Patents by Inventor Kazuya Nagaseki
Kazuya Nagaseki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20200312623Abstract: A substrate processing apparatus includes a processing chamber that accommodates a substrate, a gas supply having a gas diffusion chamber and a plurality of gas holes that communicates the gas diffusion chamber with the processing chamber, a gas inlet tube that introduces a gas into the gas diffusion chamber of the gas supply, and a gas source connected to the gas inlet tube and supplies the gas to the gas inlet tube. The gas supply has a volume variable device for changing a volume in the gas diffusion chamber.Type: ApplicationFiled: March 30, 2020Publication date: October 1, 2020Applicant: TOKYO ELECTRON LIMITEDInventors: Kazuki MOYAMA, Kazuya NAGASEKI, Shinji HIMORI, Michishige SAITO, Gen TAMAMUSHI
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Patent number: 10763126Abstract: An etching apparatus includes: a placement table serving as a lower electrode and configured to place a workpiece to be subjected to an etching processing thereon; a DC power supply configured to generate a negative DC voltage applied to the placement table; and a controller configured to: periodically apply a negative DC voltage to the placement table from the DC power supply when the etching processing on the workpiece placed on the placement table is initiated, and decrease a frequency of the negative DC voltage applied to the placement table with an elapse of processing time of the etching processing.Type: GrantFiled: April 24, 2019Date of Patent: September 1, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Koichi Nagami, Kazuya Nagaseki
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Publication number: 20200234930Abstract: An upper electrode for a plasma processing apparatus, includes an electrode having a gas discharge hole, a gas plate having a gas flow path formed at a position facing the gas discharge hole to supply a processing gas to the gas discharge hole, an electrostatic attraction part interposed between the electrode and the gas plate and having a contact surface that is in contact with a lower surface of the gas plate and an attraction surface that attracts an upper surface of the electrode, and a shield that shields radicals or gas moving from the gas discharge hole to a gap between the electrode and the gas plate.Type: ApplicationFiled: January 9, 2020Publication date: July 23, 2020Applicant: Tokyo Electron LimitedInventors: Gen TAMAMUSHI, Kazuya NAGASEKI, Chishio KOSHIMIZU
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Publication number: 20200144028Abstract: A plasma processing apparatus includes a chamber and a substrate support provided in the chamber. A power supply unit is connected to a lower electrode of the substrate support. The power supply unit applies a first DC voltage to the lower electrode during generation of plasma from an etching gas in the chamber. The first DC voltage is a positive DC voltage. The power supply unit applies a second DC voltage to the lower electrode during the generation of plasma from the etching gas in the chamber, to etch the substrate placed on the substrate support. The second DC voltage is a negative DC voltage. The DC voltage output by the power supply unit is continuously switched from the first DC voltage to the second DC voltage.Type: ApplicationFiled: November 5, 2019Publication date: May 7, 2020Applicant: TOKYO ELECTRON LIMITEDInventors: Koichi NAGAMI, Kazuya NAGASEKI, Shinji HIMORI
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Publication number: 20200144031Abstract: An etching method is performed in a state where a substrate is placed on a substrate support provided in a chamber of a plasma processing apparatus. In the etching method, radio-frequency power is supplied to generate plasma from a gas in the chamber. Subsequently, a negative DC voltage is applied to a lower electrode of the substrate support during the supplying of the radio-frequency power to etch the substrate with positive ions from plasma. Subsequently, the applying of the negative DC voltage to the lower electrode and the supplying of the radio-frequency power are stopped to generate negative ions. Subsequently, a positive DC voltage is applied to the lower electrode in a state where the supply of the radio-frequency power is stopped to supply the negative ions to the substrate.Type: ApplicationFiled: November 5, 2019Publication date: May 7, 2020Applicant: TOKYO ELECTRON LIMITEDInventors: Gen TAMAMUSHI, Kazuya NAGASEKI
