Patents by Inventor Ivan Maleev
Ivan Maleev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180164228Abstract: Systems configured to inspect a wafer are provided. One system includes an illumination subsystem configured to direct pulses of light to an area on a wafer; a scanning subsystem configured to scan the pulses of light across the wafer; a collection subsystem configured to image pulses of light scattered from the area on the wafer to a sensor, wherein the sensor is configured to integrate a number of the pulses of scattered light that is fewer than a number of the pulses of scattered light that can be imaged on the entire area of the sensor, and wherein the sensor is configured to generate output responsive to the integrated pulses of scattered light; and a computer subsystem configured to detect defects on the wafer using the output generated by the sensor.Type: ApplicationFiled: January 29, 2018Publication date: June 14, 2018Inventors: Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak, Mehdi Vaez-Iravani, Guoheng Zhao
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Patent number: 9995850Abstract: A polarization control device includes a first wave plate having a first surface profile and a second wave plate having a second surface profile complementary to the first surface profile. The optical axis of the first wave plate is orthogonal to the optical axis of the second wave plate. The first wave plate and the second wave plate are positioned to align the first surface profile with the second surface profile and maintain a constant thickness across the polarization control device. The first wave plate and the second wave plate may control polarization rotation as a continuous function of transverse position across a pupil plane of an optical system. The first wave plate and the second wave plate are separated by a sufficiently small distance so as to limit wave front distortion below a selected level.Type: GrantFiled: June 4, 2014Date of Patent: June 12, 2018Assignee: KLA-Tencor CorporationInventors: Ivan Maleev, Donald Pettibone
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Patent number: 9915622Abstract: Systems configured to inspect a wafer are provided. One system includes an illumination subsystem configured to direct pulses of light to an area on a wafer; a scanning subsystem configured to scan the pulses of light across the wafer; a collection subsystem configured to image pulses of light scattered from the area on the wafer to a sensor, wherein the sensor is configured to integrate a number of the pulses of scattered light that is fewer than a number of the pulses of scattered light that can be imaged on the entire area of the sensor, and wherein the sensor is configured to generate output responsive to the integrated pulses of scattered light; and a computer subsystem configured to detect defects on the wafer using the output generated by the sensor.Type: GrantFiled: August 27, 2015Date of Patent: March 13, 2018Assignee: KLA-Tencor Corp.Inventors: Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak, Mehdi Vaez-Iravani, Guoheng Zhao
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Patent number: 9891177Abstract: A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.Type: GrantFiled: October 3, 2014Date of Patent: February 13, 2018Assignee: KLA-Tencor CorporationInventors: Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev, Christian Wolters, Stephen Biellak, Bret Whiteside, Donald Pettibone, Yung-Ho Alex Chuang, David W. Shortt
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Publication number: 20180011533Abstract: Systems and methods are provided for discerning the intent of a device wearer primarily based on movements of the eyes. The system may be included within unobtrusive headwear that performs eye tracking and controls screen display. The system may also utilize remote eye tracking camera(s), remote displays and/or other ancillary inputs. Screen layout is optimized to facilitate the formation and reliable detection of rapid eye signals. The detection of eye signals is based on tracking physiological movements of the eye that are under voluntary control by the device wearer. The detection of eye signals results in actions that are compatible with wearable computing and a wide range of display devices.Type: ApplicationFiled: August 15, 2016Publication date: January 11, 2018Inventors: Lewis James Marggraff, Nelson George Publicover, Spencer James Connaughton, Nathan Lord, Peter Milford, Ivan Maleev
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Publication number: 20170123492Abstract: Systems and methods are provided for discerning the intent of a device wearer primarily based on movements of the eyes. The system may be included within unobtrusive headwear that performs eye tracking and controls screen display. The system may also utilize remote eye tracking camera(s), remote displays and/or other ancillary inputs. Screen layout is optimized to facilitate the formation and reliable detection of rapid eye signals. The detection of eye signals is based on tracking physiological movements of the eye that are under voluntary control by the device wearer. The detection of eye signals results in actions that are compatible with wearable computing and a wide range of display devices.Type: ApplicationFiled: August 15, 2016Publication date: May 4, 2017Inventors: Lewis James Marggraff, Nelson George Publicover, Spencer James Connaughton, Nathan Lord, Peter Milford, Ivan Maleev
