Abstract: A probe card to be used with a tester that tests an electrical characteristic of an electronic circuit formed in in a wafer is disclosed. The probe card includes a first transmitter/receiver component that is mounted on a lower surface of a tester board and electrically connected to the tester; a second transmitter/receiver component that is provided to oppose the first transmitter/receiver component and carries out contactless transmission/reception of signals with the first transmitter/receiver component; plural probes that are configured to come in contact with corresponding electrode pads of the electronic circuit and electrically connect the corresponding electrode pads and the second transmitter/receiver component; an expandable chamber having flexibility so that the expandable chamber may be inflated by introducing gas thereinto, thereby moving the plural probes away from the tester board.

Abstract: The present invention provides a surface protective film that exhibits small differences in peel strength on account of the surface state of an adherend and that is excellent in anti-contamination to adherends, and a pressure-sensitive adhesive (PSA) composition for the protective film. The PSA composition provided by the present invention comprises 0.01 to 5 parts by weight of a compound containing an oxypropylene group with respect to 100 parts by weight of an acrylic polymer as a base polymer. A surface protective film 10 provided by the present invention has a PSA layer 2, formed using the above PSA composition, on one or both sides of a support 1.

Abstract: Disclosed is a probe card including: a circuit board; a supporting plate installed below the circuit board and supporting a plurality of contact members contacting a subject to be inspected during inspection; an elastic member installed below the circuit board and above the supporting plate and having flexibility with gas filled therein, and applying a predetermined contact pressure to the plurality of contact members when the plurality of contact members contact the subject to be inspected; and a conductive section placed in the elastic member and electrically connecting the circuit board and the contact members during inspection, and the conductive section includes a conductive layer that includes an insulating layer having flexibility and a wiring layer formed on the insulating layer.

Abstract: A control circuit is provided for a vibration-type actuator that generates a vibration wave in a vibrating member by applying an alternating voltage, and relatively rotates a moving member contacting protrusions of the vibrating member. The control circuit includes a feedback control circuit and a repetitive compensator. The feedback control circuit subjects the vibration-type actuator to feedback control based on a deviation between a relative speed between the moving member and the vibrating member and a command speed or a deviation between a relative position between the moving member and the vibrating member and a command position. The repetitive compensator provides a repetitive period that is set to T/(an integral multiple of fs), where T is a period of rotation of the moving member, and fs is a spatial frequency of a speed deviation based on a contact area distribution between the protrusions and the moving member.

Abstract: A driving unit of a vibration-type actuator includes a command unit, a change making unit, an AC signal generating unit, and a filter unit. The command unit outputs a command signal that directs at least one of a frequency, an amplitude, and a phase difference of an AC signal. The change making unit makes a change to the command signal and outputs the command signal. The AC signal generating unit generates a generated AC signal in which at least one of a frequency, an amplitude, and a phase difference of the generated AC signal is modulated in accordance with the output of the change making unit. The filter unit selectively dampens a frequency component, of at least one of the output signal of the change making unit and an output signal of the AC signal generating unit, that excites vibration other than vibration in a predetermined vibration mode.

Abstract: A driving circuit is configured to drive a vibration-type actuator including a vibration member and a moving member. The vibration member includes an electro-mechanical energy conversion element and may generate a vibration wave in response to an alternating voltage applied to the electro-mechanical energy conversion element. The moving member is in contact with the vibration member and may move in response to the vibration wave relative to the vibration member. The driving circuit includes a capacitor and an inductor connected in series with the capacitor to the electro-mechanical energy conversion element. Parameters of the driving circuit may be set such that when a series resonance frequency of the inductor and the capacitor is denoted by fs and a resonance frequency of the vibration member is denoted by fm, a condition 0.73·fm<fs<1.2·fm is satisfied.

Abstract: At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.

Abstract: A vibration control apparatus capable of efficiently generating vibrations of different orders using the same electrodes. A plurality of electrodes polarized to have desired polarities are formed in a piezoelectric element, and are divided into a plurality of electrode groups each comprised of electrodes including two or more electrodes with different polarities. Phases and frequency of alternating voltages applied to the electrode groups are changed, thereby generating vibrations of different orders.

Abstract: At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.

Abstract: A vibration control apparatus capable of efficiently generating vibrations of different orders using the same electrodes. A plurality of electrodes polarized to have desired polarities are formed in a piezoelectric element, and are divided into a plurality of electrode groups each comprised of electrodes including two or more electrodes with different polarities. Phases and frequency of alternating voltages applied to the electrode groups are changed, thereby generating vibrations of different orders.

Abstract: An oscillatory-wave actuator is provided capable of simplifying the structure of a driving circuit. Push-up vibration is formed in an oscillating body including three piezoelectrics and an elastic body by applying an AC voltage to the first piezoelectric. The second piezoelectric outputs a vibration-detecting voltage according to the amplitude of the push-up vibration, and the third piezoelectric receives the vibration-detecting voltage and generates torsional vibration in the oscillating body. As a result, a traveling oscillatory wave can be formed in the elastic body by use of a single-phase driving voltage (AC voltage).

Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.

Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.

Abstract: A driving apparatus for a vibration type actuator is disclosed, which can boost the power source voltage and can reduce the cost and the size of the apparatus. The driving apparatus comprises an inductor being connected to a power source, a pulse generation circuit generating a first and second pulse signals that have a phase difference; a first switching element switching a supply operation for supplying the energy accumulated in the inductor to the electro-mechanical energy conversion element according to the first pulse signal; and a second switching element switching a discharge operation for discharging the energy accumulated in the electro-mechanical energy conversion element according to the second pulse signal.

Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.

Abstract: At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.

Abstract: A driving apparatus for a vibration type actuator is disclosed, which can boost the power source voltage and can reduce the cost and the size of the apparatus. The driving apparatus comprises an inductor being connected to a power source, a pulse generation circuit generating a first and second pulse signals that have a phase difference; a first switching element switching a supply operation for supplying the energy accumulated in the inductor to the electro-mechanical energy conversion element according to the first pulse signal; and a second switching element switching a discharge operation for discharging the energy accumulated in the electro-mechanical energy conversion element according to the second pulse signal.

Abstract: At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.

Abstract: The present invention relates to apparatus achieving improvement in operation characteristics in the operation of stopping or reversing the direction of or decelerating movement of a vibrating wave actuator constructed to apply an alternating voltage to an electro-mechanical energy conversion element to vibrate a vibration member to obtain a driving force. In the operation of stopping the vibrating wave actuator, it is necessary to cancel the vibration to stop the actuator, in order to stop the actuator in good response. The present invention has achieved the above object by applying an excitation signal, which excites vibration in a direction to cancel free vibration in the vibration member, to the electro-mechanical energy conversion element in the stop operation or the like.

Abstract: An oscillatory-wave actuator is provided capable of simplifying the structure of a driving circuit. Push-up vibration is formed in an oscillating body including three piezoelectrics and an elastic body by applying an AC voltage to the first piezoelectric. The second piezoelectric outputs a vibration-detecting voltage according to the amplitude of the push-up vibration, and the third piezoelectric receives the vibration-detecting voltage and generates torsional vibration in the oscillating body. As a result, a traveling oscillatory wave can be formed in the elastic body by use of a single-phase driving voltage (AC voltage).