Abstract: A reading device includes a base on which a read target object is placed, a reader that reads the read target object placed on the base, a first attachment frame to which the reader is attached such that the reader is disposed above the base, an operation unit that is used for operating the reading device by touching, a second attachment frame to which the operation unit is attached such that the operation unit is disposed above the base, and a support frame that has a first surface and a second surface more bendable than the first surface in response to an external force. The first attachment frame is fixed to the first surface of the support frame. The second attachment frame is fixed to the second surface of the support frame.

Abstract: A three-dimensional object printing apparatus includes: a head unit including a head that ejects a liquid toward a three-dimensional workpiece along a Z axis; a sensor unit including a sensor that detects a positional relationship with respect to the workpiece; and a movement mechanism that change positions of the head unit and the sensor unit with respect to the workpiece, in which the movement mechanism includes a first Z-axis movement mechanism that changes the position of the sensor unit with respect to the workpiece along the Z axis, and a second Z-axis movement mechanism that changes the position of the head unit with respect to the workpiece along the Z axis, and the first Z-axis movement mechanism and the second Z-axis movement mechanism move the sensor unit and the head unit independently of each other.

Abstract: To provide a flow rate regulating valve capable of detecting a state where a flow path is fully closed even when there is no lead wire or the like for detecting the state where the flow path is fully closed. A flow rate regulating valve is a fluid regulating valve including a valve body for opening and closing fluid flow paths provided in a body and includes an actuator unit for moving the valve body, and the actuator unit includes a drive motor, a slider moved by a rotation of the motor, a cylindrical body mounted on the slider, and a shaft interlocked with the cylindrical body and provided with the valve body fixed to a distal end thereof. The motor is a stepping servomotor, and has a pressing control function for moving the valve body in the closing direction at a continuous rated torque.

Abstract: To provide a diaphragm and a diaphragm valve which solve a problem of deterioration of air-tightness due to insufficient tightening of a bolt and damage to the diaphragm due to over-tightening of the bolt, as well as reducing variations in performance such as durability of the diaphragm and simplifying tightening work. A diaphragm is provided with a through hole having a diameter larger than a diameter through which a bolt can be fitly inserted. A bolt insertion cylinder made of metal through which the bolt can be inserted is fitted in the through hole. A height of the bolt insertion cylinder is equal to or less than a height of the through hole.

Abstract: Provided is a small-sized controller capable of precisely controlling a flow rate of a high-pressure fluid. Between a working shaft of a drive device and a valve stem, a power transmission device is disposed to amplify a force acting on the working shaft and transmit the resultant force to the valve stem. A diaphragm as a valve element is made of metal and is deformable to: a state where a fluid passage is fully closed; a state where the fluid passage is fully open; or a state where the fluid passage is partially open. When the fluid passage is partially open, on the basis of the flow rate of a fluid flowing through fluid passages, the drive device finely adjusts the position of the working shaft such that the flow rate is constant.

Abstract: A method of producing titanium cobbles includes: a preparation step of preparing a scrap material containing 50% by mass or more of metal titanium; a first crushing step of roughly crushing the scrap material using a first crusher; a second crushing step of crushing the scrap material, which has been roughly crushed in the first crushing step, using a second crusher; a dust collection step of collecting fine dust of the scrap material generated in the second crushing step; and a first classification step of classifying products obtained by crushing the scrap material, which have been generated in the second crushing step, into medium particles with particle sizes within a predetermined particle size range, large particles with particle sizes larger than the particle size range, and small particles with particle sizes smaller than the particle size range.

Abstract: A method of producing titanium cobbles includes: a preparation step of preparing a scrap material containing 50% by mass or more of metal titanium; a first crushing step of roughly crushing the scrap material using a first crusher; a second crushing step of crushing the scrap material, which has been roughly crushed in the first crushing step, using a second crusher; a dust collection step of collecting fine dust of the scrap material generated in the second crushing step; and a first classification step of classifying products obtained by crushing the scrap material, which have been generated in the second crushing step, into medium particles with particle sizes within a predetermined particle size range, large particles with particle sizes larger than the particle size range, and small particles with particle sizes smaller than the particle size range.

Abstract: To provide a flow rate regulating valve capable of detecting a state where a flow path is fully closed even when there is no lead wire or the like for detecting the state where the flow path is fully closed. A flow rate regulating valve is a fluid regulating valve including a valve body for opening and closing fluid flow paths provided in a body and includes an actuator unit for moving the valve body, and the actuator unit includes a drive motor, a slider moved by a rotation of the motor, a cylindrical body mounted on the slider, and a shaft interlocked with the cylindrical body and provided with the valve body fixed to a distal end thereof. The motor is a stepping servomotor, and has a pressing control function for moving the valve body in the closing direction at a continuous rated torque.

Abstract: Provided is a small-sized controller capable of precisely controlling a flow rate of a high-pressure fluid. Between a working shaft of a drive device and a valve stem, a power transmission device is disposed to amplify a force acting on the working shaft and transmit the resultant force to the valve stem. A diaphragm as a valve element is made of metal and is deformable to: a state where a fluid passage is fully closed; a state where the fluid passage is fully open; or a state where the fluid passage is partially open. When the fluid passage is partially open, on the basis of the flow rate of a fluid flowing through fluid passages, the drive device finely adjusts the position of the working shaft such that the flow rate is constant.