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Patent number: 9494531Abstract: Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.Type: GrantFiled: August 8, 2014Date of Patent: November 15, 2016Assignee: KLA-Tencor CorporationInventors: Yung-Ho Alex Chuang, Xiaoxu Lu, John Fielden, Ivan Maleev
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Patent number: 9377416Abstract: Methods and systems for determining wafer inspection coordinates for fixed location(s) on a wafer are provided. One system includes an illumination subsystem configured to direct light to a spot on an edge of a wafer. The spot extends beyond the edge of the wafer. The system also includes a stage that rotates the wafer thereby causing the spot to be scanned over the edge of the wafer. The system also includes a detector configured to detect light from the spot while the spot is being scanned over the edge and to generate output responsive thereto. The system further includes a computer processor configured to determine wafer inspection coordinates of two or more locations on the edge of the wafer based on the output and to determine wafer inspection coordinates of fixed location(s) on the wafer based on the wafer inspection coordinates of the two or more locations on the edge.Type: GrantFiled: May 11, 2015Date of Patent: June 28, 2016Assignee: KLA-Tencor Corp.Inventors: Ivan Maleev, Venkata Kode
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Publication number: 20160097727Abstract: A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.Type: ApplicationFiled: October 3, 2014Publication date: April 7, 2016Inventors: Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev, Christian Wolters, Stephen Biellak, Bret Whiteside, Donald Pettibone, Yung-Ho Alex Chuang, David W. Shortt
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Patent number: 9279774Abstract: Systems configured to inspect a wafer are provided. One system includes an illumination subsystem configured to simultaneously form multiple illumination areas on the wafer with substantially no illumination flux between each of the areas. The system also includes a scanning subsystem configured to scan the multiple illumination areas across the wafer. In addition, the system includes a collection subsystem configured to simultaneously and separately image light scattered from each of the areas onto two or more sensors. Characteristics of the two or more sensors are selected such that the scattered light is not imaged into gaps between the two or more sensors. The two or more sensors generate output responsive to the scattered light. The system further includes a computer subsystem configured to detect defects on the wafer using the output of the two or more sensors.Type: GrantFiled: July 9, 2012Date of Patent: March 8, 2016Assignee: KLA-Tencor Corp.Inventors: Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak, Mehdi Vaez-Iravani, Guoheng Zhao
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Publication number: 20150369753Abstract: Systems configured to inspect a wafer are provided. One system includes an illumination subsystem configured to direct pulses of light to an area on a wafer; a scanning subsystem configured to scan the pulses of light across the wafer; a collection subsystem configured to image pulses of light scattered from the area on the wafer to a sensor, wherein the sensor is configured to integrate a number of the pulses of scattered light that is fewer than a number of the pulses of scattered light that can be imaged on the entire area of the sensor, and wherein the sensor is configured to generate output responsive to the integrated pulses of scattered light; and a computer subsystem configured to detect defects on the wafer using the output generated by the sensor.Type: ApplicationFiled: August 27, 2015Publication date: December 24, 2015Inventors: Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak, Mehdi Vaez-Iravani, Guoheng Zhao
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Publication number: 20150330914Abstract: Methods and systems for determining wafer inspection coordinates for fixed location(s) on a wafer are provided. One system includes an illumination subsystem configured to direct light to a spot on an edge of a wafer. The spot extends beyond the edge of the wafer. The system also includes a stage that rotates the wafer thereby causing the spot to be scanned over the edge of the wafer. The system also includes a detector configured to detect light from the spot while the spot is being scanned over the edge and to generate output responsive thereto. The system further includes a computer processor configured to determine wafer inspection coordinates of two or more locations on the edge of the wafer based on the output and to determine wafer inspection coordinates of fixed location(s) on the wafer based on the wafer inspection coordinates of the two or more locations on the edge.Type: ApplicationFiled: May 11, 2015Publication date: November 19, 2015Inventors: Ivan Maleev, Venkata Kode
