Abstract: An object table is supported in a vacuum chamber by an elongate beam or beams extending though elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

Abstract: A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

Abstract: An object table is supported in a vacuum chamber by an elongate beam or beams extending though elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

Abstract: A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a projection system of the apparatus. The positioning means is provided with a pneumatic gravity compensator comprising a piston associated with the object table; a gas-filled pressure chamber, the gas in the pressure chamber acting on the movable member to at least partially counteract the weight of the object table; a gas bearing; and evacuating means for evacuating gas escaping through a gap between the movable member and a bearing surface of a cylindrical housing towards the vacuum chamber. A partially flexible rod connects the piston to the object table.

Abstract: The invention provides an optoelectronic device having a holder and a coxial module which is secured in the holder and which includes an optoelectronic component, preferably a semi-conductor diode laser. The module is capable of receiving or emitting radiation at an end face of the module, preferably via a coupled glass fiber. Connection pins for the optoelectronic component are situated at the other end face of the module and the holder is provided with connection means which extended right angles to the longitudinal direction of the module and that are electrically connected to the connection pins. The connection pins are bent from the longitudinal direction of the module towards the connection means. The free ends of the connection pins are inserted in the connection means. The holder is provided with a clamping member by means of which the module is secured in the holder.

Abstract: The invention relates to a magnetic clamping device with a clamping body (1) comprising a cylinder plate (2) of non-magnetizable material provided with cylinders (5), a clamping plate (3) of non-magnetizable material situated at one side of the cylinder plate, a closing plate (4) situated at the other side of the cylinder plate, and pistons (9) made at least partly from magnetic material which are movable in the respective cylinders, which clamping body is further provided with channels (13, 14) to which a fluidic pressure source can be connected for the simultaneous movement of the pistons in the cylinders towards and away from the clamping plate. To improve the magnetic clamping action, all magnetic pistons (9) are fastened to a common piston plate (8). This ensures that all magnetic pistons, when energized, will exert their magnetic influence on the object to be clamped.

Abstract: Methods and device for manufacturing a plate with a plane main surface or with parallel main surfaces, whereby material is taken off from the edges of the plate and from the central portion of the plate alternately by means of polishing in order to obtain main surfaces having a convex, plane, or concave shape. Polishing is stopped after at least one transition from convex to concave or vice versa at the moment at which the main surface has a substantially plane shape or has substantially parallel main surfaces.

Abstract: A device (1) for supporting a rotatable body (3) in a direction parallel to an axis of rotation (5) of the body (3). The device (1) comprises a support member (17) with a fluid bearing (21) which maintains a beating gap (23) between a bearing surface (15) of the body (3) extending perpendicular to the axis of rotation (5) and a bearing surface (19) of the support member (17) extending perpendicular to the axis of rotation (5) during operation. Manufacturing tolerances may lead to deviations from perpendicularity of the beating surfaces (15, 19) relative to the axis of rotation (5), which deviations cause an undesirable vibration of the body (3) parallel to the axis of rotation (5) during rotation of the body (3).