Abstract: In a method for predicting at least one illumination parameter for evaluating an illumination setting for illuminating an object field of a projection exposure apparatus, illumination parameters are measured at a number of calibration settings, correction terms for prediction values of the illumination parameters are determined from the measured values, and then at least one illumination parameter of at least one illumination setting, which is not contained in the set of n calibration settings, is predicted.

Abstract: A fuel cell system with planar manifold having at least one fuel cell assembly with a first side and a second side; a plurality of anodes on the first side; a plurality of cathodes on the second side; ion-conducting electrolyte between the first and second sides; a fluid manifold assembly fluidly connected to the first side. In the planar manifold a first barrier layer provides at least one inlet port in fluid communication with a hydrogen source, and at least one outlet port to remove any unreacted hydrogen and byproducts from the first side; a plurality of conduit layers, on at least one of which is disposed one or more channels fluidly connected to the at least one inlet port and one of which is fluidly connected to the at least one outlet port; and, a second barrier layer disposed above the plurality of conduit layers containing a plurality of perforations affixed to the first side to supply hydrogen gas.

Abstract: An electrochemical cell system includes a fluid manifold having a layered structure. The fluid manifold includes at least one conduit layer having a first side and a second side. The at least one conduit later has at least one conduit channel.

Abstract: A copolymer as dispersant in a binder composition comprising an alkaline activating agent, wherein the activating agent is especially suitable for activation of a latently hydraulic and/or pozzolanic binder, wherein the copolymer has a polymer backbone and side chains bonded thereto and comprises at least one ionizable monomer unit M1 and at least one side chain-bearing monomer unit M2, and wherein the copolymer has a gradient structure in at least one section A in a direction along the polymer backbone with regard to the ionizable monomer unit M1 and/or with regard to the side chain-bearing monomer unit M2.

Abstract: A comb polymer and use thereof for improving the processing of hydraulically setting compositions. The comb polymer has ester, amide and/or ether groups on side chains bound to a main chain and the main chain has at least one acrylic acid unit A or a salt thereof and at least one methacrylic acid unit M or a salt thereof. Processes for producing a hydraulically setting composition with longer processing time.

Abstract: A method of reducing image placement errors in a microlithographic projection exposure apparatus includes providing a mask, a light sensitive layer and a microlithographic projection exposure apparatus which images features of the mask onto the light sensitive surface using projection light. Subsequently, image placement errors associated with an image of the features formed on the light sensitive surface are determined either by simulation or metrologically. Then an input state of polarization of the projection light is changed to an elliptical output state of polarization which is selected such that the image placement errors are reduced.

Abstract: The invention relates to the use of at least one comb polymer which includes side chains which have at least one cationic group, and does not include side chains having polyether groups, and which has a main chain which has carboxyl groups, as dispersant for hydraulically settable compositions. The invention also relates to hydraulically settable cement compositions, moldings, comb polymers and method for producing comb polymers.

Abstract: Embodiments of the present invention relate to a fluid distribution system. The system may include one or more electrochemical cell layers, a bulk distribution manifold having an inlet, a cell layer feeding manifold in direct fluidic contact with the electrochemical cell layer and a separation layer that separates the bulk distribution manifold from the cell feeding manifold, providing at least two independent paths for fluid to flow from the bulk distribution manifold to the cell feeding manifold.

Abstract: In a method for predicting at least one illumination parameter for evaluating an illumination setting for illuminating an object field of a projection exposure apparatus, illumination parameters are measured at a number of calibration settings, correction terms for prediction values of the illumination parameters are determined from the measured values, and then at least one illumination parameter of at least one illumination setting, which is not contained in the set of n calibration settings, is predicted.

Abstract: Method for setting an illumination setting in an illumination optical unit comprising at least one controllable correction device, which includes a multiplicity of adjustable correction elements for influencing the transmission, wherein the illumination setting is varied for adapting a predetermined imaging parameter in the region of an image field.

Abstract: A cemented tibial prosthesis having a bone-contacting surface with a porous outer rim. With the bone-contacting surface seated against a resected proximal tibia, bone cement or another suitable adhesive will travel into the pores of the porous outer rim to enhance the connection between the tibial prosthesis and the tibia.

Abstract: A collector for a projection exposure apparatus for microlithography comprises a plurality of reflective sections which are embodied and arranged in such a way that they can be impinged upon during the focusing of radiation from a first focus into a second focus with angles of impingement in a predefined angular spectrum.

