Abstract: A gas purification apparatus has a housing with an inlet end having an inlet port for gas supply to an interior chamber, and an opposite, outlet end having an outlet port for exit of purified gas from the chamber. The housing is of generally cylindrical shape with a central axis, and the inlet and outlet ports are offset from the central axis towards a lower portion of the housing. A purification medium fills at least the majority of the chamber. The internal wall of the chamber is cylindrical along part of the length of the housing extending from the outlet end, and has a rounded or part-spherical inlet portion extending from the inlet port to the cylindrical part of the internal wall.

Abstract: A gas recovery and reuse/recycle method is disclosed which can readily and economically recover valuable and/or environmentally hazardous gases from a manufacturing or chemical process and then return the gas to the process for reuse, and repeat this many times without significant contamination or degradation of the gas or the produced products. All gas transport, compression and storage equipment is designed and maintained so that it is non-contaminating to the process gas. Commonly the process gas will be a Group VIII gas, preferably He, Ne, Kr or Xe, or a gas which comprises a hazard to the ambient environment or beings therein, such as a carbon oxide gas, a halocarbon gas, an acid-precursor gas, a biologically hazardous gas, or a radioactive gas.

Abstract: A process, composition and apparatus for the removal of water from moist non-corrosive gases (such as those containing oxygen or CO.sub.2) down to .ltoreq.10-20 ppb water concentration are described. The dehydrating agent is an oxide or salt of an electropositive metal and has a surface area of at least 140 m.sup.2 /g, preferably 140-500 m.sup.2 /g, is compatible with the gas, and preferably is capable of dehydrating such gases to .ltoreq.1 ppb, preferably to as low as 500 ppt. The electropositive metal will be a Group 3b, 4b or lanthanide metal or vanadium. The preferred agent is a high surface area titania, zirconia, yttria or vanadia, with titania most preferred. The dehydrating agent can be in the form of a pelleted or granular bulk material or a coating on or within the pores of a substrate. The agent is retained in a simple container which is easily installed in a gas supply line for the gas, such as to a gas- or vapor-deposition manufacturing unit.

Abstract: A process and apparatus for the removal of water from corrosive halogen gases, particularly chlorine- or bromine-containing gases, down to .ltoreq.100 ppb water concentration are described. The critical component is a high silica zeolite, preferably high silica mordenite, which in a variety of physical forms is capable of dehydrating such gases to .ltoreq.100 ppb or .ltoreq.50 ppb without being detrimentally affected by the corrosive nature of the gases in the presence of water. The high silica zeolite is produced by the removal of alumina from a natural or synthetic zeolite while retaining the desirable zeolite structure, to a silica:alumina ratio of from 20-2000:1. Metal cations which may be depleted by the alumina removal may be replaced by solution impregnation. Halogen- or halide-containing gases, or those with equivalent corrosion properties, may be dehydrated without deterioration of the high silica zeolite.

Abstract: A interconnection system for coaxial fluid tubing includes zero-clearance connectors having a metallic innner gasket for sealing an inner passageway for a first fluid and having a elastomeric outer gasket for sealing an outer passageway for a second fluid. The elastomeric outer gasket forms a fluid-tight seal as the connectors are tightened. Further tightening of the connectors engages and seals the metallic inner gasket. Both straight tubing sections and elbows are constructed in a factory setting so that the completed sections can be assembled at a job site without cutting or welding.