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Publication number: 20200126770Abstract: A decrease of an etching rate of a substrate can be suppressed, and energy of ions irradiated to an inner wall of a chamber main body can be reduced. A plasma processing apparatus includes a DC power supply configured to generate a negative DC voltage to be applied to a lower electrode of a stage. In a plasma processing performed by using the plasma processing apparatus, a radio frequency power is supplied to generate plasma by exciting a gas within a chamber. Further, the negative DC voltage from the DC power supply is periodically applied to the lower electrode to attract ions in the plasma onto the substrate placed on the stage. A ratio occupied, within each of cycles, by a period during which the DC voltage is applied to the lower electrode is set to be equal to or less than 40%.Type: ApplicationFiled: December 20, 2019Publication date: April 23, 2020Inventors: Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki, Shinji Himori
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Patent number: 10553407Abstract: A decrease of an etching rate of a substrate can be suppressed, and energy of ions irradiated to an inner wall of a chamber main body can be reduced. A plasma processing apparatus includes a DC power supply configured to generate a negative DC voltage to be applied to a lower electrode of a stage. In a plasma processing performed by using the plasma processing apparatus, a radio frequency power is supplied to generate plasma by exciting a gas within a chamber. Further, the negative DC voltage from the DC power supply is periodically applied to the lower electrode to attract ions in the plasma onto the substrate placed on the stage. A ratio occupied, within each of cycles, by a period during which the DC voltage is applied to the lower electrode is set to be equal to or less than 40%.Type: GrantFiled: August 17, 2018Date of Patent: February 4, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki, Shinji Himori
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Publication number: 20190333741Abstract: A plasma processing method includes providing a plasma processing apparatus; supplying radio-frequency waves from a radio-frequency power supply; and applying a negative DC voltage to a lower electrode from the at least one DC power supply. In the applying the DC voltage, the DC voltage is cyclically applied to the lower electrode, and in a state where a frequency defining each cycle in which the DC voltage is applied to the lower electrode is set to be lower than 1 MHz, a ratio occupied by a period during which the DC voltage is applied to the lower electrode in the each cycle is regulated.Type: ApplicationFiled: April 26, 2019Publication date: October 31, 2019Applicant: TOKYO ELECTRON LIMITEDInventors: Koichi NAGAMI, Tatsuro OHSHITA, Kazuya NAGASEKI, Shinji HIMORI
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Publication number: 20190333739Abstract: An etching apparatus includes: a placement table serving as a lower electrode and configured to place a workpiece to be subjected to an etching processing thereon; a DC power supply configured to generate a negative DC voltage applied to the placement table; and a controller configured to: periodically apply a negative DC voltage to the placement table from the DC power supply when the etching processing on the workpiece placed on the placement table is initiated, and decrease a frequency of the negative DC voltage applied to the placement table with an elapse of processing time of the etching processing.Type: ApplicationFiled: April 24, 2019Publication date: October 31, 2019Applicant: TOKYO ELECTRON LIMITEDInventors: Koichi NAGAMI, Kazuya NAGASEKI
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Publication number: 20190252157Abstract: A plasma processing system includes a chamber, a gas supply unit, a gas exhaust unit, a separating unit, a boost unit and an accumulation unit. The chamber is configured to process a target substrate by plasma of a gaseous mixture of a rare gas and a processing gas. The gas supply unit is configured to supply the rare gas and the processing gas into the chamber. The gas exhaust unit is configured to exhaust a gas containing the rare gas from the chamber. The separating unit is configured to separate the rare gas from the gas exhausted by the gas exhaust unit. The boost unit is configured to boost the rare gas separated by the separating unit. The accumulation unit is configured to accumulate the rare gas boosted by the boost unit and supply the accumulated first rare gas to the gas supply unit.Type: ApplicationFiled: February 8, 2019Publication date: August 15, 2019Applicant: TOKYO ELECTRON LIMITEDInventors: Kazuki MOYAMA, Kazuya NAGASEKI
