Abstract: A pellicle for extreme ultraviolet (EUV) lithography is based on yttrium carbide and used in a EUV lithography process. The pellicle for EUV lithography includes a pellicle layer that has a core layer containing yttrium carbide. The yttrium carbide is YCX (0.25<x<0.45).

Abstract: This application relates to a pellicle for extreme ultraviolet lithography used in a lithography process using extreme ultraviolet rays. In one aspect, the pellicle includes a pellicle layer formed of an M-? material in which M is combined with ?. Here, M is one of Si, Zr, Mo, Ru, Y, W, Ti, Ir, or Nb, and a is at least two of B, N, C, O, or F.

Abstract: This application relates to a pellicle for extreme ultraviolet lithography based on yttrium (Y) and used in a lithography process using extreme ultraviolet rays. In one aspect, the pellicle includes a pellicle layer including a core layer formed of an yttrium-based material expressed as Y-M (M is one of B, Si, O, or F).

Abstract: This application relates to a pellicle for extreme ultraviolet lithography containing amorphous carbon and a manufacturing method thereof. In one aspect, the pellicle includes a substrate having an opening formed in a central portion, a support layer formed on the substrate to cover the opening, and a pellicle layer formed on the support layer and containing amorphous carbon. The pellicle layer may include a core layer formed on the support layer, and a capping layer formed on the core layer and may further include a buffer layer. At least one of the core layer, the capping layer, or the buffer layer may be an amorphous carbon layer.

Abstract: This application relates to a pellicle for extreme ultraviolet lithography and a manufacturing method thereof using the low-temperature direct growth method of multilayer graphene. In one aspect, the method includes forming an etch stopper on a substrate, forming a seed layer on the etch stopper, the seed layer including at least one of amorphous boron, BN, BCN, B4C, or Me-X (Me is at least one of Si, Ti, Mo, or Zr, and X is at least one of B, C, or N). The method may also include forming a metal catalyst layer on the seed layer; forming an amorphous carbon layer on the metal catalyst layer, and directly growing multilayer graphene on the seed layer through interlayer exchange between the metal catalyst layer and the amorphous carbon layer by performing a low-temperature heat treatment at 450° C. to 600° C.

Abstract: A pellicle for extreme ultraviolet lithography containing molybdenum carbide is disclosed. The pellicle includes a substrate having an opening formed in a central portion, and a pellicle layer formed on the substrate to cover the opening and including a molybdenum carbide containing layer that contains molybdenum carbide expressed as MoC1-x (0<x<1). The pellicle layer includes a core layer formed on the substrate to cover the opening, and the core layer may be the molybdenum carbide containing layer.

Abstract: A pellicle for extreme ultraviolet lithography has an extreme ultraviolet transmittance of 90% or more and also has thermal stability, mechanical stability, and chemical durability. The pellicle includes a support layer and a pellicle layer. The support layer has an opening formed in a central portion thereof. The pellicle layer is formed on the support layer to cover the opening and includes ZrBx (2<x<16).

Abstract: A system for managing a battery of a vehicle includes a first controller configured to control a power-on (IG ON) state and a power-off (IG OFF) state of a plurality of controllers in the vehicle and to be periodically woken up in the power-off (IG OFF) state to wake up at least some of the plurality of controllers, and a second controller configured to turn off a main relay connecting a first battery in the vehicle and a vehicle system when the power-off (IG OFF) state begins, to monitor a state of the first battery storing energy for generating power of the vehicle by maintaining power during a preset first reference time, to be woken up at a wake-up period of the first controller when the first reference time elapses, and to monitor the state of the first battery.

Abstract: This application relates to a method for manufacturing a pellicle for extreme ultraviolet lithography. In one aspect, the method includes forming a support layer of a silicon nitride material on a silicon substrate, and forming a core layer of a graphene material on the support layer. The method may also include forming a graphene defect healing layer on the core layer by selectively forming a material of MeOxNy (Me is one of Si, Al, Ti, Zr, and Hf, x+y=2) at a grain boundary of the core layer in an atomic layer deposition process using heat in order to heal defects generated in graphene forming the core layer without additional damage to the graphene. The method may further include a capping layer on the graphene defect healing layer, wherein a central portion of the silicon substrate under the support layer is removed to form an opening partially exposing the support layer.

Abstract: A pellicle for extreme ultraviolet lithography has an extreme ultraviolet transmittance of 90% or more and also has thermal stability, mechanical stability, and chemical durability. The pellicle includes a support layer and a pellicle layer. The support layer has an opening formed in a central portion thereof. The pellicle layer is formed on the support layer to cover the opening and includes ZrBx (2<x<16).

Abstract: The present inventive concept relates to a thermal radiation body for cooling a heating element, which includes a pattern unit including a pore part provided as an empty space or filled with a gas phase and a cover part covering the pore part and dissipates heat of the heating element through heat radiation.

Abstract: A compressor is disclosed. The compressor includes an upper shell and a lower shell forming an appearance of the compressor. The compressor also includes a coupling portion provided between the upper shell and the lower shell and configured to protrude from a side surface of the upper shell or the lower shell to outside the upper shell or the lower shell. The coupling portion includes at least one coupling protrusion configured to protrude from a side surface of a flange portion to the outside, to increase a rigidity of the flange portion and the coupling portion.

