Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.

Abstract: A bulk chemical delivery system, comprising: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. In non-limiting representative example, the bulk chemical canister may have a capacity of 200 liters. Also disclosed are novel manifolds for use in delivering chemicals from canisters and a transportation/containment cart.

Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.

Abstract: A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.

Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.

Abstract: A bulk chemical delivery system, that includes a cabinet that houses a delivery system. The delivery system may include a canister within the cabinet that is connected to a manifold within the cabinet that includes at least one output line for providing chemical from the canister outside the cabinet. The delivery system may further include an input system that provides input for operation of the delivery system, wherein the input system is housed in an enclosure, and an inert gas line that connects and supplies inert gas to the enclosure.

Abstract: This invention concerns a stable composition useful in the manufacture of semiconductors, comprising a liquid mixture of: octomethylcylcotetrasilane and a triethoxy arsenic compound.

Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.

Abstract: This invention concerns a shipping crate, comprising: a base having three sides and one or more doors attached thereto, wheels attached to the base, a top attached to the sides having a tank hole, wherein the base, sides, and doors have been attached to provide a sealed compartment. This invention also concerns a chemical delivery cabinet, comprising: a base, three sides, and one or more doors attached to one or more sides, a valve manifold affixed to an inner wall of the cabinet, process control instrumentation which connects to and controls the valve manifold, wherein at least one of the doors has a touch control pad mounted thereon.

Abstract: A bulk chemical delivery system having: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. The bulk chemical canister may have a capacity of 200 liters.

Abstract: This invention concerns a stable composition useful in the manufacture of semiconductors, comprising a liquid mixture of: tetraethylorthosilicate ("TEOS"), triethylborate ("TEB"), and a triethylphosphorus compound such as triethylphosphate ("TEPO"). The composition may be advantageously used in a plasma enhanced chemical vapor deposition apparatus equipped with a liquid mass flow controller. The boron and phosphorus percentages in the resulting borophosphosilicate film may be varied to arrive at desired percentages. This invention also includes a method useful for the preparation of a high purity liquid mixture useful in the manufacture of semiconductors, comprising the steps of: obtaining high purity (a) tetraethylorthosilicate, (b) triethylborate, and (c) a triethylphosphorus compound; adding components (a), (b), and (c) to a sealed, stainless steel container; and mixing the components to form the liquid mixture.

Abstract: This invention concerns a shipping and containment cart, comprising: a base having three sides and one or more doors attached thereto, wheels attached to the base, a top attached to the sides having a tank hole, wherein the base, sides, and doors have been attached to provide a sealed compartment. This invention also concerns a chemical delivery cabinet, comprising: a base, three sides, and one or more doors attached to one or more sides, a valve manifold affixed to an inner wall of the cabinet, process control instrumentation which connects to and controls the valve manifold, wherein at least one of the doors has a touch control pad mounted thereon.

Abstract: Containers for ultrahigh purity chemicals having aspect ratios of greater than 3:1 and methods of making the same from seamless electropolished stainless steel tubing are described. Chemical delivery systems for semiconductor fabrication processes that utilize these high aspect ratio containers also are described.

Abstract: A bracket assembly is provided for supporting and stabilizing valves or other accessories that are attached to chemical canisters. Such valves and related connectors are subject to damage and resulting leakage due to forces applied to them during shipment, handling, installation and use. In order to reduce such damage, a rigid baseplate is provided that can be attached to the port tube of a standard canister. Rigid angle brackets may be connected to the baseplate and to the valves to provide a strong, rigid support to hold the valves position relative to the canister. Such a bracket assembly removes stresses from conduits and sealed couplings between the valves and the canister, thus preventing damage to the couplings due to the application of external forces to the valves. The invention is also applicable to support other sorts of accessories mounted on canisters of various types and sizes.

Abstract: A bulk chemical delivery system, having a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. The bulk chemical canister may have a capacity of 200 liters. The bulk canister is housed within a transportation and containment cart that is housed within a cabinet.

Abstract: A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.