Abstract: A semiconductor processing station is provided. The semiconductor processing station includes a first platform, a second platform and a vacuum tunnel, wherein the first platform has a first load lock and a first plurality of chambers, and the second platform has a second load lock and a second plurality of chambers, and the vacuum tunnel connects the first and the second load locks.

Abstract: A rail transport system and method for a semiconductor fabrication facility (FAB). In one embodiment, the system includes a network of stationary rails and a wheeled vehicle movable on the rails via rolling movement. The vehicle is operable to hold a wafer carrier that stores a plurality of wafers. A cross-floor transport system is provided that may include a vehicle lifter positioned near the network of rails that extends between a first elevation and a second elevation in the FAB. The lifter is configured and operable to receive the vehicle from rails at the first elevation and vertically transport the vehicle to rails at the second elevation without removing the wafer carrier from the wheeled vehicle. In one embodiment, the lifter is configured so that the vehicle may be rolled directly onto and off of the lifter for vertical transport.

Abstract: A photolithography system includes a photo-mask storage, at least one photolithography machine and an overhead crane for transporting at least one photo-mask at least between the photo-mask storage and the photolithography machine. The overhead crane includes at least one main rail, a mask girder, a mask hoist and a mask holding device. The mask girder is coupled with the main rail and movable at least between a first position above the photo-mask storage and a second position above the photolithography machine. The mask hoist is movably coupled with the mask girder. The mask holding device is coupled with the mask hoist.

Abstract: A monitoring system has a vehicle and a monitoring device. The vehicle is movable along a predetermined route, and the monitoring device is mounted to the vehicle. The monitoring device has a sensor configured to monitor an environmental parameter and a controller communicatively coupled to the sensor. The controller is configured to record the monitored environmental parameter along the predetermined route as data points associated with time tags, record position information, and associate the position information with corresponding time tags. The number of time tags associated with the position information is less than the number of time tags associated with the monitored environmental parameter. A server is configured to receive and display a visualized presentation of the recorded monitored environmental parameter and the recorded position information.

Abstract: A monitoring system has a vehicle and a monitoring device. The vehicle is movable along a predetermined route, and the monitoring device is detachably mounted to the vehicle. The vehicle has a photonic device configured to read position information according to detection of a positioning tag positioned at a predetermined position along the predetermined route. The monitoring device has a sensor configured to monitor an environmental parameter and a controller communicatively coupled to the sensor and the photonic device. The controller is configured to record the monitored environmental parameter along the predetermined route and the position information.

Abstract: A semiconductor processing station is provided. The semiconductor processing station includes a first platform, a second platform and a vacuum tunnel, wherein the first platform has a first load lock and a first plurality of chambers, and the second platform has a second load lock and a second plurality of chambers, and the vacuum tunnel connects the first and the second load locks.

Abstract: The present disclosure provides one embodiment of a semiconductor processing apparatus. The semiconductor processing apparatus includes a load lock designed to receive a wafer carrier; an inner wafer carrier buffer configured to hold the wafer carrier received from the load lock and to perform a nitrogen purge to the wafer carrier; and a processing module designed to perform a semiconductor process to wafers from the wafer.

Abstract: A rail transport system and method for a semiconductor fabrication facility (FAB). In one embodiment, the system includes a network of stationary rails and a wheeled vehicle movable on the rails via rolling movement. The vehicle is operable to hold a wafer carrier that stores a plurality of wafers. A cross-floor transport system is provided that may include a vehicle lifter positioned near the network of rails that extends between a first elevation and a second elevation in the FAB. The lifter is configured and operable to receive the vehicle from rails at the first elevation and vertically transport the vehicle to rails at the second elevation without removing the wafer carrier from the wheeled vehicle. In one embodiment, the lifter is configured so that the vehicle may be rolled directly onto and off of the lifter for vertical transport.

Abstract: A monitoring system has a vehicle and a monitoring device. The vehicle is movable along a predetermined route, and the monitoring device is detachably mounted to the vehicle. The vehicle has a photonic device configured to read position information according to detection of a positioning tag positioned at a predetermined position along the predetermined route. The monitoring device has a sensor configured to monitor an environmental parameter and a controller communicatively coupled to the sensor and the photonic device. The controller is configured to record the monitored environmental parameter along the predetermined route and the position information.