abstract: A photoelectric conversion device 1 comprises a laminated body comprising a conducting substrate 2, and an opposing electrode layer 3, a porous spacer layer 5 containing an electrolyte 4, a porous semiconductor layer 7 that adsorbs a dye 6 and contains the electrolyte 4 and a light-transmitting conductive layer 8 respectively laminated in this order on the conducting substrate 2. Consequently, the thickness of the electrolyte layer determined previously by a gap between two substrates is allowed to be determined according to the thickness of a spacer layer containing an electrolyte 4, and thus the electrolyte layer can be made both thin and uniform, and the conversion efficiency and reliability can be improved.
    Type: Application
    Filed: September 4, 2006
    Publication date: May 28, 2009
    Applicant: KYOCERA CORPORATION
    Inventors: Hisashi Higuchi, Yuji Kishida, Rui Kamada
  • Publication number: 20080210074
    Abstract: Slide compound saws (1, 100, 150) may include a table (3b) defining a table surface. A saw unit (20) may be pivotable relative to the table surface. A first slide bar (31, 51, 251, 351) may be slidably coupled to the table and may be disposed substantially in parallel with the table surface. The first slide bar may define a first sliding distance (S1) of the saw unit in a direction substantially parallel to the table surface. A sliding device (24, 33, 52, 61, 62, 252, 352) may slidably couple the first slide bar to the saw unit. The sliding device may define a second sliding distance (S2) of the saw unit in the direction substantially parallel to the table surface. Preferably, the saw unit can slide up to a distance S1 plus S2 in the direction substantially parallel to the table surface.
    Type: Application
    Filed: May 13, 2008
    Publication date: September 4, 2008
    Inventor: Hisashi Higuchi
  • Patent number: 7406902
    Abstract: A table saw includes a table for placing a workpiece thereon. A saw unit may be vertically movably supported on the table and may have a saw blade mounted thereon. A battery-driven motor may be mounted on the saw unit for rotatably driving the saw blade. A battery mounting device may be provided for mounting a battery on the table saw.
    Type: Grant
    Filed: May 25, 2005
    Date of Patent: August 5, 2008
    Assignee: Makita Corporation
    Inventors: Yoshinori Shibata, Junichi Masuda, Hisashi Higuchi
  • Patent number: 7387056
    Abstract: Slide compound saws (1, 100, 150) may include a table (3b) defining a table surface. A saw unit (20) may be pivotable relative to the table surface. A first slide bar (31, 51, 251, 351) may be slidably coupled to the table and may be disposed substantially in parallel with the table surface. The first slide bar may define a first sliding distance (S1) of the saw unit in a direction substantially parallel to the table surface. A sliding device (24, 33, 52, 61, 62, 252, 352) may slidably couple the first slide bar to the saw unit. The sliding device may define a second sliding distance (S2) of the saw unit in the direction substantially parallel to the table surface. Preferably, the saw unit can slide up to a distance S1 plus S2 in the direction substantially parallel to the table surface.
    Type: Grant
    Filed: June 7, 2002
    Date of Patent: June 17, 2008
    Assignee: Makita Corporation
    Inventor: Hisashi Higuchi
  • Publication number: 20050257656
    Abstract: A table saw includes a table for placing a workpiece thereon. A saw unit may be vertically movably supported on the table and may have a saw blade mounted thereon. A battery-driven motor may be mounted on the saw unit for rotatably driving the saw blade. A battery mounting device may be provided for mounting a battery on the table saw.
    Type: Application
    Filed: May 25, 2005
    Publication date: November 24, 2005
    Inventors: Yoshinori Shibata, Junichi Masuda, Hisashi Higuchi
  • Publication number: 20030226436
    Abstract: Slide compound saws (1, 100, 150) may include a table (3b) defining a table surface. A saw unit (20) may be pivotable relative to the table surface. A first slide bar (31, 51, 251, 351) may be slidably coupled to the table and may be disposed substantially in parallel with the table surface. The first slide bar may define a first sliding distance (S1) of the saw unit in a direction substantially parallel to the table surface. A sliding device (24, 33, 52, 61, 62, 252, 352) may slidably couple the first slide bar to the saw unit. The sliding device may define a second sliding distance (S2) of the saw unit in the direction substantially parallel to the table surface. Preferably, the saw unit can slide up to a distance S1 plus S2 in the direction substantially parallel to the table surface.
    Type: Application
    Filed: June 7, 2002
    Publication date: December 11, 2003
    Inventor: Hisashi Higuchi
  • Publication number: 20020190841
    Abstract: The material for an electrical resistivity element contains at least 20 mass % and at most 60 mass % of nickel, less than 5 mass % of iron and the remaining part including unavoidable impurities and cobalt. The material for the electrical resistivity element is manufactured by preparing a composition that contains at least 20 mass % and at most 60 mass % of nickel, less than 5 mass % of iron and the remaining part including cobalt, melting and casting the composition to obtain an ingot, removing the surface of the ingot by hot working, and performing cold-working and heat treatment on the hot-worked body.
    Type: Application
    Filed: June 12, 2002
    Publication date: December 19, 2002
    Inventors: Yukifumi Chiba, Hisashi Higuchi
  • Patent number: 6420683
    Abstract: The invention provides a glow plug with an electric resistor made of a material comprising 20 to 60% by weight nickel and less than 5% by weight iron and the balance of cobalt and unavoidable impurities. The glow plug pf the invention attains an excellent quick heating ability, a self-temperature control function, high oxidation resistance, long durability and good workability.
    Type: Grant
    Filed: September 21, 2001
    Date of Patent: July 16, 2002
    Assignee: NGK Spark Plug Co., Ltd.
    Inventors: Yukifumi Chiba, Hisashi Higuchi, Chiaki Kumada, Shunsuke Gotou
  • Publication number: 20020060214
    Abstract: The invention provides a glow plug with an electric resistor made of a material comprising 20 to 60% by weight nickel and less than 5% by weight iron and the balance of cobalt and unavoidable impurities. The glow plug of the invention attains an excellent quick heating ability, a self-temperature control function, high oxidation resistance, long durability and good workability.
    Type: Application
    Filed: September 21, 2001
    Publication date: May 23, 2002
    Applicant: NGK SPARK PLUG CO., LTD
    Inventors: Yukifumi Chiba, Hisashi Higuchi, Chiaki Kumada, Shunsuke Gotou