Abstract: A geared electric motor comprises: an output gear configured to rotate around an axial line parallel to a rotor shaft as an axis of rotation; an output shaft configured to rotate integrally with the output gear, the output shaft being arranged at a position facing an input gear with a distance in a direction of the axis of rotation; a first holding member holding the rotor bearing; a second holding member holding a first output bearing; and a third holding member holding a second output bearing. The first holding member, the second holding member, and the third holding member are fixed to each other with the third holding member sandwiched between the first holding member and the second holding member.

Abstract: A non-contact type gripper may include a gripping plate, a plurality of blowing holes, a plurality of suction holes and a cavity. The blowing holes may be formed at the gripping plate to inject a gas to an object. The suction holes may be formed at the gripping plate to suck the gas. The cavity may be extended from at least one of the blowing holes to suppress a pressure drop of the gas. The gas flowing through the cavities extended from the corner suction hole and the blowing holes between the adjacent suction holes may receive a low flow resistance. Thus, a pressure drop of the gas injected from the blowing holes may be suppressed by the cavities to maintain a pressure of the gas, thereby preventing a deflection of the corner portion of the object such as the semiconductor chip by a strong suction force. As a result, the non-contact type gripper may grip the object in the non-contact manner to prevent a contamination of the object.

Abstract: A vehicle state detection unit detects whether a vehicle including an information apparatus is in motion or stopped. A display control unit displays operation items related to various functions provided by the information apparatus on a display. A function execution unit executes a function corresponding to a selected operation item. An identification unit identifies the frequency of use of each operation item by classifying the items according to whether the vehicle is in motion or stopped. The display control unit further displays on a prescribed menu screen in which some of the operation items are aggregated. On the prescribed menu screen, when the vehicle is in motion, the operation item identified as having a high frequency of use when the vehicle is in motion is displayed, and when the vehicle is stopped, the operation item identified as having a high frequency of use when the vehicle is stopped is displayed.

Abstract: A cognitive function-improving agent containing one or both of Bifidobacterium breve FERM BP-11175 and a culture of Bifidobacterium breve FERM BP-11175 as an active ingredient for administration to a subject who has not developed dementia is provided.

Abstract: A packaging container having excellent water repelling properties on the outer or inner surface of the packaging container includes at least an outer resin layer, a paper core layer, and an inner resin layer. Minute protrusions are formed on the surface of the outer resin layer or the inner resin layer, and the minute protrusion structure has a fractal dimension of 1.08 to 1.17, wherein the fractal dimension is a numeric value calculated by the box count method at a resolution at which the length per one pixel is 0.5-1.0 ?m.

Abstract: The aim of the present invention lies in inexpensively providing a thin-film laminated film having excellent barrier properties. A further aim of the present invention lies in providing a method for producing a thin-film laminated film in which a plurality of thin films are coated on a plastic film by means of atmospheric-pressure plasma CVD which has low equipment costs and running costs, and also in providing a thin-film laminated film production apparatus which is able to operate continuously for a long period of time and can produce high-speed coating. A thin film according to the present invention includes a plastic film, a first silicon oxide-based thin film containing silicon oxide as the main component, and a first amorphous carbon-based thin film. The first amorphous carbon-based thin film is formed on the first silicon oxide-based thin film. The first silicon oxide-based thin film has pinholes with a diameter in the range of 10-200 nm.

Abstract: A packaging container having excellent water repelling properties on the outer or inner surface of the packaging container includes at least an outer resin layer, a paper core layer, and an inner resin layer. Minute protrusions are formed on the surface of the outer resin layer or the inner resin layer, and the minute protrusion structure has a fractal dimension of 1.08 to 1.17, wherein the fractal dimension is a numeric value calculated by the box count method at a resolution at which the length per one pixel is 0.5-1.0 ?m.

Abstract: A substrate processing apparatus includes a substrate stage that supports a substrate, a follower stage disposed on a same plane as the substrate stage, a first driving unit that moves the follower stage in parallel with a first direction, and a second driving unit that moves the substrate stage in parallel with the first direction. The second driving unit includes a voice magnet member disposed on the substrate stage, and a voice coil member disposed on the follower stage and spaced apart from the voice magnet member.

Abstract: A substrate processing apparatus includes a substrate stage that supports a substrate, a follower stage disposed on a same plane as the substrate stage, a first driving unit that moves the follower stage in parallel with a first direction, and a second driving unit that moves the substrate stage in parallel with the first direction. The second driving unit includes a voice magnet member disposed on the substrate stage, and a voice coil member disposed on the follower stage and spaced apart from the voice magnet member.

Abstract: A substrate treating method includes a determining step for determining a treating condition for hydrophobizing a surface of a substrate, based on a target regarding a dissolved area size in a resist pattern, and a treating step for hydrophobizing the surface of the substrate with the treating condition determined in the determining step before forming resist film on the surface of the substrate.

Abstract: An exposure apparatus includes a liquid supply system having a supply path via which liquid is supplied to a space under a projection system; a liquid recovery system having a recovery path via which the supplied liquid is collected; a supply flow-meter provided at the supply path; a recovery flow-meter provided at the recovery path; a stage system having a movable stage apparatus on which a substrate is held; and a light receiver which is provided at the movable stage apparatus and which receives detection light via a light-transmissive member. The light-transmissive member has a liquid repellent upper surface from which the detection light is incident on the light-transmissive member. The substrate is exposed through liquid in a liquid immersion area formed on a portion of an upper surface of the substrate while supplying liquid via the supply path and collecting liquid via the recovery path.