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Publication number: 20190172689Abstract: An exhaust device including an exhaust mechanism and an exhaust unit is provided. The exhaust mechanism includes a first blade unit and a second blade unit provided in an exhaust space of a processing vessel including a processing space of a vacuum atmosphere for applying a process to a workpiece. The first blade unit and the second blade unit are arranged coaxially with a periphery of the workpiece, and at least one of the first blade unit and the second blade unit is rotatable. The exhaust unit is provided at a downstream side of the exhaust mechanism and communicates with the exhaust space. The exhaust unit is configured to exhaust gas in the processing vessel.Type: ApplicationFiled: November 30, 2018Publication date: June 6, 2019Inventors: Kazuya NAGASEKI, Kazuki MOYAMA, Toshiya MATSUDA, Naokazu FURUYA, Tatsuro OHSHITA
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Publication number: 20190164727Abstract: A part for a semiconductor manufacturing apparatus, the part being enabled to cause electricity to pass through and including an insulating member.Type: ApplicationFiled: November 20, 2018Publication date: May 30, 2019Inventors: Naoki SUGAWA, Naoyuki SATOH, Kazuya NAGASEKI
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Publication number: 20190148155Abstract: In a substrate processing method, electrons having a first energy are supplied from an electron beam generator into an inner space of a chamber body of a substrate processing apparatus to generate negative ions by attaching the electrons to molecules in a processing gas supplied to the inner space. Then a positive bias voltage is applied to an electrode of a supporting table that supports a substrate mounted on thereon in the inner space to attract the negative ions to the substrate.Type: ApplicationFiled: November 8, 2018Publication date: May 16, 2019Applicant: TOKYO ELECTRON LIMITEDInventors: Shinji KUBOTA, Kazuya NAGASEKI, Akihiro YOKOTA, Gen TAMAMUSHI
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Publication number: 20190122863Abstract: Energy of ions irradiated to a chamber main body is reduced. A plasma processing apparatus includes a chamber main body, a placing table and a high frequency power supply unit. The chamber main body is configured to provide a chamber therein. The chamber main body is connected to a ground potential. The placing table has a lower electrode and is provided within the chamber. The high frequency power supply unit is electrically connected to the lower electrode. The high frequency power supply unit is configured to generate an output wave for bias to be supplied to the lower electrode. The high frequency power supply unit is configured to generate the output wave in which a positive voltage component of a voltage waveform of a high frequency power having a fundamental frequency is reduced.Type: ApplicationFiled: April 14, 2017Publication date: April 25, 2019Inventors: Kazuya Nagaseki, Tatsuro Ohshita, Koichi Nagami
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Publication number: 20190057845Abstract: A decrease of an etching rate of a substrate can be suppressed, and energy of ions irradiated to an inner wall of a chamber main body can be reduced. A plasma processing apparatus includes a DC power supply configured to generate a negative DC voltage to be applied to a lower electrode of a stage. In a plasma processing performed by using the plasma processing apparatus, a radio frequency power is supplied to generate plasma by exciting a gas within a chamber. Further, the negative DC voltage from the DC power supply is periodically applied to the lower electrode to attract ions in the plasma onto the substrate placed on the stage. A ratio occupied, within each of cycles, by a period during which the DC voltage is applied to the lower electrode is set to be equal to or less than 40%.Type: ApplicationFiled: August 17, 2018Publication date: February 21, 2019Inventors: Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki, Shinji Himori
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Publication number: 20190013230Abstract: Disclosed is a method of manufacturing an electrostatic chuck configured to attract a substrate by applying a voltage to a first electrode layer. The method includes forming the first electrode layer on a first resin layer on a base and thermally spraying ceramics or a ceramics-containing material on the first electrode layer. The thermally spraying the ceramic or the ceramics-containing material includes transporting powder of a thermal spray material, introduced into a nozzle from a feeder, by a plasma generation gas and spraying the powder from an opening in a tip end portion of the nozzle, dissociating the sprayed plasma generation gas by electric power of 500 W to 10 kW to generate plasma having a common axis with the nozzle, and forming the powder of the thermal spray material into a liquid phase by the generated plasma to form a film on the first electrode layer.Type: ApplicationFiled: July 6, 2018Publication date: January 10, 2019Applicant: TOKYO ELECTRON LIMITEDInventors: Satoshi TAGA, Yoshiyuki KOBAYASHI, Kazuya NAGASEKI
