Patents by Inventor Hsiang Yin SHEN
Hsiang Yin SHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11942342Abstract: A conveying unit includes a housing; a collision prevention mechanism disposed on a sidewall of the housing; a gripping member configured to hold a carrier for carrying a semiconductor structure; a sensor disposed on the gripping member and configured to measure and collect data associated with vibration of the gripping member; and an unit controller disposed on the gripping member and configured to analyze the data from the sensor and control a movement of the conveying unit.Type: GrantFiled: August 18, 2021Date of Patent: March 26, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen
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Publication number: 20240094705Abstract: A behavior recognition device for recognizing behaviors of a semiconductor manufacturing apparatus includes a storage device and a control unit. The storage device is configured to store log data of the semiconductor manufacturing apparatus. The control unit is cooperatively connected to the storage device, and configured to build a transition state model based on the log data to analyze behaviors related to wafer transfer sequences and manufacturing operations of the semiconductor manufacturing apparatus.Type: ApplicationFiled: November 23, 2023Publication date: March 21, 2024Inventors: KAI-TING YANG, LI-JEN KO, HSIANG YIN SHEN
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Publication number: 20240087934Abstract: A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.Type: ApplicationFiled: November 23, 2023Publication date: March 14, 2024Inventors: YONG-JYU LIN, FU-HSIEN LI, CHEN-WEI LU, CHI-FENG TUNG, HSIANG YIN SHEN
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Patent number: 11860607Abstract: A behavior recognition device for recognizing behaviors of a semiconductor manufacturing apparatus includes a storage device and a control unit. The storage device is configured to store log data of the semiconductor manufacturing apparatus. The control unit is cooperatively connected to the storage device, and configured to build a transition state model based on the log data to analyze behaviors related to wafer transfer sequences and manufacturing operations of the semiconductor manufacturing apparatus.Type: GrantFiled: August 18, 2020Date of Patent: January 2, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Kai-Ting Yang, Li-Jen Ko, Hsiang Yin Shen
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Patent number: 11854849Abstract: A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.Type: GrantFiled: June 12, 2020Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Yong-Jyu Lin, Fu-Hsien Li, Chen-Wei Lu, Chi-Feng Tung, Hsiang Yin Shen
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Patent number: 11854846Abstract: A system for a semiconductor fabrication facility includes a maintenance tool, a control unit, a first track, a second track, a maintenance crane movably mounted on the first track, a plurality of first sensors disposed on the first track, an OHT vehicle movably mounted on the second track, and a second sensor on the OHT vehicle. The first sensors detect a location of the maintenance crane and generate a first location data to the control unit. The second sensor generates a second location data to the control unit.Type: GrantFiled: June 29, 2022Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Fu-Hsien Li, Sheng-Kang Yu, Chi-Feng Tung, Hsiang Yin Shen, Guancyun Li
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Patent number: 11848222Abstract: A system for a semiconductor fabrication facility (FAB) includes an orientation tool and a transporting tool configured to transport at least one customized part. The orientation tool includes a port configured to receive the workpiece, a sensor configured to detect an orientation of the workpiece received in the port and a rotation mechanism configured to turn the workpiece received in the port.Type: GrantFiled: July 9, 2020Date of Patent: December 19, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chuan Wei Lin, Fu-Hsien Li, Yong-Jyu Lin, Rong-Shen Chen, Chi-Feng Tung, Hsiang Yin Shen
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Publication number: 20230341787Abstract: A method includes: storing a carrier containing material in a storage; recording environmental data of the storage to a database while the material is in the storage; generating a forecast for the material in the carrier based on the environmental data; receiving a request for the material from a semiconductor fabrication tool; and providing the carrier to the semiconductor fabrication tool based on the forecast.Type: ApplicationFiled: June 27, 2023Publication date: October 26, 2023Inventors: Rong-Syuan FAN, Chi-Feng TUNG, Ching-Jung CHANG, Hsiang-Yin SHEN
