Abstract: A control apparatus and a control method for a vibration type driving apparatus are disclosed which can maintain output performance even when low-speed driving is continued for a long time. The vibration type driving apparatus comprises a vibrating body and an electro-mechanical energy conversion element, and a contact body in contact with the vibrating body. By applying a plurality of driving signals to the electro-mechanical energy conversion element to excite a traveling vibration on the vibrating body, the vibrating body and the contact body are relatively moved. The control apparatus and the control method controls the driving signals such that the largest displacement of the traveling vibration fluctuates and a position where the largest displacement reaches the peak is changed in a direction of the relative movement of the vibrating body and the contact body.

Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.

Abstract: At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.

Abstract: The present invention relates to apparatus achieving improvement in operation characteristics in the operation of stopping or reversing the direction of or decelerating movement of a vibrating wave actuator constructed to apply an alternating voltage to an electro-mechanical energy conversion element to vibrate a vibration member to obtain a driving force. In the operation of stopping the vibrating wave actuator, it is necessary to cancel the vibration to stop the actuator, in order to stop the actuator in good response. The present invention has achieved the above object by applying an excitation signal, which excites vibration in a direction to cancel free vibration in the vibration member, to the electro-mechanical energy conversion element in the stop operation or the like.

Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.

Abstract: A current detection circuit which applies an AC voltage to a vibrator (1) which converts electricity into a mechanical energy to vibrate, and detects a mechanical branch current serving as a current component which contributes to the vibration of the vibrator (1), includes a series circuit which connects a capacitor (4) to the vibrator (1) in series, voltage dividing circuits (5, 6), connected to the series circuit in parallel, for dividing and extracting a voltage applied across the series circuit, and a detection circuit (7) for detecting a difference between, of the divided voltages, a terminal voltage other than the voltage applied across the series circuit and a voltage at a connection portion between the vibrator and the capacitor in the series circuit.

Abstract: A beam rotation angle detecting apparatus includes a light receiving portion for detecting the incidence positions of at least two beams moving on concentric circles while describing a circle or an arc, and an arithmetic system for calculating and outputting the angle between a straight line linking at least two incidence positions detected by the light receiving portion together and a predetermined reference line.

Abstract: The present invention relates to apparatus achieving improvement in operation characteristics in the operation of stopping or reversing the direction of or decelerating movement of a vibrating wave actuator constructed to apply an alternating voltage to an electro-mechanical energy conversion element to vibrate a vibration member to obtain a driving force. In the operation of stopping the vibrating wave actuator, it is necessary to cancel the vibration to stop the actuator, in order to stop the actuator in good response. The present invention has achieved the above object by applying an excitation signal, which excites vibration in a direction to cancel free vibration in the vibration member, to the electro-mechanical energy conversion element in the stop operation or the like.

Abstract: Provided is a control device for a vibration type actuator having an elastic member fixed with an electro-mechanical energy conversion element, and a vibration member that generates a vibration on a surface of the elastic member by supplying a drive signal to the electro-mechanical conversion element, the control device including: a drive circuit that supplies a periodic signal to the electromechanical energy conversion element, a state detecting circuit that detects a drive state of the vibration member and outputs a waveform signal representing the detected drive state, an inclination detecting circuit that detects an inclination of a waveform in a given level of the waveform signal, and a control circuit that controls the drive circuit on the basis of an output signal from the inclination detecting circuit.

Abstract: A current detection circuit which applies an AC voltage to a vibrator (1) which converts electricity into a mechanical energy to vibrate, and detects a mechanical branch current serving as a current component which contributes to the vibration of the vibrator (1), includes a series circuit which connects a capacitor (4) to the vibrator (1) in series, voltage dividing circuits (5, 6), connected to the series circuit in parallel, for dividing and extracting a voltage applied across the series circuit, and a detection circuit (7) for detecting a difference between, of the divided voltages, a terminal voltage other than the voltage applied across the series circuit and a voltage at a connection portion between the vibrator and the capacitor in the series circuit.

Abstract: A beam rotation angle detecting apparatus includes a light receiving portion for detecting the incidence positions of at least two beams moving on concentric circles while describing a circle or an arc, and an arithmetic system for calculating and outputting the angle between a straight line linking at least two incidence positions detected by the light receiving portion together and a predetermined reference line.

Abstract: A control apparatus and a control method for a vibration type driving apparatus are disclosed which can maintain output performance even when low-speed driving is continued for a long time. The vibration type driving apparatus comprises a vibrating body and an electromechanical energy conversion element, and a contact body in contact with the vibrating body. By applying a plurality of driving signals to the electro-mechanical energy conversion element to excite a traveling vibration on the vibrating body, the vibrating body and the contact body are relatively moved. The control apparatus and the control method controls the driving signals such that the largest displacement of the traveling vibration fluctuates and a position where the largest displacement reaches the peak is changed in a direction of the relative movement of the vibrating body and the contact body.

Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.

Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.

Abstract: The present invention relates to a vibration type actuator apparatus, and is aimed to provide an apparatus capable of determining a phase with which a driving voltage is applied to a piezo-electric member particularly relative to a phase of vibration displacement of a vibration member, shifting to a high-speed driving state in a short time, and abruptly stopping.

Abstract: A beam rotation angle detecting apparatus includes a light receiving portion for detecting the incidence positions of at least two beams moving on concentric circles while describing a circle or an arc, and an arithmetic system for calculating and outputting the angle between a straight line linking at least two incidence positions detected by the light receiving portion together and a predetermined reference line.

Abstract: This invention relates to an arrangement for detecting the driven state of a vibration wave actuator apparatus and provides an apparatus in which a waveform signal having an amplitude corresponding to a vibration state is generated by a monitor circuit, and this waveform signal is level-detected by a comparing circuit having a predetermined threshold so as to form a signal having a pulse width corresponding to the amplitude of the waveform signal, thereby detecting a vibration state from the pulse width.

Abstract: Provided is a control device for a vibration type actuator having an elastic member fixed with an electro-mechanical energy conversion element, and a vibration member that generates a vibration on a surface of the elastic member by supplying a drive signal to the electro-mechanical conversion element, the control device including: a drive circuit that supplies a periodic signal to the electromechanical energy conversion element, a state detecting circuit that detects a drive state of the vibration member and outputs a waveform signal representing the detected drive state, an inclination detecting circuit that detects an inclination of a waveform in a given level of the waveform signal, and a control circuit that controls the drive circuit on the basis of an output signal from the inclination detecting circuit.

Abstract: A vibration type activator having improved electro-mechanical energy conversion efficiency and reduced noise generation includes plural switching elements each of which is operated by a switching pulse signal generated by a drive control circuit of the motor. A drive control circuit selects a pulse width of the generated switching pulse signal such that the amplitude of a base wave frequency component (“base wave”) among frequency components of a voltage applied to an inductance element may be larger than a total amplitude of higher harmonic wave frequency components (“whole higher harmonic wave”).

Abstract: The present invention relates to a vibration type actuator apparatus, and is aimed to provide an apparatus capable of determining a phase with which a driving voltage is applied to a piezo-electric member particularly relative to a phase of vibration displacement of a vibration member, shifting to a high-speed driving state in a short time, and abruptly stopping.