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Patent number: 9182341Abstract: An optical scanning system may include a moving sample positioning stage that supports the sample during an optical measurement of the sample using the light source and the spectrometer. The moving sample positioning stage may move the sample in at least one direction during the optical measurement of the sample. A scatterometer system may include collection imaging optics for imaging the reflected light onto a multi-pixel sensor that collects and analyze the reflected light.Type: GrantFiled: June 12, 2013Date of Patent: November 10, 2015Assignee: KLA-Tencor CorporationInventor: Ivan Maleev
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Patent number: 9076639Abstract: The present invention includes a transmissive-reflective photocathode including a membrane configured to absorb photons from an illumination source via a first surface of the membrane, the membrane further configured to emit photoelectrons in a reflection mode via the first surface, the membrane further configured to emit photoelectrons in a transmissive mode via a second surface, the first surface and the second surface being substantially parallel, and a membrane support structure configured to mechanically secure the membrane, the membrane support structure further configured to provide at least a first pathway between the first surface and free space and a second pathway between the second surface and free space.Type: GrantFiled: September 6, 2012Date of Patent: July 7, 2015Assignee: KLA-Tencor CorporationInventor: Ivan Maleev
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Publication number: 20150041666Abstract: Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.Type: ApplicationFiled: August 8, 2014Publication date: February 12, 2015Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, John Fielden, Ivan Maleev
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Publication number: 20140361152Abstract: A polarization control device includes a first wave plate having a first surface profile and a second wave plate having a second surface profile complimentary to the first surface profile. The optical axis of the first wave plate is orthogonal to the optical axis of the second wave plate. The first wave plate and the second wave plate are positioned to align the first surface profile with the second surface profile and maintain a constant thickness across the polarization control device. The first wave plate and the second wave plate may control polarization rotation as a continuous function of transverse position across a pupil plane of an optical system. The first wave plate and the second wave plate are separated by a sufficiently small distance so as to limit wave front distortion below a selected level.Type: ApplicationFiled: June 4, 2014Publication date: December 11, 2014Inventors: Ivan Maleev, Donald Pettibone
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Publication number: 20130335736Abstract: An optical scanning system may include a moving sample positioning stage that supports the sample during an optical measurement of the sample using the light source and the spectrometer. The moving sample positioning stage may move the sample in at least one direction during the optical measurement of the sample. A scatterometer system may include collection imaging optics for imaging the reflected light onto a multi-pixel sensor that collects and analyze the reflected light.Type: ApplicationFiled: June 12, 2013Publication date: December 19, 2013Inventor: Ivan Maleev
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Patent number: 8502977Abstract: A spectroscopic system may include: a spectroscopic scatterometer; an angular-resolved spectrometer; and a fiber bundle having a two-dimensional input surface and a one-dimensional output surface.Type: GrantFiled: June 1, 2010Date of Patent: August 6, 2013Assignee: KLA-Tencor CorporationInventor: Ivan Maleev
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Publication number: 20130126705Abstract: The present invention includes a transmissive-reflective photocathode including a membrane configured to absorb photons from an illumination source via a first surface of the membrane, the membrane further configured to emit photoelectrons in a reflection mode via the first surface, the membrane further configured to emit photoelectrons in a transmissive mode via a second surface, the first surface and the second surface being substantially parallel, and a membrane support structure configured to mechanically secure the membrane, the membrane support structure further configured to provide at least a first pathway between the first surface and free space and a second pathway between the second surface and free space.Type: ApplicationFiled: September 6, 2012Publication date: May 23, 2013Applicant: KLA-TENCOR CORPORATIONInventor: Ivan Maleev
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Publication number: 20130016346Abstract: Systems configured to inspect a wafer are provided.Type: ApplicationFiled: July 9, 2012Publication date: January 17, 2013Applicant: KLA-TENCOR CORPORATIONInventors: Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak