Patents by Inventor Ikuhisa Morioka

Ikuhisa Morioka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic adsorption device
    Patent number: 6728091
    Abstract: An electrostatic adsorption device has a dielectric layer, electrodes, a cooling member and an insulating adhesive. The dielectric layer is made of a ceramic dielectric material and has an adsorption face and a back face. The electrodes are provided on the back face of the dielectric layer and gaps are defined between the portions of the electrodes. The insulating adhesive is provided between the back face of the dielectric layer and the cooling member. The insulating adhesive covers the electrodes and the back face and is provided in the gaps.
    Type: Grant
    Filed: May 29, 2002
    Date of Patent: April 27, 2004
    Assignee: NGK Insulators, Ltd.
    Inventors: Hideyoshi Tsuruta, Masahito Eguchi, Tetsuya Kawajiri, Ikuhisa Morioka
  • Electrostatic adsorption device
    Publication number: 20030059627
    Abstract: An electrostatic adsorption device 1B has a dielectric layer 2, electrodes 4A and 4B, a cooling member 5 and an insulating adhesive 3. The dielectric layer 2 is made of a ceramic dielectric material and has an adsorption face and a back face. The electrodes 4A and 4B are provided on the back face 2b of the dielectric layer 2. The electrodes 4A and 4B define gaps 10. The insulating adhesive 3 is provided between the back face 2b of the dielectric layer 2 and the cooling member 5. The insulating adhesive 3 covers the electrodes 4A and 4B and the back face 2b and is provided in the gap 10.
    Type: Application
    Filed: May 29, 2002
    Publication date: March 27, 2003
    Applicant: NGK Insulators, Ltd.
    Inventors: Hideyoshi Tsuruta, Masahito Eguchi, Tetsuya Kawajiri, Ikuhisa Morioka