Abstract: A serial communication device bridging between a parallel bus and a serial bus, includes (a) a check bit producer which applies an error correcting code to parallel data transmitted through the parallel bus, (b) a parallel-serial converter which converts the parallel data output from the check bit producer, into serial data, (c) a serial-parallel converter which converts serial data transmitted through the serial bus, into parallel data, and (d) an error detector which checks an error correcting code applied to the serial data, and detects an error in the error correcting code.

Abstract: An edge exposing apparatus includes a photo detector and a lighting time measuring circuit for detecting a decrease in performance of light source units. The lighting time measuring circuit detects a ready state ((stabilization of luminous intensity) of the light source units, for example by measuring a lighting time for a startup (switch-on) of the light source units. When the measuring circuit detects a preset lighting time, or when the photo detector detects a luminous intensity below a preset value, the light source units are determined to have lowered performance, and are switched off. When a decrease in performance of one unit is detected, a replacement light source unit is started while continuing edge exposure with one or more other light source unit(s). When a ready state is detected, the edge exposure with the one light source unit is terminated (switch-off), and edge exposure is performed with the replacement light source unit.

Abstract: An exposure apparatus is an exposure apparatus that exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting a pattern image onto the substrate via the projection optical system and the liquid, wherein the projection optical system has a first group comprising an optical member that contacts the liquid, and a second group that differs from that first group; the first group is supported by a first support member; and the second group is separated from the first group and is supported by the second support member that differs from the first support member.

Abstract: An exposure apparatus is an exposure apparatus that exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting a pattern image onto the substrate via the projection optical system and the liquid, wherein the projection optical system has a first group comprising an optical member that contacts the liquid, and a second group that differs from that first group; the first group is supported by a first support member; and the second group is separated from the first group and is supported by the second support member that differs from the first support member.

Abstract: A stage assembly (10) for independently moving and positioning a first device (26A) and a second device (26A) in an operation area (25) is provided herein. The stage assembly (10) includes a stage base (12), a first stage (14), a first mover assembly (15), a second stage (16), and a second mover assembly (18). The first mover assembly (15) moves the first stage (14) and the first device (26A) into the operational area (25) and the second mover assembly (18) moves the second stage (16) and the second device (26B) into the operational area (25). The present stage assembly (10) reduces and minimizes the amount of reaction forces and disturbances that are transferred between the stages (14), (16). This improves the positioning performance of the stage assembly (10). Further, for an exposure apparatus (30), this allows for more accurate positioning of two semiconductor wafers (28) relative to a reticle (32) or some other reference.

Abstract: An actuator has a pair of electromagnets and a curved magnetic member that is magnetically coupled to the electromagnets. The magnetic force acting on the curved magnetic member has less of a tendency to induce torque to the table than a straight magnetic member, because the geometry of the magnetic force between the curved magnetic member and electromagnets remain relatively unchanged over the permitted range of movement of the magnetic member.

Abstract: In manufacture of the paper container from the packaging materials, the damage of internal layer of packaging materials is promptly inspected, and degradation by light exposure of content can be prevented. Method of manufacturing light barrier paper packaging materials for liquid food formed from a laminate having a paper layer, a thermoplastic resin outside layer and a thermoplastic resin inside layer comprising a step of preparing substantially complete bleached white bleached paper layer of weight of 50-350 g/m2, a step of providing light barrier layer of light barrier material in the inside of the bleach paper layer before or during the lamination of the inside thermoplastic resin layer, a step of inspecting defect of the obtained laminate by observation of the visible or invisible inside-surface of the bleach layer from the inside thermoplastic resin layer side of the obtained laminate through the light barrier layer.

Abstract: An edge exposing apparatus includes a photo detector and a lighting time measuring circuit for detecting a decrease in performance of light source units. The same lighting time measuring circuit has a function to detect a ready state (i.e. stabilization of luminous intensity) of the light source units capable of performing edge exposure. When the lighting time measuring circuit detects a lighting time having reached a preset value, or when the photo detector detects a luminous intensity below a preset value, the light source units are determined to have lowered in performance, and are switched off. The lighting time measuring circuit measures a lighting time from a startup (switch-on) of the light source units, and when the lighting time reaches a preset value, the light source units are determined to have attained the ready state and edge exposure is started with the light source units.

Abstract: A stage assembly (10) for independently moving and positioning a first device (26A) and a second device (26A) in an operation area (25) is provided herein. The stage assembly (10) includes a stage base (12), a first stage (14), a first mover assembly (15), a second stage (16), and a second mover assembly (18). The first mover assembly (15) moves the first stage (14) and the first device (26A) into the operational area (25) and the second mover assembly (18) moves the second stage (16) and the second device (26B) into the operational area (25). The present stage assembly (10) reduces and minimizes the amount of reaction forces and disturbances that are transferred between the stages (14), (16). This improves the positioning performance of the stage assembly (10). Further, for an exposure apparatus (30), this allows for more accurate positioning of two semiconductor wafers (28) relative to a reticle (32) or some other reference.

Abstract: A high accuracy stage supported in six degrees of freedom by electromagnetic bearings. Movements in the horizontal plane of the stage are controlled by variable reluctance actuators which are mounted between the high accuracy stage and a coarse stage so as not to distort the high accuracy stage during movements thereof. The high accuracy stage is supported in three vertical degrees of freedom by electromagnetic actuators disposed between the coarse stage and the high accuracy stage and aided by a supplemental vertical support disposed adjacent to the actuators. Preferably, the high accuracy stage is suspended from a bar supported by the supplemental vertical support, which is preferably air bellows.