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Publication number: 20230343621Abstract: The present disclosure is directed to a stocker utilizing one or more storage carriers to optimize the utilization of a storage compartment within the stocker. The stocker includes one or more storage towers each including one or more shelves that may be moved from a closed position to an opened position by being pulled outward by a hook of a forking structure. This forking structure is configured to lift up a corresponding storage carrier off the shelf to be transported to a storage carrier load port to position one or more workpieces or toolpieces within the storage carrier, which is then transported back to the corresponding shelf for storage. The utilization of the forking structure along with the pull out shelves allows for a large number of storage carriers to be stored within the storage compartment of the stocker.Type: ApplicationFiled: April 20, 2022Publication date: October 26, 2023Inventors: Rong Syuan FAN, Ching-Jung CHANG, Chi-Feng TUNG, Hsiang Yin SHEN
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Publication number: 20230335422Abstract: A support member system is described for association with an overhead transport system. The support member system provides a safety feature to the overhead transport system by which the overhead transport system is able to avoid damage to wafers that are contained within a wafer cassette that is unintentionally released by the overhead transport system. The support member system is able to prevent such released cassettes from impacting the ground or tools located under the overhead transport system. The support member system targets wafer cassettes that have dimensions which are different than the dimensions of wafer cassettes for which the overhead transport system was originally designed to transport. Stocker systems for receiving, storing and delivering different types of wafer cassettes are also described.Type: ApplicationFiled: June 26, 2023Publication date: October 19, 2023Inventors: Guancyun LI, Ching-Jung CHANG, Chi-Feng TUNG, Hsiang Yin SHEN
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Patent number: 11749548Abstract: A transport system, including: a sensor, a controller and a power panel. The sensor determines a zone and sends a quantity information in response to a quantity of vehicles in the zone. The controller is arranged to send an output signal in accordance with the quantity information. The power panel is arranged to output a current in accordance with the output signal for driving vehicles in the zone, wherein the current is outputted to a cable extending through the zone.Type: GrantFiled: May 14, 2021Date of Patent: September 5, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen
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Publication number: 20230268212Abstract: Some implementations described herein provide a method that includes loading, from a load port and into a first buffer of a multiple-buffer overhead hoist transport (OHT) vehicle, a first transport carrier storing one or more processed wafers. The method includes unloading to the load port, while the first buffer retains the first transport carrier, and from a second buffer of the multiple-buffer OHT vehicle, a second transport carrier storing one or more wafers for processing. In other implementations, the method includes loading, into a first buffer of the multiple-buffer OHT vehicle, a first transport carrier storing one or more wafers for processing, while a semiconductor processing tool, associated with a load port, is processing one or more wafers associated with a second transport carrier. The method includes positioning the multiple-buffer OHT vehicle above the load port while the multiple-buffer OHT vehicle retains the first transport carrier in the first buffer.Type: ApplicationFiled: May 1, 2023Publication date: August 24, 2023Inventors: Chuan Wei LIN, Fu-Hsien LI, Chi-Feng TUNG, Hsiang Yin SHEN
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Patent number: 11735451Abstract: A support member system is described for association with an overhead transport system. The support member system provides a safety feature to the overhead transport system by which the overhead transport system is able to avoid damage to wafers that are contained within a wafer cassette that is unintentionally released by the overhead transport system. The support member system is able to prevent such released cassettes from impacting the ground or tools located under the overhead transport system. The support member system targets wafer cassettes that have dimensions which are different than the dimensions of wafer cassettes for which the overhead transport system was originally designed to transport. Stocker systems for receiving, storing and delivering different types of wafer cassettes are also described.Type: GrantFiled: March 3, 2020Date of Patent: August 22, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Guancyun Li, Ching-Jung Chang, Chi-Feng Tung, Hsiang Yin Shen