Abstract: The aim of the present invention lies in inexpensively providing a thin-film laminated film having excellent barrier properties. A further aim of the present invention lies in providing a method for producing a thin-film laminated film in which a plurality of thin films are coated on a plastic film by means of atmospheric-pressure plasma CVD which has low equipment costs and running costs, and also in providing a thin-film laminated film production apparatus which is able to operate continuously for a long period of time and can produce high-speed coating. A thin film according to the present invention includes a plastic film, a first silicon oxide-based thin film containing silicon oxide as the main component, and a first amorphous carbon-based thin film. The first amorphous carbon-based thin film is formed on the first silicon oxide-based thin film. The first silicon oxide-based thin film has pinholes with a diameter in the range of 10-200 nm.

Abstract: An exposure apparatus includes a stage apparatus having an upper surface in which a recess that holds a substrate is formed. A liquid immersion system has a supply port via which a liquid is supplied and a collection port via which the liquid is collected forms a liquid immersion region. A projection optical system has an optical element and is configured to project an exposure light onto the substrate through the liquid of the liquid immersion region. A light-transmissive member is provided at the stage apparatus and has an upper surface substantially coplanar with an upper surface of the substrate held on the stage apparatus and with the upper surface of the stage apparatus. A groove is provided at the stage apparatus, into which the liquid is allowed to flow.

Abstract: A substrate processing apparatus includes a substrate stage that supports a substrate, a follower stage disposed on a same plane as the substrate stage, a first driving unit that moves the follower stage in parallel with a first direction, and a second driving unit that moves the substrate stage in parallel with the first direction. The second driving unit includes a voice magnet member disposed on the substrate stage, and a voice coil member disposed on the follower stage and spaced apart from the voice magnet member.

Abstract: An exposure apparatus includes a stage apparatus having an upper surface in which a recess that holds a substrate is formed. A liquid immersion system has a supply port via which a liquid is supplied and a collection port via which the liquid is collected forms a liquid immersion region. A projection optical system has an optical element and is configured to project an exposure light onto the substrate through the liquid of the liquid immersion region. A light-transmissive member is provided at the stage apparatus and has an upper surface substantially coplanar with an upper surface of the substrate held on the stage apparatus and with the upper surface of the stage apparatus. A groove is provided at the stage apparatus, into which the liquid is allowed to flow.

Abstract: An exposure apparatus includes a projection system, a liquid supply system having a supply opening via which liquid is supplied to a space under the projection system, a liquid recovery system having a recovery opening via which the supplied liquid is collected, a supply flow meter fluidically connected to the supply opening, a stage system having a movable stage apparatus on which a substrate is held, and a measurement system which measures a wavefront aberration and has a light receiving part which receives a light from the projection system through a light-transmissive member provided at the movable stage apparatus and the liquid between the projection system and the light-transmissive member. A liquid immersion area, through which the substrate is exposed, is formed on a portion of an upper surface of the substrate while performing liquid supply via the supply opening and liquid collection via the recovery opening.

Abstract: A substrate treating method includes a determining step for determining a treating condition for hydrophobizing a surface of a substrate, based on a target regarding a dissolved area size in a resist pattern, and a treating step for hydrophobizing the surface of the substrate with the treating condition determined in the determining step before forming resist film on the surface of the substrate.

Abstract: An exposure apparatus includes a projection system, a liquid supply system having a supply opening via which liquid is supplied to a space under the projection system, a liquid recovery system having a recovery opening via which the supplied liquid is collected, a supply flow meter fluidically connected to the supply opening, a stage system having a movable stage apparatus on which a substrate is held, and a measurement system which measures a wavefront aberration and has a light receiving part which receives a light from the projection system through a light-transmissive member provided at the movable stage apparatus and the liquid between the projection system and the light-transmissive member. A liquid immersion area, through which the substrate is exposed, is formed on a portion of an upper surface of the substrate while performing liquid supply via the supply opening and liquid collection via the recovery opening.

Abstract: An exposure apparatus includes a projection system; a liquid supply system configured to supply liquid to a space under the projection system; a liquid recovery system configured to recover the supplied liquid via a recovery opening; a separator fluidically connected to the recovery opening, which separates one of the liquid and gas, which has been collected via the recovery opening, from the other; a flow-meter fluidically connected to the recovery opening; a stage system configured to move a movable member on which a substrate is held; and a measurement system having a light receiving part which receives a measurement light through a light-transmissive member provided at the movable member and through the liquid between the projection system and the light-transmissive member.

Abstract: A substrate is transported between a first space and a second space, which are separated by a partition wall, through an opening portion formed in the partition wall. A transport apparatus includes a support device having a support portion which supports the substrate, the support device being provided so as to block the opening portion while a clearance between the partition wall and the support device is formed, the support device moving the support portion from a state where the support portion faces the first space to a state where the support portion faces the second space; and an adjustment device which adjusts an amount of the clearance, thereby suppressing the movement of fluid from the first space to the second space.