Abstract: A stage assembly (10) for moving and positioning a device (30) includes a stage (14), a stage mover assembly (16), a device table (18), a table mover assembly (20) and a damping assembly (22). The table mover assembly (20) moves the device table (18) along a Z axis, about an X axis and about a Y axis relative to the stage (14) and generates reaction forces. The damping assembly (22) is coupled to the table mover assembly (20). Uniquely, the damping assembly (22) reduces the reaction forces created by the table mover assembly (20) that are transferred to the stage (14).

Abstract: A circulating system (10) for circulating a fluid (24) from a fluid source (28) around an attraction only type actuator (12) is provided herein. The actuator (12) includes a first core (18), a second core (22), and a tubular conductor (20). The circulating system (10) includes a circulation housing (26) and a fluid inlet (60). The circulation housing (26) is sized and shaped to encircle the conductor (20) and provide a fluid passageway (44) between the circulation housing (26) and the conductor (20). The fluid inlet (60) extends into the fluid passageway (44) and is in fluid communication with the fluid source (28). Fluid (24) from the fluid source (28) is directed through the fluid inlet (60) into the fluid passageway (44). Preferably, the flow rate of the fluid (24) is controlled to maintain an outer surface (96) of the circulation housing (26) at a set temperature to control the influence of the actuator (12) on the surrounding environment and the surrounding components.

Abstract: A filling machine for producing containers containing liquid food product includes a series of rollers for forming a web-shaped packaging material into a tubular packaging material, a filling tube for introducing a liquid food product into the tubular packaging material while the tubular packaging material is being conveyed downwardly, a heat sealing bar providing with a heating mechanism and engageable with a cutting bar to produce a seal area forming a transverse seal across the tubular packaging material below a level of the liquid food product, and a cutter provided on the cutting bar to cut the tubular packaging material in the seal zone to form a preformed container containing the liquid food product. At least one nozzle is positioned to direct a sterilizing flushing liquid towards the outside surface of the tubular packaging material and/or the cutter.

Abstract: A stage assembly (10) for moving and positioning a device (30) includes a stage (14), a stage mover assembly (16), a device table (18), a table mover assembly (20) and a damping assembly (22). The table mover assembly (20) moves the device table (18) along a Z axis, about an X axis and about a Y axis relative to the stage (14) and generates reaction forces. The damping assembly (22) is coupled to the table mover assembly (20). Uniquely, the damping assembly (22) reduces the reaction forces created by the table mover assembly (20) that are transferred to the stage (14).

Abstract: An apparatus for providing support between a first structure and a second structure is described. The apparatus includes a supporting member, and first and second sections. The supporting member is mounted to the first structure and second structure, and has positive stiffness with respect to a lateral direction. The first section has at least one magnetic member, and is coupled to the first structure. The second section has at least one magnetic member, and is coupled to the second structure. The first and second sections present negative stiffness caused by magnetic attractive force at a neutral position, thereby canceling at least a part of the positive stiffness of the supporting member.

Abstract: Disclosed is a linear motor device provided with a movable member, a stator having coils, and a control system for powering selected coils among the coils in accordance with a position of the movable member. The control system powers only the minimum number of coils contributing to the generation of thrust in relation with the current position of the movable member.

Abstract: A high accuracy stage supported in six degrees of freedom by electromagnetic bearings. Movements in the horizontal plane of the stage are controlled by variable reluctance actuators which are mounted between the high accuracy stage and a coarse stage so as not to distort the high accuracy stage during movements thereof. The high accuracy stage is supported in three vertical degrees of freedom by electromagnetic actuators disposed between the coarse stage and the high accuracy stage and aided by a supplemental vertical support disposed adjacent to the actuators. Preferably, the high accuracy stage is suspended from a bar supported by the supplemental vertical support, which is preferably air bellows.

Abstract: The columns of an aligner are placed on a surface plate. Actuators are provided between the surface plate and leg parts of the column. Acceleration sensors are attached to the surface plate and the leg parts of the column near the leg parts of the column respectively. Relative vibrations in +/−z directions which are generated between the surface plate and the column are detected by the acceleration sensors and, in accordance with the detection results, driving forces generated by the actuators in +/−z directions are controlled. Further, vibration eliminators are attached to the important points of the surface plate, the column or a lower base and vibrations generated locally in the surface plate, the column or the lower base are reduced by the vibration eliminators.

Abstract: A device stage assembly (10) for positioning a device (26) is provided herein. The device stage assembly (10) includes a mover housing (44), a device stage (14), a support assembly (18), and a control system (22). The support assembly (18) moves the device stage (14) relative to the mover housing (44) under the control of the control system (22). Uniquely, the support assembly (18) includes at least four, spaced apart Z device stage movers (84), (86), (88), (90) that move the device stage (14) relative to the mover housing (44). Further, the control system (22) controls the Z device stage movers (84), (86), (88), (90) to inhibit dynamic and static deformation of the device stage (14) during movement of the device stage (14). Further, the four Z device stage movers (84), (86), (88), (90) distribute forces on the device stage (14) in a way that more closely matches the gravitational and inertial loads on the device stage (14).

Abstract: A wafer stage assembly is provided to be used in combination with a projection lens assembly, such as in a semiconductor wafer manufacturing process. The wafer stage assembly includes a wafer table supported and positioned by a wafer stage and a wafer stage base for carrying a semiconductor wafer. The wafer stage assembly also includes a plurality of sets of sensors to determine a position and a rotation of the wafer table in six degrees of freedom relative to the projection lens assembly. A first set of sensors determines a position and a rotation of the wafer table relative to the projection lens assembly in at least one of the six degrees of freedom, while a second set of sensors determines a position and a rotation of the wafer table relative to the wafer stage base in the remaining of the six degrees of freedom.