Patents by Inventor Kim Ngoc Vu
Kim Ngoc Vu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10281056Abstract: A valve diaphragm processed by cold working a small concentric region of one surface has a permanent axisymmetric deformation. The deformed diaphragm can be used in a manner which causes continual elastic compression loading of the diaphragm material. The loading of the deformed diaphragm provides a valve restoring spring force and simultaneously defeats diaphragm tendency toward exhibiting hysteresis. The restoring force provided by the diaphragm can also lessen actuator hysteresis.Type: GrantFiled: June 1, 2018Date of Patent: May 7, 2019Assignee: VistadelTek, LLCInventor: Kim Ngoc Vu
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Patent number: 10240679Abstract: A high conductance valve for use in fluid delivery systems is comprised of a flat non-circular orifice ridge adjacent to which a control plate having a planar control surface is proximally positioned to adjust the valve effective opening area and thereby the conductance of the valve. The length of the non-circular orifice ridge periphery is substantially greater than the circumference of a similarly sized circular orifice and therefore the realized effective opening area is also substantially greater despite having a similar footprint.Type: GrantFiled: June 12, 2015Date of Patent: March 26, 2019Assignee: HORIBA STEC, Co., Ltd.Inventor: Kim Ngoc Vu
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Publication number: 20190072189Abstract: A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. Enhanced leak tightness in the valve shut-off condition may additionally be provided by selectively incorporating into the control plate materials softer than the material comprising the orifice ridge. The control plate is especially useful in high conductance, fast acting, and proportional control applications such as gas delivery in semiconductor manufacturing.Type: ApplicationFiled: November 1, 2018Publication date: March 7, 2019Inventor: Kim Ngoc Vu
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Publication number: 20180347707Abstract: A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. The flow-through control plate is especially useful in fast acting proportional control applications such as gas delivery in semiconductor manufacturing.Type: ApplicationFiled: June 4, 2018Publication date: December 6, 2018Inventor: Kim Ngoc Vu
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Patent number: 10113665Abstract: A valve diaphragm processed by cold working a small concentric region of one surface has a permanent axisymmetric deformation. The deformed diaphragm can be used in a manner which causes continual elastic compression loading of the diaphragm material. The loading of the deformed diaphragm provides a valve restoring spring force and simultaneously defeats diaphragm tendency toward exhibiting hysteresis. The restoring force provided by the diaphragm can also lessen actuator hysteresis.Type: GrantFiled: June 15, 2016Date of Patent: October 30, 2018Assignee: VistadelTek, LLCInventor: Kim Ngoc Vu
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Publication number: 20180306322Abstract: A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.Type: ApplicationFiled: April 19, 2018Publication date: October 25, 2018Inventor: Kim Ngoc Vu
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Publication number: 20180283577Abstract: A valve diaphragm processed by cold working a small concentric region of one surface has a permanent axisymmetric deformation. The deformed diaphragm can be used in a manner which causes continual elastic compression loading of the diaphragm material. The loading of the deformed diaphragm provides a valve restoring spring force and simultaneously defeats diaphragm tendency toward exhibiting hysteresis. The restoring force provided by the diaphragm can also lessen actuator hysteresis.Type: ApplicationFiled: June 1, 2018Publication date: October 4, 2018Inventor: Kim Ngoc Vu
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Publication number: 20180259070Abstract: A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.Type: ApplicationFiled: May 14, 2018Publication date: September 13, 2018Inventor: Kim Ngoc Vu
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Publication number: 20180259071Abstract: A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.Type: ApplicationFiled: May 14, 2018Publication date: September 13, 2018Inventor: Kim Ngoc Vu
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Patent number: 10006556Abstract: A motion enhancing mechanism assembly suited for use with fluid control devices such as a piezoelectric modulating actuator of a proportional control valve. Range-limited axial motion of the actuator is transmitted through an amplifier disc to cause tilting of a control plate initially in sealing registration with an orifice ridge surrounding a fluid conduit aperture. Tilting of the control plate opens a wedge-like gap through which fluid may flow with larger conductance than is available with a planar gap of uniform height otherwise achievable with the range-limited motion of the actuator.Type: GrantFiled: November 4, 2015Date of Patent: June 26, 2018Assignee: VistadelTek, LLCInventor: Kim Ngoc Vu
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Publication number: 20180135756Abstract: A gasket retainer that is absent sharp corners, has apertures of reasonable dimensional tolerance, and may be conveniently made by a variety of manufacturing processes. The retainer is made from thin flat springy material that readily returns to form after slight bending. Representative gasket capturing apertures are of smoothly non-convex outline with major dimension sufficiently large to allow passage of a ring shaped gasket turned on edge and minor dimension sufficiently small to engage, on approximately opposite circular segments that each engage along less than one third of a gasket circumference, a cavity or groove on the outside diameter periphery of the gasket turned flat parallel to the retainer material sheet. Fasteners may be retained by similar apertures.Type: ApplicationFiled: January 15, 2018Publication date: May 17, 2018Inventor: Kim Ngoc Vu