Abstract: A block copolymer, in particular for use as a dispersant for mineral binder compositions, including at least one first block A and at least one second block B, wherein the first block A has a monomer unit M1 and the second block B has a monomer unit M2. To this end a proportion of monomer units M2 which is in any case present in the first block A is less than 25 mol %, in particular less than or equal to 10 mol %, based on all the monomer units M1 in the first block A and a proportion of monomer units M1 which is in any case present in the second block B is less than 25 mol %, in particular less than or equal to 10 mol %, based on all the monomer units M2 in the second block B.

Abstract: The invention relates to an illumination system for an EUV lithography device, comprising: a first facet mirror having facet elements that reflect EUV radiation, and a second facet mirror having facet elements for reflecting the EUV radiation reflected by the first facet mirror onto an illumination field. At least one of the facet elements of the first facet mirror or of the second facet mirror is designed as a diffractive optical element for diffracting the EUV radiation. In particular, at least one of the facet elements of the second facet mirror is designed as a diffractive optical element for illuminating only a part of the illumination field. The invention also relates to an EUV lithography device comprising such an illumination system, and to a facet mirror comprising at least one diffractive facet element.

Abstract: An illumination optical unit for projection lithography has a first polarization mirror device to reflect and polarize of illumination light. A second mirror device, which is disposed downstream of the polarization mirror device reflects an illumination light beam. At least one drive device is operatively connected to at least one of the two mirror devices. The two mirror devices are displaceable relative to one another via the drive device between a first relative position, which leads to a first beam geometry of the illumination light beam after reflection at the second mirror device, and a second relative position, which leads to a second beam geometry of the illumination light beam after reflection at the second mirror device, which is different from the first beam geometry. This results in a flexible predefinition of different illumination geometries, in particular of different illumination geometries with rotationally symmetrical illumination.

Abstract: Comb polymers having carboxyl/carboxylate and ester groups, containing a) 0.1-0.9 mol fractions of a partial structural unit S1, which is derived from an acrylic/methacrylic or maleic acid unit, b) 0-0.4 mol fractions of a partial structural unit S2, which is derived, for example, from an acrylic/methacrylic or maleic acid unit, which is esterified by means of a C1 to C20-alkanol or a polyalkylene glycol, alkyl-capped on one end, preferably a polyethylene glycol, and c) 0.1-0.4 mol fractions of a partial structural unit S3, which is derived from an acrylic/methacrylic or maleic acid unit, which is esterified by means of a polyalkylene glycol monoalkyl ether, which has a terminal, secondary hydroxyl group of the form-CH(R3)OH, wherein R3 is bulky alkyl group, preferably a methyl group.

Abstract: The disclosure relates to optical systems of a microlithographic projection exposure apparatus, and to a microlithographic exposure method. According to an aspect of the disclosure, an optical system has a light source, a ray-splitting optical element, which splits a light ray incident on this element when the projection exposure apparatus is in operation into a first partial ray and a second partial ray, with the first and the second partial ray having mutually orthogonal polarization directions, and at least one ray-deflecting optical element for generating a desired polarized illumination setting from the first partial ray and the second partial ray, wherein the ray-splitting optical element is arranged such that light incident on this ray-splitting optical element when the projection exposure apparatus is in operation has a degree of polarization of less than one.

Abstract: An optical system of a microlithographic projection exposure apparatus includes at least one mirror arrangement having a plurality of mirror elements which are displaceable independently of each other for altering an angular distribution of the light reflected by the mirror arrangement. The optical system also includes a polarization-influencing optical arrangement including a first lambda/2 plate and at least one additional lambda/2 plate.

Abstract: A comb polymer is used for increasing the flow rate and/or reducing the viscosity of a mineral binder composition, where the comb polymer has a main chain including acid groups and there are pendent chains linked to the main chain, and where the average number-average molar mass of all of the pendent chains is from 120 to 1000 g/mol and the molar ratio of the acid groups to the side chains is in the range from 0.5 to 2.

Abstract: Fluid coupling assemblies and methods are discussed. The fluid coupling assemblies include a first coupling member, a second coupling member magnetically engageable with the first coupling member, and a seal member disposed between a portion of the first coupling member and a portion of the second coupling member. A magnetic engagement of the first coupling member and the second coupling member unseals a fluid flow path therebetween. In certain examples, the first coupling member is sealed by a valve member and the second coupling member includes an activation member. When engaged, the valve member is moved from a closed position to an open position by the activation member, thereby unsealing the fluid flow path. A magnetic force between the first coupling member and the second coupling member can be chosen such that the members disengage when a predetermined fluid flow path pressure is reached.