Abstract: A hub of this motor includes a hub annular portion being annular and arranged above a stator, and a flange portion arranged to extend radially outward from the hub annular portion, and including an upper surface on which an annular member is arranged. A yoke includes a first yoke cylindrical portion to which a magnet is fixed; a yoke annular portion arranged to extend radially inward from an upper end of the first yoke cylindrical portion, and including an upper surface arranged opposite to a lower surface of the hub; and a second yoke cylindrical portion arranged to extend axially upward from a radially inner end portion of the yoke annular portion. An inner circumferential surface of the hub annular portion and an outer circumferential surface of the second yoke cylindrical portion are fixed to each other at an engagement portion arranged radially inward of a radially inner end portion of each of coils.

Abstract: A hub of this motor includes a hub annular portion being annular and arranged above a stator, and a flange portion arranged to extend radially outward from the hub annular portion, and including an upper surface on which an annular member is arranged. A yoke includes a first yoke cylindrical portion to which a magnet is fixed; a yoke annular portion arranged to extend radially inward from an upper end of the first yoke cylindrical portion, and including an upper surface arranged opposite to a lower surface of the hub; and a second yoke cylindrical portion arranged to extend axially upward from a radially inner end portion of the yoke annular portion. An inner circumferential surface of the hub annular portion and an outer circumferential surface of the second yoke cylindrical portion are fixed to each other at an engagement portion arranged radially inward of a radially inner end portion of each of coils.

Abstract: A durable diaphragm valve has a single-layer structure consisting of rubber materials. The single-layer structure has a membrane part deforming and moving up and down with opening and closing of a flow channel and a flange part which is provided around said membrane part and sandwiched between a valve body and a bonnet. The flange part has an annular ridge consisting of an upper ridge protruding upward and a lower ridge protruding downward from a position corresponding to said upper ridge. The upper ridge has an inner upper ridge and an outer upper ridge with its protruding height being lower than the inner upper ridge, which are consecutively formed in a staircase pattern.

Abstract: A durable diaphragm valve has a single-layer structure consisting of rubber materials. The single-layer structure has a membrane part deforming and moving up and down with opening and closing of a flow channel and a flange part which is provided around said membrane part and sandwiched between a valve body and a bonnet. The flange part has an annular ridge consisting of an upper ridge protruding upward and a lower ridge protruding downward from a position corresponding to said upper ridge. The upper ridge has an inner upper ridge and an outer upper ridge with its protruding height being lower than the inner upper ridge, which are consecutively formed in a staircase pattern.

Abstract: A diaphragm with excellent durability is provided which can restrain occurrence of a crack resulting from up and down movements of the diaphragm with opening and closing of a flow channel of a diaphragm valve, and a diaphragm valve having this diaphragm. The diaphragm is attached to a diaphragm valve, comprising a membrane part deforming and moving up and down with opening and closing of a flow channel and a flange part which is provided around said membrane part and sandwiched between a valve body and a bonnet, wherein the diaphragm is formed in a curved surface shape where the shape before deformation of the lower surface of said membrane part descends and then ascends from an outer edge part towards a central part.

Abstract: A plasma processing apparatus includes a processing chamber; a lower electrode serving as a mounting table for mounting thereon a target object; and an upper electrode or an antenna electrode provided to be opposite to the lower electrode. The apparatus further includes a gas supply source for introducing a gas including a halogen-containing gas and an oxygen gas into the processing chamber and a high frequency power supply for applying a high frequency power for generating plasma to at least one of the upper electrode, the antenna electrode, or the lower electrode. Among inner surfaces of the processing chamber which are exposed to the plasma, at least a part of or all of the surfaces between a mounting position of the target object and the upper electrode, or the antenna electrode; or at least a part of or all of the surfaces of the upper electrode or the antenna electrode are coated with a fluorinated compound.

Abstract: A ceramic spray-coated member capable of surely controlling adhesion and detachment of water is produced by spraying a given ceramic onto a surface of a base material, in which an organic matter adsorbed on a surface of the ceramic spray-coated member is removed and the surface of the ceramic spray-coated member is stabilized by chemically bonding to water.

Abstract: Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment. A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIb of the Periodic Table coated directed or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Abstract: Producing a ceramic coating member for a semiconductor processing apparatus with a purpose of improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment and as a means for solution, forming a porous layer by irradiating an oxide of an element in Group IIIa of the Periodic Table to be coated directly or through an undercoat on the surface of the substrate of a metal or non-metal and further forming a secondary recrystallized layer of the oxide on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Abstract: For the purpose of solving problems inherent to a plasma spray coating of white base Al2O3—Y2O3 composite oxide, i.e. drawbacks that the corrosion resistance, heat resistance and abrasion resistance are poor and the light reflectance is high because the coating is porous and weak in the bonding force among particles, a spray coating member having an excellent heat emission property and the like is proposed wherein a surface of a substrate is covered with a spray coating of a colored composite oxide made of a low luminosity, achromatic or chromatic Al2O3—Y2O3.