Patents by Inventor Ke-Hung Chen

Ke-Hung Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210327881
    Abstract: Some embodiments include an integrated assembly having capacitor-contact-regions. Metal-containing interconnects are coupled with the capacitor-contact-regions. A first insulative material is between the metal-containing interconnects. A second insulative material is over the first insulative material. A third insulative material is over the second insulative material. First capacitor electrodes extend through the second and third insulative materials and are coupled with the metal-containing interconnects. Fourth insulative material is adjacent the first capacitor electrodes. Capacitor plate electrodes are adjacent the fourth insulative material and are spaced from the first capacitor electrodes by the fourth insulative material. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: April 17, 2020
    Publication date: October 21, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Ke-Hung Chen, Christopher W. Petz, Pankaj Sharma, Yong Mo Yang
  • Patent number: 10436717
    Abstract: Described herein are architectures, platforms and methods for detecting and analyzing anomalous events (i.e., arcing events) from spectral data gathered during a wafer fabrication process.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: October 8, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Thomas Omstead, Ke-Hung Chen, Deepak Vedhachalam
  • Publication number: 20180143141
    Abstract: Described herein are architectures, platforms and methods for detecting and analyzing anomalous events (i.e., arcing events) from spectral data gathered during a wafer fabrication process.
    Type: Application
    Filed: November 17, 2017
    Publication date: May 24, 2018
    Inventors: Thomas Omstead, Ke-Hung Chen, Deepak Vedhachalam
  • Patent number: 8884433
    Abstract: A circuit structure includes a semiconductor substrate, first and second metallic posts over the semiconductor substrate, an insulating layer over the semiconductor substrate and covering the first and second metallic posts, first and second bumps over the first and second metallic posts or over the insulating layer. The first and second metallic posts have a height of between 20 and 300 microns, with the ratio of the maximum horizontal dimension thereof to the height thereof being less than 4. The distance between the center of the first bump and the center of the second bump is between 10 and 250 microns.
    Type: Grant
    Filed: August 24, 2009
    Date of Patent: November 11, 2014
    Assignee: Qualcomm Incorporated
    Inventors: Mou-Shiung Lin, Chien-Kang Chou, Ke-Hung Chen
  • Patent number: 8558383
    Abstract: A post passivation rerouting support structure comprises a relatively thin support layer above the passivation layer to support the RDL, and a relatively thick support layer for fine pitch interconnects extending from the RDL and terminating as contact structures at the surface of the thick support layer, for a next level packaging structure. The thick support layer is planarized before defining the contact structures. The thick support layer may be formed after the conducting posts have been formed, or the thick support layer is formed before forming the conducting posts in vias formed in the thick support layer. An encapsulating layer may be provided above the thick support layer, which top surface is planarized before defining the contact structures. The encapsulating layer and the further support layer may be the same layer.
    Type: Grant
    Filed: November 4, 2008
    Date of Patent: October 15, 2013
    Assignee: Megica Corporation
    Inventors: Mou-Shiung Lin, Chien-Kang Chou, Ke-Hung Chen
  • Patent number: 8399989
    Abstract: A circuitry component comprising a semiconductor substrate, a pad over said semiconductor substrate, a tantalum-containing layer on a side wall and a bottom surface of said pad, a passivation layer over said semiconductor substrate, an opening in said passivation layer exposing said pad, a titanium-containing layer over said pad exposed by said opening, and a gold layer over said titanium-containing layer.
    Type: Grant
    Filed: July 31, 2006
    Date of Patent: March 19, 2013
    Assignee: Megica Corporation
    Inventors: Mou-Shiung Lin, Hsin-Jung Lo, Chiu-Ming Chou, Chien-Kang Chou, Ke-Hung Chen
  • Patent number: 8304766
    Abstract: A semiconductor chip comprises a metal pad exposed by an opening in a passivation layer, wherein the metal pad has a testing area and a bond area. During a step of testing, a testing probe contacts with the testing area for electrical testing. After the step of testing, a polymer layer is formed on the testing area with a probe mark created by the testing probe. Alternatively, a semiconductor chip comprises a testing pad and a bond pad respectively exposed by two openings in a passivation layer, wherein the testing pad is connected to the bond pad. During a step of testing, a testing probe contacts with the testing pad for electrical testing. After the step of testing, a polymer layer is formed on the testing pad with a probe mark created by the testing probe.
    Type: Grant
    Filed: April 26, 2011
    Date of Patent: November 6, 2012
    Assignee: Megica Corporation
    Inventors: Mou-Shiung Lin, Huei-Mei Yen, Hsin-Jung Lo, Chiu-Ming Chou, Ke-Hung Chen
  • Patent number: 8294279
    Abstract: A method of assembling chips. A first chip and a second chip are provided. At least one conductive pillar is formed on the first chip, and a conductive connecting material is formed on the conductive pillar. The second chip also comprises at least one conductive pillar. The first chip is connected to the second chip via the conductive pillars and the conductive connecting material.
