Abstract: To reduce the size of a gas-insulated switch for the purpose of utilizing the space of a power station or substation effectively and improving the economy thereof. A gas-insulated switch equipped with a fixed contact and a moving contact that can contact with and separate from the fixed contact, wherein the breakage of the moving contact is operated with a single shock absorber in both the breaking action and the closing action of the moving contact. As a result that use of the gas-insulated switch according to the present invention improves the overall energy efficiency of components, a device with further reduced driving energy can be realized for a gas-insulated switch of the same specification.

Abstract: To reduce the size of a gas-insulated switch for the purpose of utilizing the space of a power station or substation effectively and improving the economy thereof. A gas-insulated switch equipped with a fixed contact and a moving contact that can contact with and separate from the fixed contact, wherein the breakage of the moving contact is operated with a single shock absorber in both the breaking action and the closing action of the moving contact. As a result that use of the gas-insulated switch according to the present invention improves the overall energy efficiency of components, a device with further reduced driving energy can be realized for a gas-insulated switch of the same specification.

Abstract: A system for successively extracting unprocessed substrates from a cassette, successively conveying the extracted substrates to a plurality of processing units, causing the processing units to process the substrates, and successively returning processed substrates to a cassette is disclosed. In the system, corresponding to a recipe that contains process conditions for each of at least one lot, a process start prediction time at which processes of each lot start and a process completion prediction time at which processes for each lot are completed are calculated for at least two processes. Corresponding to the process start prediction time and the process completion prediction time, at least one of optimum processing units that optimize processes for each lot is selected for each lot.

Abstract: A system for successively extracting unprocessed substrates from a cassette, successively conveying the extracted substrates to a plurality of processing units, causing the processing units to process the substrates, and successively returning processed substrates to a cassette is disclosed. In the system, corresponding to a recipe that contains process conditions for each of at least one lot, a process start prediction time at which processes of each lot start and a process completion prediction time at which processes for each lot are completed are calculated for at least two processes. Corresponding to the process start prediction time and the process completion prediction time, at least one of optimum processing units that optimize processes for each lot is selected for each lot.