Abstract: A gyroscope is driven at a drive frequency and senses a Coriolis force caused by rotation of the gyroscope. The response of the gyroscope to a given Coriolis force may change due to changes in the gyroscope over time. A plurality of test frequencies are applied to the gyroscope, and the response of the gyroscope to those test frequencies is analyzed in order to track changes in the response of the gyroscope. Operational parameters of the gyroscope may be altered in order to compensate for those changes.

Abstract: A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.

Abstract: A ring gyroscope structure with central spring structure that prefers prefers 2?-modes and makes them low in frequency. The flexing resonance modes that tend to couple to external mechanical excitation are clearly higher that the 2?-modes. The described structure is thus very robust against external mechanical shocks and vibrations.

Abstract: A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.

Abstract: A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.

Abstract: A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance.

Abstract: A MEMS structure that provides an improved way to selectively control electromechanical properties of a MEMS device with an applied voltage. The MEMS structure includes a capacitor element that comprises at least one stator element, and at least one rotor element suspended for motion parallel to a first direction in relation to the stator element. The stator element and the rotor element form at least one capacitor element, the capacitance of which varies according to displacement of the rotor element from an initial position. The stator element and the rotor element are mutually oriented such that in at least one range of displacements of the rotor element from an initial position, the second derivative of the capacitance with respect to the displacement has negative values.

Abstract: The invention presents a spring structure (501), which has at least two masses (Ma, Mb) coupled in a first direction as opposite phase oscillators by means of springs (Sh1, Sh2) connected to them (Ma, Mb), via a loop (L, E) between said springs (Sh1, Sh2) connected to their coupling points, wherein oblique springs (Sl45, Sr45) are connected from said coupling points of the loop (L) to the anchors (A) of the base such that the longitudinal motion of the loop (L) is arranged to occur perpendicularly or substantially perpendicularly to said first direction, to thus attenuate opposite phase oscillation other than that of the masses (Ma, Mb). The invention also presents the use of a spring structure in a resonator and/or in a resonator array as well as in a sensor or a sensor comprising system.

Abstract: A ring gyroscope structure with central spring structure that prefers prefers 2?-modes and makes them low in frequency. The flexing resonance modes that tend to couple to external mechanical excitation are clearly higher that the 2?-modes.

Abstract: A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.

Abstract: A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.

Abstract: A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance.

Abstract: The invention relates to measuring devices used for measuring angular velocity, and more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention comprises at least two seismic mass structures (1), (2), excitation structures (3), (4) and coupling seesaw type springs (6), (7). The objective of the invention is to provide an improved sensor structure, which enables reliable measuring with good efficiency particularly in small vibrating micro-mechanical angular velocity sensor solutions.

Abstract: The invention presents a spring structure (501), which has at least two masses (Ma, Mb) coupled in a first direction as opposite phase oscillators by means of springs (Sh1, Sh2) connected to them (Ma, Mb), via a loop (L, E) between said springs (Sh1, Sh2) connected to their coupling points, wherein oblique springs (Sl45, Sr45) are connected from said coupling points of the loop (L) to the anchors (A) of the base such that the longitudinal motion of the loop (L) is arranged to occur perpendicularly or substantially perpendicularly to said first direction, to thus attenuate opposite phase oscillation other than that of the masses (Ma, Mb). The invention also presents the use of a spring structure in a resonator and/or in a resonator array as well as in a sensor or a sensor comprising system.

Abstract: The invention relates to measuring devices used for measuring angular velocity, and more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention comprises at least two seismic mass structures (1), (2), excitation structures (3), (4) and coupling seesaw type springs (6), (7). The objective of the invention is to provide an improved sensor structure, which enables reliable measuring with good efficiency particularly in small vibrating micro-mechanical angular velocity sensor solutions.

Abstract: The present invention relates to measuring devices for use in physical measuring, and in particular to capacitive sensors. In the sensor according to the invention, the shape of the stationary electrode (3), (4), (12), (17-20), (27-28) is stepped. Through the invention, a method for manufacturing a capacitive sensor with improved linearity is achieved, as well as a capacitive sensor suitable for use particularly in small capacitive sensor solutions.

Abstract: The invention relates to measuring devices for the measuring of pressure, and more specifically to capacitive pressure sensors. The silicon crystal planes {111} are located at the corners of a wet etched membrane well of a pressure sensor element according to the present invention. An object of the invention is to provide an improved method of manufacturing a capacitive pressure sensor, and a capacitive pressure sensor suitable for use, in particular, in small capacitive pressure sensor solutions.

Abstract: The present invention relates to measuring devices for use in physical measuring, and in particular to capacitive sensors. In the sensor according to the invention, the shape of the stationary electrode (3), (4), (12), (17-20), (27-28) is stepped. By means of the invention, a method for manufacturing a capacitive sensor with improved linearity is achieved, as well as a capacitive sensor suitable for use particularly in small capacitive sensor solutions.

Abstract: The invention relates to measuring devices for the measuring of pressure, and more specifically to capacitive pressure sensors. The silicon crystal planes {111} are located at the corners of a wet etched membrane well of a pressure sensor element according to the present invention. An object of the invention is to provide an improved method of manufacturing a capacitive pressure sensor, and a capacitive pressure sensor suitable for use, in particular, in small capacitive pressure sensor solutions.