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Patent number: 9970547Abstract: A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.Type: GrantFiled: July 5, 2017Date of Patent: May 15, 2018Assignee: VistadelTek, LLCInventor: Kim Ngoc Vu
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Patent number: 9869409Abstract: A gasket retainer that is absent sharp corners, has apertures of reasonable dimensional tolerance, and may be conveniently made by a variety of manufacturing processes. The retainer is made from thin flat springy material that readily returns to form after slight bending. Representative gasket capturing apertures are of smoothly non-convex outline with major dimension sufficiently large to allow passage of a ring shaped gasket turned on edge and minor dimension sufficiently small to engage, on approximately opposite circular segments that each engage along less than one third of a gasket circumference, a cavity or groove on the outside diameter periphery of the gasket turned flat parallel to the retainer material sheet. Fasteners may be retained by similar apertures.Type: GrantFiled: January 14, 2014Date of Patent: January 16, 2018Assignee: VISTADELTEK, LLCInventor: Kim Ngoc Vu
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Publication number: 20170356549Abstract: A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.Type: ApplicationFiled: July 5, 2017Publication date: December 14, 2017Inventor: Kim Ngoc Vu
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Patent number: 9739378Abstract: A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.Type: GrantFiled: April 16, 2015Date of Patent: August 22, 2017Assignee: VistadelTek, LLCInventor: Kim Ngoc Vu
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Publication number: 20170234444Abstract: A mechanism for coupling motion of a piezoelectric actuator in axisymmetric devices like modulating proportional valves uses actuator extension motion to cause translation away from a mechanism mounting plane and thereby enables lifting open of a valve element instead of the usual pushing closed of the valve element. The mechanism does not contain any gears nor leadscrew threads, and in usual practice is constantly loaded, so apparent change of direction is achieved without mechanical backlash introducing hysteresis. The mechanism surrounds a piezoelectric stack actuator by contacting opposite ends of the piezoelectric stack, whereby extension motion lengthening the actuator causes a lifting portion of the mechanism to translate toward the bulk of the actuator while the proximally adjacent mounting portion of the mechanism remains at a fixed. location.Type: ApplicationFiled: April 6, 2017Publication date: August 17, 2017Inventor: Kim Ngoc Vu
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Patent number: 9625048Abstract: A mechanism for coupling motion of a piezoelectric actuator in axisymmetric devices like modulating proportional valves uses actuator extension motion to cause translation away from a mechanism mounting plane and thereby enables lifting open of a valve element instead of the usual pushing closed of the valve element. The mechanism does not contain any gears nor leadscrew threads, and in usual practice is constantly loaded, so apparent change of direction is achieved without mechanical backlash introducing hysteresis. The mechanism surrounds a piezoelectric stack actuator by contacting opposite ends of the piezoelectric stack, whereby extension motion lengthening the actuator causes a lifting portion of the mechanism to translate toward the bulk of the actuator while the proximally adjacent mounting portion of the mechanism remains at a fixed location.Type: GrantFiled: September 4, 2014Date of Patent: April 18, 2017Assignee: HORIBA STEC, Co., Ltd.Inventor: Kim Ngoc Vu
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Publication number: 20170009890Abstract: A control plate for effecting superior shut-off in a proportional control valve comprises a moveable disk-shaped element that has a flat surface, generally perpendicular to the valve axis of symmetry when closed, and translates toward or away from an orifice surrounded by a narrow lip or orifice ridge. Enhanced leak tightness in the valve shut-off condition is achieved by selectively incorporating into the control plate materials that are softer than the material comprising the orifice ridge.Type: ApplicationFiled: July 7, 2016Publication date: January 12, 2017Inventor: Kim Ngoc Vu
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Publication number: 20160369915Abstract: A valve diaphragm processed by cold working a small concentric region of one surface has a permanent axisymmetric deformation. The deformed diaphragm can be used in a manner which causes continual elastic compression loading of the diaphragm material. The loading of the deformed diaphragm provides a valve restoring spring force and simultaneously defeats diaphragm tendency toward exhibiting hysteresis. The restoring force provided by the diaphragm can also lessen actuator hysteresis.Type: ApplicationFiled: June 15, 2016Publication date: December 22, 2016Inventor: Kim Ngoc Vu
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Publication number: 20160138730Abstract: A motion enhancing mechanism assembly suited for use with fluid control devices such as a piezoelectric modulating actuator of a proportional control valve. Range-limited axial motion of the actuator is transmitted through an amplifier disc to cause tilting of a control plate initially in sealing registration with an orifice ridge surrounding a fluid conduit aperture. Tilting of the control plate opens a wedge-like gap through which fluid may flow with larger conductance than is available with a planar gap of uniform height otherwise achievable with the range-limited motion of the actuator.Type: ApplicationFiled: November 4, 2015Publication date: May 19, 2016Inventor: Kim Ngoc Vu