Abstract: A MEMS gyrocompass and method are provided to mitigate systematic error in determination of a north angle. The MEMS gyrocompass includes one or more MEMS gyroscopes having a sense axis within a reference plane. Samples from an output of the MEMS gyroscope are obtained in at least two angles of rotation about an axis perpendicular to the reference plane. First fit coefficients are determined by fitting samples with first fitting functions determined as function of time. Second fit coefficients are determined by fitting components of earth rotation rate projected on the reference plane based on samples obtained by all the MEMS gyroscopes, which fitting is performed with a second fitting function determined as a function of rotation angle of the MEMS gyroscope with respect to a reference angle. The north angle is determined as an angle between the reference angle and true north based on the second fit coefficients.

Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.

Abstract: A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.

Abstract: A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.

Abstract: A MEMS sensor includes a substrate and a MEMS layer. A plurality of anchoring points within the MEMS layer suspend a suspended spring-mass system that includes active micromechanical components that respond to a force of interest such as linear acceleration, angular velocity, pressure, or magnetic field. Springs and rigid masses couple the active components to the anchoring points, such that displacements of the anchoring points do not substantially cause the active components within the MEMS layer to move out-of-plane.

Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.

Abstract: An exemplary sensor may include a MEMS layer anchored to a cap and a substrate by anchoring portions of the MEMS layer. A suspended spring-mass system may include springs, at least one rigid mass, and at least one movable mass. The anchoring springs may be torsionally compliant about one or more axes and coupled to the rigid mass such that forces imparted by the anchoring portions are not transmitted to the movable mass.

Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.

Abstract: A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.

Abstract: A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.

Abstract: A gyroscope includes drive electrodes that drive a drive mass at a drive frequency. A sense mass is responsive to a Coriolis force caused by rotation of the gyroscope and oscillates based on the drive frequency. Electrodes adjacent to the sense mass drive the sense mass at test frequencies. The response to the driving at the test frequencies is measured and a gyroscope failure is identified based on this response.

Abstract: A suspended spring-mass system is suspended from a plurality of the anchoring points. A source voltage is provided from one of anchoring points to the suspended spring-mass system. The other anchoring points have measurement nodes which measure the voltage at those anchoring points. If a voltage other than the source voltage is received at one of the measurement nodes, an error is identified.

Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.

Abstract: A gyroscope is driven at a drive frequency and senses a Coriolis force caused by rotation of the gyroscope. The response of the gyroscope to a given Coriolis force may change due to changes in the gyroscope over time. A plurality of test frequencies are applied to the gyroscope, and the response of the gyroscope to those test frequencies is analyzed in order to track changes in the response of the gyroscope. Operational parameters of the gyroscope may be altered in order to compensate for those changes.

Abstract: An exemplary sensor may include a MEMS layer anchored to a cap and a substrate by anchoring portions of the MEMS layer. A suspended spring-mass system may include springs, at least one rigid mass, and at least one movable mass. The anchoring springs may be torsionally compliant about one or more axes and coupled to the rigid mass such that forces imparted by the anchoring portions are not transmitted to the movable mass.

Abstract: A MEMS sensor includes a substrate and a MEMS layer. A plurality of anchoring points within the MEMS layer suspend a suspended spring-mass system that includes active micromechanical components that respond to a force of interest such as linear acceleration, angular velocity, pressure, or magnetic field. Springs and rigid masses couple the active components to the anchoring points, such that displacements of the anchoring points do not substantially cause the active components within the MEMS layer to move out-of-plane.

Abstract: A MEMS structure that provides an improved way to selectively control electromechanical properties of a MEMS device with an applied voltage. The MEMS structure includes a capacitor element that comprises at least one stator element, and at least one rotor element suspended for motion parallel to a first direction in relation to the stator element. The stator element and the rotor element form at least one capacitor element, the capacitance of which varies according to displacement of the rotor element from an initial position. The stator element and the rotor element are mutually oriented such that in at least one range of displacements of the rotor element from an initial position, the second derivative of the capacitance with respect to the displacement has negative values.

Abstract: A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.

Abstract: A gyroscope includes drive electrodes that drive a drive mass at a drive frequency. A sense mass is responsive to a Coriolis force caused by rotation of the gyroscope and oscillates based on the drive frequency. Electrodes adjacent to the sense mass drive the sense mass at test frequencies. The response to the driving at the test frequencies is measured and a gyroscope failure is identified based on this response.

Abstract: A suspended spring-mass system is suspended from a plurality of the anchoring points. A source voltage is provided from one of anchoring points to the suspended spring-mass system. The other anchoring points have measurement nodes which measure the voltage at those anchoring points. If a voltage other than the source voltage is received at one of the measurement nodes, an error is identified.