Abstract: Process for fabricating a preform, wherein a fiber preform is infiltrated with molten silicon after being contacted with an aqueous silicon carbide particulate slurry containing a dissolved source of carbon and heated to coat the particles with carbon.

Abstract: An image displaying device includes a display unit which displays a cursor and at least one button; an input unit for moving the cursor and for selecting the button; and a controller for controlling the display unit and the input unit. The input unit is provided with an operating part operated by an operator, at least one position sensor which detects an operation state of the operating part, and at least one actuator which applies a specific external force to the operating part. When a display screen of the display unit is switched, the controller drives the actuator to move the cursor to a default position set in the switched display screen. In that case, the moving rate of the cursor is set lower than a moving rate of the cursor for pulling the cursor towards the center of the button.

Abstract: In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors (35) are provided in a pair of fork portions (31) of a reticle hand. Inert gas is injected and supplied from the injectors (35) into a pellicle space (29) through vent holes (27) of a reticle (30) with a pellicle. In this state, the reticle (30) with the pellicle is transported.

Abstract: A force-applying input device includes a mechanical section including a tilting lever; an operation section mounted to an end of the tilting lever; first and second actuators which apply a force to the operation section through the tilting lever; first and second position sensors which detect operation amount and direction of the tilting lever; and a control section which generates first and second drive signals of the first and second actuators by receiving first and second position signals output from the respective first and second position sensors. Based on the first and second position signals output from the position sensors, the control section computes the first and second drive signals of the first and second actuators in accordance with operation amount and direction of the operation section, and outputs first and second drive powers of the respective first and second actuators from first and second drive circuits.

Abstract: Disclosed is a semiconductor manufacturing apparatus which includes a chamber having an environment-controlled inside space, a stage disposed in the inside space of the chamber and for holding a substrate to perform a predetermined process to the substrate, a temporary storage for temporarily storing one or more substrates in a local environment being independent from the chamber inside, a robot for conveying a substrate between the stage and the temporary storage, and a controller for controlling the robot so that the substrate is stored into the temporary storage when the environment control of the chamber inside space is suspended.

Abstract: A method of processing a ceramic preform is disclosed having the steps of: coating with a preceramic polymer at least one fabric panel formed of silicon carbide fibers coated with a high temperature boron nitride; shaping the at least one fabric panel into a preliminary preform; curing the preceramic polymer to impart rigidity to the preform, and inserting the rigidized preform into a reactor without tooling for a chemical vapor infiltration process to form the ceramic preform.

Abstract: A method of processing a porous ceramic preform is disclosed comprising: partially infiltrating interconnected pores of a ceramic preform with an organic fluid, converting the organic fluid on pore surfaces of preform to a carbon film, and injecting silicon into the pores with the carbon film of the preform.

Abstract: A method for manufacturing a preform having a desirably uniform distribution of structural forms (for example and without limitation, particles, flakes, and fibers) therethrough. The method according to the present invention includes using an electrical charge reaction between cationic and anionic agents (such as, without limitation, cationic and anionic polymers) to cause the structural forms to floc or clump together in a mass in which the structural forms are desirably uniformly distributed therethrough. The flocculent mass is then dewatered and/or dried to form a preform that is ready for further processing.

Abstract: A substrate managing system includes a reading device for reading information recorded on a substrate, and an information processing device for performing management of the substrate on the basis of the information, wherein the reading device reads information as recorded on an end face of the substrate. At least a portion of a substrate container is made of a transparent material for optical reading of information as recorded on a substrate kept stored in the container.

Abstract: Disclosed is a semiconductor manufacturing apparatus which includes a chamber having an environment-controlled inside space, a stage disposed in the inside space of the chamber and for holding a substrate to perform a predetermined process to the substrate, a temporary storage for temporarily storing one or more substrates in a local environment being independent from the chamber inside, a robot for conveying a substrate between the stage and the temporary storage, and a controller for controlling the robot so that the substrate is stored into the temporary storage when the environment control of the chamber inside space is suspended.