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Patent number: 11720033Abstract: A method includes: storing a carrier containing material in a storage; recording environmental data of the storage to a database while the material is in the storage; generating a forecast for the material in the carrier based on the environmental data; receiving a request for the material from a semiconductor fabrication tool; and providing the carrier to the semiconductor fabrication tool based on the forecast.Type: GrantFiled: September 15, 2021Date of Patent: August 8, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Rong-Syuan Fan, Ching-Jung Chang, Chi-Feng Tung, Hsiang-Yin Shen
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Patent number: 11676841Abstract: Some implementations described herein provide a method that includes loading, from a load port and into a first buffer of a multiple-buffer overhead hoist transport (OHT) vehicle, a first transport carrier storing one or more processed wafers. The method includes unloading to the load port, while the first buffer retains the first transport carrier, and from a second buffer of the multiple-buffer OHT vehicle, a second transport carrier storing one or more wafers for processing. In other implementations, the method includes loading, into a first buffer of the multiple-buffer OHT vehicle, a first transport carrier storing one or more wafers for processing, while a semiconductor processing tool, associated with a load port, is processing one or more wafers associated with a second transport carrier. The method includes positioning the multiple-buffer OHT vehicle above the load port while the multiple-buffer OHT vehicle retains the first transport carrier in the first buffer.Type: GrantFiled: April 16, 2021Date of Patent: June 13, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chuan Wei Lin, Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen
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Patent number: 11605553Abstract: An automated method of unpacking a container containing semiconductor wafers from a sealed bag is provided. The method includes inflating the bag with a gas using an automated gas dispenser. After inflating the bag, the bag is cut using an automated cutting device to expose the container, and the cut bag is removed from around the container.Type: GrantFiled: November 16, 2020Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Fu-Hsien Li, Chi-Feng Tung, Chi Yuan Chu, Jen-Ti Wang, Hsiang Yin Shen
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Publication number: 20230066297Abstract: An EUV stocker and an EUV pod device is disclosed. The EUV stocker includes an AI driven dynamic control circuitry, an AI controlled safety interlock, and an independent air return control device. The EUV stocker includes a Mass Flow Control (MFC) that operates in conjunction with one or more valves. The EUV stocker further includes a hydrocarbon detecting assembly, oxygen detecting assembly, pressure detecting assembly, and temperature detecting assembly and more to maintain the required condition within the EUV stocker. The EUV stocker also includes automated transportation devices such as AMHS, OHT, MR, AGV, RGV, or the like to provide a safe EUV mask storage environment for operators.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Inventors: Guancyun LI, Ching-Jung CHANG, Chi-Feng TUNG, Hsiang-Yin SHEN
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Publication number: 20220406638Abstract: An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.Type: ApplicationFiled: January 27, 2022Publication date: December 22, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Guancyun Li, Ching-Jung Chang, Chi-Feng Tung, Hsiang Yin Shen
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Publication number: 20220384230Abstract: A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.Type: ApplicationFiled: August 9, 2022Publication date: December 1, 2022Inventors: YONG-JYU LIN, FU-HSIEN LI, CHEN-WEI LU, CHI-FENG TUNG, HSIANG YIN SHEN
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Publication number: 20220344187Abstract: A mobile stocker described herein is configured to be easily installed and relocated to various locations in a semiconductor fabrication facility. The mobile stocker is capable of being programmed with, and/or autonomously learning, the layout of a semiconductor fabrication facility, and automatically relocating to a new location based on the layout using a navigation system. Accordingly, the mobile stocker is capable of being flexibly relocated in the semiconductor fabrication facility to dynamically support changes in demand and production capacity. Moreover, the capability to quickly assign a location identifier to the mobile stocker and to automatically interface with transport systems in the semiconductor fabrication facility reduces downtime of the mobile stocker, which increases productivity in the semiconductor fabrication facility.Type: ApplicationFiled: June 28, 2021Publication date: October 27, 2022Inventors: Rong Syuan FAN, Ching-Jung CHANG, Chi-Feng TUNG, Hsiang Yin SHEN