Abstract: Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment. A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIa of the Periodic Table coated directly or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Abstract: A ceramic spray-coated member capable of surely controlling adhesion and detachment of water is produced by spraying a given ceramic onto a surface of a base material, in which an organic matter adsorbed on a surface of the ceramic spray-coated member is removed and the surface of the ceramic spray-coated member is stabilized by chemically bonding to water.

Abstract: A work roll for use in rolling apparatus for producing from a metal blank sheet articles having a deformed cross section and comprising, for example, a plate portion, and a plurality of upright walls formed on one surface of the plate portion integrally therewith and arranged as spaced apart from one another, such as flat heat exchange tube component members, heat sinks and lead frames. The work roll assures more simplified production work and provides surface finishes with higher accuracy than conventionally. The work roll comprises different kinds of disks having different diameters and arranged alternately on an axis into juxtaposed layers as secured to one another. Large disks 20A, 20B, are arranged at respective portions not forming the upright walls, and small disks 21A, 21B smaller than the large disks 20A, 20B in radius by an amount corresponding to the height of the upright walls are arranged at respective portions for forming the upright walls.

Abstract: A work roll for use in rolling apparatus for producing from a metal blank sheet articles having a deformed cross section and comprising, for example, a plate portion, and a plurality of upright walls formed on one surface of the plate portion integrally therewith and arranged as spaced apart from one another, such as flat heat exchange tube component members, heat sinks and lead frames. The work roll assures more simplified production work and provides surface finishes with higher accuracy than conventionally. The work roll comprises different kinds of disks having different diameters and arranged alternately on an axis into juxtaposed layers as secured to one another. Large disks 20A, 20B, are arranged at respective portions not forming the upright walls, and small disks 21A, 21B smaller than the large disks 20A, 20B in radius by an amount corresponding to the height of the upright walls are arranged at respective portions for forming the upright walls.

Abstract: A work roll for use in rolling apparatus for producing from a metal blank sheet articles having a deformed cross section and comprising, for example, a plate portion, and a plurality of upright walls formed on one surface of the plate portion integrally therewith and arranged as spaced apart from one another, such as flat heat exchange tube component members, heat sinks and lead frames. The work roll assures more simplified production work and provides surface finishes with higher accuracy than conventionally. The work roll comprises different kinds of disks having different diameters and arranged alternately on an axis into juxtaposed layers as secured to one another. Large disks 20A, 20B, are arranged at respective portions not forming the upright walls, and small disks 21A, 21B smaller than the large disks 20A, 20B in radius by an amount corresponding to the height of the upright walls are arranged at respective portions for forming the upright walls.

Abstract: Herein disclosed is a battery-operated, dot type recording apparatus which comprises a drive mechanism unit having its number of revolutions regulated by the output of a quartz oscillator, a circuit for connecting a d.c. power source with a meter only when a measured value is to be recorded, and delay switching means for causing the tip of a pointer of a meter to hit the recording paper at the time when that meter becomes stable. Thus, the dot type recording apparatus is so constructed of a small number of mechanical means that it can reliably operate for a long time, while having its adjustment and maintenance facilitated, with little influence from changes in circumstances.

Abstract: Battery-operated, dot type recording apparatus which is so constructed that the recording paper feed and the recording operation are alternately executed in short times and that a measuring instrument is actuated only during a period of time covering time intervals before and after each recording operation, the actuation of the measuring instrument and the recording paper feed as well as the recording operation being carried out at good timing in a short period of time, whereby the consumption of the battery is low, no high power is required at a time, and the recovery time of the battery suffices, so that the battery is of long life.