Abstract: A method for manufacturing a preform having a desirably uniform distribution of structural forms (for example and without limitation, particles, flakes, and fibers) therethrough. The method according to the present invention includes using an electrical charge reaction between cationic and anionic agents (such as, without limitation, cationic and anionic polymers) to cause the structural forms to floc or clump together in a mass in which the structural forms are desirably uniformly distributed therethrough. The flocculent mass is then dewatered and/or dried to form a preform that is ready for further processing.

Abstract: A method for transporting a substrate between a carrier, which holds the substrate, and a semiconductor manufacturing unit, which receives the substrate. The method includes steps of applying the carrier, which holds the substrate, to a chamber, which houses the semiconductor manufacturing unit, in which chamber the environment of the semiconductor manufacturing unit is controlled, rotatably removing, by an opener, a door of the carrier and a door of the chamber, as a unit, from the carrier and the chamber, and transferring the substrate from the carrier and to the carrier, when the door of the carrier and the door of the chamber have been rotatably removed as a unit by the opener in the removing step. Also disclosed are semiconductor manufacturing apparatus utilizing such a method.

Abstract: A method for manufacturing a preform having a desirably uniform distribution of structural forms (for example and without limitation, particles, flakes, and fibers) therethrough. The method according to the present invention includes using an electrical charge reaction between cationic and anionic agents (such as, without limitation, cationic and anionic polymers) to cause the structural forms to floc or clump together in a mass in which the structural forms are desirably uniformly distributed therethrough. The flocculent mass is then dewatered and/or dried to form a preform that is ready for further processing.

Abstract: A method for transporting a substrate between a carrier, which holds the substrate, and a semiconductor manufacturing unit, which receives the substrate. The method includes steps of applying the carrier, which holds the substrate, to a chamber, which houses the semiconductor manufacturing unit, in which chamber the environment of the semiconductor manufacturing unit is controlled, rotatably removing, by an opener, a door of the carrier and a door of the chamber, as a unit, from the carrier and the chamber, and transferring the substrate from the carrier and to the carrier, when the door of the carrier and the door of the chamber have been rotatably removed as a unit by the opener in the removing step. Also disclosed are semiconductor manufacturing apparatus utilizing such a method.

Abstract: Disclosed is a semiconductor manufacturing apparatus which includes a chamber having an environment-controlled inside space, a stage disposed in the inside space of the chamber and for holding a substrate to perform a predetermined process to the substrate, a temporary storage for temporarily storing one or more substrates in a local environment being independent from the chamber inside, a robot for conveying a substrate between the stage and the temporary storage, and a controller for controlling the robot so that the substrate is stored into the temporary storage when the environment control of the chamber inside space is suspended.

Abstract: A code reading device includes an illuminator which illuminates a code formed on a substrate with light, a reflector which reflects the light to allow the light to pass through the code at least two times, and a detector which detects the reflected light to read the code on the substrate. The substrate is one of a photomask, a reticle, a wafer and a glass plate.

Abstract: A method for manufacturing a preform having a desirably uniform distribution of structural forms (for example and without limitation, particles, flakes, and fibers) therethrough. The method according to the present invention includes using an electrical charge reaction between cationic and anionic agents (such as, without limitation, cationic and anionic polymers) to cause the structural forms to floc or clump together in a mass in which the structural forms are desirably uniformly distributed therethrough. The flocculent mass is then dewatered and/or dried to form a preform that is ready for further processing.

Abstract: A code reading device includes an illuminator which illuminates a code formed on a substrate with light, a reflector which reflects the light to allow the light to pass through the code at least two times, and a detector which detects the reflected light to read the code on the substrate. The substrate is one of a photomask, a reticle, a wafer and a glass plate.

Abstract: A bar code containing information about a reticle (transparent substrate) is marked on the reticle at a portion vertically overlapping a transfer hand when the reticle held by the transfer hand is transferred. A reflecting portion is formed on the transfer hand at a portion corresponding to the bar code. A bar code reader has an illumination portion and detection portion. When the reticle is held and transferred by the transfer hand, the illumination portion illuminates the bar code, and the detection portion detects light reflected by the reflecting portion to read the bar code. The illumination portion and detection portion of the bar code reader may be separated and disposed to oppose each other through the reticle, thereby reading the bar code in the transmission scheme.

Abstract: Glutamate receptor function in a mammal may be potentiated using an effective amount of a compound of formula