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Publication number: 20180174806Abstract: Disclosed is a plasma processing apparatus including: a processing container; a placing table provided in the processing container and configured to place a workpiece thereon; a dielectric member having a facing surface that faces the placing table; a planar antenna provided on a surface of the dielectric member opposite to the facing surface and configured to introduce an induced electric field for plasma excitation into the processing container via the dielectric member; and an electromagnet group disposed along an outer circumference of the processing container and configured to form a magnetic field for moving ions in plasma based on the induced electric field along the facing surface of the dielectric member in the processing container.Type: ApplicationFiled: December 13, 2017Publication date: June 21, 2018Applicant: TOKYO ELECTRON LIMITEDInventors: Kazuya NAGASEKI, Shinji HIMORI, Mitsunori OHATA
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Patent number: 9978566Abstract: Disclosed is a plasma etching method which is performed using a plasma processing apparatus that is a capacitively coupled plasma processing apparatus, and includes: a processing container; a gas supply unit that supply an etching processing gas into the processing container; a placing table including a lower electrode; an upper electrode provided above the placing table; and a plurality of electromagnets including a plurality of coils, or a plurality of electromagnets each including a coil, on the upper electrode. The plasma etching method includes generating plasma of the processing gas to perform a plasma etching on a single film of a workpiece placed on the placing table; and controlling a current supplied to the plurality of electromagnet to change a distribution of an etching rate of the single film in the diametric direction with respect to the central axis during the generating of the plasma of the processing gas.Type: GrantFiled: October 7, 2016Date of Patent: May 22, 2018Assignee: TOKYO ELECTRON LIMITEDInventors: Akihiro Yokota, Shinji Himori, Tatsuro Ohshita, Shu Kusano, Etsuji Ito, Kazuya Nagaseki
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Publication number: 20170103877Abstract: Disclosed is a plasma etching method which is performed using a plasma processing apparatus that is a capacitively coupled plasma processing apparatus, and includes: a processing container; a gas supply unit that supply an etching processing gas into the processing container; a placing table including a lower electrode; an upper electrode provided above the placing table; and a plurality of electromagnets including a plurality of coils, or a plurality of electromagnets each including a coil, on the upper electrode. The plasma etching method includes generating plasma of the processing gas to perform a plasma etching on a single film of a workpiece placed on the placing table; and controlling a current supplied to the plurality of electromagnet to change a distribution of an etching rate of the single film in the diametric direction with respect to the central axis during the generating of the plasma of the processing gas.Type: ApplicationFiled: October 7, 2016Publication date: April 13, 2017Applicant: TOKYO ELECTRON LIMITEDInventors: Akihiro YOKOTA, Shinji HIMORI, Tatsuro OHSHITA, Shu KUSANO, Etsuji ITO, Kazuya NAGASEKI
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Patent number: 9390943Abstract: A substrate processing apparatus generates an electric field in a processing space between a lower electrode to which a high frequency power is supplied and an upper electrode facing the lower electrode and performs plasma processing on a substrate mounted on the lower electrode by using a plasma generated by the electric field. Distribution of a plasma density in the processing space is controlled by a magnetic field generated by controlling a plurality of electromagnets provided at a top surface of the upper electrode which is provided to be opposite to the processing space.Type: GrantFiled: February 14, 2013Date of Patent: July 12, 2016Assignee: TOKYO ELECTRON LIMITEDInventors: Kazuya Nagaseki, Etsuji Ito, Akihiro Yokota, Shinji Himori, Shoichiro Matsuyama