    Type: Grant
    Filed: January 24, 2006
    Date of Patent: October 23, 2012
    Assignee: Megica Corporation
    Inventors: Ke-Hung Chen, Shih-Hsiung Lin, Mou-Shiung Lin
  • Patent number: 8148822
    Abstract: A bonding pad structure is fabricated on an integrated circuit (IC) substrate having at least a contact layer on its top surface. A passivation layer covers the top surface of the IC substrate and the contact layer. The passivation layer has an opening exposing a portion of the contact layer. An electrically conductive adhesion/barrier layer directly is bonded to the contact layer. The electrically conductive adhesion/barrier layer extends to a top surface of the passivation layer. A bonding metal layer is stacked on the electrically conductive adhesion/barrier layer.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: April 3, 2012
    Assignee: Megica Corporation
    Inventors: Mou-Shiung Lin, Hsin-Jung Lo, Chiu-Ming Chou, Chien-Kang Chou, Ke-Hung Chen
  • Publication number: 20110198589
    Abstract: A semiconductor chip comprises a metal pad exposed by an opening in a passivation layer, wherein the metal pad has a testing area and a bond area. During a step of testing, a testing probe contacts with the testing area for electrical testing. After the step of testing, a polymer layer is formed on the testing area with a probe mark created by the testing probe. Alternatively, a semiconductor chip comprises a testing pad and a bond pad respectively exposed by two openings in a passivation layer, wherein the testing pad is connected to the bond pad. During a step of testing, a testing probe contacts with the testing pad for electrical testing. After the step of testing, a polymer layer is formed on the testing pad with a probe mark created by the testing probe.
    Type: Application
    Filed: April 26, 2011
    Publication date: August 18, 2011
    Applicant: Megica Corporation
    Inventors: Mou-Shiung Lin, Huei-Mei Yen, Chiu-Ming Chou, Hsin-Jung Lo, Ke-Hung Chen
  • Patent number: 7947978
    Abstract: A semiconductor chip comprises a metal pad exposed by an opening in a passivation layer, wherein the metal pad has a testing area and a bond area. During a step of testing, a testing probe contacts with the testing area for electrical testing. After the step of testing, a polymer layer is formed on the testing area with a probe mark created by the testing probe. Alternatively, a semiconductor chip comprises a testing pad and a bond pad respectively exposed by two openings in a passivation layer, wherein the testing pad is connected to the bond pad. During a step of testing, a testing probe contacts with the testing pad for electrical testing. After the step of testing, a polymer layer is formed on the testing pad with a probe mark created by the testing probe.
    Type: Grant
    Filed: December 5, 2006
    Date of Patent: May 24, 2011
    Assignee: Megica Corporation
    Inventors: Mou-Shiung Lin, Huei-Mei Yen, Chiu-Ming Chou, Hsin-Jung Lo, Ke-Hung Chen
  • Publication number: 20090309224
    Abstract: A circuit structure includes a semiconductor substrate, first and second metallic posts over the semiconductor substrate, an insulating layer over the semiconductor substrate and covering the first and second metallic posts, first and second bumps over the first and second metallic posts or over the insulating layer. The first and second metallic posts have a height of between 20 and 300 microns, with the ratio of the maximum horizontal dimension thereof to the height thereof being less than 4. The distance between the center of the first bump and the center of the second bump is between 10 and 250 microns.
    Type: Application
    Filed: August 24, 2009
    Publication date: December 17, 2009
    Applicant: MEGICA CORPPORATION
    Inventors: Mou-Shiung Lin, Chien-Kang Chou, Ke-Hung Chen
  • Patent number: 7582556
    Abstract: A circuit structure includes a semiconductor substrate, first and second metallic posts over the semiconductor substrate, an insulating layer over the semiconductor substrate and covering the first and second metallic posts, first and second bumps over the first and second metallic posts or over the insulating layer. The first and second metallic posts have a height of between 20 and 300 microns, with the ratio of the maximum horizontal dimension thereof to the height thereof being less than 4. The distance between the center of the first bump and the center of the second bump is between 10 and 250 microns.
    Type: Grant
    Filed: June 26, 2006
    Date of Patent: September 1, 2009
    Assignee: MEGICA Corporation
    Inventors: Mou-Shiung Lin, Chien-Kang Chou, Ke-Hung Chen
  • Publication number: 20090057895
    Abstract: A post passivation rerouting support structure comprises a relatively thin support layer above the passivation layer to support the RDL, and a relatively thick support layer for fine pitch interconnects extending from the RDL and terminating as contact structures at the surface of the thick support layer, for a next level packaging structure. The thick support layer is planarized before defining the contact structures. The thick support layer may be formed after the conducting posts have been formed, or the thick support layer is formed before forming the conducting posts in vias formed in the thick support layer. An encapsulating layer may be provided above the thick support layer, which top surface is planarized before defining the contact structures. The encapsulating layer and the further support layer may be the same layer.