Abstract: A system for managing a battery of a vehicle includes a first controller configured to control a power-on (IG ON) state and a power-off (IG OFF) state of a plurality of controllers in the vehicle and to be periodically woken up in the power-off (IG OFF) state to wake up at least some of the plurality of controllers, and a second controller configured to turn off a main relay connecting a first battery in the vehicle and a vehicle system when the power-off (IG OFF) state begins, to monitor a state of the first battery storing energy for generating power of the vehicle by maintaining power during a preset first reference time, to be woken up at a wake-up period of the first controller when the first reference time elapses, and to monitor the state of the first battery.

Abstract: A cylinder block includes an extension portion that is shaped to extend toward the cylinder liner and is formed on an end portion of the cylinder block so as to form a surface contact with a head gasket. In particular, the cylinder liner includes an end portion forming an accommodation groove portion that is shaped to correspond to the extension portion, and a part of the end portion of the cylinder liner is supported on a circumferential surface of the extension portion and is linked to the accommodation groove portion. In addition, the part of the end portion of the cylinder liner forms a surface contact with the head gasket.

Abstract: A fan motor for an air conditioner includes a rotor shaft, a plurality of rotor cores arranged in a circumferential direction about a center of the rotor shaft, a bridge configured to couple the rotor cores, permanent magnets coupled to the plurality of rotor cores, and an insert-injected rotor body provided in a space formed through the rotor shaft, the rotor cores, the bridge, and the permanent magnets. A cable holder for the fan motor includes an upper cable holder in which a plurality of protrusion walls are formed downwardly, a lower cable holder in which a plurality of guide walls coupled between the plurality of protrusion walls are formed upwardly, and a soldering land which is formed in a lower portion of the lower cable holder and upon which a wire can be soldered.

Abstract: The present inventive concept relates to a thermal radiation body for cooling a heating element, which includes a pattern unit including a pore part provided as an empty space or filled with a gas phase and a cover part covering the pore part and dissipates heat of the heating element through heat radiation.

Abstract: A battery pre-heating apparatus for a hybrid vehicle according to an embodiment of the present invention comprises: a battery composed of a plurality of battery cells; a power relay assembly comprising, for the charge and discharge control of the battery, a first main relay connected to a positive electrode of the battery and a second main relay connected to a negative electrode of the battery; and a pre-heater including at least one sheet heater formed of a heating paste composition, wire-connected between an output terminal of the first main relay and an output terminal of the second main relay, and pre-heating the battery to a predetermined temperature using generation power by regenerative braking, wherein the heating paste composition contains, on the basis of 100 parts by weight of the heating paste composition, 3-6 parts by weight of carbon nanotube particles, 0.5-30 parts by weight of carbon nanoparticles, 10-30 parts by weight of a mixed binder, 29-83 parts by weight of an organic solvent, and 0.

Abstract: A motor for a washing machine includes a stator and a rotor. The rotor includes a rotor casing including a base portion formed in a disk shape and a vertical wall extending substantially perpendicularly from an outer periphery of the base portion, a permanent magnet provided on an inner surface of the vertical wall of the rotor casing, and a connecting member provided at a center of the base portion of the rotor casing and connected to a shaft. The base portion of the rotor casing includes a first ring portion facing a coil portion of the stator and a second ring portion, provided with a plurality of air inlet holes, that is positioned between the first ring portion and the connecting member and does not face the coil portion of the stator.

Abstract: A heating device for an electric vehicle, according to an embodiment of the present invention, comprises: a water pump which is for circulating supplied water; a heating resistor which has one or more surface type heating elements formed by means of a heating paste composition and is for heating the circulated water; a water temperature sensor which is for measuring the temperature of the hot water heated by means of the heating resistor; and a control unit which is for adjusting the heating resistor such that the measured temperature measured by means of the water temperature sensor satisfies a set temperature value, wherein the heating paste composition comprises, on the basis of 100 parts by weight of the total heating paste composition, 3˜6 wt % of carbon nanotube particles, 0.5˜30 wt % of carbon nanoparticles, 10˜30 wt % of a mixed binder, 29˜83 wt % of an organic solvent, and 0.

Abstract: A battery pre-heating apparatus for a hybrid vehicle according to an embodiment of the present invention comprises: a battery composed of a plurality of battery cells; a power relay assembly comprising, for the charge and discharge control of the battery, a first main relay connected to a positive electrode of the battery and a second main relay connected to a negative electrode of the battery; and a pre-heater including at least one sheet heater formed of a heating paste composition, wire-connected between an output terminal of the first main relay and an output terminal of the second main relay, and pre-heating the battery to a predetermined temperature using generation power by regenerative braking, wherein the heating paste composition contains, on the basis of 100 parts by weight of the heating paste composition, 3-6 parts by weight of carbon nanotube particles, 0.5-30 parts by weight of carbon nanoparticles, 10-30 parts by weight of a mixed binder, 29-83 parts by weight of an organic solvent, and 0.