    Type: Application
    Filed: November 4, 2008
    Publication date: March 5, 2009
    Applicant: MEGICA CORPORATION
    Inventors: Mou-Shiung Lin, Chien-Kang Chou, Ke-Hung Chen
  • Patent number: 7468545
    Abstract: A post passivation rerouting support structure comprises a relatively thin support layer above the passivation layer to support the RDL, and a relatively thick support layer for fine pitch interconnects extending from the RDL and terminating as contact structures at the surface of the thick support layer, for a next level packaging structure. The thick support layer is planarized before defining the contact structures. The thick support layer may be formed after the conducting posts have been formed, or the thick support layer is formed before forming the conducting posts in vias formed in the thick support layer. An encapsulating layer may be provided above the thick support layer, which top surface is planarized before defining the contact structures. The encapsulating layer and the further support layer may be the same layer.
    Type: Grant
    Filed: May 8, 2006
    Date of Patent: December 23, 2008
    Assignee: Megica Corporation
    Inventors: Mou-Shiung Lin, Chien-Kang Chou, Ke-Hung Chen
  • Publication number: 20070164279
    Abstract: A semiconductor chip comprises a metal pad exposed by an opening in a passivation layer, wherein the metal pad has a testing area and a bond area. During a step of testing, a testing probe contacts with the testing area for electrical testing. After the step of testing, a polymer layer is formed on the testing area with a probe mark created by the testing probe. Alternatively, a semiconductor chip comprises a testing pad and a bond pad respectively exposed by two openings in a passivation layer, wherein the testing pad is connected to the bond pad. During a step of testing, a testing probe contacts with the testing pad for electrical testing. After the step of testing, a polymer layer is formed on the testing pad with a probe mark created by the testing probe.
    Type: Application
    Filed: December 5, 2006
    Publication date: July 19, 2007
    Applicant: MEGICA CORPORATION
    Inventors: Mou-Shiung Lin, Huei-Mei Yen, Chiu-Ming Chou, Hsin-Jung Lo, Ke-Hung Chen
  • Publication number: 20070026631
    Abstract: A circuitry component comprising a semiconductor substrate, a pad over said semiconductor substrate, a tantalum-containing layer on a side wall and a bottom surface of said pad, a passivation layer over said semiconductor substrate, an opening in said passivation layer exposing said pad, a titanium-containing layer over said pad exposed by said opening, and a gold layer over said titanium-containing layer.
    Type: Application
    Filed: July 31, 2006
    Publication date: February 1, 2007
    Inventors: Mou-Shiung Lin, Hsin-Jung Lo, Chiu-Ming Chou, Chien-Kang Chou, Ke-Hung Chen
  • Publication number: 20070023919
    Abstract: A bonding pad structure is fabricated on an integrated circuit (IC) substrate having at least a contact layer on its top surface. A passivation layer covers the top surface of the IC substrate and the contact layer. The passivation layer has an opening exposing a portion of the contact layer. An electrically conductive adhesion/barrier layer directly is bonded to the contact layer. The electrically conductive adhesion/barrier layer extends to a top surface of the passivation layer. A bonding metal layer is stacked on the electrically conductive adhesion/barrier layer.
    Type: Application
    Filed: May 17, 2006
    Publication date: February 1, 2007
    Inventors: Mou-Shiung Lin, Hsin-Jung Lo, Chiu-Ming Chou, Chien-Kang Chou, Ke-Hung Chen
  • Publication number: 20060292851
    Abstract: A circuit structure includes a semiconductor substrate, first and second metallic posts over the semiconductor substrate, an insulating layer over the semiconductor substrate and covering the first and second metallic posts, first and second bumps over the first and second metallic posts or over the insulating layer. The first and second metallic posts have a height of between 20 and 300 microns, with the ratio of the maximum horizontal dimension thereof to the height thereof being less than 4. The distance between the center of the first bump and the center of the second bump is between 10 and 250 microns.
    Type: Application
    Filed: June 26, 2006
    Publication date: December 28, 2006
    Inventors: Mou-Shiung Lin, Chien-Kang Chou, Ke-Hung Chen
  • Publication number: 20060291029
    Abstract: A post passivation rerouting support structure comprises a relatively thin support layer above the passivation layer to support the RDL, and a relatively thick support layer for fine pitch interconnects extending from the RDL and terminating as contact structures at the surface of the thick support layer, for a next level packaging structure. The thick support layer is planarized before defining the contact structures. The thick support layer may be formed after the conducting posts have been formed, or the thick support layer is formed before forming the conducting posts in vias formed in the thick support layer. An encapsulating layer may be provided above the thick support layer, which top surface is planarized before defining the contact structures. The encapsulating layer and the further support layer may be the same layer.
    Type: Application
    Filed: May 8, 2006
    Publication date: December 28, 2006
    Inventors: Mou-Shiung Lin, Chien-Kang Chou, Ke-Hung Chen